• 반도체디스플레이기술학회지
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• 제16권3호
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• pp.41-46
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• 2017

This study aims to select suitable co-solvents and to obtain optimal process conditions in order to improve process efficiency and productivity through experimental results obtained under various experimental conditions for the etching and rinsing process using liquid carbon dioxide and supercritical carbon dioxide. Acetone was confirmed to be effective through basic experiments and used as the etching solution for MEMS-wafer etching in this study. In the case of using liquid carbon dioxide as the solvent and acetone as the etching solution, these two components were not mixed well and showed a phase separation. Liquid carbon dioxide in the lower layer interfered with contact between acetone and Mems-wafer during etching, and the results after rinsing and drying were not good. Based on the results obtained under various experimental conditions, the optimum process for treating MEMS-wafer using supercritical CO2 as the solvent, acetone as the etching solution, and methanol as the rinsing solution was set up, and MEMS-wafer without stiction can be obtained by continuous etching, rinsing and drying process. In addition, the amount of the etching solution (acetone) and the cleaning liquid (methanol) compared to the initial experimental values can be greatly reduced through optimization of process conditions.

• 미래기술융합논문지
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• 제2권4호
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• pp.13-19
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• 2023

파리기후변화협약(UNFCCC, 2015) 체결에 따라 선진국뿐만 아니라 개발도상국을 포함하는 포괄적 참여를 통해 전 세계가 온실가스 감축 활동을 확대하고 있다. 세계 주요국은 탄소배출권 시장을 통한 탄소배출 총량규제의 효과에 많은 기대를 걸고 있다. 그러나 탄소배출권을 얻기 위해서는 정량적인 탄소저감량 데이터를 바탕으로 제3자 검증이 필요하다. 이에 본 논문에서는 탄소배출권용 AIoT 고효율 가로등을 개발하여 등기구의 광효율을 측정하는 성능분석 연구를 진행했다. 탄소배출권을 얻기 위해 고효율 LED PKG를 사용하며 고전압용 PFC를 자체 개발하고 통신이 가능한 고효율의 등기구를 개발했다. 통신을 위해 등기구와 Gateway간 2.4GHz LoRa 방식을 채택했다. 한국 도로공사 표준 가로등 Type A, B, C 시뮬레이션을 통하여 렌즈 설계를 진행했다. 가로등의 성능은 공인 성적기관의 광효율 측정을 통하여 기존 타제품 대비 고효율의 성능을 검증하였으며, 이를 통한 전기에너지 절감으로 탄소배출권을 획득할 것으로 기대된다.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.119-124
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• 2023

In this study, experimental approach of the measurement of condensation and evaporation heat transfer coefficients is discussed for mixed refrigerants using in the ultra low-temperature cooling system for semiconductor etching process. An experimental apparatus was described performing the condensation and evaporation heat transfer measurements for mixed refrigerants. The mixed refrigerant used in this study was composed of the optimal mixture determined in previous research, with a composition of Ar:R14:R23:R218 = 0.15:0.4:0.15:0.3. The experiments were conducted over a temperature range from -82℃ to 15℃ and at pressures ranging from 18.5 bar to 5 bar. The convection heat transfer coefficients of the mixed refrigerant were measured at flow rates corresponding to actual operating conditions. The condensation heat transfer coefficient ranged from approximately 0.7 to 0.9 kW/m2K, while the evaporation heat transfer coefficient ranged from 1.0 to 1.7 kW/m2K. The detailed discussion of the experimental methods, procedures, and results were described in this paper.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.488.2-488.2
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• 2014

Carbon-based materials such as carbon nanotubes and graphene have emerged as promising building blocks in applications for nanoelectronics and energy devices due to electrical property, ease of processability, and relatively inert electrochemistry. In recent years, there has been considerable interest in core-shell nanomaterials, in which inorganic nanowires are surrounded by inorganic or organic layers. Especially, carbon encapsulated semiconductor nanowires have been actively investigated by researchers in lithium ion batteries. We report a method to synthesize silicon nanowire (SiNW) core/carbon shell structures by chemical vapor deposition (CVD), using methane (CH4) as a precursor at growth temperature of $1000{\sim}1100^{\circ}C$. Unlike carbon-based materials synthesized via conventional routes, this method is of advantage of metal-catalyst free growth. We characterized these materials with FE-SEM, FE-TEM, and Raman spectroscopy. This would allow us to use these materials for applications ranging from optoelectronics to energy devices such as solar cells and lithium ion batteries.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2008년도 추계학술대회 논문집 전기설비전문위원
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• pp.207-210
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• 2008

