• Korean Journal of Materials Research
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• v.26 no.9
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• pp.486-492
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• 2016

Tungsten (W) thin film was deposited at $400^{\circ}C$ using pulsed chemical vapor deposition (pulsed CVD); film was then evaluated as a nucleation layer for W-plug deposition at the contact, with an ultrahigh aspect ratio of about 14~15 (top opening diameter: 240~250 nm, bottom diameter: 98~100 nm) for dynamic random access memory. The deposition stage of pulsed CVD has four steps resulting in one deposition cycle: (1) Reaction of $WF_6$ with $SiH_4$. (2) Inert gas purge. (3) $SiH_4$ exposure without $WF_6$ supply. (4) Inert gas purge while conventional CVD consists of the continuous reaction of $WF_6$ and $SiH_4$. The pulsed CVD-W film showed better conformality at contacts compared to that of conventional CVD-W nucleation layer. It was found that resistivities of films deposited by pulsed CVD were closely related with the phases formed and with the microstructure, as characterized by the grain size. A lower contact resistance was obtained by using pulsed CVD-W film as a nucleation layer compared to that of the conventional CVD-W nucleation layer, even though the former has a higher resistivity (${\sim}100{\mu}{\Omega}-cm$) than that of the latter (${\sim}25{\mu}{\Omega}-cm$). The plan-view scanning electron microscopy images after focused ion beam milling showed that the lower contact resistance of the pulsed CVD-W based W-plug fill scheme was mainly due to its better plug filling capability.

• Proceedings of the KWS Conference
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• 2002.10a
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• pp.720-725
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• 2002

In recent years, techniques for micro-assembly with high repeatability under a scanning electron microscope (SEM) are required to construct highly functional micro-devices. Adhesion phenomenon is more significant for smaller objects, becanse adhesional force is proportional to size of the objects while gravitational force is proportional to the third power of it. It is also known that adhesional force between micro-objects exposed to Electron Beam irradiation of SEM increases with the elapsed time. Therefore, mechanical manipulation techniques using a needle-shaped tool by adhesional force are often adopted in basic researches where micro-objects are studied. These techniques, however, have not yet achieved the desired repeatability because many of these could not have been supported theoretically. Some techniques even need the process of trial-and-error. Thus, in this paper, mechanical and adhesional micro-manipulation are analyzed theoretically by introducing new physical factors, such as adhesional force and rolling-resistance, into the kinematic system consisting of a sphere, a needle-shaped tool, and a substrate. Through this analysis, they are revealed that how the micro-sphere behavior depends on the given conditions, and that it is possible to cause the fracture of the desired contact interfaces selectively by controlling the force direction in which the tool-tip loads to the sphere. Based on the acquired knowledge, a mode diagram, which indicates the micro-sphere behavior for the given conditions, is designed. By refening to this mode diagram, the practical technique of the pick and place manipulation of a micro-sphere under an SEM by the selective interface fracture is proposed.

• Journal of the Korean Ceramic Society
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• v.34 no.2
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• pp.139-144
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• 1997

Structurally, the rare earth cuprate superconductor of Nd2-xCexCuO4-$\delta$ has T' structure and has been known as having a quite complicated microstructural phenomena, so far. In order to be superconductivity, both small amount of cation substitution of Nd3+ by Ce4+ and oxygen reduction are required. In the present study the crystallographic study on the structural transition for the Nd2-xCexCuO4-$\delta$ crystal has been con-ducted by observing the CBED (Convergent Beam Electron Diffraction) pattern with STEM(Scanning Transmission Electron Microscope). Three different samples of Nd2CuO3,Nd1.85Ce0.15CuO4 and Nd1.85Ce0.15CuO3.965 were prepared by solid-state sintering and their CBED patterns were observed by STEM to study the structural transition accompanying the substitution of Ce and the reduction of oxygen. Experimental HOLZ lines of these samples were compared with those plotted by a computer-programmed simulation to de-termine the lattice parameter of Nd2-xCexCuO4-$\delta$ crystal.

• Journal of the Korea Convergence Society
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• v.11 no.7
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• pp.157-162
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• 2020

In recent years, laser induced graphene process have been intensively studied for eco-friendly electronic device such as flexible electronics or thin film based energy storage devices because of its simple and effective process. In order to increase the performance and efficiency of an electronic device using such a graphene patterned structure, it is essential to study an optimized laser patterning condition as small as possible linewidth while maintaining the graphene-specific 2-dimensional characteristics. In this study, we analyzed to find the optimal line pattern by using a Ti:sapphire femtosecond laser based photo-thermal reduction process. we tuned intensity and scanning speed of laser spot for generating effective graphene characteristic and minimum thermal effect. As a result, we demonstrated the reduced graphene pattern of 30㎛ in linewidth by using a focused laser beam of 18㎛ in diameter.

