• 한국공작기계학회논문집
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• 제16권5호
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• pp.129-133
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• 2007

Focused Ion Beam(FIB) systems is a useful tool for the fabrication of micro-nano scale structures. In this study, the effects of FIB etching on the Au microstructure are systematically investigated. As the fabrication parameters, ion dose, dwell time and beam overlap ratio are studied. First, the increases of Ga ion dose makes the milling yield higher and the sidewall of milling profile steeper. Dwell time is found to have little effects on the milling profile due to the relatively large milling area of $1\times1{\mu}m^2$ used in this study. However, beam overlap significantly affects not only milling rate but also milling profile. As the beam overlap ratio changes from positive to negative, the development of regular cross-stripe patterns at the bottom with low milling rate is observed.

• 한국정밀공학회지
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• 제27권11호
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• pp.17-23
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• 2010

Titanium alloy is one of the hard processing materials made by the traditional manufacturing method because of the excellent mechanical strength. Ablation of titanium alloy is investigated by using a femtosecond laser which is a regenerative amplified Ti:sapphire laser with 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Experiments are carried out under various ablation conditions with different pulse overlap ratios for the rectangular shape and micro hole. Test results show that the ablation characteristic according to pulse overlap ratio of titanium alloy seems to be as non-linear type at the different zone of energy fluence. The optimal condition of rectangular shape processing is obtained at the laser peak power 1.3mW, pulse overlap ratio of 90%, beam gap of $1\;{\mu}m$. The micro hole has a good quality from the pulse overlap ratio of 99% at the same laser peak power. With the optimal processing condition, the fine rectangular shape and micro hole without burr and thermal damage are achieved.

• 한국광학회지
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• 제14권1호
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• pp.65-71
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• 2003

국소 홀로그램 기록방법에서 저장밀도를 높이기 위해서는 각 홀로그램은 이웃한 홀로그램들과 가급적 가깝게 기록되어야 한다. 이 경우에 두 인접한 홀로그램의 기준빔들은 공간적으로 겹칠 수 있다. 본 논문에서는 공간다중화를 위한 기준빔의 이동거리에 대해서 겹침을 최소화하는 최적의 기준빔 폭이 존재함을 시물레이션 및 실험적으로 보인다 따라서, 저장밀도를 높임에 따르는 국소 홀로그램의 장점의 희생을 최소화할 수 있다.

• 융합신호처리학회논문지
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• 제12권1호
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• pp.67-75
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• 2011

본 논문에서는 인접 초음파 센서간 효과적인 빔 폭 중첩을 이용하여 고성능 장애물 탐지를 위한 중첩 초음파 센서 링을 최적 설계하는 방법에 대해 체계적으로 기술하도록 한다. 기본적으로 일군의 동종 저지향성 초음파 센서들이 일정 간격으로 상호 빔 폭이 중첩되도록 원형 배치된다고 가정한다. 첫째 초음파 센서의 실제와 단순화된 빔 패턴 그리고 빔 폭 내의 장애물 위치 추정을 위한 여러 센서 모델에 대해 소개한다. 둘째, 중첩 초음파 센서 링의 장애물 탐지 범위와 장애물 위치 추정을 위한 간단한 센서 모델에 대해 기술한다. 셋째, 타원과 비타원 형태의 빔 패턴에 대해 각각, 장애물 탐지 시 위치 불확실성이 최소화되도록 중첩 초음파 센서 링을 설계하기 위한 지수를 정의한다. 넷째, 최소한의 빔 폭 중첩 보장과 과도한 빔 폭 중첩 회피를 위해 요구되는 중첩 초음파 센서 링의 구조적 사양에 대한 제한 조건을 유도한다. 다섯째, 주어진 중첩 초음파 센서 링의 반경에 대한 초음파 센서의 최적 사용 개수와 주어진 초음파 센서의 사용 개수에 대한 중첩 초음파 센서 링의 최적 반경을 결정한다. 본 논문 전반에 걸쳐, 대표적인 상용 저지향성 초음파 센서로서 Murata사의 MA40B8이 채택되었다.

