• Title/Summary/Keyword: beam design

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KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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Development of a V-band Rotman Lens Using Thin-Film Dielectric (Thin-Film Dielectric을 이용한 V-band Rotman Lens의 개발)

  • Lee, Jang-Soo;Park, Sang-Bok;Lee, Dong-Kyu;Song, Saeng-Seob;Lee, Sang-Hyo;So, Joon-Ho;Kwon, Young-Woo;Seo, Kwang-Seok;Cheon, Chang-Yul
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.17 no.11 s.114
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    • pp.1073-1081
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    • 2006
  • In this paper, a phased array antenna based on thin-film dielectric technology at 60 GHz is designed. In order to reduce dividing/combining loss and avoid high loss of phase shifters, Rotman Lens has been employed as a feeder of antenna. The lens has 3 beam ports and 5 array ports with 2 dummy ports. The simulation for the design was performed by simulator using MoM(method of moments). The measured results of fabricated lens show magnitude deviation less than ${\pm}2dB$ and phase aberration less than ${\pm}5^{\circ}$ over $58{\sim}62GHz$. The antenna shows ${\pm}7^{\circ}$ of scan angles.

Design of a Double-Faced Monopole Antenna Using the Coupling Effect of Induced Currents (유도 전류의 커플링 효과를 이용한 모노폴 안테나 설계)

  • Choi, Young;Lee, Seungwoo;Kim, Nam
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.12
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    • pp.1327-1336
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    • 2012
  • In this paper, the dual-faced monopole antenna, which is arranged by numerous rectangular ring patches in sequence for the multi-bands is proposed. The ring type structure of the patch can be increased the bandwidth. Therefore the bandwidth and beam width are improved by using multiple arrayed patches. When the ring type patches are inserted serially, the resonance frequencies are occurred by the current flow from the first ring patch. It is possible because the gap between the patches is very narrow. In addition, if the patches are composed on the same plane as the feed-line, fabrication could be very difficult because the gap between the patches is extremely narrow. The thickness and permittivity of the antenna, moreover, are very important parameters because both sides of the substrate are used. We finally found the optimal thickness and permittivity to generate the coupling effect by simulation. All patches are consisted of 4-steps which the patch size was decreased 85 % by each step. In conclusion, the resonant frequency bands are 1.75~2.6 GHz(850 MHz), 3.24~3.46 GHz(220 MHz), 3.8~4.0 GHz(200 MHz), and 4.4~4.9 GHz(500 MHz).

Evaluation on the Behavioral Characteristics of Plastic Greenhouse by Full-scale Testing and Finite Element Analysis (재하시험과 유한요소해석에 의한 플라스틱 필름 온실의 거동특성 분석)

  • Ryu, Hee Ryong;Lee, Eung Ho;Cho, Myeong Whan;Yu, In Ho;Kim, Young Chul
    • Journal of Bio-Environment Control
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    • v.21 no.4
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    • pp.459-465
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    • 2012
  • This study analyzed the effect of semi-rigid rafter-purlin cross-linking connection and driven steel pipe base on the static behavior of plastic greenhouse (PG). To promote the time and cost efficiency of the assembly process, each cross-linking connections of space arch type grid that consists of rafter and purlin is linked with steel-wire buckles, and each end of the rafters was driven directly to the ground to support the PG structure. However, in the design process, cross-linking connections and bases are idealized by being categorized as fully rigid or frictionless pinned, which does not appropriately reflect actual conditions. This study takes a full-scale loading test of PG and analyzes the effect of member cross-linking connections and driven steel pipe base on the behavior of a structure. The analysis provided a basis for determining the rigidity factor of member cross-linking nodes needed for finite element analysis, and the reliability of the result regarding the static behavior of PG.

Development of Multi-span Plastic Greenhouse for Tomato Cultivation (토마토 재배용 연동 플라스틱 온실 개발)

  • Yu, In Ho;Lee, Eung Ho;Cho, Myeong Whan;Ryu, Hee Ryong;Kim, Young Chul
    • Journal of Bio-Environment Control
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    • v.21 no.4
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    • pp.428-436
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    • 2012
  • This study aimed to develop the multi-span plastic greenhouse which is suitable for tomato cultivation and is safe against climatic disasters such as typhoon or heavy snow. The width and heights of eaves and ridge of newly developed tomato greenhouse are 7, 4.5 and 6.5 m, respectively. The width is the same but the eaves and ridge heights are 1.8 and 2 m higher than conventional 1-2 W greenhouses, respectively. Cross beam has been designed as a truss structure so it can sustain loads of tomato and equipment. Tomato greenhouse has been designed according to climatic disaster preventing design standard maintaining the high height. In other words, the material dimensions and interval of materials including column and rafter have been set to stand against $40m{\cdot}s^{-1}$ of wind and 40 cm of snow. Tomato greenhouse has been equipped with rack-pinion type roof vents which have been used in glass greenhouse in order to prevent excessive rise in air temperature. This vent type is different from that of 1-2 W type greenhouse which is made by rolling up and down the vinyl at upper part of column. Roof vents are installed at ridge, and thus external air inflow and natural ventilation are maximized. As the height increases, heating cost increase as well and, therefore, tomato greenhouse has been equipped with multi-layered thermal curtain, of which thermo-keeping is excellent, to prevent heat from escaping.

