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http://dx.doi.org/10.4313/TEEM.2003.4.4.001

Al2O3 Coating and Filling of Carbon Nanotubes  

Lee Jong-Soo (Department of Electrical Engineering, College of Engineering, Korea University)
Min Byung-Don (Department of Electrical Engineering, College of Engineering, Korea University)
Kim Sang-Sig (Department of Electrical Engineering, College of Engineering, Korea University)
Publication Information
Transactions on Electrical and Electronic Materials / v.4, no.4, 2003 , pp. 1-6 More about this Journal
Abstract
Aluminum oxide ($Al_2O_3$) nanotubes and nanorods were fabricated by coating and filling of multiwalled carbon nanotubes (MWNTs) with atomic-layer deposition (ALD). $Al_2O_3$ material was deposited on the MWNTs at a substrate temperature of $300^{\circ}C$ using trimethylaluminum and distilled water. Transmission electron microscopy, high resolution transmission electron microscopy, energy-dispersive X-ray spectroscopy, and selected area electron diffraction of the deposited MWNTs revealed that amorphous $Al_2O_3$ material coats the MWNTs conformally and that this material fills the inside of the MWNTs. These illustrate that ALD has an excellent capability to coat and fill any three-dimensional shapes of MWNTs conformally without producing any crystallites.
Keywords
Multiwalled carbon nanotubes; Filling; Coating; Atomic layer deposition;
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