• 설비공학논문집
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• 제13권3호
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• pp.209-216
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• 2001

A numerical study is peformed to investigate the effect of circumferential velocity generated by the guide vane on the nozzle flow of a jet fan, s a way of increasing the penetration force of jet fan with nozzle of 175mm diameter. For the validation of numerical results. the velocity is measured by a 5-hole pitot tube and flow visualization is conducted by the tuft method. Under the inlet condition that the maximum circumferential velocity in the stator outlet of the present jet fan is 1.8m/s, the axial velocity in the nozzle outlet has the feature that the velocity at the axis is low and the velocity near the wall high. Therefore, to increase the throw length of the jet fan, the configuration of the fairing and nozzle needs to be developed and the precise revise of the stator angle is required, In addition, the bigger the circumferential velocity, the smaller the axial velocity at the axis and the bigger non-uniformity of the flow distribution.

• Journal of Advanced Marine Engineering and Technology
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• 제20권4호
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• pp.81-89
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• 1996

In the present study, the unsteady in a square-selctional 180.deg. curved duct are experimentally investigated. The experimental study using air in a square-sectional 180.deg. curved duct is carried out to measure axial velocity distributions with data acquisition and processing system. In this system, Rotating Machinery Resolver(RMR) and PHASE Software are used to obtain the results of unsteady flows. In conclusion, the exact measurement of unsteady flow using LDV system depends upon uniformity of metreials, duct thickness, and scattered particles.

• 대한기계학회논문집B
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• 제23권3호
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• pp.388-397
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• 1999

Numerical simulations are carried out for the magnetic Czochralski single crystal growth system. It Is shown that a magnetic field significantly suppresses the convective flow and as the strength of magnetic field becomes to be stronger, the heat transfer in the melt is dominated by conduction rather than convection. By imposing a cusp magnetic field, the growth interface shape becomes convex toward the melt. When the axial magnetic field is imposed, there occurs an inversion of the interface shape with increase of the magnetic field strength. The oxygen concentration near the interface decreases with increasing cusp magnetic field strength while axial field causes an increase of an oxygen concentration at the central region and decrease of that at the edge of the crystal. The results show that the cusp magnetic field has advantages over an axial magnetic field In the radial uniformity of oxygen as well as in the additional degree of control.

• 한국초전도ㆍ저온공학회논문지
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• 제18권1호
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• pp.50-54
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• 2016

In this paper, a hybrid method is proposed to design an air-core superconducting solenoid system for 6 T axial uniform magnetic field using Niobium Titanium (NbTi) superconducting wire. In order to minimize the volume of conductor, the hybrid optimization method including a linear programming and a nonlinear programming was adopted. The feasible space of solenoid is divided by several grids and the magnetic field at target point is approximated by the sum of magnetic field generated by an ideal current loop at the center of each grid. Using the linear programming, a global optimal current distribution in the feasible space can be indicated by non-zero current grids. Furthermore the clusters of the non-zero current grids also give the information of probable solenoids in the feasible space, such as the number, the shape, and so on. Applying these probable solenoids as the initial model, the final practical configuration of solenoids with integer layers can be obtained by the nonlinear programming. The design result illustrates the efficiency and the flexibility of the hybrid method. And this method can also be used for the magnet design which is required the high homogeneity within several ppm (parts per million).

• 한국진공학회:학술대회논문집
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.248-248
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• 1999

현재 반도체 공정에서 사용하는 건식식각 공정은 고밀도 프라즈마를 사용한 플라즈마 장비를 사용하는 경향이 증대되고 있으며 이와 같은 고밀도 플라즈마 장비의 사용은 반도체 소자의 최소 선폭(CD)이 deep sub-micron으로 감소하고 반면 실리콘 웨이퍼의 크기는 8인치 직경이상으로 증가하여 가고 있어서 그 필요성이 더욱 더 증가되고 있다. 특히 TFT-LCD를 비롯한 PDP, 그리고 FED 등과 같은 여러 가지 형태의 평판 디스플레이의 제조공정에 있어서도 실리콘 기판에 비하여 대면적의 기판을 이용하고 또한 사각형 형태의 시편공정이 요구되므로 평판 디스플레이에서도 고밀도의 균일한 플라즈마 유지가 중요하다. 따라서, 본 실험에서는 여러 가지 형태의 영구자석 및 전자석의 세기 및 배열이 유도결합형 플라즈마에 미치는 효과(plasma&etch uniformity, etch rate, etc.)를 살펴보기 위해서, 유도결합형 플라즈마 chamber(210mm$\times$210mm) 내부에 magnetic cusping을 위한 영구자석용 하우스를 제작하여 표면에서 3000Gauss의 자장세기를 갖는 소형영구자석을 부착하였으며,외벽에는 chamber와 같이 사각형태로 40회 감겨진 50cm$\times$50cm 의 크기로 chamber 상하에 1개씩 Helmholtz 코일 형태로 설치하였다. 식각가스로는 Cl2, HBr, 그리고 BCl3 gas를 이용하여 axial magnet과 multidipole magnet 유무에 따른 반응성 gas의 polysilicon 식각특성을 살펴보았으며, 또한 electrostatic probe(ESP, Hiden Analytic미)를 이용하여 이들 반응성 gas에 대한 magnetically enhanced inductively coupled plasma의 특성분석을 수행하였따. Cl2, HBr, BCl3의 반응성 식각가스 조합을 이용하여 polysilicon의 식각속도 및 식각선택도를 관찰한 결과, 어떠한 자장도 가하지 않은 경우에 비해 gas의 분해율이 가장 높은 영구자석과 전자석의 조합에서 가장 높은 식각도가 관찰되었다. 특히 pure Cl2 플라즈마의 경우, Axial 방향의 전자석만을 가한 경우 식각속도에 있어서는 큰 증가를 보였으나, 식각균일도(식각균일도:8.8%)는 다소 감소하였으며, Axial 방향의 전자석과 영구자석을 조합한 경우 가장 높은 식각속도를 얻었으며, 식각균일도는 Axial 방향의 전자석만을 사용하였을 경우와 비교하여 향상되었다.