New Suggestion of Effective Moment of Inertia for Beams Reinforced with the Deformed GFRP Rebar (이형 GFRP Rebar로 보강된 보의 유효단면이차모멘트 산정식 제안)

  • Sim, Jong-Sung;Oh, Hong-Seob;Ju, Min-Kwan;Lim, Jun-Hyun
    • Journal of the Korea Concrete Institute
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    • v.20 no.2
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    • pp.185-191
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    • 2008
  • To fundamentally solve the problem of deterioration of concrete structures, it has been researched that the high durable concrete structure reinforced with the FRP rebar can be one of major solution to the newly-developed concrete structure. FRP rebar has lots of advantages such as non-corrosive, high performance and light weight against the conventional steel rebar. Among these kinds of FRP rebars, GFRP rebar has usually been considered as the best reinforcement because of its economic point of view. Even though the material capacity of the GFRP rebar was already investigated, there are some problems such as low modulus of elastic that will be cause for degrade of the serviceability of flexural concrete member reinforced with the GFRP rebar. Thus, the deflection characteristics of the GFRP rebar reinforced concrete structure should be considered then investigated. In this study, ACI 440 guideline (2003), ISIS Canada Design Manual (2001) and Toutanji et al. (2000) was considered for predicting the moment of inertia of the concrete beam reinforced with the GFRP rebar. And it was also evaluated that load-deflection relationship had a good accordance with the test and analysis result. In the result of this study, it could be estimated that the load-deflection relationship using the suggested equation of moment of inertia in this study indicated better accordance with the test result than that of the others until failure.

THE EFFECT OF ETHYLENE GLYCOL ANALOGS ON MECHANICAL PROPERTIES OF MOIST DEMINERALIZED DENTIN MATRIX (Ethylene Glycol 유사체가 탈회된 상아질의 물리적 성질에 미치는 영향)

  • Lee Kyung-Hee;Cho Young-Gon;Lee Kwang-Won
    • Restorative Dentistry and Endodontics
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    • v.31 no.4
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    • pp.290-299
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    • 2006
  • Objectives: The purpose of this study is to evaluate the effect of ethylene glycol analogs on modulus of elasticity and ultimate tensile strength of moist, demineralized dentin matrix. Methods: Dentin disks 0.5 mrn thick were prepared from mid-coronal dentin of extracted. unerupted, human third molars. 'I' beam and hour-glass shaped specimens were prepared from the disks, the ends protected with nail varnish and the central regions completely demineralized in 0.5M EDTA for 5 days. Ultimate tensile stress (UTS) and low strain modulus of elasticity (E) were determined with specimens immersed for 60 min in distilled water $(H_{2}O)$, ethylene glycol $(HO-CH_{2}-CH_{2}-OH)$, 2-methoxyethanol $(H_{3}CO-CH_{2}-CH_{2}-OH)$, and 1,2-dimethoxyethane $(H_{3}CO-CH_{2}-CH_{3}-OCH_{3})$ prior to testing in those same media. Modulus of elasticity was measured on the same specimens in a repeated measures experimental design. The results were analyzed with a one-way ANOVA on ranks, followed by Dunn's test at ${\alpha}\;=\;0.05$. Regression analysis examined the relationship between UTS or E and hoy's solubility parameter for hydrogen bonding $({\delta}_{h})$ of each solvent. Results: The UTS of demineralized dentin in water, ethylene glycol, 2-methoxyethanol, and 1,2-dimethoxyethane was 24 (3), 30 (5), 37 (6), and 45 (6) MPa, ${\times}$ (SD) N = 10. Low strain E for the same media were 16 (13), 23 (14), 52 (24), and 62 (22) MPa. Regression analysis of UTS vs ${\delta}_{h}$ revealed a significant $(p\;<\;0.0001,\;r\;=\;-0.99,\;R^{2}\;=\;0.98)$ inverse, exponential relationship. A similar inverse relationship was obtained between low strain E vs ${\delta}_{h}\;(p\;<\;0.0005,\;r\;=\;-0.93,\;R^{2}\;=\;0.86)$. Significance: The tensile properties of demineralized dentin are dependent upon the hydrogen bonding ability of polar solvents $({\delta}_{h})$. Solvents with low ${\delta}_{h}$ values may permit new interpeptide H-bonding in collagen that increases its tensile properties. Solvents with high ${\delta}_{h}$ values prevent the development of these new interpeptide H-bonds.

