• 제목/요약/키워드: barrier function

검색결과 593건 처리시간 0.037초

Fabrication and characterization of $WSi_2$ nanocrystals memory device with $SiO_2$ / $HfO_2$ / $Al_2O_3$ tunnel layer

  • Lee, Hyo-Jun;Lee, Dong-Uk;Kim, Eun-Kyu;Son, Jung-Woo;Cho, Won-Ju
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2011년도 제40회 동계학술대회 초록집
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    • pp.134-134
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    • 2011
  • High-k dielectric materials such as $HfO_2$, $ZrO_2$ and $Al_2O_3$ increase gate capacitance and reduce gate leakage current in MOSFET structures. This behavior suggests that high-k materials will be promise candidates to substitute as a tunnel barrier. Furthermore, stack structure of low-k and high-k tunnel barrier named variable oxide thickness (VARIOT) is more efficient.[1] In this study, we fabricated the $WSi_2$ nanocrystals nonvolatile memory device with $SiO_2/HfO_2/Al_2O_3$ tunnel layer. The $WSi_2$ nano-floating gate capacitors were fabricated on p-type Si (100) wafers. After wafer cleaning, the phosphorus in-situ doped poly-Si layer with a thickness of 100 nm was deposited on isolated active region to confine source and drain. Then, on the gate region defined by using reactive ion etching, the barrier engineered multi-stack tunnel layers of $SiO_2/HfO_2/Al_2O_3$ (2 nm/1 nm/3 nm) were deposited the gate region on Si substrate by using atomic layer deposition. To fabricate $WSi_2$ nanocrystals, the ultrathin $WSi_2$ film with a thickness of 3-4 nm was deposited on the multi-stack tunnel layer by using direct current magnetron sputtering system [2]. Subsequently, the first post annealing process was carried out at $900^{\circ}C$ for 1 min by using rapid thermal annealing system in nitrogen gas ambient. The 15-nm-thick $SiO_2$ control layer was deposited by using ultra-high vacuum magnetron sputtering. For $SiO_2$ layer density, the second post annealing process was carried out at $900^{\circ}C$ for 30 seconds by using rapid thermal annealing system in nitrogen gas ambient. The aluminum gate electrodes of 200-nm thickness were formed by thermal evaporation. The electrical properties of devices were measured by using a HP 4156A precision semiconductor parameter analyzer with HP 41501A pulse generator, an Agillent 81104A 80MHz pulse/pattern generator and an Agillent E5250A low leakage switch mainframe. We will discuss the electrical properties for application next generation non-volatile memory device.

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Work Function Modification of Indium Tin Oxide Thin Films Sputtered on Silicon Substrate

  • Oh, Gyujin;Kim, Eun Kyu
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.351.2-351.2
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    • 2014
  • Indium tin oxide (ITO) has a lot of variations of its properties because it is basically in an amorphous state. Therefore, the differences in composition ratio of ITO can result in alteration of electrical properties. Normally, ITO is considered as transparent conductive oxide (TCO), possessing excellent properties for the optical and electrical devices. Quantitatively, TCO has transparency over 80 percent within the range of 380nm to 780nm, which is visible light although its specific resistance is less than $10-3{\Omega}/cm$. Thus, the solar cell is the best example for which ITO has perfectly matching profile. In addition, when ITO is used as transparent conductive electrode, this material essentially has to have a proper work function with contact materials. For instance, heterojunction with intrinsic thin layer (HIT) solar cell could have both front ITO and backside ITO. Because each side of ITO films has different type of contact materials, p-type amorphous silicon and n-type amorphous silicon, work function of ITO has to be modified to transport carrier with low built-in potential and Schottky barrier, and approximately requires variation from 3 eV to 5 eV. In this study, we examine the change of work function for different sputtering conditions using ultraviolet photoelectron spectroscopy (UPS). Structure of ITO films was investigated by spectroscopic ellipsometry (SE) and scanning electron microscopy (SEM). Optical transmittance of the films was evaluated by using an ultraviolet-visible (UV-Vis) spectrophotometer

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생체활성 각질층 지질 - 아토피 피부염 관리를 중심으로 - (Stratum Corneum Lipids as Bioactive Materials for Atopic Dermatitis)

