• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 B
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• pp.1530-1533
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• 2005

Total 12 units of high power klystron-modulator systems as microwave source is under operation for 2.5-GeV electron linear accelerator in Pohang Light Source(PLS) linac. RF power and beam power of klystron are precisely measured for the effective control of electron beam. A precise measurement and measurement equipment with good response characteristics are required for this. Input power of klystron is calculated from the applied voltage and the current on its cathode. Tiny measurement error severely effects RF output power value of klystron. Therefore, special care is needed to measure precise beam voltage. Capacitive voltage divider(CVD) unit is intended for the measurement of beam voltage of 400 kV generated from the pulsed klystron-modulator system. Main parameter to determine the standard capacitance in the high arm of CVD is dielectric constant of insulation oil. Therefore CVD should be designed to have a minimum capacitance variation due to voltage, frequency and temperature in the measurement range. This paper will discuss the analysis of capacitive voltage divider for a pulsed high-voltage measurement, and the empirical relations between capacitance and oil temperature variation.

• Journal of Electrical Engineering and Technology
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• 제7권6호
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• pp.971-976
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• 2012

A 150 kJ compact capacitive pulsed power system (CCPPS) capable of delivering electrical energy into an electrothermal chemical (ETC) gun on a vehicle has been studied. The CCPPS provides pulsed electrical energy into a capillary plasma injector which generates plasma of tens of thousands $^{\circ}K$ in temperature and has a nonlinear resistance depending on the current. The design requirements of the CCPPS are as follows: the maximum power of 250 MW, the pulse width of about 0.6 ms, the volume of no more than 0.5 cubic meter, the efficiency of energy transfer over 80 % and the repetition rate of 4~5 times per minute. The constructed CCPPS is composed of four 37.5 kJ capacitor bank modules in parallel to make a trapezoid pulse shape and to satisfy the design requirements. Each module is designed to achieve high reliability, safety, efficiency and energy density to endure severe operating conditions. The results of the performance test on the CCPPS using a 120 mm ETC gun are described.

• 전기학회논문지
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• 제59권4호
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• pp.762-767
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• 2010

This paper describes characteristic of a light triggered thyristor investigated by experiment to adopt it into a main switch of a pulsed power unit. Triggering principle of the light triggered thyristor are referred with its structure and equivalent circuit. Operational principle and simulation result of a capacitive pulsed power circuit are explained. A variety of triggering conditions of triggering circuit and characteristics on turn-on, turn-off, voltage dividing in series operation, overvoltage protection function of the light triggered thyristor are investigated by experiments. Experimental result of 40 kJ pulsed power unit using the light triggered thyristor is presented.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2007년도 제38회 하계학술대회
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• pp.1472-1473
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• 2007

In this paper, it is investigated to develop a compact 150kJ pulsed power supply to be operated on a vehicle. The goals of development are the maximum charging energy of 150kJ, the efficiency of energy transfer of >80%, the pulse forming of trapezoidal wave of $150{\sim}250MW$, the consecutive charging rate of >several shots/min. The hierarchy and circuit of the pulsed power supply for optimization, high efficiency and minimization of volume are investigated and presented. And, the charging voltage, inductance and resistance of the compact pulsed power supply are studied and determined.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제54권2호
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• pp.63-68
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• 2005

Total 12 units of high power klystron-modulator systems as microwave source are under operation for 2.5 GeV electron linear accelerator in Pohang Light Source (PLS) linac. The klystron-modulator system has an important role for the stable operation to improve an availability statistics of overall system performance of klystron-modulator system. RF power and beam power of klystron are precisely measured for the effective control of electron beam. A precise measurement and measurement equipment with good response characteristics are demanded for this. Input power of klystron is calculated from the applied voltage and the current on its cathode. Tiny measurement error severely effects RF output power value of klystron. Therefore, special care is needed to measure precise beam voltage. Capacitive voltage divider (CVD), which divides input voltage as capacitance ratio, is intended for the measurement of a beam voltage of 400 kV generated from the klystron-modulator system. Main parameter to determine standard capacitance in the high arm of CVD is dielectric constant of insulation oil. Therefore CVD should be designed to have a minimum capacitance variation due to voltage, frequency and temperature in the measurement range. This paper will be present and discuss the design concept and analysis of capacitive voltage divider for a pulsed high-voltage measurement, and the empirical relations between capacitance effects and oil temperature variation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.307-307
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• 2013

초고집적 회로에 적용되는 반도체 소자의critical dimension (CD)이 수 nano 사이즈로 줄어들고 있기 때문에, 다양한 물질의 식각을 할 때, 건식식각의 중요성이 더 강조되고 있다. 특히 $SiO_2$와 같은 유전체 물질을 식각할 때, plasma process induced damages (P2IDs)가 관찰되어 왔고, 이러한 P2IDs를 줄이기 위해, pulsed-time modulation plasma가 광범위하게 연구되어 왔다. Pulsed plasma는 정기적으로 radio frequency (RF) power on과 off를 반복하여 rf power가 off된 동안, 평균전자 온도를 낮춤으로써, 웨이퍼로 입사되는 전하 축적을 효과적으로 줄일 수 있다. 또한 fluorocarbon plasmas를 사용하여 $SiO_2$를 식각하기 위해 Dual-Frequency Capacitive coupled plasma (DF-CCP)도 널리 연구되어 왔는데, 이것은 기존의 방법과는 다르게 plasma 밀도와 ion bombardment energy를 독립적으로 조절 가능하다는 장점이 있어서 미세 패턴을 식각할 때 효과적이다. 본 연구에서는 Source power에는 60 MHz pulsed radio frequency (RF)를, bias power에는 2 MHz continuous wave (CW) rf power가 사용된 system에서 Ar/$C_4$ F8/$O_2$ 가스 조합으로, amorphous carbon layer (ACL)가 hard mask로 사용된 $SiO_2$를 식각했다. 그리고 source pulse의 duty ratio와 pulse frequency의 효과에 따른 $SiO_2$의 식각특성을 연구하였다. 그 결과, duty ratio의 감소에 따라 $SiO_2$, ACL의 etch rate이 감소했지만, $SiO_2$/ACL의 etch selectivity는 증가하였다. 반면에 pulse frequency의 변화에 따른 두 물질의 etch selectivity는 크게 변화가 없었다. 그 이유는 pulse 조건인 duty ratio의 감소가 전자 온도 및 전자 에너지를 낮춰 $C_2F8$가스의 분해를 감소시켰으며, 이로 인해 식각된 $SiO_2$의 surface와 sidewall에 fluorocarbon polymer의 형성이 증가하였기 때문이다. 또한 duty ratio의 감소에 따라 etch selectivity뿐만 아니라 etch profile까지 향상되는 것을 확인할 수 있었다.

