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Improvement of Pad Lifetime using POU (Point of Use) Slurry Filter and High Spray Method of De-Ionized Water (POU 슬러리 필터와 탈이온수의 고분사법에 의한 패드수명의 개선)

  • 박성우;김상용;서용진
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.14 no.9
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    • pp.707-713
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    • 2001
  • As the integrated circuit device shrinks to smaller dimensions, chemical mechanical polishing (CMP) process was requirdfo the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gest thinner, micro-scratches are becoming as major defects. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. To prevent agglomerated slurry particle from inflow, we installed 0.5${\mu}{\textrm}{m}$ point of use (POU) filter, which is depth-type filter and has 80% filtering efficiency for the 1.0${\mu}{\textrm}{m}$ size particle. In this paper, we studied the relationship between defect generation and polished wafer counts to understand the exact efficiency fo the slurry filteration, and to find out the appropriate pad usage. Our experimental results showed that it sis impossible to prevent defect-causing particles perfectly through the depth-type filter. Thus, we suggest that it is necessary to optimize the slurry flow rate, and to install the high spray bar of de-ionized water (DIW) with high pressure, to overcome the weak-point of depth type filter.

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An Analysis of Ecological Habitat Characteristics in Medium-scale Stream -A Case of the Bokha Stream- (중규모 하천 생물 서식처의 특성 분석 -복하천을 중심으로-)

  • 안홍규;우효섭
    • Journal of the Korean Institute of Landscape Architecture
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    • v.32 no.2
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    • pp.102-119
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    • 2004
  • This study investigates the relation between the location of a habitat and the ecological connections according to the habitat type in the riparian zone at the Bokha stream. Stream habitat is classified into nine types for the aquatic insects and fish. For vegetation and birds, habitat is classified into five types of medium-scale streams, including both physical and chemical streams are analyzed accordingly. The major results of this study are as follows: 1) A pool connected to the main stream has a certain water depth (about 80 cm) and is disturbed at least 5 to 6 times a year. Although the pool has a somewhat bad water quality, it provides a habitat for various types of young fish. 2) A meander riffle is about 15 cm deep, the flow velocity in the region is about 75 cm/s. This region does not have large structures to which aquatic insects can attach, so it cannot be used as a spawning ground. 3) A rock type pool is about 60 cm deep, the flow velocity in the meander riffle is about 25 cm/s. In this region, many aquatic insects attached to large structures appear. Due to various riparian vegetation, the rock type pool is used as a habitat for aquatic insects. 4) A pool which is only connected to the main stream during floods has a bad water quality. Despite of its relatively small size, it has a high population density of aquatic insects. faculty.

The Performance and Emission of the Intake Port Injection Type Hydrogen Fueled Engine (흡기관 분사 방식 수소 연료 기관의 성능 및 배출물에 관한 연구)

  • 이형승;이석재;이종화;유재석;김응서
    • Transactions of the Korean Society of Automotive Engineers
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    • v.1 no.2
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    • pp.27-33
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    • 1993
  • Using the solenoid driven gas injection valve, Hydrogen fuel supply system was made. It was attached to a single cylinder research engine and intake port injection type hydrogen fueled S.I. engine was constructed. Engine performance, emission characteristics, and abnormal combustion were studied through the engine test performed with the variations of fuel-air equivalence ratio and spark timing. Compared with gasoline, hydrogen burns so fast that cylinder peak pressure and temperature are higher and NO is emitted more at full load condition. IN the case of intake port injection type engine, COVimep becomes lower due to the well-mixing of air and fuel, and engine output is lower owing to the low volumetric efficiency. As fuel-air equivalence ratio goes up, the combustion speed increases, and COVimep decreases. NO emission peaks slightly lean of stoichiometric. As spark timing advances and fuel-air equivalence ratio goes up, the cylinder peak pressure and temperature become higher, so abnormal combustions take place easily.

