Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1992.07b
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- Pages.949-951
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- 1992
High-Speed Deposition of Diamond Films by DC Plasma Jet
직류 플라즈마 제트를 이용한 고속 다이아몬드 막 증착기술
- Kim, Won-Kyu (Electrical Engineering and Science Research Center) ;
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Whang, Ki-Woong
(Dept. of Electrical Engineering, Seoul National Univ.)
- Published : 1992.07.23
Abstract
A low pressure DC plasma jet has been used to obtain diamond films from a mixture of
Keywords