• 반도체디스플레이기술학회지
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• 제14권2호
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• pp.1-7
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• 2015

In this paper, a new capacitive pressure sensor has been proposed for a displacement measurement. The new sensor is mainly composed of a gap of $5{\mu}m$ and a notch of $1{\mu}m$. And the sensor has the performance as the high sensitivity and capacitance compared with a commercial capacitive sensor. Therefore, the advantages of the new capacitive pressure sensor are good sensitivity in normal range, mechanically robust and large overload protection. The analytical model is induced for confirming the performance of the proposed sensor. In addition, FEM (finite elements method) simulation has been performed to verify the analytical model. Firstly, the displacement characteristics of diaphragm membrane were simulated by the analytical model and FEM in the case of different structure and materials. At last, through this analysis, these simulation results can be predicted the change of the performance when the device parameters are varied. And it is used as a design tool to achieve at a set of performance we desired.

• 대한기계학회논문집A
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• 제33권9호
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• pp.976-981
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• 2009

MEMS capacitive gap sensor is developed for measuring abrasion depth of gun barrel rifling. Measuring abrasion depth of gun barrel rifling is very important because it is related with exactness of firing and life of arms. The method using a gap sensor is not to hurt rifling. And it can measure abrasion depth through minimum shooting, because the developed gap sensor can measure from $1{\mu}m{\sim}12{\mu}m$ using Polydimethylsiloxane(PDMS) material and making a stretchable electrode on PDMS. And it's resolution is 1 ${\mu}m$ using capacitive method and MEMS technology.

• 한국전자파학회논문지
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• 제12권3호
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• pp.451-461
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• 2001

본 논문에서는 주기적인 용량성 부하가 연결된 속도정합 진행파형 전극의 간편한 설계방법을 제시한다. 이 설계 방법에 의하면 속도 정합과 임피던스 정합이 이루어질 수 있는 coplanarstrip(CPS) 전극의 폭과 간격 그리고 용량성 부하의 커패시턴스와 부하간의 간격을 해석적으로 쉽게 결정할 수 있다. GaAs를 기판으로 하는 속도정합 진행파형 전극의 계산결과 100 GHz 이상의 대역폭을 갖는다.

• 전기학회논문지
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• 제56권8호
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• pp.1397-1404
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• 2007

It is important to measure the resistive component separately from the total leakage current at power distribution line. It is because electric disasters such as electric shock and fire are caused mainly by the resistive component of the total leakage current. In this paper, a new theory for measuring the resistive component separately from the total leakage current is suggested, and is embodied to an actual circuit using operational amplifiers, analog switch and R-C low pass filter. Through experiments for various cases containing both the resistive and capacitive leakage currents, the suggested algorithm is confirmed to be able to measure the resistive leakage current within 4.1% of error even when the capacitive leakage current is much bigger than the resistive one. The suggested method is expected to lower the total cost because it can be realized using simple and cheap devices, and implies the measuring time can be possibly reduced because the resistive leakage current is computed exactly from the signals during only a half period of power voltage.

• Journal of Power Electronics
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• 제4권3호
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• pp.188-196
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• 2004

The dielectric barrier discharge is recognized as one of the efficient methods of ultraviolet light generation and ozone production. As well, it is widely utilized for gaseous wastes neutralization and other technological processes in industry. This electrochemical reaction is electrically equivalent to a nonlinear capacitive load that represents some difficulties for designing the power supply. Therefore, a conventional power supply is designed for a drastically simplified model of the load and generally is not optimal. This paper presents a fast simulation approach for the nonlinear capacitive model representation of the dielectric barrier discharge load lamp. The main idea of the proposed method is to use analytical solutions of the differential state equations for the load and find the unknown initial conditions for the steady state by an optimization method. The derived expressions for the analytical solutions are rather complicated, however they greatly reduce the calculation time, which make sense when a deeper analysis is performed. This paper introduces the proposed simulation method and gives some examples of its application such as estimation of the load equivalent parameters and load matching conditions.

