• 한국산학기술학회논문지
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• 제6권3호
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• pp.270-272
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• 2005

코발트 실리사이드는 낮은 전기 저항성 때문에 고효율 소자를 제조하는데 적합한 물질이다. 이는 전자소재가 소형화되면서 접촉저항과 혼합을 줄이기 위해 더욱 필요하게 되었다. 본 연구에서는 티타늄의 표면산화에 미치는 영향과, RTO 조건에서 온도에 따른 코발트 실리사이드 박막의 산화정도를 측정했다. 기질로서 p-형 실리콘웨이퍼를 사용하였고, 고속 열 가공을 통하여 박막을 가공하였다. 티타늄 층을 입혔을 때 산화충의 두께는 $500{\AA}$정도 성장하였다. 고속 열산화의 온도변화에 따라 산화막은 $550^{\circ}C\~700^{\circ}C$까지는 성장을 보였으나 $700^{\circ}C$이상에는 산화막 성장이 포화상태를 보였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 추계학술대회 논문집
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• pp.521-524
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• 2001

In this letter, we report on the investigation of Ti, Pt/Si/Ti Ohmic contacts to p-type 4H-SiC. The contacts were formed by a 2-step vacuum annealing at 500$^{\circ}C$ for 1h, 950$^{\circ}C$ for 10 min respectively. The contact resistances were measured using the transmission line model method, which resulted in specific contact resistivities in the 3.5x10$\^$-3/ and 6.2x10$\^$-4/ ohm/$\textrm{cm}^2$, and the physical properties of the contacts were examined using x-ray diffraction, microscopy, AES(auger electron spectroscopy). AES analysis has shown that, at this anneal temperature, there was a intermixing of the Ti and Si, migration of into SiC. Overlayer of Pt had the effect of decreasing the specific contact resistivity and improving the surface morphology of the annealed contact.

• 한국전기전자재료학회논문지
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• 제22권3호
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• pp.205-209
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• 2009

In this study, in order to develop the composition ceramics for lead-free ultrasonic motor, (1-x-0.09)$NaNbO_{3-x}BaTiO_3-0,09LiNbO_3$ ceramics were fabricated using a conventional mixed oxide process and their piezoelectric and dielectric characteristics were investigated according to the $BaTiO_3$ substitution. All the specimens showed orthorhombic phase structure without secondary phase, $BaTiO_3$ substitution enhanced density, dielectric constant(${\epsilon}_r$) and electromechanical coupling factor($k_p$), However, mechanical quality factor was deteriorated. Curie temperature of specimens was observed as about $380^{\circ}C$. At the $BaTiO_3$ substitution of 4 mol%, density, electromechanical coupling factor($k_p$), dielectric constant(${\epsilon}_r$) and piezoelectric constant($d_{33}$) of specimen showed the optimum value of $4.493g/cm^3$, 0.236, 175, 70 pC/N, respectively.

• 한국세라믹학회지
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• 제35권6호
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• pp.594-602
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• 1998

유기용메인 이소옥탄(isooctane)에 계면활성제를 이용하여 물을 역마이셀 형태로 생성시킨 후, 이소프로필 알코올(isopropyle alcohol)에 묽힌 티타늄알코옥사이드(tetraisopropyl orthotitanate)를 가하여 가수분해 반응를 거쳐 TiO(OH)2 분말을 제조하였다. 역마이셀에 의한 TiO(OH)2 분말 제조에 미치는 공정변수들인 계면활성제의 종류, 농도, 보조계면활성제, 가수분해 반응온도, pH등이 생성된 입자의 크기, 모양, 입도분포에 미치는 영향을 규명하였다. 비이온계활성제인 Span 80을 사용하였을 경우에는 Span 80의 농도변화, 가수분해 반응온도 변화, pH변화에 무관하게 입도분포가 uninodal형태였으나, 음이온계면활성제인 Aerosol-OT(AOT)를 사용하였을 경우, binodal형태를 나타내었다. 에타올(ethanol)을 cosurfactant로 첨가한 계(AOT, 1.0CMC, isooctane+ethanol, pH2.5, 30$^{\circ}C$)로 부터 생성된 입자는 평균입경이 0.12${\mu}{\textrm}{m}$ 으로서 미세할 뿐아니라 입도분포도 매우 좁은 것을 알 수 있다. 따라서, cosurfactant의 유무가 생성 입자의 입도분포에 큰 영향을 미치는 것을 알 수 있다. FT-IR 분석으로 T1-O 결합과 Ti-OH 결합에 의한 흡수피크를 확인하였고, TGA-DTA 분석결과에 의하면 41$0^{\circ}C$ 부근의 발열피크로 부터 비정질 구조에서 anatase 구조로 결정화가 시작됨을 알 수 있었으며, 온도 상승과 더불어 결정이 성장하여 약 45$0^{\circ}C$ 정도에서 비정질상이 anatase상의 결정구조로 완전히 전이됨을 확인하였다.

