• Title/Summary/Keyword: beam overlap

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The ocused Ion Beam Etching Characteristic of Au (집속 이온빔 가공변수에 따른 Au 에칭 특성 연구)

  • Park, J.J.;Kim, S.D.
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.16 no.5
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    • pp.129-133
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    • 2007
  • Focused Ion Beam(FIB) systems is a useful tool for the fabrication of micro-nano scale structures. In this study, the effects of FIB etching on the Au microstructure are systematically investigated. As the fabrication parameters, ion dose, dwell time and beam overlap ratio are studied. First, the increases of Ga ion dose makes the milling yield higher and the sidewall of milling profile steeper. Dwell time is found to have little effects on the milling profile due to the relatively large milling area of $1\times1{\mu}m^2$ used in this study. However, beam overlap significantly affects not only milling rate but also milling profile. As the beam overlap ratio changes from positive to negative, the development of regular cross-stripe patterns at the bottom with low milling rate is observed.

The Femto Second Laser Induced Ablation on the Titanium Alloy for Various Beam Overlap Ratio (빔 중첩율에 따른 티타늄 합금의 펨토초 레이저 어블레이션)

  • Chung, Il-Young;Kang, Kyung-Ho;Kim, Jae-Do
    • Journal of the Korean Society for Precision Engineering
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    • v.27 no.11
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    • pp.17-23
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    • 2010
  • Titanium alloy is one of the hard processing materials made by the traditional manufacturing method because of the excellent mechanical strength. Ablation of titanium alloy is investigated by using a femtosecond laser which is a regenerative amplified Ti:sapphire laser with 1kHz repetition rate, 184fs pulse duration time and 785nm wavelength. Experiments are carried out under various ablation conditions with different pulse overlap ratios for the rectangular shape and micro hole. Test results show that the ablation characteristic according to pulse overlap ratio of titanium alloy seems to be as non-linear type at the different zone of energy fluence. The optimal condition of rectangular shape processing is obtained at the laser peak power 1.3mW, pulse overlap ratio of 90%, beam gap of $1\;{\mu}m$. The micro hole has a good quality from the pulse overlap ratio of 99% at the same laser peak power. With the optimal processing condition, the fine rectangular shape and micro hole without burr and thermal damage are achieved.

Overlap properties of reference beams far localized recording of neighboring holograms (이웃한 국소 홀로그램 기록을 위한 기준빔의 겹침 특성)

  • 오용석;김복수;장주석;김지덕;이홍석
    • Korean Journal of Optics and Photonics
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    • v.14 no.1
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    • pp.65-71
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    • 2003
  • To maximize the storage density in a localized hologram recording method, each hologram should be recorded as close as possible to its neighboring holograms. In this case, the reference beams used to record two adjacent holograms may overlap in spatial multiplexing. Through simulations and experiments, we show that there exists an optimal reference beam size to minimize the overlap for a given shifting distance of the reference beams in spatial multiplexing. Thus the advantages of the localized hologram recording method can be minimally sacrificed while the storage density is increased.

Optimal Design of Overlapped Ultrasonic Sensor Ring for High Performance Obstacle Detection Using Effective Beam Overlap (효과적인 빔 폭 중첩을 이용한 고성능 장애물 탐지용 중첩 초음파 센서 링의 최적 설계)

