• Title/Summary/Keyword: chemical ablation

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Real Time Monitoring of Ionic Species Generated from Laser-Ablated Pb$(Zr_{0.52}Ti_{0.48})O_3$ Target Using Pulsed-Field Time-Of-Flight Mass spectrometer

  • 최영구;임훙선;정광우
    • Bulletin of the Korean Chemical Society
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    • v.19 no.8
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    • pp.830-835
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    • 1998
  • The characteristics of the ablation plume generated by 532 nm Nd: YAG laser irradiation of a Pb(Zr0.52Ti0.48)O3 (PZT) target have been investigated using a pulsed-field time-of-flight mass spectrometer (TOFMS). The relative abundance of O+, Ti+, Zr+, Pb+, TiO+, and ZrO+ ions has been measured and discussed. TiO+ and ZrO+ ions were also found to be particularly stable within the laser ablation plasma with respect to PbO+ species. The behavior of the temporal distributions of each ionic species was studied as a function of the delay time between the laser shot and the ion extraction pulse. The most probable velocity of each ablated ion is estimated to be Vmp=1.1-1.6x 105 cm/s at a laser fluence of 1.2 J/cm2, which is typically employed for the thin film deposition of PZT. The TOF distribution of Ti+ and Zr+ ions shows a trimodal distribution with one fast and two slow velocity components. The fast velocity component (6.8x 10' cm/s) appears to consist of directly ablated species via nonthermal process. The second component, originated from the thermal evaporation process, has a characteristic velocity of 1.4-1.6 x 105 cm/s. The slowest component (1.2 x 105 cm/s) is composed of a dissociation product formed from the corresponding oxide ion.

Prepatation of$(Ba_{0.5}, Sr_{0.5}) Tio_3$thin folms by Laser Ablation technique and their electrical properties with different electrodes (Laser Ablation에 의한 $(Ba_{0.5}, Sr_{0.5}) Tio_3$박막의 제조와 전극에 따른 전기적 특성)

  • Yun, Sun-Gil;Safari, A.
    • Korean Journal of Materials Research
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    • v.4 no.4
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    • pp.401-405
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    • 1994
  • The chemical composition and electrical properties were investigated for epitaxially crystallized $(Ba_{0.5}Sr_{0.5})Tio_3$ (BST) films deposited on Pt and $YBa_Cu_3O_{7-x}$(YBCO) electrodes by laser ablation technique. The crystalline quality of the heteroepitaxial BST films deposited on Pt bottom electrode was found to be better than that of BST film on YBCO electrode by the RBS analysis. Films deposited at $600^{\circ}C$ on Pt electrode showed a dielectric constant of 320 and a dissipation factor of 0.023 at 100kHz. Leakage current density of BST films on Pt electrode was smaller than that on YBCO bottom electrode. Their leakage current density was about 0.8$\mu \; A/ \textrm{cm}^2$ at an applied electric field of 0.15MV/cm.

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Effects of Ar-Plasma Treatment in Alkali-Decomposition of Poly(ethylene terephthalate)

  • Seo, Eun-Deock
    • Macromolecular Research
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    • v.11 no.5
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    • pp.387-392
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    • 2003
  • The ablation effects of Ar-plasma treatment and alkali-decomposition behavior in NaOH solution of polyethylene terephthalate (PET) film were investigated. The modifications were evaluated by analysis of atomic force microscopy topographical changes, and by the measurement of decomposition yield in conjunction with heats of formation and electron densities of acyl carbon calculated by Parameterization Method 3 method. It has shown that the alkali-decomposition is hampered by plasma treatment and its decomposition yield is closely related with plasma treatment conditions such as exposure time to plasma. Plasma-treated PET films exhibited lower decomposition yield, compared to that of virgin PET. Increasing plasma exposure time contributes positively to decrease the decomposition yield. It has also shown that the topography of PET surface was affected by the base-promoted hydrolysis as well as Ar-plasma treatments. These behaviors are attributed to the decreased nucleophilicity of acyl carbon damaged by the ablation of Ar-plasma.