• 소성∙가공
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• 제20권2호
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• pp.140-145
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• 2011

The aim of the present study is to derive optimized post heat treatment temperatures to get a proper formability for Ti/STS409L/Ti clad materials. These clad materials were fabricated by cold rolling followed by a post heat treatment process for 10 minutes at temperatures ranging from $500^{\circ}C$ to $850^{\circ}C$. The microstructure of the interface was observed using a Scanning Electron Microscope(SEM) and an Energy Dispersive X-ray Analyser(EDX) in order to investigate the effects of post heat treatment on the bonding properties of the Ti/STS409L/Ti clad materials. Diffusion bonding was observed at the interfaces with a diffusion layer thickness increasing with the post heat treatment temperature. The diffusion layer was composed of a type of(${\varepsilon}+{\zeta}$) intermetallic compound containing additional elements, namely, Fe, Ti and Ni. The micro Knoop hardness of the Ti/STS409L interfaces was found to increase with heat treatment up to $800^{\circ}C$ and then decrease for temperatures rising up to $850^{\circ}C$. The tensile strength was shown to decrease for heat treatment temperature increasing to $750^{\circ}C$ and then increase rapidly for temperature rising up to $850^{\circ}C$. A post heat treatment temperature range of $700{\sim}750^{\circ}C$ was found to optimize the formability of Ti/STS409L/Ti clad materials.

• 한국세라믹학회지
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• 제35권1호
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• pp.88-96
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• 1998

The structural and electrical properties of titanium dioxide(TiO2) thin films deposited on p-type (100) si and 4$^{\circ}$off(100) Si substartes by metalorganic chemical vapor deposition (MOCVD) have been studied with post rapid thermal annealing. TiO2 thin films of anatase phase were grown at 300-500$^{\circ}C$ using titanium post rapid thermal annealing at a temperature of 800$^{\circ}C$ for 30sec. rutile phase was observed in the condition of the deposition temperature over 350$^{\circ}C$ in the ambient air atmosphere and at 500$^{\circ}C$ in cacuu,. SEM and AFM study show-ed surface roughness were increased slightly from 40${\AA}$to 55${\AA}$ after annealing due to grain growth and phase transformation. From capacitane-voltage measurement of Al/TiO2./p-Si structure after annealing we obtained ideal capacitance-voltage characteristics of MOS structure with dielectric constant of 16-22 in case of (100) Si and about 30- in case of 4$^{\circ}$off(100) Si but showed the higher leakage current.

