• Title/Summary/Keyword: carrier gas

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Etch Rate Dependence of Differently Doped Poly-Si Films on the Plasma Parameters (플라즈마 변수에 의한 불순물주입 다결정실리콘 박막의 식각율 변화)

  • Park, Sung-Ho;Kim, Youn-Tae;Kim, Jin-Sup;Kim, Bo-Woo;Ma, Dong-Sung
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.11
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    • pp.1342-1349
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    • 1988
  • The dependence of the etch rates of differently doped poly-Si films on the gas composition, the chamber pressure and the RF power was investigated in detail. The highest anisotropy and the lowest CD loss were achieved at the $SF_6$-rich compositions, i.e., $Cl_2:SF_6$=17:33 (SCCM), in the $POCl_3$-doped poly-Si. The etch rates increased for n-type dopant (phosphorus), while decreased for p-type (boron) with increasing the doping levels irrespective of plasma parameters. And from the results of the activation of doped poly-Si films the active carrier concentrations as well as the doping concentrations were found to be responsible for the increase of the etch rate of the phosphorus-doped poly-Si.

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Effect of Oxygen on the Magnetic and Recording Characteristics of Magneto-Optical Disk (광자기 디스크의 기록 및 자기적 특성에 산소가 미치는 영향)

  • Choe, G.
    • Journal of the Korean Magnetics Society
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    • v.3 no.3
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    • pp.229-233
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    • 1993
  • The effects of differential partial pressures of oxygen during sputtering on the magnetic and recording characteristics of magneto-optical disks were investigated. Different flows of oxygen were deliberately introduced into the sputtering chamber to have a variety of partial pressures of oxygen during sputtering. A residual gas analyzer was employed to monitor the oxygen peak before, during, and after sputtering and to estimate the reacted oxygen amount. Most of the oxygen introduced into the chamaber was reacted during sputtering. As the partial pressure of oxygen increased, the oxygen content of the TbFeCoCr film increased also. The oxygen appeared to be bound as Tb-O, effectively decreasing the magnetically active Tb content of the film The coercivity decreased but the squareness of the Kerr hysteresis loops was still excellent. The perpendicular anisotropy was not significantly affected by oxygen amount. The carrier-to-noise ratio, includi!1g the write power sensitivity and bias field sensitivity did not change too much with oxygen content in the film The disks sputtered with oxygen showed better bias field sensitivity with lower write power threshold than the disk sputtered without oxygen, due to high demagnetization during domain formation. No significant degradation of coercivity for the disk sputtered oxygen was observed during an accelerated aging test.

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Nonstoichiometric Effects in the Leakage Current and Electrical Properties of Bismuth Ferrite Ceramics

  • Woo, Jeong Wook;Baek, SeungBong;Song, Tae Kwon;Lee, Myang Hwan;Rahman, Jamil Ur;Kim, Won-Jeong;Sung, Yeon Soo;Kim, Myong-Ho;Lee, Soonil
    • Journal of the Korean Ceramic Society
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    • v.54 no.4
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    • pp.323-330
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    • 2017
  • To understand the defect chemistry of multiferroic $BiFeO_3-based$ systems, we synthesized nonstoichiometric $Bi_{1+x}FeO_{3{\pm}{\delta}}$ ceramics by conventional solid-state reaction method and studied their structural, dielectric and high-temperature charge transport properties. Incorporation of an excess amount of $Bi_2O_3$ lowered the Bi deficiency in $BiFeO_3$. Polarization versus electric field (P-E) hysteresis loop and dielectric properties were found to be improved by the $Bi_2O_3$ addition. To better understand the defect effects on the multiferroic properties, the high temperature equilibrium electrical conductivity was measured under various oxygen partial pressures ($pO_2{^{\prime}}s$). The charge transport behavior was also examined through thermopower measurement. It was found that the oxygen vacancies contribute to high ionic conduction, showing $pO_2$ independency, and the electronic carrier is electron (n-type) in air and Ar gas atmospheres.

Empirical relationship between band gap and synthesis parameters of chemical vapor deposition-synthesized multiwalled carbon nanotubes

