Mechanical Characteristics of Crystalline Carbon Nitride Films Grown by Reactive Sputtering (반응성 스퍼터링으로 성장된 결정성 질화탄소막의 기계적 특성)
-
- Journal of the Korean Institute of Electrical and Electronic Material Engineers
- /
- v.15 no.2
- /
- pp.147-152
- /
- 2002