• Journal of Surface Science and Engineering
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• v.43 no.4
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• pp.170-175
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• 2010

The GaAs epitaxial layers were grown on Si(100) substrates by molecular beam epitaxy(MBE) using the two-step method. The Si(100) substrates were cleaned with different surface cleaning method of vacuum heating, As-beam, and Ga-beam at the substrate temperature of $800^{\circ}C$. Growth temperature and thickness of the GaAs epitaxial layer were $800^{\circ}C$ and 1 ${\mu}m$, respectively. The surface structure and epitaxial growth were observed by reflection high-energy electron diffraction(RHEED) and scanning electron microscope(SEM). Just surface structure of the Si(100) substrate cleaned by Ga-beam at $800^{\circ}C$ shows double domain ($2{\times}1$). RHEED patterns of the GaAs epitaxial layers grown on Si(100) substrates with cleaning method of vacuum heating, As-beam, and Ga-beam show spot-like, ($2{\times}4$) with spot, and clear ($2{\times}4$). From SEM, it is found that the GaAs epitaxial layers grown on Si(100) substrates with Ga-beam cleaning has a high quality.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.20 no.2
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• pp.167-173
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• 2009

This paper proposes an electronically beam steering array antenna, consisting of single fed active element and 4 parasitic elements, operating in 5.8 GHz ISM band. Beam steering can be achieved by controlling the reactance of the variable reactance control circuit connected to the load of the parasitic elements without using the high cost phase shifters. The proposed antenna realizes ${\pm}30^{\circ}$ beam scanning of E-plane and H-plane with the below -10 dB return loss in ISM band. The gain of the $6.18{\sim}7.53\;dBi$ in E-plane and $7.022{\sim}7.779\;dBi$ in H-plane is shown in the scanning range.

• Journal of the Korean Vacuum Society
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• v.15 no.5
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• pp.458-464
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• 2006

The construction and the performance test of an ultra high vacuum (UHV) molecular beam epitaxy (MBE) system has been completed successfully. We have done domestic development and tried performance test for ultra high vacuum molecular beam epitaxy system. This system has reached pressure $2X10-^{10}$ Torr and the substrate has reached temperature $1,100^{\circ}C$. We have investigated into the characteristic of ZnSe/GaAs(001) by using scanning electron microscope (SEM), atomic force microscope (AFM), x-ray diffraction (XRD) and photolumi-nescence (PL).

• Applied Microscopy
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• v.41 no.3
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• pp.147-154
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• 2011

Backscattered electrons (BSE) are generated at the impact of the primary electron beam on the specimen. BSE imaging provides the compositional contrast to resolve chemical features of sectioned block-face. A focused ion beam (FIB) column can be combined with a field emission scanning electron microscope (FESEM) to ensure a dual (or cross)-beam system (FIB-FESEM). Due to the milling of the specimen material by 10 to 100 nm with the gallium ion beam, FIB-FESEM allows the serial block-face (SBF) imaging of plastic-embedded specimens with high z-axis resolution. After contrast inversion, BSE images are similar to transmitted electron images by transmission electron microscopy. As another means of SBF imaging, a specialized ultramirotome has been incorporated into the specimen chamber of FESEM ($3View^{(R)}$). Internal structures of plastic-embedded specimens can be serially revealed and analyzed by $3View^{(R)}$ with a large field of view to facilitate three-dimensional reconstruction. These two SBF approaches by FESEM can be employed to unravel spatial association of (sub)cellular entities for a comprehensive understanding of complex biological systems.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.10
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• pp.1807-1813
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• 2007

This paper deals with extending the variable natural oscillation frequency range of an active integrated FET oscillator. In this paper, we conform experimentally that the variable range of the natural oscillation frequency is expanded about three times in the oscillator controlled by the varactor diode. When the frequency difference is given to the oscillators in the two element antenna system, phase difference appeared between the oscillators. The 2-, 3-, 4-, 5-element patch antenna arrays are composed for the beam scanning experiments. All the above patch antennas show good phased array characteristics. The range of the scanning angle is about $30^{\circ}$, and the radiation power is gradually increased from $50{\mu}W\;to\;200{\mu}W$. The radiation patterns we sharpened as the number of elements is increased.

• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.162.6-162
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• 2001

Confocal scanning microscopy (CSM) is an important instrument in a wide variety of imaging applications because of its ability to provide three-dimensional images of thick, volume specimens. The mechanism for two-dimensional beam scanning and optical sectioning has an important roe in CSM as the three-dimensional profiler. This optical sectioning property arises from the use of a point detector, which serves to attenuate the signals from out-of-focus. The intensity profile for the open loop scanning should be matched with its response for the standard. The non-linearity can be minimized with the optical sectioning or the optical probe of the closed loop control. This paper shows the mathematical expression of the light such as the extinction curve in the optical fields of system using AO deflector, the axial/lateral response experimentally when the error sources change, and the methods of optical sectioning. Thorough design of optical sectioner is crucial to the success of CSM in the field ...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.51-54
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• 2000

The traditional surface measuring method using confocal principle requires much time to measure an object surface since it is a scanning tool. In this paper, the upgraded confocal microscope is introduced. It is also a scanning tool but it requires 2D-scanning while the traditional one requires 3D-scanning. It means the time for measuring is considerably reduced. In addition, the measuring system is configured to increase the efficiency of beam. He-Ne laser whose frequency is 632.8nm is used for the laser source. An example of measuring result through the upgraded confocal microscope is showed.

• Journal of the Optical Society of Korea
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• v.16 no.2
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• pp.121-126
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• 2012

We propose a novel technique that records the horizontal-parallax-only (HPO) hologram of a real object using optical scanning holography (OSH). The proposing HPO-OSH is composed of a conventional OSH and an electronics low pass filter. When we scan an object along vertical direction before horizontal direction, the electronic low pass filter filters the vertical fringes with preserving horizontal fringes and gives an HPO hologram. To the best of our knowledge, this is the first time to record the HPO hologram using OSH without either truncation of the scanning beam or digital post processing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.330-333
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• 2005

The fabrication of mold fur nano imprint lithography (NIL) is experimentally reported using the scanning probe lithography (SPL) technique, instead of the conventional I-beam lithography technique. The nanometer scale patterning structure is fabricated by the localized generation of oxide patterning on the silicon (100) wafer surface with a thin oxide layer, The fabrication method is based on the contact mode of scanning probe microscope (SPM) in air, The precision cleaning process is also performed to reach the low roughness value of $R_{rms}=0.084 nm$, which is important to increase the reproducibility of patterning. The height and width of the oxide dot are generated to be 15.667 nm and 209.5 nm, respectively, by applying 17 V during 350 ms.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.10 no.3
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• pp.220-224
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• 2017

In this paper, a method of feeding for the near field beam scanning array antenna with three dimensional focal point has been studied. The conventional array antenna theory is mostly about the far field points. The basic idea is to feed the transmitted signal so that it is in phase at the desired point. In this study, a method is proposed to compensate the phase to have the maximum received power at the point where the measurement point distance is near to the array antenna size. In the proposed method, 11 point source antennas are arrayed in three ways in free space. And the contour map is plotted by calculating the radiation patterns in the three dimensional space and the received signal intensities in the plane within the near space. As a result, it was confirmed that 3 dimensional beam scanning is possible also in the near field of the array antenna.