  • Obasogie, Oyema E.;Abdulkareem, Ambali S.;Mohammed, Is'haq A.;Bankole, Mercy T.;Tijani, Jimoh. O.;Abubakre, Oladiran K.
    • Carbon letters
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    • v.28
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    • pp.72-80
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    • 2018
  • In this study, an empirical relationship between the energy band gap of multi-walled carbon nanotubes (MWCNTs) and synthesis parameters in a chemical vapor deposition (CVD) reactor using factorial design of experiment was established. A bimetallic (Fe-Ni) catalyst supported on $CaCO_3$ was synthesized via wet impregnation technique and used for MWCNT growth. The effects of synthesis parameters such as temperature, time, acetylene flow rate, and argon carrier gas flow rate on the MWCNTs energy gap, yield, and aspect ratio were investigated. The as-prepared supported bimetallic catalyst and the MWCNTs were characterized for their morphologies, microstructures, elemental composition, thermal profiles and surface areas by high-resolution scanning electron microscope, high resolution transmission electron microscope, energy dispersive X-ray spectroscopy, thermal gravimetry analysis and Brunauer-Emmett-Teller. A regression model was developed to establish the relationship between band gap energy, MWCNTs yield and aspect ratio. The results revealed that the optimum conditions to obtain high yield and quality MWCNTs of 159.9% were: temperature ($700^{\circ}C$), time (55 min), argon flow rate ($230.37mL\;min^{-1}$) and acetylene flow rate ($150mL\;min^{-1}$) respectively. The developed regression models demonstrated that the estimated values for the three response variables; energy gap, yield and aspect ratio, were 0.246 eV, 557.64 and 0.82. The regression models showed that the energy band gap, yield, and aspect ratio of the MWCNTs were largely influenced by the synthesis parameters and can be controlled in a CVD reactor.

Fabrication and Characteristics of Photoconductive Amorphous Silicon Film for Facsimile (팩시밀리용 비정질 실리콘 광도전막의 제작 및 특성)

  • Kim, Jeong-Seob;Oh, Sang-Kwang;Kim, Ki-Wan;Lee, Wu-Il
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.26 no.6
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    • pp.48-56
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    • 1989
  • Contact-type linear image sensors for facsimile have been fabricated by means of rf glow discharge decomposition method of silane. The dependence of their electrical and optical properties on rf power, $SiH_4$ flow rate, ambient gas pressure, $H_2SiH_4$ ratio and substrate temperature are described. The a-Si:H monolayer demonstriated photosensitivity of 0.85 and $I_{ph}/I_d$ ratio of 100 unger 100 lux illumination. However, this monolayer has relatively high dark current due to carrier injection from both electrodes, resulting in low $I_{ph}/I_{dd}$ ratio. To suppress the dark current we have fabricated $SiO_2/i-a-Si:H/p-a-Si:H:B$ multilayer film with blocking structure. The photocurrent of this multilayer sensor with 6 V bias became saturated ar about 20nA under 10 lux illumination, while the dark current was less than 0.2 nA. Moreover, the spectral sensitivity of the multilayer film was enhanced for short wavelength visible region, compared with that of the a-Si:H monolayer. These results show that the fabricated photocon-ductive film can be used as the linear image sensor of the facsimile.

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Measurement of Coating Removal Rate of Accelerated Dry Ice Snow Impact (가속 드라이아이스 snow impact에 의한 도막 제거속도의 측정)

  • Na, Young Min;Kim, Hotae;Kim, Sun-Geon
    • Clean Technology
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    • v.10 no.4
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    • pp.177-187
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    • 2004
  • Dry ice snow jet was produced by high-pressure expansion of liquid carbon dioxide and subsequent acceleration by carrier gas flow. Removal mechanism for coating was not so different from that for contaminating particles on the surface. The removal of coating was quantitatively described by Hutchings' equation. The two parameters obtained from the plot, were used to predict the removal rate or the specific coating area removed by a unit mass of carbon dioxide. Their values also enhanced the reliability of the experimental data and enabled the experimental errors corrected. Hutchings' plots obtained with various values of either stand-off distance or nozzle length tends to meet apparently at a single unique point at which the scar-size enlargement by focusing jet plume was balanced with that by spreading it.

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Spferical fine ZnO Particles prepared from zinc nitrate by Ultrasonic Spray Pyrolysis technique (초음파 분무 열분해법에 의해 질산아연용액으로부터 구형의 ZnO 미분말 제조)

  • 이서영;김영도;신건철
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.1 no.2
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    • pp.46-58
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    • 1991
  • The synthesized ZnO powder was prepared by spray pyrolysis method using ultrasonic vibrator. The starting solutons were the aqueous solution of $Zn(NO_3)_2\cdot6H_2O$. The concentration was prepared 1M, O.5M, O.25M, and O.lM. The Nz carrier gas was 2.3cm$\cdot{sec}^{-1}$. The prepared powder from the $Zn(NO_3)_2{\cdot}6H_2O$ aqueous solution was Zine oxide with hexagonal structure. The shape of prepared powder was fine size, narrow size distribution, agglomerate-free, nearly sphere particle. Also, the particle size was about $ 0.28-0.61\mum$.

