• Proceedings of the Korean Ceranic Society Conference
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• 2003.10a
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• pp.76.1-76
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• 2003

• Journal of Sensor Science and Technology
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• v.15 no.2
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• pp.148-152
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• 2006

This paper describes the fabrication of SiCN microstructures for super-high temperature MEMS using photopolymerization of pre-ceramic polymer. In this work, polysilazane liquide as a precursor was deposited on Si wafers by spin coating, microstructured and solidificated by UV lithography, and removed from the substrate. The resulting solid polymer microstructures were cross-linked under HIP process and pyrolyzed to form a ceramic of withstanding over $1400^{\circ}C$. Finally, the fabricated SiCN microstructures were annealed at $1400^{\circ}C$ in a nitrogen atmosphere. Mechanical characteristics of the SiCN microstructure with different fabrication process conditions were evaluated. The elastic modules, hardness and tensile strength of the SiC microstructure implemented under optimum process condtions are 94.5 GPa, 10.5 GPa and 11.7 N/min, respectively. Consequently, the SiCN microstructure proposed in this work is very suitable for super-high temperature MEMS application due to very simple fabrication process and the potential possiblity of sophisticated mulitlayer or 3D microstructures as well as its good mechanical properties.

• Journal of the Korean Ceramic Society
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• v.51 no.5
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• pp.477-480
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• 2014

An $Al_2O_3$-CuO-ZnO (ACZ) precursor powder was synthesized by a facial sol-gel process using a nonionic surfactant span 80 as the chelating agent to improve the surface area and morphology. When creating a hydrogen membrane, several kinds of properties are required, such as easy dissociation of hydrogen molecules, fast hydrogen diffusion, high hydrogen solubility, and resistance to hydrogen embrittlement. ACZ-Ni composite membranes (cermet) were prepared with this precursor and pure Ni powder via the hot press sintering (HPS) method. The ACZ powder was characterized by XRD, BET, and FE-SEM. Hydrogen permeation experiments were performed by Sievert's type of hydrogen permeation membrane equipment. The hydrogen permeability of ACZ/Ni 10 wt% and ACZ/Ni 20 wt% was obtained as 7.2 and $10molm^{-2}s^{-1}$ at RT, respectively. These values of the corresponding membranes were slightly increased with increasing pressures.

• Journal of the Korean Ceramic Society
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• v.42 no.6 s.277
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• pp.384-390
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• 2005

[ ${\alpha}-Al_2O_3$ ] precursor was synthesised by sol-gel method using aluminum sulfate, sodium sulfate and sodium carbonate as law materials. The flaky ${\alpha}-Al_2O_3$ crystals were prepared by heating using precursor about $1,050^{\circ}C$. In this study, the effect of some transition-metal sulfate ($FeSO_4,\;SnSO_4,\;ZnSO_4$) addition have been investigated. When iron sulfate was added, it could see that act on impurities in crystal growth process. In case of tin sulfate, distribution of Platelets was very broad. When flaky ${\alpha}-Al_2O_3$ crystals were prepared zinc sulfate addition, thickness, size, and distribution of platelets was suited to industrial application. The average diameter of flaky ${\alpha}-Al_2O_3$ crystals was about 20 $\mu$m, and its thickness was about 0.3 $\mu$m. Increasing addition of zinc sulfate, thickness of ${\alpha}-Al_2O_3$ platelet was decreased.

• Journal of the Korean Ceramic Society
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• v.35 no.9
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• pp.974-980
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• 1998

This study is concerned with the production of carbon fiber reinforced carbon(C/C) with polyaromatic mesophase pitch as matrix precursor and with the investigation of friction-wear characteristics in ambient air using a constant speed type of friction tester. The main problem in using the polyaromatic mesophase as the matrix precursor is the high viscosity which may limit the complete impregnation of the fiber preform in the vacuum. To solve these problems two dimensional carbon fiber fabrics were infiltrated with meso-phase pitch in the pitch impregnator. After the impregnation and the heat treatment process. C/C com-posites were characterized by density porosity to monitor the influence of high pressure and temperature. It showed that the bulk density was increased and the apparent porosity and the density increasing rate was reduced as repeating the impregnation the carbonization and the heat treatment. The friction-wear charac-teristics of C/C composites were investigated by measuring the average friction coefficient and the specific wear rate as functions friction speed and friction pressure using a constant speed type of friction tester. C/C composite4s showed the average friction coefficient to be reduced as increasing the friction speed and the friction pressure.