  • Kim, Sung-Bok;Kim, Hyun-Bin
    • Journal of the Institute of Convergence Signal Processing
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    • v.12 no.1
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    • pp.67-75
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    • 2011
  • This paper presents the systematic optimal design of an overlapped ultrasonic sensor ring for high performance obstacle detection using effective beam overlap. Basically, a set of low directivity ultrasonic sensors of the same type are arranged in a circle at regular intervals with their beams overlapped. First, both real and simplified beam patterns of an ultrasonic sensor and several sensor models for obstacle position estimation within its beam pattern are introduced. Second, the obstacle detection range of an overlapped ultrasonic sensor ring and its simple sensor model for obstacle position estimation are described. Third, for both conic and non-conic shaped beam pattern, the design indices of an overlapped ultrasonic sensor ring for minimal positional uncertainty in obstacle detection are defined. Fourth, the constraints imposed on the structural parameters of an overlapped ultrasonic sensor ring to guarantee non empty beam overlap and to avoid excessive beam overlap are derived. Fifth, the optimal number of ultrasonic sensors for a given radius of an overlapped ultrasonic sensor ring and the optimal radius of an overlapped ultrasonic sensor ring are determined. Throughout this paper, the MA40B8 from Murata Inc. is taken as a representative commercial low directivity ultrasonic sensor.

Optimal Design of Overlapped Ultrasonic Sensor Ring for High Resolution Obstacle Detection (고분해능 장애물 탐지를 위한 중첩 초음파 센서 링의 최적 설계)

  • Kim, Sung-Bok;Kim, Hyun-Bin
    • Journal of Institute of Control, Robotics and Systems
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    • v.17 no.2
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    • pp.79-87
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    • 2011
  • This paper presents the optimal design of an overlapped ultrasonic sensor ring for high resolution obstacle detection of an autonomous mobile robot. It is assumed that a set of low directivity ultrasonic sensors of the same type are arranged along a circle of nonzero radius at a regular spacing with their beams overlapped. First, taking into account the dead angle region, the entire range of obstacle detection is determined with reference to the center of an overlapped ultrasonic sensor ring. Second, the optimal design index of an overlapped ultrasonic sensor ring is defined as the area closeness of three sensing subzones resulting from beam overlap. Third, the lower and upper bounds on the number of ultrasonic sensors are derived, which can guarantee minimal beam overlap and also avoid excessive beam overlap among adjacent ultrasonic sensors. Fourth, employing a commercial low directivity ultrasonic sensor, an optimal design example of an overlapped ultrasonic sensor ring is given along with the ultrasonic sensor ring prototype mounted on top of a mobile robot. Finally, some experimental results using our prototype ultrasonic sensor ring are given to demonstrate the validity and performance of an optimally overlapped ultrasonic sensor ring for high resolution obstacle detection.

Thin-Beam Excimer Laser Annealing

  • Ang, Woo Boon;Rothweiler, Dirk;Knowles, David
    • 한국정보디스플레이학회:학술대회논문집
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    • 2007.08b
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    • pp.1061-1064
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    • 2007
  • Thin Beam Excimer Laser Annealing is investigated as one possible process enabled by the variable concept of Thin Beam LTPS processing. The structure of the resulting p-Si material is analyzed in terms of grain size distribution, scaling with energy density and overlap, as well as average surface roughness. This process provides similar control and latitude as conventional excimer laser annealing, but reduced average surface roughness and the potential to be scaled to significant productivity levels.

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Fabrication of a Nano Pattern Using Focused Ion Beam (집속이온빔을 이용한 나노 패턴 형성)

  • Han J.;Min B.K.;Lee S.J.;Park C.W.;Lee J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.06a
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    • pp.1531-1534
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    • 2005
  • Nano pattern is being utilized to produce micro optical components, sensors, and information storage devices. In this study, a study on nano pattern fabrication using raster-scan type Focused Ion Beam (FIB) milling is introduced. Because the intensity of ion beam has Gaussian distribution, the overlapping of the Gaussian beam results in a 3D pattern, and the shape of the pattern can be adjusted by variation of FIB milling parameters, such as overlap, ion dose, and dwell time. The Gaussian shape of single beam intensity has been investigated by experiment, and 3D nano patterns with pitch of 200nm generated by FIB is demonstrated.

