• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.2
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• pp.91-95
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• 2012

ZnO thin films were deposited on p-type 4H-SiC substrate by pulsed laser deposition. ZnO nanowires were formed on p-type 4H-SiC substrate by furnace. Ti/Au electrodes were deposited on ZnO thin film/SiC and ZnO nanowire/SiC structures, respectively. Structural and crystallographical properties of the fabricated ZnO thin film/SiC and ZnO nanowire/SiC structures were investigated by field emission scanning electron microscope and X-ray diffraction. In this work, resistance and sensitivity of ZnO thin film/SiC gas sensor and ZnO nanowire/SiC gas sensor were measured at $300^{\circ}C$ with various CO gas concentrations (0%, 90%, 70%, and 50%). Resistance of gas sensor decreases at CO gas atmosphere. Sensitivity of ZnO nanowire/SiC gas sensor is twice as big as sensitivity of ZnO thin film/SiC gas sensor.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.1
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• pp.14-19
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• 1999

Using a single precursor of hexamethyldisilane $(Si_{2}(CH_{3})_{6})$, $\beta$-SiC film was successfully deposited on a Si substrate at $1100^{\circ}C$ by a chemical vapor deposition method. Selectivity of SiC deposition on a Si substrate partially covered with a masking material was investigated by introducing HCl gas into hexamethyldisilane/$H_{2}$ gas system during the deposition. The schedule of the precursor and HCl gas flows was modified so that the selectivity of SiC deposition between a Si substrate and a mask material should be improved. It was confirmed that the selectivity of SiC deposition was improved by introducing HCl gas. Also, the pulse gas flow technique was effective to enhance the selectivity.

• Analytical Science and Technology
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• v.30 no.5
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• pp.287-294
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• 2017

As the demand for natural gas increases with industrial development, the supply of natural gas is expected to become unstable with a shortage of imported natural gas. It is hence necessary to meet this demand by introducing and developing various types of natural gas, such as pipeline natural gas (PNG) and substituted natural gas (SNG), in addition to liquefied natural gas (LNG). The components included in PNG as well as their concentrations must be measured accurately, and a standard gas should be developed to accurately measure hydrocarbons ($C_6-C_{10}$), which are trace components included in natural gas. The components in the primary standard gas mixtures (PSMs) developed in the present study were hexane, heptane, octane, nonane, and decane with concentrations of $10-30{\mu}mol/mol$ with methane as the balance gas. Standard hydrocarbon ($C_6-C_{10}$) gas mixtures were prepared in aluminum cylinders by a gravimetric method with traceability following ISO 6142 with raw material gases, for which the purity of each component was analyzed completely. The prepared standard gas mixtures were analyzed by to evaluate the preparation consistency between the standard gas mixtures, the adsorbability of the cylinders, the variation of the stability, and the uncertainty. The results showed that aluminum cylinders have little adsorptive loss on their internal surfaces with excellent long-term stability. The developed standard gas mixture, containing hexane, heptane, octane, nonane, and decane with concentrations of $10-30{\mu}mol/mol$, showed an uncertainty in a range of 0.79 % - 1.63 %.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.4
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• pp.375-380
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• 2005

CF₄ molecular gas is used in most of semiconductor manufacture processing and SF/sub 6/ molecular gas is widely used in industrial of insulation field. but both of gases have defect in global warming. C₃F/sub 8/ gas has large attachment cross-section more than these gases, moreover GWP, life-time and price of C₃F/sub 8/ gas is lower than them, therefor it is important to calculate transport coefficients of C₃F/sub 8/ gas like electron drift velocity, ionization coefficient, attachment coefficient, effective ionization coefficient and critical E/N. The aim of this study is to get these transport coefficients for imformation of the insulation strength and efficiency of etching process. In this paper, we calculated the electron drift velocity (W) in pure C₃F/sub 8/ molecular gas over the range of E/N=0.1∼250 Td at the temperature was 300 K and gas pressure was 1 Torr by the Boltzmann equation method. The results of this paper can be important data to present characteristic of gas for plasma etching and insulation, specially critical E/N is a data to evaluate insulation strength of a gas.

• Journal of the Korean Institute of Gas
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• v.19 no.6
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• pp.99-104
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• 2015

Today the most efficient way to transport the natural gas is carried via the liquid. In order to liquefy the natural gas to be cooled to $-160^{\circ}C$ or less. Cooling method has a number of different ways. In this paper, we studied control method for the representative liquefaction process, C3MR. Natural gas liquefaction control is a tool that can maintain the quality of natural gas is a means to ensure stable operation. Analyzing the C3MR process, and select the control parameters for the control valve. We find control structure for mixed refrigerant cycle through the step response. A control result obtained through the dynamic simulation arbitrarily given a disturbance was found to maintain a steady-state results.

