• Tribology and Lubricants
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• v.31 no.6
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• pp.239-244
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• 2015

Chemical mechanical polishing (CMP) is one of the most important processes for enabling sub-14 nm semiconductor manufacturing. Moreover, post-CMP defect control is a key process parameter for the purpose of yield enhancement and device reliability. Due to the complexity of device with sub-14 nm node structure, CMP-induced defects need to be fixed in the CMP in-situ cleaning module instead of during post ex-situ wet cleaning. Therefore, post-CMP in-situ cleaning optimization and cleaning efficiency improvement play a pivotal role in post-CMP defect control. CMP in-situ cleaning module normally consists of megasonic and brush scrubber processes. And there has been an increasing effort for the optimization of cleaning chemistry and brush scrubber cleaning in the CMP cleaning module. Although there have been many studies conducted on improving particle removal efficiency by brush cleaning, these studies do not consider the effects of brush contamination. Depending on the process condition and brush condition, brush cross contamination effects significantly influence post-CMP cleaning defects. This study investigates brush cross contamination effects in the CMP in-situ cleaning module by conducting experiments using 300mm tetraethyl orthosilicate (TEOS) blanket wafers. This study also explores brush pre-treatment in the CMP tool and proposes recipe effects, and critical process parameters for optimized CMP in-situ cleaning process through experimental results.

• Nuclear Engineering and Technology
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• v.53 no.7
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• pp.2151-2161
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• 2021

Nuclear data (ND) sensitivity and uncertainty (S/U) quantification in shielding applications is performed using deterministic and probabilistic approaches. In this paper the validation of the newly developed deterministic program package ASUSD (ADVANTG + SUSD3D) is presented. ASUSD was developed with the aim of automating the process of ND S/U while retaining the computational efficiency of the deterministic approach to ND S/U analysis. The paper includes a detailed description of each of the programs contained within ASUSD, the computational workflow and validation results. ASUSD was validated on two shielding benchmark experiments from the Shielding Integral Benchmark Archive and Database (SINBAD) - the fission relevant ASPIS Iron 88 experiment and the fusion relevant Frascati Neutron Generator (FNG) Helium Cooled Pebble Bed (HCPB) Test Blanket Module (TBM) mock-up experiment. The validation process was performed in two stages. Firstly, the Denovo discrete ordinates transport solver was validated as a standalone solver. Secondly, the ASUSD program package as a whole was validated as a ND S/U analysis tool. Both stages of the validation process yielded excellent results, with a maximum difference of 17% in final uncertainties due to ND between ASUSD and the stochastic ND S/U approach. Based on these results, ASUSD has proven to be a user friendly and computationally efficient tool for deterministic ND S/U analysis of shielding geometries.

• Nuclear Engineering and Technology
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• v.55 no.8
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• pp.2785-2796
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• 2023

How to generate the precise broad group cross section is important for the fast reactor design. In this study, a fast reactor multi-group cross-section generation code MGGC2.0 are developed in-house for processing ultrafine group MATXS format library. Validation and verification are performed for MGGC2.0 code by applying the benchmarks of ICSBEP handbook, and the results of MGGC2.0 agree well with that of MCNP. The consistent P_N method with critical buckling search is in good agreement that condensed with TWODANT flux and flux moment for the inner core and outer core region. For the radial blanket and reflector, two region approximation method has been applied in MGGC2.0 by using collision Probability Method neutron flux solver. The RBEC-M benchmark was used to verify the power distribution calculation, and the relative error of power distribution comparison with the reference are less than 0.8% in the fuel region and the maximum relative error is 5.58% in the reflector region. Therefore, the precise broad cross section can be generated by MGGC2.0 for fast reactor.