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The Influence of Parameters Controlling Beam Position On-Sample During Deposition Patterning Process with Focused Ion Beam (빔 위치 관련 제어인자가 집속이온빔 패턴 증착공정에 미치는 영향)

  • Kim, Joon-Hyun;Song, Chun-Sam;Kim, Youn-Jea
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.32 no.3
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    • pp.209-216
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    • 2008
  • The application of focused ion beam (FIB) depends on the optimal interaction of the operation parameters between operating parameters which control beam and samples on the stage during the FIB deposition process. This deposition process was investigated systematically in C precursor gas. Under the fine beam conditions (30kV, 40nm beam size, etc), the effect of considered process parameters - dwell time, beam overlap, incident beam angle to tilted surface, minimum frame time and pattern size were investigated from deposition results by the design of experiment. For the process analysis, influence of the parameters on FIB-CVD process was examined with respect to dimensions and constructed shapes of single and multi- patterns. Throughout the single patterning process, optimal conditions were selected. Multi-patterning deposition were presented to show the effect of on-stage parameters. The analysis have provided the sequent beam scan method and the aspect-ratio had the most significant influence for the multi-patterning deposition in the FIB processing. The bitmapped scan method was more efficient than the one-by-one scan type method for obtaining high aspect-ratio (Width/Height > 1) patterns.

A Study on the Characteristics of Member Force, Horizontal Displacement and Concrete Strength by Design Elements of SPW Retaining Walls (SPW 흙막이 벽체의 설계요소별 부재력과 수평변위 및 콘크리트강도 특성 연구)

  • Wan-Ho Kim;Yu-Seok Shin;Yeong-Jin Lee;Yong-Chai Chang;Kang-Il Lee
    • Journal of the Korean Geosynthetics Society
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    • v.22 no.1
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    • pp.75-85
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    • 2023
  • In areas where excavation works are carried out, it is very important to select a retaining wall method to minimize ground water level and ground subsidence changes. In this regard, the use of Secant Pile Wall(SPW) method, which can complement the disadvantages of the CIP method, is gradually domestic increasing for the construction of retaining wall method. This study investigated the design elements of the SPW method and the interrelationship between the structural stability factors of the wall. The design elements for the retaining method are the overlap length between piles, pile diameter, and the specifications of the H-Beam specifications, while the structural stability factors of the wall are the bending stress, shear stress, horizontal displacement, and concrete strength. The study results showed that the pile diameter and H-Beam specifications have a significant impact on the capacity of the H-Beam, the overlap length and pile diameter have a significant impact on the horizontal displacement, and the pile diameter and H-Beam specifications have a significant impact on the required strength of the concrete.

Comparative Analysis on Performance Indices of Obstacle Detection for an Overlapped Ultrasonic Sensor Ring (중첩 초음파 센서 링의 장애물 탐지 성능 지표 비교 분석)

  • Kim, Sung-Bok;Kim, Hyun-Bin
    • Journal of Institute of Control, Robotics and Systems
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    • v.18 no.4
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    • pp.321-327
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    • 2012
  • This paper presents a comparative analysis on three different types of performance indices of obstacle detection for an overlapped ultrasonic sensor ring. Due to beam overlap, the entire sensing zone of each ultrasonic sensor can be divided into three smaller sensing subzones, which leads to significant reduction of positional uncertainty in obstacle detection. First, the positional uncertainty in obstacle detection is expressed in terms of the area of a sensing subzone, and type 1 performance index is then defined as the area ratio of side and center sensing subzones. Second, based on the area of a sensing subzone, type 2 performance index is defined taking into account the size of the entire range of obstacle detection as well as the degree of the positional uncertainty in obstacle detection. Third, the positional uncertainty in obstacle detection is now expressed in terms of the length of the uncertainty arc spanning a sensing subzone, and type 3 performance index is then defined as the average value of the uncertainty arc lengths over the entire range of obstacle detection. Fourth, using a commercial low directivity ultrasonic sensor, the changes of three different performance indices depending on the parameter of an overlapped ultrasonic sensor ring are examined and compared.