• Title/Summary/Keyword: borosilicate glass

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Boron Detection Technique in Silicon Thin Film Using Dynamic Time of Flight Secondary Ion Mass Spectrometry

  • Hossion, M. Abul;Arora, Brij M.
    • Mass Spectrometry Letters
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    • v.12 no.1
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    • pp.26-30
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    • 2021
  • The impurity concentration is a crucial parameter for semiconductor thin films. Evaluating the impurity distribution in silicon thin film is another challenge. In this study, we have investigated the doping concentration of boron in silicon thin film using time of flight secondary ion mass spectrometry in dynamic mode of operation. Boron doped silicon film was grown on i) p-type silicon wafer and ii) borosilicate glass using hot wire chemical vapor deposition technique for possible applications in optoelectronic devices. Using well-tuned SIMS measurement recipe, we have detected the boron counts 101~104 along with the silicon matrix element. The secondary ion beam sputtering area, sputtering duration and mass analyser analysing duration were used as key variables for the tuning of the recipe. The quantitative analysis of counts to concentration conversion was done following standard relative sensitivity factor. The concentration of boron in silicon was determined 1017~1021 atoms/㎤. The technique will be useful for evaluating distributions of various dopants (arsenic, phosphorous, bismuth etc.) in silicon thin film efficiently.

Stabilization of Heavy Metals in Glasses Containing EAF Dust (전기로 분진이 첨가된 유리의 중금속 안정화 특성)

  • Eun, Hee-Tai;Kang, Seung-Gu;Kim, Yoo-Taek;Lee, Gi-Kang;Kim, Jung-Hwan
    • Journal of the Korean Ceramic Society
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    • v.41 no.11
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    • pp.851-857
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    • 2004
  • The stabilizing characteristics of heavy metals in the silicate glass (SD), borosilicate glass (BD), and leadsilicate glass (PD) containing Electric Arc furnace (EAF) dust were studied by the Toxic Characterization Leaching Procedure (TCLP) test. Also, the dependence of the amount of EAF dust upon structural changes of SD, BD, and PD glasses and the TCLP results were investigated by the XRD and FT-IR spectroscopy. In the XRD results, all of SD, BD, and PD specimens containing dust up to 30 wt% were amorphous without crystallizing. In the TCLP test, the concentration of heavy metals leached from the glasses increased with the amount of EAF dust added. The SD specimen series showed the lowest heavy metal leaching and the heavy metal leachate of the PD specimens were lower than those of the BD specimens. But, the Pb leaching from the PD specimens was the highest in the PD glass composition due to the high Pb content. The value of oxygen/network former ratio could be used to compare the chemical durability within the same glass series, but not proper to do between the different glass series. Adding the EAF dust to the SD mother glass, decreased the Si-O-Si symmetry and increased the non-bridging oxygen, which weakened the structure and decreased the chemical durability of glasses. In the BD series glasses, the addition of EAF dust caused the structural changes from tetra-borate group to di-borate group and the formation of the 2-dimensional layer structure of pyre- and ortho- borate, which decreased the chemical durability of glasses. It is concluded that SD series glass among the 3 kinds of glasses is the most effective to stabilize the heavy metals of EAF dust.

Effect of Additives on the Refractive Index of B2O3-SiO2-Al2O3 Glasses for Photolithographic Process in Electronic Micro Devices

  • Won, Ju-Yeon;Hwang, Seong-Jin;Lee, Jung-Ki;Kim, Hyung-Sun
    • Korean Journal of Materials Research
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    • v.20 no.7
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    • pp.370-373
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    • 2010
  • In fabricating plasma display panels, the photolithographic process is used to form patterns of barrier ribs with high accuracy and high aspect ratio. It is important in the photolithographic process to control the refractive index of the photosensitive paste. The composition of this paste for photolithography is based on the $B_2O_3-SiO_2-Al_2O_3$ glass system, including additives of alkali oxides and rare earth oxides. In this work, we investigated the density, structure and refractive index of glasses based on the $B_2O_3-SiO_2-Al_2O_3$ system with the addition of $Li_2O$, $K_2O$, $Na_2O$, CaO, SrO, and MgO. The refractive index of the glasses containing K2O, Na2O and CaO was similar to that of the [BO3] fraction while that of the SrO, MgO and Li2O containing glasses were not correlated with the coordination fraction. The coordination number of the boron atoms was measured by MAS NMR. The refractive index increased with a decrease of molar volume due to the increase in the number of non-bridging oxygen atoms and the polarizability. The lowest refractive index (1.485) in this study was that of the $B_2O_3-SiO_2-Al_2O_3-K_2O$ glass system due to the larger ionic radius of $K^+$. Based on our results, it has been determined that the refractive index of the $B_2O_3-SiO_2-Al_2O_3$ system should be controlled by the addition of alkali oxides and alkali earth oxides for proper formation of the photosensitive paste.

