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http://dx.doi.org/10.4191/KCERS.2007.44.1.580

Properties of Chemical Vapor Deposited ZrC coating layer for TRISO Coated Fuel Particle  

Kim, Jun-Gyu (Department of Advanced Material Science and Engineering, Yonsei University)
Kum, E-Sul (Department of Advanced Material Science and Engineering, Yonsei University)
Choi, Doo-Jin (Department of Advanced Material Science and Engineering, Yonsei University)
Lee, Young-Woo (Nuclear Materials Technology and Development, Korea Atomic Energy Research Institute)
Park, Ji-Yeon (Nuclear Materials Technology and Development, Korea Atomic Energy Research Institute)
Publication Information
Journal of the Korean Ceramic Society / v.44, no.10, 2007 , pp. 580-584 More about this Journal
Abstract
The ZrC layer instead of SiC layer is a critical and essential layer in TRISO coated fuel particles since it is a protective layer against diffusion of fission products and provides mechanical strength for the fuel particle. In this study, we carried out computational simulation before actual experiment. With these simulation results, Zirconium carbide (ZrC) films were chemically vapor deposited on $ZrO_2$ substrate using zirconium tetrachloride $(ZrCl_4),\;CH_4$ as a source and $H_2$ dilution gas, respectively. The change of input gas ratio was correlated with growth rate and morphology of deposited ZrC films. The growth rate of ZrC films increased as the input gas ratio decreased. The microstructure of ZrC films was changed with input gas ratio; small granular type grain structure was exhibited at the low input gas ratio. Angular type structure of increased grain size was observed at the high input gas ratio.
Keywords
TRISO; ZrC; CVD; Input gas ratio; Morphology;
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