• 한국세라믹학회지
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• 제21권3호
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• pp.278-282
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• 1984

Barium titanate powder was made by firing the complex hydroxide which had been synthesized with chemical wet process by the medium of $H_2O_2$. This experiment was done as following A mixed solution of $BaCl_2$, $TiCl_4$ and $H_2O_2$ with 1:1:10 mol ratio was prepared. Ammonium hydroxide was added into the mixed solution. In the range of pH 8-10 $BaTiO_3$ complex hydroxide was obtained and treated at room temperature 11$0^{\circ}C$, 20$0^{\circ}C$, 40$0^{\circ}C$ and $600^{\circ}C$. The results obtaiined from this experiment were as follows. At room temperature $BaTiO_3$ complex hydroxide was amorphous. Above 10$0^{\circ}C$ crystalline $BaTiO_3$ was obtained and particle size of $BaTiO_3$ was increased with elevated temperature. So the particle size of BaTiO3 could be controlled by the firing temperature. After treating $BaTiO_3$ complex hydroxide at 10$0^{\circ}C$ the average particle size of $BaTiO_3$ was 0.22$\mu\textrm{m}$.

• 한국환경과학회지
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• 제19권5호
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• pp.577-584
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• 2010

The generation of $TiO_2$ nanoparticles by a thermal decomposition of titanium tetraisopropoxide (TTIP) was carried out experimentally using a tubular electric furnace at various synthesis temperatures (700, 900, 1100 and $1300^{\circ}C$) and precursor heating temperatures (80, 95 and $110^{\circ}C$). Effects of degree of crystallinity, surface area and anatase mass fraction of those $TiO_2$ nanoparticles on photocatalytic properties such as decomposition of methylene blue was investigated. Results show that the primary particle diameter obtained from thermal decomposition of TTIP was considerably smaller than the commercial photocatalyst (Degussa, P25). Also, those specific surface areas were more than 134.4 $m^2$/g. Resultant $TiO_2$ nanoparticles showed improved photocatalytic activity compared with Deggusa P25. This is contributed to the higher degree of crystallinity, surface area and anatase mass fraction of $TiO_2$ nanoparticles compared with P25.

• Transactions on Electrical and Electronic Materials
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• 제15권4호
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• pp.226-229
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• 2014

In this study, lead-free $(Ba_{0.85}Ca_{0.15})(Ti_{1-x}Zr_x)O_3$ ceramics and a bimorph-type piezoelectric actuator were fabricated using the normal oxide-mixed sintering method, and their dielectric properties, microstructure, and displacement properties were investigated. From the results of X-ray diffraction, the pattern of the specimen has a pure perovskite structure. In addition, no secondary impurity phases were found. The excellent piezoelectric coefficient of $d_{33}=454pC/N$, the electromechanical coupling factor $k_p=0.51$, the dielectric constant ${\varepsilon}_r=3,657$, the mechanical quality factor $Q_m=239$, and $T_c$(Tetragonal-Cubic) =$90^{\circ}C$ were shown at x= 0.085. ${\Delta}k_p/k_p20^{\circ}C$ and ${\Delta}f_r/f_r20^{\circ}C$ showed the maximum value of -0.255 and 0.111 at $-20^{\circ}C$ and $80^{\circ}C$, respectively. The maximum total-displacement was $60{\mu}m$ under the input voltage of 50 V. As a result, it is considered that lead-free $(Ba_{0.85}Ca_{0.15})(Ti_{1-x}Zr_x)O_3$ ceramics is a promising candidate for piezoelectric actuator application for x= 0.085.

• 한국결정학회지
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• 제10권1호
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• pp.56-65
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• 1999

수열법을 이용하여 미세한 BaTiO3 분말을 합성하였다. Ti원으로 두 종류의 TiO2 gel을 사용하였으며 그 크기와 모양을 BaTiO3 합성에 주는 영향을 고찰하였다. 구형의 단분산 TiO2 gel을 사용하여 Ba(NO3)2 수용액에서 수열 합성한 BaTiO3 분말은 입자크기도 균일하였으며 응집이 일어나지 않아않았다. 비교적 낮은 pH에서 구형 TiO2 gel을 사용하여 합성한 BaTiO3 분말은 구형을 그대로 유지하였지만 높은 pH에서 합성한 BaTiO3 분말은 그 구형이 분해되었다. KOH양이 많아지고, 합성시간이 길어짐에 따라 합성된 BaTiO3 분말의 크기는 커졌으며 그 c/a 값도 증가하였다.