• Korean Journal of Metals and Materials
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• v.49 no.10
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• pp.797-804
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• 2011

In this study, the mechanisms of the three steps (the polymer deposition step, the polymer etching step and the Si etching step) that constitute the Bosch process were investigated. The effects of radicals and ions on each step were quantitatively analyzed by comparing the simulated aspect ratio dependency of the deposition or etch rate with the experimental results. In the polymer deposition step, fluorocarbon polymer is deposited by chemical reactions of $CF_x$ radicals, of which the reaction probability is 0.13. Although the polymer etching step and the Si etching step were conducted under the same conditions, the etching mechanisms of polymer and Si were found to be quite different. In the polymer etching step, both chemical etching and physical sputter-etching contribute to the polymer etching. Whereas, in the Si etching step, Si is chemically etched by F radicals, of which the reactivity is greatly increased by the bombardment of energetic ions.

• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.334-341
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• 2011

The mechanism behind super-filling of high-aspect-ratio features with Cu by catalyst-enhanced chemical vapor deposition (CECVD) coupled with plasma treatment is described and the metrology required to predict the filling feasibility is identified and quantified. The reaction probability of a Cu precursor was determined as a function of substrate temperature. Iodine adatoms are deactivated by the bombardment of energetic particles and also by the overdeposition of sputtered Cu atoms during the plasma treatment. The degree of deactivation of adsorbed iodine was experimentally quantified. The quantified factors, reaction probability and degree of deactivation of iodine were introduced to the simulation for the prediction of the trench filling aspect by CECVD coupled with plasma treatment. Simulated results show excellent agreement with the experimental filling aspects.

• Corrosion Science and Technology
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• v.20 no.3
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• pp.112-117
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• 2021

Inductively coupled plasma magnetron sputtering (ICPMS) has the advantage of being able to dramatically improve coating properties by increasing the plasma ionization rate and the ion bombardment effect during deposition. Thus, this paper presents the comparative results of CrN films deposited by direct current magnetron sputtering (dcMS) and ICPMS systems. The structure, microstructure, and mechanical and corrosive properties of the CrN coatings were investigated by X-ray diffractometry, scanning electron microscopy, nanoindentation, and corrosion-resistance measurements. The as-deposited CrN films by ICPMS grew preferentially on a 200 plane compared to dcMS on a 111 plane. As a result, the films deposited by ICPMS had a very compact microstructure with high hardness. The nanoindentation hardness reached 19.8 GPa, and 13.5 GPa by dcMS. The corrosion current density of CrN film prepared by ICPMS was about 9.8 × 10^-6 mA/cm², which was 1/470 of 4.6 × 10^-3 mA/cm², the corrosion current density of CrN film prepared by dcMS.

• Journal of The Korean Astronomical Society
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• v.55 no.3
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• pp.75-86
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• 2022

The lunar surface progressively darkens and reddens as a result of sputtering from solar wind particles and bombardment of micrometeoroids. The extent of exposure to these space weathering agents is frequently calculated as the location in a diagram of reflectance at 750 nm vs. 950 nm/750 nm color (R-C). Sim & Kim (2018) examined the R-C trends of pixels within ~3,500 craters, and revealed that the length (L) and skewness (s) of R-C trends can be employed as a secondary age or maturity indicator. We broaden this research to general lunar surface areas (3,400 tiles of 0.25° × 0.25° size) in 218 mare basalt units, whose ages have been derived from the size-frequency distribution analysis by Hiesinger et al. (2011). We discover that L and s rise with age until ~3.2 Gyr and reduce rather rapidly afterward, while the optical maturity, OMAT, reduces monotonically with time. We show that in some situations, when not only OMAT but also L and s are incorporated in the estimation utilizing 750 & 950 nm photometry, the age estimation becomes considerably more reliable. We also observed that OMAT and the lunar cratering chronology function (cumulative number of craters larger than a certain diameter as a function of time) have a relatively linear relationship.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.127-132
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• 1997

Microstructure of the Fe-Ti system by ion beam mixing of multilayers at 300 K and 77 K has been studied in a wide composition range. The ion bombardment was carried out using $Ar^+$ ions at 80 keV. Using grazing angle x-ray diffraction we find that the lattice parameters of these bcc solid solutions are very close to that of $\alpha$-Fe. Extended x-ray absorption fine-structure spectroscopy have been performed to investgate the short-range order in the ion-beam-mixed state. The structure parameters, such as the interatomic distance and the coordination number are estmated from the Fe K-edge Fourier filtered EXAFS spectra. The interatomic distance is independent of the alloy concentration and it is almost constant. The study of x-ray absorption near-edge structure gives information on the individual $\rho$components of the partial densityof states of the conduction band of the Fe and Ti We also find that a charge transfer from Ti to Fe atoms takes place.