• 제어로봇시스템학회논문지
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• 제17권2호
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• pp.79-87
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• 2011

This paper presents the optimal design of an overlapped ultrasonic sensor ring for high resolution obstacle detection of an autonomous mobile robot. It is assumed that a set of low directivity ultrasonic sensors of the same type are arranged along a circle of nonzero radius at a regular spacing with their beams overlapped. First, taking into account the dead angle region, the entire range of obstacle detection is determined with reference to the center of an overlapped ultrasonic sensor ring. Second, the optimal design index of an overlapped ultrasonic sensor ring is defined as the area closeness of three sensing subzones resulting from beam overlap. Third, the lower and upper bounds on the number of ultrasonic sensors are derived, which can guarantee minimal beam overlap and also avoid excessive beam overlap among adjacent ultrasonic sensors. Fourth, employing a commercial low directivity ultrasonic sensor, an optimal design example of an overlapped ultrasonic sensor ring is given along with the ultrasonic sensor ring prototype mounted on top of a mobile robot. Finally, some experimental results using our prototype ultrasonic sensor ring are given to demonstrate the validity and performance of an optimally overlapped ultrasonic sensor ring for high resolution obstacle detection.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2007년도 7th International Meeting on Information Display 제7권2호
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• pp.1061-1064
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• 2007

Thin Beam Excimer Laser Annealing is investigated as one possible process enabled by the variable concept of Thin Beam LTPS processing. The structure of the resulting p-Si material is analyzed in terms of grain size distribution, scaling with energy density and overlap, as well as average surface roughness. This process provides similar control and latitude as conventional excimer laser annealing, but reduced average surface roughness and the potential to be scaled to significant productivity levels.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1531-1534
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• 2005

Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

• 대한기계학회논문집A
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• 제32권3호
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• pp.209-216
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• 2008

The application of focused ion beam (FIB) depends on the optimal interaction of the operation parameters between operating parameters which control beam and samples on the stage during the FIB deposition process. This deposition process was investigated systematically in C precursor gas. Under the fine beam conditions (30kV, 40nm beam size, etc), the effect of considered process parameters - dwell time, beam overlap, incident beam angle to tilted surface, minimum frame time and pattern size were investigated from deposition results by the design of experiment. For the process analysis, influence of the parameters on FIB-CVD process was examined with respect to dimensions and constructed shapes of single and multi- patterns. Throughout the single patterning process, optimal conditions were selected. Multi-patterning deposition were presented to show the effect of on-stage parameters. The analysis have provided the sequent beam scan method and the aspect-ratio had the most significant influence for the multi-patterning deposition in the FIB processing. The bitmapped scan method was more efficient than the one-by-one scan type method for obtaining high aspect-ratio (Width/Height > 1) patterns.

• 한국지반신소재학회논문집
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• 제22권1호
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• pp.75-85
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• 2023

굴착공사가 이루어지는 지역에서는 지하수위 변화와 지반침하를 최소화하기 위한 흙막이 벽체 공법 선정이 매우 중요하다. 이러한 측면에서 CIP 공법의 단점을 보완할 수 있는 SPW 공법은 국내 흙막이 벽체 시공 시 점차 증가하는 추세이다. 이러한 여건을 고려하여 본 연구에서는 SPW 공법의 설계요소와 흙막이 벽체의 구조적 안정요소간 상호 특성에 대하여 연구하였다. 여기서, 흙막이 벽체의 설계요소는 말뚝 간 겹침길이, 말뚝직경, H형강 보강재 규격이며 이에 따른 흙막이 벽체의 구조적 안정요소는 흙막이 벽체의 휨응력, 전단응력, 수평변위, 콘크리트 강도이다. 연구 결과 H형강 보강재의 부재력에 큰 영향을 미치는 설계요소는 말뚝직경과 H형강 보강재 규격이며, 수평변위에 큰 영향을 미치는 설계요소는 말뚝직경과 말뚝 간 겹침길이인 것으로 나타났다. 또한, 콘크리트 강도에 큰 영향을 미치는 설계요소는 말뚝직경과 H형강 보강재 규격인 것으로 나타났다.

• 제어로봇시스템학회논문지
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• 제18권4호
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• pp.321-327
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• 2012

This paper presents a comparative analysis on three different types of performance indices of obstacle detection for an overlapped ultrasonic sensor ring. Due to beam overlap, the entire sensing zone of each ultrasonic sensor can be divided into three smaller sensing subzones, which leads to significant reduction of positional uncertainty in obstacle detection. First, the positional uncertainty in obstacle detection is expressed in terms of the area of a sensing subzone, and type 1 performance index is then defined as the area ratio of side and center sensing subzones. Second, based on the area of a sensing subzone, type 2 performance index is defined taking into account the size of the entire range of obstacle detection as well as the degree of the positional uncertainty in obstacle detection. Third, the positional uncertainty in obstacle detection is now expressed in terms of the length of the uncertainty arc spanning a sensing subzone, and type 3 performance index is then defined as the average value of the uncertainty arc lengths over the entire range of obstacle detection. Fourth, using a commercial low directivity ultrasonic sensor, the changes of three different performance indices depending on the parameter of an overlapped ultrasonic sensor ring are examined and compared.