• 한국자동차공학회논문집
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• 제17권2호
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• pp.10-19
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• 2009

The working of diesel particulate filters(DPF) needs to periodically burn soot that has been accumulated during loading of the DPF. The prediction of the relation between an uniformity of gas velocity and soot regeneration efficiency with simulations helps to make design decisions and to shorten the development process. This work presents a comprehensive combined 'DOC+CDPF' model approach. All relevant behaviors of flow fluid are studied in a 3D model. The obtained flow fields in the front of DPF is used for 1D simulation for the prediction of the thermal behavior and regeneration efficiency of CDPF. Validation of the present simulation are performed for the axial and radial direction temperature profile and shows goods agreement with experimental data. The coupled simulation of 3D and 1D shows their impact on the overall regeneration efficiency. It is found that the flow non-uniformity may cause severe radial temperature gradient, resulting in degrading regeneration efficiency.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 1999년도 추계학술발표회 초록집
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• pp.56-56
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• 1999

For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1992년도 하계학술대회 논문집 B
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• pp.949-951
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• 1992

A low pressure DC plasma jet has been used to obtain diamond films from a mixture of $CH_4$ and $H_2$ with high deposition rate (>1$\mu\textrm{m}$/min). The effects of the deposition conditions such as torch geometry, substrate temperature, gas mixing ratio, chamber pressure, axial magnetic field on the diamond film properties such as morphology, purity, uniformity of the film and deposition rate, etc. have been examined with the aid of Scanning Electron Microscopy, X-Ray Diffraction, and Raman Spectroscopy. Both the growth rate and particle size increased rapidly for low methane concentrations but saturated and the morphology changed from octahedral to cubic structure when the concentration exceeded 1.0 %. Higher growth rates (>1.5${\mu}m$/min) can be obtained by applying an axial magnetic field to the DC plasma jet. Diamond obtained from the magnetized plasma jet also shows a sharp peak at 1332.5$cm^{-1}$ in the Raman Spectra and this result implies that higher growth rate with a good quality diamond films can he obtained by applying an external magnetic field to the plasma jet.

• 전자공학회논문지D
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• 제36D권12호
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• pp.63-69
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• 1999

QWS-DFB 레이저에서 단일 주파수 동작 안정성을 결정하는 문턱 이득 차이와 축 방향 광자 분포, 균일성을 동시에 나타내는 통합된 설계 변수로서 광자 분포 중심을 정의하고, 이 광자 분포 중심이 문턱 이득 차이와 광자 분포의 균일성과 어떻게 연관되는지를 유효 굴절률 전달 매트릭스 방법으로 보였다. 또, 이로부터 단일 주파수 동작 안정성을 최대화하는 설계 원칙을 제시하였다. 그리고 이 설계 원칙을 적용한 예로서 100% 단일 주파수 동작 수율을 보이는 결합계수의 범위를 넓힌 ,sampled grating QWS-DFB 레이저 구조를 제안하였다. 이 레이저 구조는 단일 주파수 동작을 하는 결합계수의 범위가 좁다는 QWS-DFB 레이저의 문제점을 해결하는 길을 제시하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1997년도 추계학술대회 논문집 학회본부
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• pp.376-378
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• 1997

Plasma density and its axial distribution and uniformity on the substrate in a helical resonator plasma in the external magnetic field have been measured using Langmuir probes. Net RF power is set to 200W and chamber pressure is varied from $1{\times}10^{-1}Torr$ to $1{\times}10^{-4}Torr$. There are three kinds of external magnetic field structure applied on the helical resonator plasma. One is a uniform magnetic field, another is a plus gradient magnetic field and the third is a minus gradient magnetic field. Of the three magnetic field structure, the minus gradient magnetic field is found to show the highest increase in plasma density on the substrate compared with other magnetic structures. In order to avoid radial density ununiformity, weak magnetic fields under 100Gauss are applied.