• Journal of the Korean Institute of Telematics and Electronics
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• v.26 no.6
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• pp.63-70
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• 1989

The ion beam extracted from the AuGe liquid metal ion source was implanted into GaAs substrate. The surface composition and the structure of ion implanted samples were investigated by AES, RHEED, SEM and EPMA. The depth profiles measured by AES were compared with the results of Monte Carlo simulation based on the two-body collision. As the results of AuGe ion implantation the preferential sputtering of As were revealed by AES and EPMA, and the outdiffusion of Ga and Ge was investigated by 300$^{circ}C$ annealing. The Au and Ge depth profiles measured by AES agreed with the results of Monte Carlo simulation based on the two-body collision.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.11
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• pp.1-11
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• 1999

In this paper, the effects of superstrate on the radiation patterns of dipole on cylindrical bianisotropic substrates were studied. Special constitutive relations are used to describe the bianisotropic properties of a material, such that the Green's function can be formulated. Electromagnetic fields and boundary conditions in spectral region were used to find Green's function of the spectral representation and electromagnetic fields in space region were derived through inverse Fourier transformations of fields in spectral region using asymptotic formula for far zone. Radiation characteristics of axial Hertzian dipole on superstrate loaded cylindrical bianisotropic substrates were obtained. The effects of bianisotropic superstrate on the radiation properties of the antennas including beam scanning, directivity enhancement, dark-region illumination, and on horizon radiation, are discussed.

• The Journal of Advanced Prosthodontics
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• v.6 no.2
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• pp.96-102
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• 2014

PURPOSE. This study was performed to characterize the effects of zirconia coated with calcium phosphate and hydroxyapatite compared to smooth zirconia after bone marrow-derived osteoblast culture. MATERIALS AND METHODS. Bone marrow-derived osteoblasts were cultured on (1) smooth zirconia, (2) zirconia coated with calcium phosphate (CaP), and (3) zirconia coated with hydroxyapatite (HA). The tetrazolium-based colorimetric assay (MTT test) was used for cell proliferation evaluation. Scanning electron microscopy (SEM) and alkaline phosphatase (ALP) activity was measured to evaluate the cellular morphology and differentiation rate. X-ray photoelectron spectroscopy (XPS) was employed for the analysis of surface chemistry. The genetic expression of the osteoblasts and dissolution behavior of the coatings were observed. Assessment of the significance level of the differences between the groups was done with analysis of variance (ANOVA). RESULTS. From the MTT assay, no significant difference between smooth and surface coated zirconia was found (P>.05). From the SEM image, cells on all three groups of discs were sporadically triangular or spread out in shape with formation of filopodia. From the ALP activity assay, the optical density of osteoblasts on smooth zirconia discs was higher than that on surface treated zirconia discs (P>.05). Most of the genes related to cell adhesion showed similar expression level between smooth and surface treated zirconia. The dissolution rate was higher with CaP than HA coating. CONCLUSION. The attachment and growth behavior of bone-marrow-derived osteoblasts cultured on smooth surface coated zirconia showed comparable results. However, the HA coating showed more time-dependent stability compared to the CaP coating.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.2
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• pp.211-217
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• 2010

It is important to measure the mechanical properties of nanostructures because they are required to determine the lifetime and reliability of nanodevices developed for various fields. In this study, tensile tests for a multi-walled carbon nanotube (MWCNT) and a ZnO nanorod were performed in a scanning electron microscope (SEM). The force sensor was a cantilever type and was mounted in front of a nanomanipulator placed in the chamber. The nanomanipulator was controlled using a joystick and personal computer. The nanostructures dispersed on the cut area of a transmission electron microscope (TEM) grid were gripped with the force sensor by exposing an electron beam in the SEM; the tensile tests were the performed. The in situ tensile loads of the nanostructure were obtained. After the tensile test, the cross-sectional areas of the nanostructures were observed by TEM and SEM. Based on the TEM and SEM results, the elastic modulus of the MWCNT and ZnO nanorod were calculated to be 0.98 TPa and 55.85 GPa, respectively.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.20 no.1
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• pp.47-52
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• 2011

It is well known that stiffness of composites depends on layup sequence of CFRP(carbon fiber reinforced plastics) laminates because the layup of composite laminates influences their properties. Ultrasonic NDE of composite laminates is often based on the backwall echoes of the sample. A pair of such transducers was mounted in a holder in a nose-to-nose fashion to be used as a scanning probe on composites. Miniature potted angle beam transducers were used (Rayleigh waves in steel) on solid laminates of composites. Experiments were performed to understand the behavior of the transducers and the nature of the waves generated in the composite (mode, wave speed, angle of refraction). C-scan images of flaws and impact damage were then produced by combining the pitch-catch probe with a portable manual scanner known as the Generic Scanner ("GenScan"). The pitch-catch signal was found to be more sensitive than normal incidence backwall echo of longitudinal wave to fiber orientation of the CFRP composites, including low level porosity, ply waviness, and cracks. Therefore, it is found that the experimentally Rayleigh wave variation of pitch-catch ultrasonic signal was consistent with numerical results and one-side ultrasonic measurement might be very useful to detect the defects.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.43 no.6 s.312
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• pp.16-26
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• 2006

In this paper, we propose a 3D shape restoration system which measures height and surface shape of transparent ITO glass and delivers errors in focal length and incident angle of laser beam to femto-second laser micromachining. The proposed system is composed of a line scan laser, a high resolution camera, a linear motion guide synchronized to image capturing, and a control station. Also, we define the sensitivity indices that represent a relation between measurement error and a position of a camera and scan laser, and utilize it for optimum design. The results of the proposed system are compared with results of SPM(Scanning Probe Microscope) and prove the usefulness of the system.