• Progress in Superconductivity and Cryogenics
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• v.7 no.3
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• pp.9-12
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• 2005

[ $Y_1Ba_2Cu_3O_{7-8}$ ] (YBCO) coated conductor has been fabricated by batch-type process using oxide-precursor-based metal-organic deposition (MOD) method. The batch-type process can be scaled up more simply to Produce long-length YBCO conductor than the reel-to-reel process. Also, it has less handling problems and is adequate to the ambient gas environment. In this work, YBCO oride powder was used as a starting precursor for MOD method. After reel-to-reel dip coating process, me ter-long-buffered metal tape was wound around a cylinder and underwent calcination and annealing processes. Annealed YBCO films showed good c-axis alignment and dense surface morphology with no cracks, but exhibited very low critical current density of $10^5\;A/cm^2$.

• Progress in Superconductivity and Cryogenics
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• v.8 no.1
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• pp.23-25
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• 2006

Optimization of process variables, including oxygen and water partial pressure and also an nesting temperature, was performed in batch-type process to fabricate YBCO films on LaAlO3 single crystal. In this work, YBCO oxide powder was used as a starting precursor for metal-organic deposition(MOD)method. The precursor films were fabricated in batch furnace and they were converted to the epitaxial YBCO films at the same furnace with varying the process variables. The oxygen partial pressure was varied from 100ppm to 2000ppm and the water partial pressure from 1.2% to 12.2%. The window for optimal P(O2) was narrow about 700ppm for batch-type process. YBCO films in bathc-thype MOD process were optimized at 740-770oC and P(H2O) of 2.3%-7.3%.

• Journal of the Semiconductor & Display Technology
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• v.5 no.2 s.15
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• pp.41-46
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• 2006

Wet etching process in recent semiconductor manufacturing is devided into batch and single wafer type. Batch type wet etching process provides more throughput with poor etching uniformity compared to single wafer type process. Single wafer process achieves better etching uniformity by boom-swing injected chemical on rotating wafer. In this study, etching characteristics of $SiO_2$ layer at room and elevated temperature is evaluated and compared. The difference in etching rate and uniformity of each condition is identified, and the temperature profile of injected chemical is theoretically calculated and compared to that of experimental result. Better etching uniformity is observed with single wafer tool with boom-swing injection compared to single wafer process without boom-swing or batch type tool.

• 한국초전도학회:학술대회논문집
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• v.15
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• pp.65-65
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• 2005

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.3
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• pp.195-202
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• 1998

The LPCVD system of batch type for the massproduction of semiconductor fabrication has a problem of phosphorous concentration uniformity in the boat. In this paper we study an improvement of the uniformity for phosphorous concentration and sheet resistance. These property was improved by using the nitrogen process and modified long nozzle for gas injection tube in the doped polysilicon deposition system. The phosphorous concentration and its uniformity for polysilicon film are measured by XRF(X-ray Fluorescence) for the conventional process condition and nitrogen process. In conventional process condition, the phosphorous concentration, it uniformity and sheet resistance for polysilicon film are in the range of 3.8~5.4$\times$10\ulcorner atoms/㎤, 17.3% and 59~$\Omega$/ , respectively. For the case of nitrogen process the corresponding measurements exhibited between 4.3~5.3$\times$10\ulcorner atoms/㎤, 10.6% and 58~81$\Omega$/ . We find that in the nitrogen process the uniformity of phosphorous concentration improved compared with conventional process condition, however, the sheet resistance in the up zone of the boat increased about 12 $\Omega$/ . In modified long nozzle, the phosphorous concentration, its uniformity and sheet resistance for polysilicon films are in the range of 4.5~5.1$\times$10\ulcorner atoms/㎤, 5.3% and 60~65$\Omega$/ respectively. Annealing after $N_2$process gives the increment of grain size and the decrement of roughness. Modification of nozzle gives the increment of injection amount of PH$_3$. Both of these suggestion result in the stable phosphorous concentration and sheet resistance. The results obtained in this study are also applicable to process control of batch type system for memory device fabrication.