• 전기학회논문지P
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• 제60권1호
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• pp.13-18
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• 2011

More and all-electric aircraft (AEA) carry many loads with varied functions. In particular, there may be large pulsed loads with short duty ratios which can affect the normal operation of other loads. In this paper, a converter with spilt capacitors and an improved adaptive controller is used as the Voltage Bus Conditioner (VBC) with the reduced capacitive storage to mitigate the voltage transients on the bus. The proposed converter allows the smaller capacitive storage. Also, the proposed controller has the advantage of requiring only one sensor and performing both the functions of mitigating the voltage bus transients and maintaining the level of energy stored. Experimental results are presented which verify the control principles and demonstrate the practicality of the approach.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제51권12호
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• pp.584-590
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• 2002

Crowbar system is usually applied to a pulsed power system in which a capacitor bank is discharged into a load. This provides a free wheeling path for the load current and prevents the capacitor from recharging due to a reverse voltage. Usually diodes have been used as a crowbar switch, but it is not a practical system because the cost of the diodes goes up enormously with increasing the system voltage and current. This paper presents a novel protection scheme of a charging and discharging system of a 300 kJ capacitor bank using a low-cost crowbar system which consists of a crowbar switch and resistors. Triggered vacuum switch(TVS) was used for a crowbar switch, and Rogowski coil was used to determine a trigger time of TVS. When this crowbar system is applied to our pulsed power system which consists of capacitor bank($123muF$), inductor() for forming a pulse, load resistor$(100 m\Omega)$, and a closing switch, instantaneous reversal voltage of capacitor bank could be limited less than 1.8 ㎸ until capacitor bank was charred to 17 ㎸.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.136.2-136.2
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• 2015

반도체 제조는 chip의 성능 향상 및 단가 하락을 위해 지속적으로 pattern size가 nano size로 감소해 왔고, capacitor 용량은 증가해 왔다. 이러한 현상은 contact hole의 aspect ratio를 지속적으로 증가시킨바, 그에 따라 최적의 HARC (high aspect ratio contact)을 확보하는 적합한 dry etch process가 필수적이다. 그러나 HARC dry etch process는 많은 critical plasma properties 에 의존하는 매우 복잡한 공정이다. 따라서, critical plasma properties를 적절히 조절하여 higher aspect ratio, higher etch selectivity, tighter critical dimension control, lower P2ID과 같은 plasma characteristics을 확보하는 것이 요구된다. 현재 critical plasma properties를 제어하기 위해 다양한 plasma etching 방법이 연구 되어왔다. 이 중 plasma를 낮은 kHz의 frequency에서 on/off 하는 pulsed plasma etching technique은 nanoscale semiconductor material의 etch 특성을 효과적으로 향상 시킬 수 있다. 따라서 본 실험에서는 dual-frequency capacitive coupled plasma (DF-CCP)을 사용하여 plasma operation 동안 duty ratio와 pulse frequency와 같은 pulse parameters를 적용하여 plasma의 특성을 각각 제어함으로써 etch selectivity와 uniformity를 향상 시키고자 하였다. Selective SiO2 contact etching을 위해 top electrode에는 60 MHz pulsed RF source power를, bottom electrode에는 2MHz pulse plasma를 인가하여 synchronously pulsed dual-frequency capacitive coupled plasma (DF-CCP)에서의 plasma 특성과 dual pulsed plasma의 sync. pulsing duty ratio의 영향에 따른 etching 특성 등을 연구 진행하였다. 또한 emissive probe를 통해 전자온도, OES를 통한 radical 분석으로 critical Plasma properties를 분석하였고 SEM을 통한 etch 특성분석과 XPS를 통한 표면분석도 함께 진행하였다. 그 결과 60%의 source duty percentage와 50%의 bias duty percentage에서 가장 향상된 etch 특성을 얻을 수 있었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2239-2241
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• 1999

The most important question is how to use which kind of switch in pulsed power generation. There are many kinds of commercial closing switches, which have advantages and disadvantages. The most popular closing switch is the spark gap, but it has a disadvantage in life time, because of erosion of electrodes by arc heating. The Rotary Arc Gap (RAG) switch, especially Walkie-Edgar type RAG switch, was proposed to solve such problems in spark gap. It has a simple and special structure for arc moving caused from self-induced electromagnetic force, because moving arc makes less erosion on the electrodes. In this study we have made an Walkie-Edgar type RAG switch, tested the switching with capacitive energy storage system, and measured rotating arc speed in different peak current.