The Effect of Internal Row on Marine Riser Dynamics (Riser의 내부유체 흐름이 Riser 동적반응에 미치는 영향)

  • Hong, Nam-Seeg
    • Journal of Korean Society of Coastal and Ocean Engineers
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    • v.7 no.1
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    • pp.75-90
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    • 1995
  • A mathematical model for the dynamic analysis of a riser system with the inclusion of internal flow and nonlinear effects due to large structural displacements is developed to investigate the effect of internal flow on marine riser dynamics. The riser system accounts fir the nonlinear boundary conditions and includes a steady flow inside the pipe which is modeled as an extensible or inextensible. tubular beam subject to nonlinear three dimensional hydrodynamic loads such as current or wave excitation. Galerkin's finite element approximation and time incremental operator are implemented to derive the matrix equation of equilibrium for the finite element system and the extensibility or inextensibility condition is used to reduce degree of freedom of the system and the required computational time in the case of a nonlinear model. The algorithm is implemented to develop computer programs used in several numerical applications. The investigations of the effect of infernal flow on riser vibration due to current or wave loading are performed according to the change of various parameters such as top tension, internal flow velocity, current velocity, wave period, and so on. It is found that the effect of internal flow can be controlled by the increase of top tension. However, careful consideration has to be given in the design point particularly for the long riser under the harmonic loading such as waves. And it is also found that the consideration of nonlinear effects due to large structural displacements increases the effect of internal flow on riser dynamics.

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A study on the correlation between the degree of elasticity uniformity and the dynamic performance in the overhead contact lines (전차선로 탄성도 불균일율과 동역학적 성능과의 관계에 대한 연구)

  • Park, Sa-Hoon;Kwon, Sam-Young
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.11a
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    • pp.502-502
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    • 2007
  • A catenary system should be designed to have an uniform elasticity over a span in order to maintain the lowest possible loss of contact between a pantograph and a contact wire. A elasticity uniformity of a catenary can be regarded as a important design factor used for predicting the current collection performance for a catenary. There are a couple of formulas to calculate the degree of elasticity uniformity of a catenary according to the literature survey. The effectiveness of these formulas is reviewed by performing catenary elasticity and loss of contact analysis for various different configurations of catenary systems using a beam element based FEM program. The results reveals that these formulas are not suitable to predict the current collection performance for a catenary. Therefore, a new formula based on the standard deviation of the elasticity over a span is proposed in this study. The analysis results show that the new formula for an elasticity uniformity of a catenary is very effective in predicting the current collection performance for a catenary.

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A study on the Bending Property of Structural Size Skin-Timber (대단면 스킨팀버의 휨 성질에 관한 연구)

  • Kim, Gwang-Chul
    • Journal of the Korean Wood Science and Technology
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    • v.40 no.1
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    • pp.26-37
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    • 2012
  • Recently, the demand and supply on the Hanok have been increased. However, Hanok should be requested larger section of structural members because of excessive roof weight. So, structural skin-timber was manufactured to get a lightweight structural member. The structural skin-timber has exterior shape with larger section but a great volume of wood be removed. The reduced strength of structural skin-timber can be supplemented by hybridizaion of structural member. Japanese larch and Domestic pine were used to manufacture the structural skin-timber. Structural skin-timbers of rectangular shape and cylinder shape were manufactured and tested to evaluate the bending properties. The intended strength property could not be obtained because member had been suffered severe damage by precision deficiency of manufacturing machine. However, if precision of manufacturing machine would be improved and additional hybridizaion of structural skin-timber would be done, lightweight structural member will be able to be manufactured. Structural skin-timber did not showed statistical significancy between two species, so it is possible to use pine mixed with larch. Only MOR of larch showed statistical significancy between rectangular shape and cylinder shape, so it is necessary to use of those as separate things. However, the rest of skin-timber can be judged mixed using because of non statistical significancy. The objective of this study was the development of lightweight larger structural member with relatively strength. If hybrid member of skin-timber could be developed with wood-ceramics, lightweight steel and more, it can be possible to be used as a building material of Hanok, interior material, post & beam construction material and more.