• Nuclear Engineering and Technology
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• v.56 no.7
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• pp.2641-2649
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• 2024

Effective management of slightly used nuclear fuel (SUNF) is crucial for both technical and public acceptance reasons. SUNF management, radiotoxicity risk, and associated financial investment and technological capabilities are major concerns in nuclear power production. Reducing the volume of SUNF can simplify its management, and one possible solution is utilizing small modular reactors (SMR) and advanced fuel designs like those with thorium. This research focuses on studying the neutronic performance and radionuclide inventory of three different thorium fuel configurations. The mass of fissile material in thorium-based fuel significantly impacts Kinf, burn-up, and neutron energy spectrum. Compared to uranium, thorium as a fuel produces far fewer transuranic elements and less long-lived fission products (LLFPs) at the end of the core cycle (EOC). However, certain fission product elements produced from thorium-based fuel exhibit higher radioactivity at the beginning of the core cycle (BOC). Physical separation of thorium and uranium in the fuel block, like seed-and-blanket units (SBU) and duplex fuel designs, generate less radioactive waste with lower radioactivity and longer cycle lengths than homogeneous or mixed thorium-uranium fuel. Furthermore, the SBU and duplex feel designs exhibit comparable neutron spectra, leading to negligible differences in SUNF production between the two.

• Journal of Microbiology and Biotechnology
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• v.27 no.10
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• pp.1808-1819
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• 2017

Knowledge on the functional characteristics and temporal variation of anaerobic bacterial populations is important for better understanding of the microbial process of two-stage anaerobic reactors. However, owing to the high diversity of anaerobic bacteria, close attention should be prioritized to the frequently abundant bacteria that were defined as core bacteria and putatively functionally important. In this study, using MiSeq sequencing technology, the core bacterial community of 98 operational taxonomic units (OTUs) was determined in a two-stage upflow blanket filter reactor treating pharmaceutical wastewater. The core bacterial community accounted for 61.66% of the total sequences and accurately predicted the sample location in the principal coordinates analysis scatter plot as the total bacterial OTUs did. The core bacterial community in the first-stage (FS) and second-stage (SS) reactors were generally distinct, in that the FS core bacterial community was indicated to be more related to a higher-level fermentation process, and the SS core bacterial community contained more microbes in syntrophic cooperation with methanogens. Moreover, the different responses of the FS and SS core bacterial communities to the temperature shock and influent disturbance caused by solid contamination were fully investigated. Co-occurring analysis at the Order level implied that Bacteroidales, Selenomonadales, Anaerolineales, Syneristales, and Thermotogales might play key roles in anaerobic digestion due to their high abundance and tight correlation with other microbes. These findings advance our knowledge about the core bacterial community and its temporal variability for future comparative research and improvement of the two-stage anaerobic system operation.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.255-255
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• 2015

국제핵융합실험로(ITER)의 3대 목표 중 하나는 핵융합로 개발을 위한 삼중수소증식블랑켓 개념을 시험하고 검증하는 것이며, 이를 위해 시험증식블랑켓(TBM, Test Blanket Module) 프로그램을 마련, 각국이 참여할 수 있도록 하고 있다. 한국도 2012년 국가핵융합위원회 결정에 따라, EU, 일본, 중국, 인도와 함께 TBM 프로그램에 참여하고 있으며, 2021년 설치를 목표로 헬륨냉각 고체증식재 개념의 HCCR (Helilum Cooled Ceramic Reflector) TBM을 설계, 개발하고 있다. 한국형 TBM은 총 4개의 서브모듈과 하나의 후벽(Back Manifold, BM) 으로 구성되며, 각 서브모듈은 플라즈마와 대면하는 일차벽(First Wall, FW), 증식재와 증배재, 반사재를 담고 있는 증식영역(Breeding Zong, BZ), 냉각재 매니폴드 및 구조물 역할을 하는 측벽(Side Wall, SW) 등의 기능부품으로 구성되어 있다. 냉각재는 8 MPa, $300-500^{\circ}C$의 고온고압헬륨을 사용하고, Li2SiO4 혹은 Li2TiO4 형태의 Li 세라믹 증식재를 사용하며, 중성자 증배를 위해 Be 증배재 및 흑연 반사재를 사용한다 [1-3]. 2015년 2월 개념설계검토(CDR, Conceptual Design Review)를 위해, TBM-shield를 포함한 TBM-set 설계가 완료되었으며, 열수력, 구조, 지진, 전자기, 복합하중에 대한 평가가 진행되었다. 본 논문에서는 이 중 H/He-phase에 시험될 EM-TBM과 D-T phase에 시험될 INT-TBM에 대한 열수력 성능 결과를 소개하였다[5]. 각각의 열부하 조건은 0.17과 $0.3MW/m^2$이며, 중성자 조사는 D-T phase 에서만 고려되었다. 구조재 및 사용된 기능소재별 온도 요건을 정의하고, 성능해석 결과와 비교하였으며, 이를 통해 모든 온도 요건을 만족함을 최종 확인하였다. 이러한 온도 분포는 열응력 평가를 위해 구조해석 입력자료로 활용되었다.