The spectroscopic study of chemical reaction of laser-ablated aluminum-oxygen by high power laser (분광분석을 활용한 고에너지 레이저 환경에서의 알루미늄-산소 화학반응 연구)

  • Kim, Chang-hwan
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.44 no.9
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    • pp.789-795
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    • 2016
  • Laser-induced combustions and explosions generated by high laser irradiances were explored by Laser-Induced Breakdown Spectroscopy (LIBS). The laser used for target ablation is a Q-switched Nd:YAG laser with 7 ns pulse duration at wavelength of 1064 nm laser energies from 40 mJ to 2500 mJ ($6.88{\times}10^{10}-6.53{\times}10^{11}W/cm^2$). The plasma light source from aluminum detected by the echelle grating spectrometer and coupled to the gated ICCD(a resolution (${\lambda}/{\Delta}{\lambda}$) of 5000). This spectroscopic study has been investigated for obtaining both the atomic/molecular signals of aluminum-oxygen and the calculated ambient condition such as plasma temperature and electron density. The essence of the paper is observing specific electron density ratio which can support the processes of chemical reaction and combustion between ablated aluminum plume and oxygen from air by inducing high laser energy.

Three-dimensional micro photomachining of polymer using DPSSL (Diode Pumped Solid State Laser) with 355 nm wavelength (355nm 파장의 DPSSL을 이용한 폴리머의 3차원 미세 형상 광가공기술)

  • 장원석;신보성;김재구;황경현
    • Korean Journal of Optics and Photonics
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    • v.14 no.3
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    • pp.312-320
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    • 2003
  • The basic mechanistic aspects of the interaction and practical considerations related to polymer ablation were briefly reviewed. Photochemical and photothermal effects, which highly depend on laser wavelength have close correlation with each other. In this study, multi-scanning laser ablation processing of polymer with a DPSS (Diode Pumped Solid State) 3rd harmonic Nd:YVO$_4$ laser (355 nm) was developed to fabricate a three-dimensional micro shape. Polymer fabrication using DPSSL has some advantages compared with the conventional polymer ablation process using KrF and ArF laser with 248 nm and 193 nm wavelength. These advantages include pumping efficiency and low maintenance cost. And this method also makes it possible to fabricate 2D patterns or 3D shapes rapidly and cheaply because CAD/CAM software and precision stages are used without complex projection mask techniques. Photomachinability of polymer is highly influenced by laser wavelength and by the polymer's own chemical structure. So the optical characteristics of polymers for a 355 nm laser source is investigated experimentally and theoretically. The photophysical and photochemical parameters such as laser fluence, focusing position, and ambient gas were considered to reduce the plume effect which re-deposits debris on the surface of substrate. These phenomena affect the surface roughness and even induce delamination around the ablation site. Thus, the process parameters were tuned to optimize for gaining precision surface shape and quality. This maskless direct photomachining technology using DPSSL could be expected to manufacture tile prototype of micro devices and molds for the laser-LIGA process.

Conjugate Simulation of Heat Transfer and Ablation in a Small Rocket Nozzle (소형 시험모터의 노즐 열전달 및 삭마 통합해석)

  • Bae, Ji-Yeul;Kim, Taehwan;Kim, Ji Hyuk;Ham, Heecheol;Cho, Hyung Hee
    • Journal of the Computational Structural Engineering Institute of Korea
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    • v.30 no.2
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    • pp.119-125
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    • 2017
  • Ablative material in a rocket nozzle is exposed to high temperature combustion gas, thus undergoes complicated thermal/chemical change in terms of chemical destruction of surface and thermal decomposition of inner material. Therefore, method for conjugate analysis of thermal response inside carbon/phenolic material including rocket nozzle flow, surface chemical reaction and thermal decomposition is developed in this research. CFD is used to simulate flow field inside nozzle and conduction in the ablative material. A change in material density and a heat absorption caused by the thermal decomposition is considered in solid energy equation. And algebraic equation under boundary layer assumption is used to deduce reaction rate on the surface and resulting destruction of the surface. In order to test the developed method, small rocket nozzle is solved numerically. Although the ablation of nozzle throat is deduced to be higher than the experiment, shape change and temperature distribution inside material is well predicted. Error in temperature with experimental results in rapid heating region is found to be within 100 K.