• Journal of the Korean Vacuum Society
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• v.6 no.S1
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• pp.75-79
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• 1997

Optical and mechanical characteristics of $TiO-2, ZrO_2 \;and\; SiO_xN_y$ thin films prepared by ion assisted deposition (IAD) were investigated. IAD films were bombarded by Ar or nitrogen ion beam from a Kaufman ion source while they were grown in as e-beam evaporator. The result shows that the Ae IAD increases the refractive index and packing density of $TiO_2 films close to those of the bulk. For $ZrO_2$ films the Ar IAD increases the average refractive index decreases the negative inhomogeneity of refractive index and reverses to the positive inhomogeneity. The optical properties result from improved packing density and denser outer layer next to air The Ar-ion bombardment also induces the changes in microstructure of $ZrO_2$ films such as the preferred (111) orientation of cubic phase increase in compressive stress and reduction of surface roughness. Inhomogeneous refractive index SiOxNy films were also prepared by nitrogen IAD and variable refractive index of $SiO_xN_y$ film was applied to fabricate a rugate filter.

• The Bulletin of The Korean Astronomical Society
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• v.46 no.2
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• pp.48.2-48.2
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• 2021

The lunar surface progressively darkens and reddens as a result of sputtering from solar wind particles and bombardment of micrometeoroids. The extent of exposure to these space weathering agents is frequently calculated as the location in a diagram of reflectance at 750 nm vs. 950 nm/750 nm color (R-C). Sim & Kim (2018) examined the R-C trends of pixels within ~3,500 craters, and revealed that the length (L) and skewness (s) of R-C trends can be employed as a secondary age or maturity indicator. We broaden this research to general lunar surface areas (3,400 tiles of 0.25° × 0.25° size) in 218 mare basalt units, whose ages have been derived from the size-frequency distribution analysis by Hiesinger et al. (2011). We discover that L and s rise with age until ~3.2 Gyr and reduce rather rapidly afterward, while the optical maturity, OMAT, reduces monotonically with time. We show that in some situations, when not only OMAT but also L and s are incorporated in the estimation utilizing 750 & 950 nm photometry, the age estimation becomes considerably more reliable. We also observed that OMAT and the lunar cratering chronology function (cumulative number of craters larger than a certain diameter as a function of time) have a relatively linear relationship.

• Proceedings of the Korean Society of Crop Science Conference
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• 2022.10a
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• pp.204-204
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• 2022

Transformant construction using protoplasts requires less sample preparation time than particle bombardment and Agrobacterium-mediated transfection. There are two protoplast transfection methods: the PEG-mediated transfection method and the Lipofectamine transfection method. When Lipofectamine is mixed with DNA, Lipofectamine surrounds DNA like a cell membrane because of the positive charge of Lipofectamine. The Lipofectamine-DNA complex makes DNA insertion into cells easier. Fectin has similar functions to lipofectamine and is less expensive than lipofectamine. The 3D-fectin technology has been highlighted in animal cell transfection. Therefore, we performed PEG-mediated transfection, Lipofectamine transfection, and 3D-pectin transfection with a GFP construct. Protoplasts were isolated using the first leaf of "Bobwhite" after 4 hours of incubation in an isolation Buffer (cellulase + macerozyme). Protoplasts transformed by each method were cultured for 48 hours, and then GFP fluorescence expression was confirmed under confocal microscopy. GFP signals were detected in PEG-mediated transfection and Lipofectamine transfection. And the GFP signals were also detected in protoplasts to which 3D-fectin technology was applied, suggesting that 3D-fectin technology can be used for plant protoplast transfection.

• Journal of Microbiology
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• v.41 no.3
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• pp.196-201
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• 2003

The object of this study was to characterize Bacillus strains GB-017 and GB-0356, which produce antifungal substances, especially for plant pathogens. In addition, this study was undertaken to characterize the culture conditions required for the production of antifungal substances and to document some of the properties of the antifungal substance produced by these soil-isolated strains. Strains GB-0365 and GB-017 were found to be bacillus-shaped, gram-positive and motile, and to inhibit Botrytis cineria, Fusarium sp., Pythium sp., and Rhizoctonia solani. Antagonistic activity was maintained up to pH 9.0, and the antifungal activity was stable to heat at 80$^{\circ}C$ for 1 h. Antifungal substances were separated and purified using ion exchange and adsorption columns including WK-I0(H$\^$＋) (pH 7.0), HP20 column (pH 3.0) and IPA (pH 3.0). and IPA. Its UV absorption spectrum showed major peaks at 231 and 259 nm, corresponding to polyene and lactone. A fast atom bombardment mass spectrum (FAB MS) showed a highest peak at 441 m/z and major peaks at 192, 205, and 370 m/z.

• Journal of the Korean institute of surface engineering
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• v.42 no.6
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• pp.276-279
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• 2009

ITO and ITO:Ce films were deposited by DC magnetron sputtering using an ITO ($SnO_2$: 10 wt%) and $CeO_2$ doped ITO ($CeO_2$: 0.5, 3.0, 4.0 and 6.0 wt%) ceramic targets, respectively, on unheated polyethylene terephthalate (PET) substrates. The lowest resistivity $6.7{\times}10^{-4}{\Omega}cm$ was obtained from ITO:Ce film deposited using $CeO_2$ (3.0 wt%) doped ITO target. On hte other hand, ITO:Ce (0.5wt%) film has the excellent mechanical durability which was evaluated by bending test. This result was attributed to the higher binding energy of $CeO_2$ compared to $SnO_2$ and $In_2O_3$. Therefore, $CeO_2$ atoms have a small displacement caused by the bombardment of high energy particles, and it attribute to the increase in adhesion caused by decrease in internal stress. The average transmittance of the films was more than 80% in the visible region.