Fabrication of Ti-doped BSG Waveguide Films by Flame Hydrolysis Deposition (불꽃가수분해 증착에 의한 Ti-doped BSG 도파박막의 제작)

  • 전영윤;이용태;전은숙;정석종;이형종
    • Korean Journal of Optics and Photonics
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    • v.5 no.4
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    • pp.499-504
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    • 1994
  • Ti-doped BSG (borosilicate glass) soot films on the silicone substrate have been deposited in the mixture of $SiCl_{4}$, TMB, $TiCL_{4}$ by flame hydrolysis deposition technique. The soot films are melted to form integrated fine glass films. We can fabricate thick films of serveral $10{\mu}m$ with deposition rate,more than $0.5{\mu}m$/min. Refractive index difference of BSG films are increased to more than 0.3% as function of the amount of Ti dopant. As a result of the process an optical waveguide which is simmilar with dimmension and refractive difference of optical fiber is produced. $BCl_{3}$ is widely used for B dopant, but we abtained the good results by the use of TMB in place of $BCl_{3}$. The melting point of silica soot glass is reduced to $1200^{\circ}C$ increasing B dopant. From FTIR analysis $B_2O_3$ content up to about lOmol% in BSG films. films.

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Effect of Milling Condition on Low-temperature Sinterability and Electrical Properties of BaTiO3 Ceramics (Milling 조건에 따른 BaTiO3의 저온 소결성 및 전기적 특성 변화)

  • Hong, Min-Hee;Sohn, Sung-Bum;Kim, Young-Tae;Hur, Kang-Heon
    • Journal of the Korean Ceramic Society
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    • v.46 no.2
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    • pp.200-210
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    • 2009
  • It is necessary to minimize the mismatch of sintering shrinkage between dielectric ceramic and Ni inner electrode layers for the purpose of developing the ultra high-capacity multi layered ceramic condenser(MLCC). Thus, low temperature sintering of dielectric $BaTiO_3$ ceramic should be precedently investigated. In this work, the influence of the milling condition on sintering behavior and electrical properties of $BaTiO_3$ ceramics was investigated in the $BaTiO_3$(BT)-Mg-Dy-Mn-Ba system with borosilicate glass as a sintering agent. As milling time increased, specific surface area(SSA) of the powder increased linearly, while both sinterability and dielectric property were found to be drastically decreased with an increasing SSA. It was also revealed that the sinterability of the excessively milled $BaTiO_3$ ceramics could be recovered by increasing Ba content, rather than increasing glass addition. These results suggest that the sintering behavior of $BaTiO_3$ ceramics under the high SSA was more strongly dependent on the transient liquid phase caused by Ba addition, than the liquid phase from additional glass.

Role of eptC in Biofilm Formation by Campylobacter jejuni NCTC11168 on Polystyrene and Glass Surfaces

  • Lim, Eun Seob;Kim, Joo-Sung
    • Journal of Microbiology and Biotechnology
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    • v.27 no.9
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    • pp.1609-1616
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    • 2017
  • The complex roles of cell surface modification in the biofilm formation of Campylobacter jejuni, a major cause of worldwide foodborne diarrheal disease, are poorly understood. In a screen of mutants from random transposon mutagenesis, an insertional mutation in the eptC gene (cj0256) resulted in a significant decrease in C. jejuni NCTC11168 biofilm formation (<20%) on major food contact surfaces, such as polystyrene and borosilicate glass, when compared with wild-type cells (p < 0.05). In C. jejuni strain 81-176, the protein encoded by eptC modified cell surface structures, such as lipid A, the inner core of lipooligosaccharide, and the flagellar rod protein (FlgG), by attaching phosphoethanolamine. To assess the role of eptC in C. jejuni NCTC11168, adherence and motility tests were performed. In adhesion assays with glass surfaces, the eptC mutant exhibited a $0.77log\;CFU/cm^2$ decrease in adherence compared with wild-type cells during the initial 2 h of the assay (p < 0.05). These results support the hypothesis that the modification of cell surface structures by eptC affects the initial adherence in biofilm formation of C. jejuni NCTC11168. In motility tests, the eptC mutant demonstrated reduced motility when compared with wild-type cells, but wild-type cells with the transposon inserted in a gene irrelevant to biofilm formation (cj1111c) also exhibited decreased motility to a similar extent as the eptC mutant. This suggests that although eptC affects motility, it does not significantly affect biofilm formation. This study demonstrates that eptC is essential for initial adherence, and plays a significant role in the biofilm formation of C. jejuni NCTC11168.