• Journal of Korean Institute of Industrial Engineers
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• v.38 no.2
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• pp.89-97
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• 2012

This paper considers a manufacturer with a two-station make-to-stock and make-to-order serial production system. The MTS facility produces a single type of component and provides components for the MTO facility that produces customized products. In addition to the internal demand from the MTO facility, the MTS facility faces demands from the spot market with the option of to accept or reject each incoming demand. This paper addresses a joint component inventory rationing and batch production control which maximizes the manufacturer's profit. Using the Markov decision process model, we investigate the structural properties of the optimal inventory rationing and batch production policy, and present two types of heuristics. We implement a numerical experiment to compare the performance of the optimal and heuristic policies and a simulation study to examine the impact of the stochastic process variability on the inventory rationing and batch production control.

• Journal of Institute of Control, Robotics and Systems
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• v.2 no.3
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• pp.148-157
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• 1996

Availability of input trajectories corresponding to desired output trajectories is often important in designing control systems for batch and other transient processes. In this paper, we propose a predictive control-type model-based iterative learning algorithm which is applicable to finding the nominal input trajectories of a linear time-invariant batch process. Unlike the other existing learning control algorithms, the proposed algorithm can be applied to nonsquare systems and has an ability to adjust noise sensitivity as well as convergence rate. A simple model identification technique with which performance of the proposed learning algorithm can be significantly enhanced is also proposed. Performance of the proposed learning algorithm is demonstrated through numerical simulations.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.43 no.4
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• pp.23-32
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• 2020

Many small and medium-sized manufacturing companies process various product types to respond different customer orders in a single production line. To improve their productivity, they often apply batch processing while considering various product types, constraints on batch sizes and setups, and due date of each order. This study introduces a batch scheduling heuristic for a production line with multiple product types and different due dates of each order. As the process times vary due to the different batch sizes and product types, a recursive equation is developed based on a flow line model to obtain the upper bound on the completion times with less computational complexity than full computation. The batch scheduling algorithm combines and schedules the orders with same product types into a batch to improve productivity, but within the constraints to match the due dates of the orders. The algorithm incorporates simple and intuitive principles for the purpose of being applied to small and medium companies. To test the algorithm, two case studies are introduced; a high pressure coolant (HPC) manufacturing line and a press process at a plate-type heat exchanger manufacturer. From the case studies, the developed algorithm provides significant improvements in setup frequency and thus convenience of workers and productivity, without violating due dates of each order.

• Applied Chemistry for Engineering
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• v.20 no.5
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• pp.542-546
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• 2009

Methane production using the mixed organic wastes of peel-type fruit wastes from apple or orange and sewage sludge was investigated in the batch anaerobic degradation process. When apple or orange peels with sewage sludge were used as mixed substrates, higher methane production was achieved under the condition of 3 : 7 (fruit peel : sewage sludge) mixing ratio. However, above the 3 : 7 mixing ratio, the pH of mixture was decreased from 8.0 to 4.5~4.7 due to organic acid production from the fruit wastes. Subsequently, methane production was low. The results in this study could be effectively applied to the methane gas production system as a bioenergy in the mixed batch anaerobic digestion process using the peel-type fruit wastes and sewage sludge.

• Journal of Korean Society of Industrial and Systems Engineering
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• v.30 no.1
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• pp.33-40
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• 2007

A multi-server queueing system with finite buffer is considered. The input flow is the BMAP (Batch Markovian Arrival Process). The service time has the PH (Phase) type distribution. Customers from the BMAP enter the system according to the discipline of partial admission. Besides ordinary (positive) customers, the Markovian flow (MAP) of negative customers arrives to the system. A negative customer can delete an ordinary customer in service if the state of its PH-service process belongs to some given set. In opposite case the ordinary customer is considered to be protected of the effect of negative customers. The stationary distribution and the main performance measures of the considered queueing system are calculated.