Temperature-Range-Dependent Optimization of Noninvasive MR Thermometry Methods (온도범위에 따른 비침습적 자기공명 온도측정방법의 최적화)

  • Kim, Jong-Min;Kumar, Suchit;Jo, Young-Seung;Park, Joshua Haekyun;Kim, Jeong-Hee;Lee, Chulhyun;Oh, Chang-Hyun
    • Journal of Biomedical Engineering Research
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    • v.36 no.6
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    • pp.241-250
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    • 2015
  • Noninvasive temperature monitoring is feasible with Magnetic Resonance Imaging (MRI) based on temperature sensitive MR parameters such as $T_1$ and $T_2$ relaxation times, Proton Resonance Frequency shift (PRFs), diffusion, exchange process, magnetization transfer contrast, chemical exchange saturation transfer, etc. While the temperature monitoring is very useful to guide the thermal treatment such as RF hyperthermia or thermal ablation, the optimization of the MR thermometry method is essential because the range of temperature measurement depends on the choice of the measurement methods. Useful temperature range depends on the purpose of treatment methods, for example, $42^{\circ}C$ to $45^{\circ}C$ for RF hyperthermia and over $50^{\circ}C$ for thermal ablation. In this paper, MR thermometry methods using $T_1$ and $T_2$ relaxation times and PRFs-based MR thermometry are tried on a 3.0 T MRI system and their results are reported and compared. In addition, the scanning protocol and temperature calculation algorithms from $T_1$ and $T_2$ relaxation times and PRFs are optimized for the different temperature ranges for the purpose of RF hyperthermia and/or thermal ablation.

Evaluation of Heat Resistance of Lyocell-based Carbon/Phenolic for Aerospace (항공우주용 리오셀계 탄소/페놀릭 복합재료의 내열 성능 평가)

  • Seo, Sang-Kyu;Kim, Yun-Chul;Bae, Ji-Yeul;Hahm, Hee-Chul;Hwang, Tae-Kyung
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.49 no.5
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    • pp.355-363
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    • 2021
  • Heat resistance performance evaluation and thermal analysis were performed to confirm the applicability of the lyocell-based carbon/phenolic composite material for heat-resistant parts for aerospace. Heat resistance performance evaluation of carbon/phenolic was conducted by Thermal Protection Evaluation Motor (TPEM). In this paper, boundary layer integration code considering the boundary layer analysis of combustion gas and MSC-Marc 2018 considering ablation and thermal pyrolysis were used for the thermal analysis. The ablation and thermal insulation performance were analyzed by the pressure curve of test motor and the cut carbon/phenolic specimens. The thermal response of the lyocell-based carbon/phenolic material was similar to that of the rayon-based carbon/phenolic material. Based on the results through the combustion test, the applicability of heat-resistant parts for aerospace to which domestic lyocell-based carbon fibers were applied was confirmed.

레이저 미세가공 기술

  • Lee, Cheon
    • 전기의세계
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    • v.43 no.11
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    • pp.15-21
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    • 1994
  • 레이저의 첨단기술에의 응용은, 의학, 생물학, 화학, 물리계측, 가공, 통신, 정보처리 등 다분야에 걸쳐, 수 mW에서 수 십 kW까지의 출력 영역의 레이저가 이용되고 있다. 본고에서는, 첫째, 레이저를 이용한 첨단기술의 하나인 초미세가공 기술로서, 특히, 반도체의 레이저 프로세스로 화제를 모으고 있는 1) 에칭, 2) CVD(Chemical Vapor Deposition), 3) 적층성장(epitaxy), 4) 리소그라피, 5) 홀로그라피 등에 대하여, 다른 프로세스(이온 빔 프로세스, 플라즈마 프로세스, X선에 의한 프로세스등)와 비교하여 원리, 특징, 응용상태, 장래의 전망에 대하여논하고, 둘째, 엑시머 레이저의 응용 분야에서의 가장 실용화에 접근한것 중의 하나인 애블레이숀(ablation) 가공에 대하여 논한다.

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A Study on the surface characteristics of mold and injection molded part depending on mold fabrication methods of dot pattern of LGP of cellular phone : Laser Ablation, Chemical Etching, LiGA-Reflow method (휴대폰용 도광판의 도트패턴 가공방법에 따른 금형 및 성형품의 표면특성연구 : 레이저가공, 부식, LiGA-reflow방법)

  • Do, Yeong-Su;Kim, Jong-Seon;Go, Yeong-Bae;Kim, Jong-Deok;Yun, Gyeong-Hwan;Hwang, Cheol-Jin
    • Proceedings of the Optical Society of Korea Conference
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    • 2007.07a
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    • pp.361-362
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    • 2007
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