  • 박병덕;염종경;안성구;이승헌
    • 대한화장품학회지
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    • 제30권3호
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    • pp.345-352
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    • 2004
  • 아토피 피부염을 설명하는 데는 두 가지 패러다임이 있는데, 첫 번째는 outside-inside paradigm이고 두 번째는 inside-ouside paradigm이다. Outside-inside paradigm에 의하면 아토피 피부염을 치료하기 위한 가장 좋은 방법은 피부 장벽 기능을 회복시키는 것이다. 장벽 기능은 각질층의 특징적인 구조에 의해 유지되는데, 각질층은 층상구조의 inter-cellular lipids와 corneocyte로 구성되어 있다. 아토피 피부염 환자, 층판상 어린선 환자의 각질층 내 층상구조는 hexagonal 구조가 많이 존재하고 있음을 보였으며, 이는 Ceramide 1 타입과 long chain fatty acid의 감소 때문이라고 보여진다. 이러한 이유에서 라멜라구조를 가지며 intercellular long periodicity phase 기능을 복원할 수 있는 보습제는 각질층의 intercellular lipid의 층상구조를 복원시킬 수 있을 것이다. 또한 세라마이드와 유사세라마이드를 함유한 보습제는 손상된 피부장벽, 피부질환, 아토피 피부염을 위한 유용한 치료제로 사용할 수 있다. Inside-outside paradigm에 따르면, 아토피 피부염 등이 보조 T cell, lg E, eosinophil 등을 포함한 면역반응과 관계되는데, 특히 Th1/Th2 imbalance의 복원이 아토피 피부염을 치료하는데 효과적일 것이다. 현재 여러 종류의 면역억제제가 소개되고 있지만, 이들은 고유 면역기능을 감소시킬 우려를 가지고 있다. 따라서, 세라마이드 대사산물인 SPC와 S1P는 면역조절 기능 및 상처치유의 기능을 가짐으로써 향후 관심이 집중될 것이다.

현장시험 시공을 통한 Z형 강널말뚝의 현장차수특성 분석 (Analysis of Permeability Characteristic for Z type Steel Sheet Pile by Field Test)

  • 이용수;정하익;홍승서;이광범;김상진
    • 한국지반공학회:학술대회논문집
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    • 한국지반공학회 2000년도 봄 학술발표회 논문집
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    • pp.325-330
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    • 2000
  • In general steel sheet pile use the containment system, vertical barrier systems for waste disposal and landfill purposes, roads in excavation which have a more permanent character or temporary structure. The sheet pile joints between section of the wall are sealed with a filter material arid the resistance to seepage is a function of the type of material employed. The aim of this paper is to review a characteristic of permeability for Z type sheet pile by field test in various condition.

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Alkali & Alkaline-Earth Metal Sources for OLED Devices

  • Tominetti, S.;Cattaneo, L.;Longoni, G.;Bonucci, A.;Toia, L.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.1763-1768
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    • 2006
  • Low work function alkali metals and alkaline earths successfully lower the electron injection barrier and increase electron injection into the organic layer in OLED displays, but their implementation is not easy. AlkaMax technology can ensure the required metal evaporation rate in a fast, homogeneous and easily controllable way.

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적외선법과 레이더법에 의한 콘크리트 역타시공 이음부위의 충진상태 평가시험 (Non-destructive Inspection of Top Down construction Joints of Column in SRC Structure using Radar and Thermography Method)

  • 박석균;임영수;차은용;김명모
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2000년도 봄 학술발표회 논문집
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    • pp.799-804
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    • 2000
  • The joint treatment of concrete is one of the technical problems in top down construction method. Joints created wit the top down construction result in serous weakness from the aspects of both structural and water-barrier function. Several case studies for the insepction of top down construction joints of column in SRC structure using radar and infrared thermography method. The advantages and limitations of these methods for non-destructive inspection in top own construction joints are investigated.

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초음파법을 이용한 콘크리트 역타시공 이음부위의 비파괴검사 (Non-destructive Inspection of Top Down Construction Joints of Column in SRC Structure using Ultrasonic Method)

  • 박석균;백운찬;이한범;김명모
    • 한국콘크리트학회:학술대회논문집
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    • 한국콘크리트학회 2000년도 봄 학술발표회 논문집
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    • pp.811-816
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    • 2000
  • The joint treatment of concrete is one of the technical problems in top down construction method. Joints created with the top down construction result in serious weakness from the aspects of both structural and water-barrier function. Ultrasonic method was used for the inspection of top down construction joints of column in SRC structure in this study. As a result it has been verified that the semi-direct measurement method is more effective than the other methods for detecting the voids of construction joints.

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Brain uptake through the blood-brain barrier, pharmacokinetics and analgesic effect of [$^3$H]Oxytocin in the rat

  • Park, Ji-Hyun;Kang, Young-Sook
    • 한국응용약물학회:학술대회논문집
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    • 한국응용약물학회 1998년도 Proceedings of UNESCO-internetwork Cooperative Regional Seminar and Workshop on Bioassay Guided Isolation of Bioactive Substances from Natural Products and Microbial Products
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    • pp.152-153
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    • 1998
  • Oxytocin (OT) is a neurohypophyseal nonapeptide which plays an important role in CNS function as well as uterine contraction during delivery. Furthermore, recently it has been reported that OT may also have analgesic effect and found that the release of OT is related with opioid receptors, especially $\kappa$ and ${\mu}$.

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폴리프로필렌 필름의 전도현상 (Conduction Phenomena of the Polypropylene Film)

  • 이준욱;김용주;김봉협
    • 대한전기학회논문지
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    • 제34권9호
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    • pp.349-354
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    • 1985
  • The conducting currents of polypropylene film was measured a function with electric fields at temperature of 25,35,45( C). It appears that there are four regions of conducting currents, depending upon the strength of the applied electric field` ohmic region based on ionic conduction, Poole-Frenkel region, Schottky region and negative resistance region. Several information of dielectric constant and potential barrier height were obtained.

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