• Analytical Science and Technology
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• v.34 no.1
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• pp.17-22
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• 2021

In this study, flame retardant mixtures of decabromodiphenylethane (DBDPE) and Sb2O3 were analyzed using Fourier transform infrared (FT-IR) spectroscopy. The experimentally obtained wavenumbers of DBDPE and Sb2O3 were 1321 and 949 cm-1, respectively, whereas those obtained by theoretical calculation were 1370 and 818 cm-1, respectively. Strong correlation was observed between the mixing molar ratios and observed peak area ratios, suggesting that FT-IR analysis can be used to obtain relative amounts of the individual components of flame retardant mixture.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.04b
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• pp.31-34
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• 2000

It is very important to understand the correlation of between inter layer dielectric(ILD) CMP process and various facility factors supplied to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD CMP process were studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyzed various facilities supplied at supply system. With facility shortage of D.I. water(DIW) pressure, we introduced an adding purified $N_2(PN_2)$ gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and PN2 gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and PN2 gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• Journal of the Korean Institute of Gas
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• v.26 no.5
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• pp.35-40
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• 2022

PCVD (Plasma Chemical Vapor Deposition), a solar cell manufacturing facility, is a facility that deposits plasma generated in a chamber (NH₃, SIH₄, O₂ on a wafer. In the PCVD facility, gas movement and injection is performed in the gas cabinet, and there are many leak points inside because MFC, regulator, valve, pipe, etc. are intricately connected. In order to prevent explosion in case of leakage of NH₃ with an upper explosive limit (UEL) of 33.6% and a lower explosive limit (LEL) of 15%, the dilution capacity must be capable of allowing the concentration of NH₃ to be out of the explosive range. This study was analyzed using the CFD analysis technique, which can confirm the dilution ability in 3D and numerical values when NH₃ gas leaks from the existing PCVD gas cabinet. As a result, it was concluded that it corresponds to medium dilution and that testicular ventilation is possible through facility improvement.

• Proceedings of the Korea Institute of Fire Science and Engineering Conference
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• 2003.04a
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• pp.279-284
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• 2003

• 한국가스학회:학술대회논문집
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• 1997.09a
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• pp.162-167
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• 1997

• Applied Chemistry for Engineering
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• v.23 no.6
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• pp.608-613
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• 2012

Dielectric barrier discharge plasma reactor was applied to the removal of ethylene from a simulated storage facility ($1.0m^3$) of fruits and vegetables. The system operated in a closed-loop mode by feeding the contaminated gas to the plasma reactor and recirculating the treated gas back to the storage facility. The experiments were carried out with parameters such as discharge power, circulation flow rate, initial ethylene concentration and treatment time. The rate of ethylene decomposition was mainly controlled by the discharge power and the treatment time. With the other conditions kept constant, the ethylene decomposition rate in the presence of the manganese oxide ozone control catalyst installed downstream from the plasma reactor was lower than that in the absence of it. The suggests that unreacted ozone from the plasma reactor accumulated in the storage facility where it additionally decomposed ethylene. On the basis of an initial ethylene concentration of 50 ppm, the energy requirement for completing the decomposition was about 60 kJ.

• Journal of the Korean Institute of Gas
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• v.22 no.3
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• pp.84-90
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• 2018

We researched the way to minimize the damage when the chlorine-leak accident take place in a purification plant. Since the level of risk based on the Off-site Risk Assessment(ORA) is a combination of proportional to the number of residents in the damaged area and frequency of accidents, we suggested the adequate conditions to reduce the number of residents in the damaged area by means of the operating temperature of a handling facility, installation of a emergency shut-off valve, and the analysis of the variation of the damaging range in accordance with the type of enclosure. The coverage of damage was calculated by the 'KORA(Korea Off-site Risk Assessment Supporting Tool) program. The research shows that the lower operating temperature gets, the more emergency shut-off valve being installed and the higher enclosure level of facility becomes, the extent of damage gets decreased. The decreasing rate of worst case was 17.6%, 71%, 34.5% respectively, the decreasing rate of alternative case was 31.6%, 69.0%, 34.8% respectively.

• Fire Science and Engineering
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• v.34 no.1
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• pp.89-102
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• 2020

Chemical terrorism using toxic and flammable gases, which could be fatal to the health of the human body, poses a serious threat to the security of most advanced countries, as well as those that are suffering from local disputes, due to the asymmetric information that exists between terrorist actors and victims. The countermeasures against chemical terrorism can be roughly divided into three stages: prevention, response, and probation. The critical factors for each professional response agency, and the personnel that determine the degree and range of chemical terrorism damage, are performing missions successfully in the process of the prevention and the response stage against chemical terrorism. To do this, conducting objective and systematical assessments on facilities that could potentially be the subject of chemical terrorism is more important than anything. In this study, we compared the existing domestic and foreign vulnerable classification systems for chemical terrorism, reviewed the current direction of improvement in domestic classification systems, and suggested more scientific and systematic methodologies through the vulnerability assessment on an actual public facility sample.

• Journal of the Korean Institute of Gas
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• v.17 no.4
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• pp.39-44
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• 2013

There have been large explosions at some chemical plants recently. Accidents in chemical plants have been caused mainly by servicing for maintenance. There is a need to find a key target for effective injury prevention in maintenance. In this paper, facilities were selected as a key target and the risk priority numbers of the facilities were calculated in order to prioritize preventative measures. The research method was based on the followings; the list of the facilities is found through injury analysis. Then, the risk of each facility was calculated by the frequency of accidents and the working day loss through injuries. In addition, the risk of the facilities was calculated again by the frequency and the severity based on knowledge and experience of experts. As a result, the facilities in chemical plant maintenance are ranked in order of high to low risk priority number; reactor, dryer, tank lorry, etc. In the future, special measures and attention should be directed according to the risk priority number during the maintenance of chemical plants.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.23 no.11
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• pp.1464-1472
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• 1999

Design and operation of $1MW_{th}$ pulverized coal combustion testing facility are described. Also the influence of air staging on NOx emission and burnout of coal flames was investigated in this facility. The test facility consisted of coal feeding system, firing system and flue gas treatment system. A top-fired externally air staging burner was adopted in order to avoid influence of gravity on the coal particles and for easy maintenance. Distribution of temperature and chemical species concentration of coal flames could be measured in vertical pass of furnace. Main fuel was pulverized (83.4% less than $80{\mu}m$) Australian high bituminous coal. From variety of test conditions, overall excess air ratio was selected at 1.2(20% excess air). Tho study showed that increasing the staged air resulted in lower NOx omission, and it was suggested to be more than 40% of the total combustion air for the substantial NOx reduction. Sufficient burnout was not achievable when NOx emission was less than 500ppm. Also, the amount of core air did not influence tho NOx reduction.