In this paper, we researched the dielectric properties and voltage dependence on slice XLPE sheet from 22[kV] and 154[kV] power cable. We studied effects for impurities and water for semiconductor shield through a dielectric properties experiment to estimate performance of insulating materials in power cable. Capacitance and $tan{\delta}$ of 22[kV], 154[kV] were 53/43[pF] and $7.4{\times}10^{-4}$, $2.1510^{-4}$. In these results, the trend was increased with the increase of temperature. The tan6 of XLPE/semiconductor layer was increased as compared with that of XLPE. Dielectric properties reliability of tan6 was small. Also, To improve mean-life and reliability of power cable in this study, we have investigated chemical properties showing by changing the content of carbon black that is semiconductive additives for underground power transmission. Specimens were made of sheet form with the three of existing resins and the nine of specimens for measurement. Chemical properties of specimens was measured by FT-ATR (Fourier Transform Attenuated Total Reflectance). The condition of specimens was a solid sheet. We could observe functional group (C=O, carbonyl group) of specimens through FT-ATR. From these experimental result, the concentration of functional group (C=O) was high according to increasing the content of carbon black. We could know EEA was excellent more than other specimens from above experimental results.

• 반도체디스플레이기술학회지
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• 제10권2호
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• pp.13-17
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• 2011

We have developed a new energy-consuming monitoring system that has made it possible to measure the energy consumption of a gas scrubber, one of semiconductor processing equipments, and installed this system to the gas scrubber under operating at a manufacture site. Using this system, we have measured consumptions of electric power and processing gas consumed at standby to operating mode. In case of the gas scrubber, processing gas flows continuously into it at standby and operating mode. Therefore, if the electric power has been supplied, the processing gas can flows into the device for 24 hours. Moreover, at operating of gas scrubber, the amount of electricity consumption is 5 kWh. At Standby of gas scrubber, it spends 3kwh. It is certain that the energy consumption is greater at operating mode than at standby mode. The carbon emission rates from 24 hour gas scrubber operation are 236 $kgCO_2$/day of $N_2$, 57 $kgCO_2$/day of electric power and 0.001 $kgCO_2$/day of cooling water. Most of carbon is emitted from $N_2$ gas and electric power consumption.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.94-98
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• 2003

Carbon nanofibers (CNF) with uniform diameter and controlled size could be prepared from catalytic decomposition of $C_2H_2$ with the catalyst treated by mechnochemical(MC) process. The distribution and size of Ni catalyst can be governed by tuning grinding time using MC process. As a result, size and structure of CNF can be controlled. The effect of grinding time to the as-grown CNF was checked. CNFs with diameter from 10-70nm can be synthesized. CNFs with bundle formation sharing one tip were found for MC treated catalyst.

• 반도체디스플레이기술학회지
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• 제18권3호
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• pp.36-41
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• 2019

Hybrid-type transparent electrodes were fabricated by depositing carbon nanotubes (CNTs) via spray coating on polyethylene terephthalate (PET) substrates and then coating the CNTs with [poly(3,4-ethylenedioxythiophene)] (PEDOT) films via electro-polymerization. For all of the fabricated electrodes, their surface morphologies, electric sheet resistances, visible transmittances, and color properties (e.g., yellowness) were characterized as functions of the applied voltages and process times used in electro-polymerization. The sheet resistance of the CNTs was significantly reduced by the coating of PEDOT, while their visible transmittances slightly decreased. The yellowness values of the PEDOT-coated CNTs were observed to have substantially decreased via electro-polymerization. The experimental results confirmed that the fabricated hybrid electrodes had desirable properties for the application of transparent electrode in terms of the electrical resistance, optical transmittance, and chromaticity.

• 반도체디스플레이기술학회지
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• 제12권3호
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• pp.7-12
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• 2013

Ni-CNT(Carbon Nanotube) composite coatings is were formed by electrodeposition and their physical properties were investigated with variations of CNT content(1, 3, 6. 9 g/L) in the electrolyte solution, while the current density and electroplating time were fixed respectively at $6A/dm^2$ and 90 min.. With increasing CNT content from 1 to 9 g/L, incorporated CNTs into the composite coating were limited from 4.65 wt.% to 7.38 wt.%. Microhardness and contact angle values were increased with increasing CNT content of upto 3 g/L. With increasing the CNT content further, physical properties were degraded due to agglomeration, poor adhesion of CNTs to Ni matrix and thus rough surfaces. Optimum electroplating conditions were found to be the CNT content of 3 g/L, current density of 6 A/dm2 and electroplating time of 90 min.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2005년도 추계 학술대회
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• pp.40-44
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• 2005

Catalytic performance of Co catalysts supported on MgO for the formation of multiwall carbon nanotubes (MWCNTs) Having 40-60 nm in diameter has been investigated through acetylene decomposition at $600^{\circ}C$. Scanning electron microscopy measurements show that the nanotubes are chain and coiled structures whereas x-ray diffraction patterns indicate the formation of MWCNTs with Co nanoparticles. In addition Raman spectra confirms the format ion of MWCNTs due to presence of characteristic radial breathing mode along with D and G bands.