Determination of Phorate (0,0-diethyl S-ethylthiomethyl phosphorithioate) and its Metabolites in Soil and Vegetables by GLC (토양(土壤)과 채소중(菜蔬中) Phorate(0,0-diethyl S-ethylthiomethyl phosphorithioate)와 그 대사산물(代謝産物)들의 GLC분석(分析))

  • Hong, Jong-Uck;Lee, Hae-Keun
    • Applied Biological Chemistry
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    • v.26 no.2
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    • pp.104-109
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    • 1983
  • Gas chromatographic method for the analysis of phorate(0,0-diethyl S-ethyl-thiomethyl phosphorithioate) and its metabolites in soil and vegetables was studied by using a mixed phase column(10% DC-200+8% Reoplex-400+2% QF-1 on Gas Chrom Q, $1.8{\times}2mm$ i.d, borosilicate glass column). This column can separate completely phorate and its four metabolites except phoratoxon sulfoxide. Retention time of standard mixture ranged 1.8 to 16.1 minutes at column temperature programming from 130 to $200^{\circ}C$ at $5^{\circ}C/min$ and detector sensitivity was also very high(0.05 to 1.05ng). Recoveries from soil and vegetables untreated but fortified with phorate and its three major metabolites at 0.05 and 0.5ppm levels were above 90% for phorate, phorate sulfoxide and phorate sulfone while recovery of phoratoxon metabolite was about 84%.

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A Study on Wasteform Properties of Spent Salt Treated with Zeolite and SAP (염화염을 제올라이트와 SAP로 처리한 고화체의 특성연구)

  • Kim, Hwan-Young;Park, Hwan-Seo;Kang, Kweon-Ho;Ahn, Byung-Gil;Kim, In-Tae
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.8 no.2
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    • pp.99-105
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    • 2010
  • This paper investigated the characteristics of wasteform containing a spent zeolite used as a separating agent of FPs for recycling LiCl waste which would be generated from pyrochemical process of spent PWR fuel. In this study, a conventional borosilicate and Ca-rich glass were used as a consolidating agent for spent zeolite and it's mixing ratio was changed in the range, $25{\sim}35wt%$. The leach rates of Cs and Sr had about $0.1{\sim}0.01g/m^2day$ and $0.001{\sim}0.0001g/m^2day$, respectively. The leach resistance of Cs increased with amount of SAP and it showed about 10 times higher in the Ca-rich glass wasteform than in the conventional borosilciate glass wasteform. The compressive strength of wasteform was affected with the amount of glass. Thermal expansion rate of containing 30wt% glass has relatively lower than others. Also, the melting temperature was little changed in given mixing ratio of glass.

Low-temperature Sintering and Dielectric Properties of $CaZrO_3-CaTiO_3$ Ceramics for Middle- Permittivity LTCC Substrate (중유전율 LTCC 기판용 $CaZrO_3-CaTiO_3$계 세라믹스의 저온소결 및 유전특성)

  • Park Jeong-Hyun;Choi Young-Jin;Ko Won-Jun;Park Jae-Hwan;Park Jae-Gwan
    • Journal of the Microelectronics and Packaging Society
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    • v.11 no.3 s.32
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    • pp.17-22
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    • 2004
  • The microwave dielectric properties of $CaZrO_3$ ceramics with addition of $CaTiO_3$ were studied. The effect of glass addition on the low-temperature sintering and microwave dielectric properties of $CaZrO_3-CaTiO_3$ ceramics were also evaluated to develop the materials for functional substrates of low-temperature co-fired ceramics. When $10-20 wt\%$ of lithium borosilicate glass was added, the sintering temperature of the $CaZrO_3-CaTiO_3$ ceramics decreased from $1450^{\circ}C$ to below $900^{\circ}C$. As the $T_f$ of glass frits and $CaZrO_3$ are slightly negative and that of $CaTiO_3$ is significantly positive, zero $T_f$ could be realized by mixing an appropriate amount of $CaTiO_3$ with $CaZrO_3$. The $CaZrO_3-CaTiO_3$ ceramics sintered at $875^{\circ}C$ with $15wt\%$ glass frits showed the relative density of $98\%$, permittivity of 23, quality factor of 2500 GHz, and temperature coefficient of resonant frequency of $ -3 ppm/^{\circ}C$.

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Feasibility Study on Vitrification for Rare Earth Wastes of PyroGreen Process (파이로그린공정 희토류폐기물 유리화 타당성 연구)

  • Kim, Cheon-Woo;Lee, Byeong Gwan
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.11 no.1
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    • pp.1-9
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    • 2013
  • The rare earth oxide wastes consisting of major 8 nuclides Y, La, Ce, Pr, Nd, Sm, Eu and Gd, are generated during the salt waste treatment of PyroGreen process. The final form of the rare earth is generated as the oxide state. In this study, six candidate glasses were developed to evaluate the feasibility for vitrifying the rare earth oxide wastes within the borosilicate glass system. The solubilities of the mixture of the rare earth oxide waste showed less than 25wt% at $1,200^{\circ}C$, less than 30wt% at $1,300^{\circ}C$, respectively. It means that solubility is increased with the temperature increment. The liquidus temperature of the homogeneous glass with 20wt% waste loading was determined as less than $950^{\circ}C$. In more than solubility of rare earth oxides glass, formation of rare earth-oxide-silicate crystal in glass-ceramic occurred as the secondary phase. As their viscosity at melting temperature $1,200{\sim}1,300^{\circ}C$ was less than 100 poise, electrical conductivity was higher than 1 S/cm, 20~25wt% waste loading glasses with good surface homogeneity are judged to have good operability in cold crucible induction melter. Other physicochemical properties of the developed glasses are going to be experimented in the future.