• The Journal of Korean Medical History
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• v.23 no.1
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• pp.23-41
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• 2010

Greater yang disease(太陽病) is a syndrome induced by peripheral obstruction. One of them is "wind stroke(中風)" with the obstruction in lymphatic system. The other obstruction appearing on circulatory system is called "cold damage(傷寒)." Kyejitang(桂枝湯) is the formula prescribed for greater yang wind stroke pattern(太陽中風證) which is caused by peripheral lymphatic duct obstruction. Ramulus Cinamoni acts as a vasodilator and Radix Paeoniae relieves the abdominal tension. They make blood move to the internal organ and this can remove the retention of peripheral lymphatic system. Covering the patient with a blanket and getting him/her to have hot and thin rice gruel causes slight Diaphoresis, contributing to relieving the retention of lymphatic system. Disharmony between nutrient and defense(營衛不和) means that pressure becomes different between lymphatic system and vascular system. Kyejitang(桂枝湯) is called releasing muscles formula(解肌劑) because it can resolve such pressure difference. Diaphoresis is not a means to eliminate pathogenic qi(邪氣) from the body. That is the syndrome proving that the body fluid has moved around when disordered fluid distribution is corrected. Therefore, diaphoresis should be induced weakly all the time. If diaphoresis is induced excessively, body fluid will move more than desired and then illness cannot be cured. In Sanghanlun(傷寒論), dispersing drugs aim at addressing the retention in the exterior field, but it actually applies to the entire exterior and interior to make body fluid move. Therefore, diaphoresis does not just act on exterior field, and freeing the stool does not only apply to interior field. Distribution of body fluid changed by pathogenic qi(邪氣) influences the whole body because the human body has a closed circulatory system. Sanghanlun(傷寒論) has included treatments for pathogenic disease. However, its value should not be limited to pathogenic disease. It is because controlling blood flow by sending body fluid to the place a doctor wants is certainly worth using for treatment of non-exogenous disease or chronic illnesses.

• Journal of Fashion Business
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• v.2 no.1
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• pp.35-48
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• 1998