• Journal of the Korean Ceramic Society
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• v.44 no.10
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• pp.580-584
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• 2007

The ZrC layer instead of SiC layer is a critical and essential layer in TRISO coated fuel particles since it is a protective layer against diffusion of fission products and provides mechanical strength for the fuel particle. In this study, we carried out computational simulation before actual experiment. With these simulation results, Zirconium carbide (ZrC) films were chemically vapor deposited on $ZrO_2$ substrate using zirconium tetrachloride $(ZrCl_4),\;CH_4$ as a source and $H_2$ dilution gas, respectively. The change of input gas ratio was correlated with growth rate and morphology of deposited ZrC films. The growth rate of ZrC films increased as the input gas ratio decreased. The microstructure of ZrC films was changed with input gas ratio; small granular type grain structure was exhibited at the low input gas ratio. Angular type structure of increased grain size was observed at the high input gas ratio.

• Applied Chemistry for Engineering
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• v.32 no.1
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• pp.42-48
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• 2021

In this study, a sensor for detection of nitric oxide (NO) gas was developed using petroleum pitch-based activated carbon which was synthesized from pyrolysis fuel oil (PFO). Polyethylene terephthalate (PET) was added to increase molecular weight by stimulating a polymerization of components in PFO during the pitch synthesis process. The increase in the molecular weight of pitch contributed to the improvement of textural properties of activated carbon, such as the specific surface area and micropore volume. It also enhanced the sensitivity of NO gas sensor based on the activated carbon. In addition, the effect of PET addition during the pitch synthesis on the surface oxygen content and conductivity of activated carbon was investigated. Finally, the correlation of the sensitivity with physical properties of activated carbon was analyzed.

• Proceedings of the Korean Society for Agricultural Machinery Conference
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• 2000.11c
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• pp.662-669
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• 2000

Based on the viscous flow characteristics of gas through capillary tube, a simple and low cost system was developed for controlling gas concentration for use in C.A experiments. The gas flow rate through capillary tube had a linear relationship with pressure, $(length)^{-1}$ and $(radius)^4$ of capillary tube, which agreed well with Hagen-Poiseuille's law. The developed system could control the gas concentration in storage chamber within ${\pm}0.3%$ deviation compared to the preset concentration. The required time for producing target gas concentration in storage chamber was exactly predicted by the model used in this study, and it required much longer time than the calculated time which divided the volume of chamber by flow rate. Therefore, for producing target gas concentration as quickly as possible, it needs to supply higher flow rate of gas during the initial stage of experiment when gas concentration in storage chamber has not reached at target value. It appeared that the developed system was very useful for C.A experiments. Because one could decide a desired flow rate by the prediction model, control flow rate freely and easily by changing pressure in the pressure-regulating chamber and the accuracy was high.

• Journal of the Korean Institute of Gas
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• v.17 no.1
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• pp.67-72
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• 2013

The LNG liquefaction plant which have a higher value-added business in the LNG value chain takes about 35% of total cost. Liquefaction process is core technology of liquefaction plant. Almost all of cost which was consumed from the liquefaction plant, using for operation energy of liquefaction process. The cost can be reduced by increasing efficiency of liquefaction cycle. C3MR(propane pre-cooled, mixed refrigerant cycle) which liquefies NG using propane and MR cycle has the high efficiency, so C3MR is mostly used liquefaction process in LNG industry. In this study, process simulation and analysis were performed for C3MR process. C3MR process variables were found through this simulation and analysis, and then the process optimization was performed. It is considered that the results of process analysis, process variables and process optimization study can be utilized to develope new liquefaction process.

• Journal of the Korean Society for Heat Treatment
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• v.13 no.4
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• pp.224-230
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• 2000

Garbon steel(SM35C) was gas nitrocarburized at $580^{\circ}C$ in $55%N_2-40%NH_3-5%CO_2$ mixed gas atmosphere, and then the steel was induction hardened at $850^{\circ}C$. The microstructure of gas nitrocarburized surface layer was observed by optical microscope and SEM. The phase analysis was carried out by X-ray diffraction method. The mechanical properties of gas nitrocarburized SM35C steel was evaluated by hardness, wear and fatigue test. The thickness of compound and diffusion layer were increased with increasing the gas nitrocarburizing time and the densest compound layer was obtained at 3 hours gas nitrocarburizing time. In case of 15sec induction hardening after gas nitrocarburizing, the surface hardness was decreased from 800Hv to 630Hv owing to the decomposition of compound layer, but wear resistance was increased because of increased hardness of diffusion layer. The fatigue strength of induction hardened steel after gas nitrocarburizing, $58kgf/mm^2$, was higher than $41.5kg/mm^2$ of gas nitrocarburized steel and $45kg/mm^2$ of induction hardened steel, respectively.