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Fatty Acid Compositions of Varying Seed Oils of Korean Origin (한국산(韓國産) 각종(各種) 종실유(種實油)의 지방산(脂肪酸)에 관(關)한 연구(硏究))

  • Mo, Su-Mi
    • Journal of Nutrition and Health
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    • v.8 no.2
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    • pp.19-26
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    • 1975
  • The role of fat is important from nutritional standpoint. The physiological functions of fat are energy yielding as well as the carrier of fat soluble vitamins, with special activities of essential fatty acids. It is fortunate that Korean families prefer to use vegetable oils rather than those from animal origin. But the problems are focused on better qaulity of food oils with attempt to exploit the available resources. This study was undertaken to inevestigate the fatty acid compositions of Korean origin both from conventional and unconventional resources of gas-liquid chromatography. The results obtained are as follows. 1. The total lipid contents of seeds of red pepper, Korean squash, sesame, perilla (var Japonica), and Korean pine nuts and walnuts were 24.3%, 56.6%, 56.4%, 46.9%, 69.8%, and 67.2%, respectively. 2. The saponification numbers of samples ranged from 190 to 200. It showed that the mean molecular weights of fatty acids composing the lipids were very much closed each other. 3. Iodine numbers of varing seed oils ranged from 96.5 of Korean squash seed oil to 124.6 of walnut oil. Oils obtained from squash seeds and sesame seeds showed significantly lower value, while others ranged from 122 to 125. 4. In the fatty acid compositions, squash seed oil was composed mainly of unsaturated fatty acids, 74.9% of which was oleic acid, whereas red pepper seed oil, pine nut oil, and sesame oil contained linoleic acid as a major component showing 64.4%, 56%, 48.8%, and 47.8%, respectively. In perilla seed oil, the amounts of linoleic and linolenic acids were 14.1% and 58%, respectively which meant nearly three-fourths of the total fatty acidsbeing the unsaturated essential fatty acids. This study will encourage the use of these conventional and unconventional vegetable oils which have highr ratios of polyunsaturated to saturated fatty acids.

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An Experimental Study on Composition Characteristics of SiO$_2$/TiO$_2$/Multicomponent Particle Generated in a Coflow Diffusion Flame (화염중 발생하는 SiO$_2$/TiO$_2$/다성분입자의 조성특성에 관한 실험적 연구)

  • Kim, Tae-O;Seo, Jeong-Su;Choe, Man-Su
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.25 no.9
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    • pp.1175-1182
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    • 2001
  • Chemical compositions of polydisperse SiO$_2$/TiO$_2$multicomponent aggregates were measured for different heights from the burner surface and different mobility diameters of aggregates. SiO$_2$/TiO$_2$multicomponent particles were generated in a hydrogen/oxygen coflow diffusion flame from two sets of precursors: TTIP(titanium tetraisopropoxide), TEOS(tetraethylorthosilicate). To maintain 1:1 mole ratio of TTIP:TEOS vapor, flow rate of carrier gas $N_2$was fixed at 0.6lpm for TTIP, at 0.1lpm for TEOS. In-situ sampling probe was used to supply particles into DMA(differential mobility analyzer) which was calibrated with using commercial DMA(TSI, model 3071A) and classifying monodisperse multicomponent particles. Classified monodisperse particles were collected with electrophoretic collector. The distributions of composition from particles to particle were determined using EDS(energy dispersive spectrometry) coupled with TEM(transmission electron microscope). The chemical(atomic) compositions of classified monodisperse particle were obtained for different heights; z=40mm, 60mm, 80mm. The results suggested that the chemical(atomic) composition of SiO$_2$decreased with the height from burner surface and the composition of SiO$_2$and TiO$_2$approached to the value of 1 to 1 fat downstream. It is also found that the composition of SiO$_2$decreases as the mobility diameter of aggregate increases.

An Experimental Study on Composition Characteristics of $SiO_2/TiO_2$ Multicomponent Particle in Coflow Diffusion Flame (화염중 발생하는 $SiO_2/TiO_2$ 다성분입자의 조성특성에 관한 실험적 연구)

  • Kim, Tae-Oh;Suh, Jeong-Soo;Choi, Man-Soo
    • Proceedings of the KSME Conference
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    • 2000.04b
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    • pp.441-446
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    • 2000
  • Chemical compositions of monodisperse $SiO_2/TiO_2$ multicomponent aggregates were measured for different heights from the burner surface and different mobility diameters of aggregates. $SiO_2/TiO_2$ multicomponent particles were generated in a hydrogen/oxygen coflow diffusion flame from two sets of precursors: TTIP (titanium tetraisopropoxide), TEOS(tetraethylorthosilicate). To maintain 1:1 mole ratio of TTIP:TEOS vapor theoretically, flow rate of carrier gas $N_2$ was fixed at 0.61pm for TTIP, at 0.11pm for TEOS. In situ sampling probe was used to supply particles into differential mobility analyzer(DMA) which was calibrated with using commercial DMA(TSI 3071A) and classifying monodisperse multicomponent particles. Classified particles were collected with electrophoretic collector. The distributions of composition from particle to particle were determined using EDS (energy dispersive spectrometry) coupled with TEM (transmission electron microscope). The chemical (atomic) compositions of classified monodisperse particle were obtained for different heights; z=40mm, 60mm, 80mm. The results suggested that the atomic composition of $SiO_2$ decreased with the height from burner surface and the composition of $SiO_2$ and $TiO_2$ approached to the value of 1 to 1 in far downstream. It is also found that the composition of $SiO_2$ decreases as the mobility diameter of aggregate increases.

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