• Journal of the Korean Wood Science and Technology
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• 제22권4호
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• pp.37-42
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• 1994

The adsorption of water vapor and equilibrium moisture content(EMC) of the specimens for four softwood species dried by conventional- and high temperature method and equilibrated to 15% of the target EMC condition at 25$^{\circ}C$ were determined by oven drying method and with moisture meters. The amount of adsorption for high temperature dried red pine was significantly higher than that of conventional kiln dried wood, while those of eastern white pine, eastern hemlock and Norway spruce were not significantly different between drying methods. EMCs of these four species determined by oven drying method and with capacitive admittance moisture meter were not significantly different between drying methods. EMC of high temperature dried red pine determined with resistance moisture meter was significantly higher than that of conventional kiln dried wood. But EMCs of other species did not show significant difference between drying methods. EMCs of conventional and high-temperature dried wood determined with electronic moisture meters, especially in the case of the capacitive-admittance moisture meter measurement, were lower than that determined by oven drying method.

• 한국추진공학회:학술대회논문집
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• 한국추진공학회 2009년도 제33회 추계학술대회논문집
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• pp.54-57
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• 2009

차기 한국형 발사체의 추진제 수위 측정시스템은 적용하는 추진제의 극저온 환경 및 유량제어 특성을 고려하여 연속적인 정전용량 값 출력이 가능한 정전용량형이 채택될 예정이다. 현재 정전용량형 신호 감지방식은 2전극과 3전극 방식이 있으나 본 연구에서는 측정 정확도를 고려하여 모든 유체에 적용 가능한 3전극 방식을 채택하였다. 본 논문에는 3전극 방식의 감지원리에 대한 고찰 결과 및 감지부의 형상 변화가 정전용량값에 미치는 영향에 대한 분석 결과, 추진제 탱크 상단의 감지부 설치 위치에 따른 신호감지 영향을 확인하기 위하여 시뮬레이션 프로그램을 활용한 결과가 정리되어 있다. 본 연구에서 얻어진 자료는 실제 탱크 내의 추진제 수위 측정시스템 감지부 설계 및 제작에 활용 가능하다.

• 대한전자공학회논문지SD
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• 제47권4호
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• pp.26-33
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• 2010

본 논문은 SoC 응용에 가능한 멀티 채널 용량형 터치 센서 유닛과 간단한 공통프로세스 유닛, 스위치 어레이를 포함하여 C-T 방법으로 터치 입력을 처리하는 ASIC을 제안하였다. 본 터치 센서 ASIC은 작은 전류와 칩 면적의 장점을 갖는 C-T 변환 방식에 기반 하여 설계하였으며, 최소 센싱 해상도는 한 카운터 당 41 fF이며, 외부 부품 없이 동작하기 위해 내부 발진기 및 LDO 레귤레이터, $I^2C$를 내장하였다. 본 ASIC은 0.18 um CMOS공정으로 구현되어 있으며, 1.8 V와 3.3 V 전원을 사용한다. 전체 소비 전력은 60 uA이고, 면적은 0.26 $mm^2$이다.

• 센서학회지
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• 제21권6호
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• pp.440-445
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• 2012

Contact-type Linear Encoder-like Capacitive Displacement Sensor (CLECDiS) is a novel displacement sensor which has wide measurable range with high resolution. The sensor, however, is very sensitive to relative rotational alignment between stator and mover of the sensor as well as its displacement. In addition to, there can be some disturbances in the relative rotational alignment, so some noises occur in the sensor's output signal by the disturbances. This negative effect of the high sensitivity may become larger as increasing sensitivity. Therefore, this negative effect of the high sensitivity has to be compensated and reduced to achieve nanometer resolution of the sensor. In this study, a new type capacitive linear encoder with a mechanical guide is presented to reduce the relative rotational alignment problem. The presented method is not only to reduce the alignment problem, but also to assemble the sensor to the stage conveniently. The method is based on a new type CLECDiS that has mechanical guide autonomously. In the presented sensor, when the device is fabricated by micro-machining, the guide-rail is also fabricated on the surface of the sensor. By the direct fabrication of the guide-rail with high precision micro-machining, errors of the guide-rail can be reduced significantly. In addition, a manual yaw alignment is not required to obtain large magnitude of the output signal after the assembly of the sensor and the stage. The sensor movement is going to follow the guide-rail automatically. The prototype sensor was fabricated using the presented method, and we verify the feasibility experimentally.

• 한국정밀공학회지
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• 제24권9호
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• pp.60-67
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• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.