The purpose of this paper is to examine the street fashion, which is influenced by the youth culture in 1960s. Youth culture is the youth subculture which appeared multiform in the 1960s. It tried to create a new culture by subverting the ruling class culture with their combative life style and peculiar appearance which are distinguished from mother culture. Youth cultures as youth subculture are symbolically expressed in their style which had strong characteristics of sub-fashion and anti-fashion, and which are different from mother fashion in shape. Therefore youth subculture fashion had an effect on street fashion in the 60s. The influence that the youth culture fashion had had on the street fashion is summarized as follows: Beats fashion was intelligency look on black dress, black polo-neck shirts, black trousers, black glasses and heavy black eyeliner. Mods fashion was neat style on Edwardian suit with narrow trousers, pointer-toeshoes and smooth croped hair. Folkis fashion was ethnic look, middle east asian look, peasant look, Indian style, south america look, gypsy style, natural materials, natural dying, tie-dye, beads and hand made ornaments. Rockers fashion was violence appearance categorized 'blue collar' on black leather jacket decorated with metal studs and hand-painted insignia, blue jeans and boots for motor bike. Swinging London & the Psychedelics fashion was blend mods look with pschedelic color and motive pattern. Hippie fashion was intermix pschedelic and natural or ethnic style. It was appear to be a meaningless, unpredictable assortment of diverse items and style. Faded and tattered jeans, army jackets, vintage hat, beads, embroidered headband, white sheets, diverse theatrical costumes, sandals or bare feet, granny dress, peasant blouse, blanket cape, tie-dye T-shirts and long hair. Greasers fashion was adorned black leather jacket with chains, fringing, badges, insignia and sleeves had been crudely ripped off. They came to be known wore jeans so soaked with oil. Skinheads fashion was aggressive working class identity with donkey jacket, jeans rolled up, collarless union shirts, heavy boots, braces and hair cropped short.

• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.210-213
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• 2008

The purpose of this study is to investigate the performances of organic removal and methane recovery in the full scale two-phase anaerobic system. The full scale two-phase anaerobic system was consists of an acidogenic ABR (Anaerobic Baffled Reactor) and a methanognic UASB (Upflow Anaerobic Sludge Blanket) reactor. The volume of acidogenic and methanogenic reactors is designed to 28.3 $m^3$ and 75.3 $m^3$. The two-phase anaerobic system represented 60-82% of COD removal efficiency when the influent COD concentration was in the range of 7,150 to 16,270 mg/L after screening (average concentration is 10,280 mg/L). After steady-state, the effluent COD concentration in the methanogenic reactor showed 2,740 $\pm$ 330 mg/L by representing average COD removal efficiency was 71.4 $\pm$ 8.1% when the operating temperature was in the range of 19-32$^{\circ}C$. The effluent SCOD concentration was in the range of 2,000-3,000 mg/L at the steady state while the volatile fatty concentration was not detected in the effluent. Meanwhile, the COD removal efficiency in the acidogenic reactor showed less than 5%. The acidogenic reactor played key roles to reduce a shock-loading when periodic shock loading was applied and to acidify influent organics. Due to the high concentration of alkalinity and high pH in the effluent of the methanogenic reactor, over 80% of methane in the biogas was produced consistently. More than 70 % of methane was recovered from theoretical methane production of TCOD removed in this research. The produced gas can be directly used as a heat source to increase the reactor temperature.

• Journal of Korean Society of Water and Wastewater
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• v.21 no.3
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• pp.331-339
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• 2007

The purpose of this study was to investigate the biodegradability and performance of organic removal and methane production rate when treating piggery wastewater using a pilot scale two-phase anaerobic system operated up to a volumetric rate of $10m^3/day$. The pilot scale two-phase anaerobic process is consisted of a continuous-flow stirred-tank reactor (CFSTR) for the acidification phase and an Upflow Anaerobic Sludge Blanket reactor (UASB) for the methanogenesis. The acidogenic reactor played key roles in reducing the periodically applied shock-loading and in the acidification of the influent organics. The acidogenic CFSTR was operated at organic loading rates (OLR) between 1.8 and $14.4kgCOD/m^3{\cdot}day$, and the UASB reactor was operated between 0.5 and $5.6kgCOD/m^3{\cdot}day$. A stable maximum biogas production rate was $81m^3/day$ and the methane conversion rate of the organic matter varied from 0.30 to $0.42L\;CH_4/g\;COD_{removed}$(0.40) at hydraulic retention time (HRT) above 3.5days. The methane contents ranged from 73 to 82% during the experimental period. It is known that most of the removed organic matter was converted to methane gas, and the produced biogas might be high quality for its subsequent use.