• Journal of the Korean Ceramic Society
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• v.32 no.3
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• pp.305-312
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• 1995

Thin films of Pb(Mg, Zn)1/3Nb2/3O3 were fabricated by spin coating the Pb-Mg-Zn-Nb-O complex alkoxide sols on(111) Pt-coated MgO (100) planes. It was observed that the content of H2O and the rheological characteristics of sol greatly influenced the orientation of perovskite grains after thin-film formation. A strong preferential orientation of (100)-type planes of the perovskite grains was obtained for the sol aged for 15 days with the molar ratio of H2O to total metal alkoxides=2. As small angle X-ray scattering experiment in the Porod region was performed to correlate the observed preferential orientation with the network structure of precursors at various stage of aging. It was shown that the degree of branching of the Pb-Mg-Zn-Nb-O precursor chain had a direct effect on the preferred oreintation, and weakly branched precursor systems led to highly oriented grains after thin-film formation.

• Journal of the Korean Ceramic Society
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• v.34 no.9
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• pp.993-1001
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• 1997

The (0.8PPV+0.2DMPPV) copolymer and silica/borosilicate composites were synthesized by sol-gel process. The organic-inorganic hybrid solution was prepared by using of (0.8PPV+0.2DMPPV) copolymer precursor solution as a raw material for organic components and TEOS and TMB for glass components. Then by drying the solution in vacuum at 5$0^{\circ}C$ for 7days and subsequent heat treatment in vacuum at 15$0^{\circ}C$~30$0^{\circ}C$ for 2h~72h with heating rate of 0.2$^{\circ}C$/min and 1.8$^{\circ}C$/min, the organic-inorganic composites were synthesized. Microstructural evolution of the composites was characterized by DSC, IR spectrocopy, UV/VIS spectroscopy, and TEM. Elimination of the polymer precursor and degradation of the polymer were observed by DSC and Si-O and trans C=C absorption peaks were identified by IR spectra. The polymer was found to be successfully incorporated into the glass matrix and it was confirmed by the absorption peaks from the polymer in the UV/VIS spectra and the TEM results. The absorption peak of the composites was found to shift toward short wavelength side compared to that of the pure polymer and the amount of the blue shift increased with increasing the heat treatment temperature and heat treatment time and with decreasing the heating rate.

• Journal of the Korean Ceramic Society
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• v.34 no.9
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• pp.963-968
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• 1997

Coal tar pitch was used to study the effect of the pyrolysis conditions to produce mesophase pitch used as a matrix precursor for carbon/carbon composites. The pyrolysis conditions were presented in all cases that the total pressure was 1 atm and the first stage temperature was changed from 25$0^{\circ}C$ to 34$0^{\circ}C$ to remove the low molecular weight compounds in the pitch, and then, heated to 40$0^{\circ}C$ to form anisotropic mesophase as the second stage temperature. The first stage temperature was very affected to form resulting anisotropic mesophase pitch. The resulting mesophase pitches show a significantly increased anisotropic contents upto 30$0^{\circ}C$. However, the contents of mesophase were decreased above 30$0^{\circ}C$. It was the reason that the first stage temperature had been control the number of free radicals to react the aromatic compounds in the pitch to form high molecular weight compound. Therefore, the two stage pyrolysis method could be very effectively used to control various contents of anisotropic polyaromatic mesophase compared to continuous to continuous heating method.

• Journal of the Korean Ceramic Society
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• v.27 no.7
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• pp.934-942
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• 1990

The quarternary system ceramics 0.5[yPb(Zn1/3Nb2/3)O3-(1-y)Pb(Ni1/3Nb2/3)O3]-0.5[xPbTiO3-(1-x)PbZrO3](PZN-PNN-PT-PZ) was fabricated by the columbite precursor method to obtain a stabilized perovskite structure and by conventional method to evaluate the efficiency of the former methd. Dielectric and piezoelectric properties were investigated and the stability of the perovskite phase was studied as a function of PZN and PT contents and firing temperature. In the samples prepared by the columbite precursor method, the pyrochlore phase, which is detrimental to both the dielectric and piezoelectric properties, was not observed in the absence of PZN, and electric properties were improved even when fabricated at low temperature. By adding PZN, some pyrochlore phase appeared and the morphotropic phase boundary of the samples shifted to more Zr-rich composition. The temperature dependence of piezoelectric constant decreased with the addition of PZN, due to the rising of the Curie point.

• Journal of the Korean Ceramic Society
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• v.35 no.5
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• pp.451-457
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• 1998

$Li_2$$ZrO_3$ powder which is one of the candidates of breeding materials for the fusion reactor was syn-thesized by a precipitation-combustion process. Although precipitates from the reaction between zirconium nitrate and citric acid were existed in a precursor solution. $Li_2$$ZrO_3$ could easily be obtained by using the mixed fuel of urea and citric acid in stoichiometric composition. The phases of as-synthesized powder con-sisted of $Li_2$$ZrO_3$ and small amounts of $Li_6$$Zr_2O_3$ and $Li_2$$ZrO_3$ The latter phases disappeared after the cal-cination at $1100^{\circ}C$ for 2 h. The primary particle size and the specific surface area of as-synthesized powders were smaller than 20nm and 10-14 $M^2$/g, respectively. The primary particle size of the precipitation-combustion synthesized powders was affected by the size of precipitates present in a precursor solution.