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Halbach Array Type Focusing Actuator for Small and Thin Optical Data Storage Device (할바 자석배열을 이용한 초소형 정보저장장치의 초점 구동기 설계)

  • Lee, Sung-Q;Park, Kang-Ho;Paek, Mun-Cheal
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.11a
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    • pp.65-69
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    • 2004
  • The small form factor optical data storage devices are developing rapidly nowadays. Since it is designed for portable and compatibility with flash memory, its components such as disk, head, focusing actuator, and spindle motor should be assembled within 5 m thickness. The thickness of focusing actuator is within 2 mm and the total working range is $+/-100{\mu}m$, with the resolution of less than $1{\mu}m$. Since the thickness is limited tightly, it is hard to place the yoke that closes the magnetic circuit and hard to make strong flux density without yoke. Therefore, Halbach array is adopted to increase the magnetic flux of one side without yoke. The proposed Halbach array type focusing actuator has the advantage of thin actuation structure with sacrificing less flux density than conventional magnetic array. The optical head unit is moved on the swing arm type tracking actuator. Focusing coil is attached to swing arm, and Halbach magnet array is positioned at the bottom of deck along the tracking line, and focusing actuator exerts force by the Fleming's left hand rule. The working range and resolution of focusing actuator are analyzed with FEM and experiment.

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Design and Implementation of Document Management System using Near Field Communication (비접촉 근거리 무선통신을 이용한 문서관리 시스템의 설계 및 구현)

  • Kim, Cheolho;Lee, Wooyong;Hwang, Mintae
    • Journal of Korea Multimedia Society
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    • v.17 no.5
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    • pp.613-622
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    • 2014
  • In spite of the convenience and cost-effectiveness of an electronic document management system the paper-type documents still should be stored for a comparison against the original documents. In this paper, for the efficient management of paper documents, we designed and implemented a document management system using smart devices equipped with NFC(Near Field Communication) technology. To implement the proposed system we designed a database for document management and developed an Android application for smart device using Eclipse 3.0 and Java programming. Whenever we touch the smart phone on the NFC tags which are attached to the paper-type documents and document boxes, it is possible to registering, searching and carrying in and out services for documents and boxes. This study provides smart phone users with systematic, economical and convenient paper-type documents management functions, and thus enhances the business efficiency.

Performance of integrated vertical raft-type WEC and floating breakwater

  • Tay, Zhi Yung;Lee, Luke
    • Ocean Systems Engineering
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    • v.12 no.1
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    • pp.39-61
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    • 2022
  • Renewable energy such as wave energy has gained popularity as a means of reducing greenhouse gases. However, the high cost and lack of available sea space in some countries have hindered the deployment of wave energy converters (WEC) as alternative means of sustainable energy production. By combining WECs with infrastructures such as floating breakwaters or piers, the idea of electricity generated from WECs will be more appealing. This paper considers the integration of vertical raft-type WEC (commonly known as the vertical flap WEC) with floating breakwater as means to generate electricity and attenuate wave force in the tropical sea. An array of 25 WECs attached to a floating breakwater is considered where their performance and effect on the wave climate are presented. The effects of varying dimensions of the WEC and mooring system of the floating breakwater have on the energy generation are investigated. The integrated WECs and floating breakwater is subjected to both the regular and irregular waves in the tropical sea to assess the performance of the system. The result shows that the integrated vertical flap-floating breakwater system can generate a substantial amount of wave energy and at the same time attenuate the wave force effectively for the tropical sea when optimal dimensions of the WECs are used.

Preparation of Nanocrystalline ZnO Ultrafine Powder Using Ultrasonic Spraying Combustion Method (초음파분무 연소법에 의한 나노결정 ZnO 초미분체 제조)

  • Kim, Kwang-Su;Hwang, Du-Sun;Ku, Suk-Kyeon;Lee, Kang;Jeon, Chi-Jung;Lee, Eun-Gu;Kim, Sun-Jae
    • Korean Journal of Materials Research
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    • v.12 no.10
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    • pp.784-790
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    • 2002
  • For mass product of nanocrystalline ZnO ultrafine powders, self-sustaining combustion process(SCP) and ultrasonic spray combustion method(USCM) were applied at the same time. Ultrasonic spray gun was attached on top of the vertical type furnace. The droplet was sprayed into reaction zone of the furnace to form SCP which produces spherical shape with soft agglomerate crystalline ZnO particles. To characterize formed particles, fuel and oxidizing agent for SCP were used glycine and zinc nitrate or zinc hydroxide. Respectively, with changing combustion temperature and mixture ratio of oxidizing agent and fuel, the best ultrasonic spray conditions were obtained. To observe ultrasonic spray effect, two types of powder synthesis processes were compared. One was directly sprayed into furnace from the precursor solution (Type A), the other directly was heated on the hot plate without using spray gun (Type B). Powder obtained by type A was porous sponge shape with heavy agglomeration, but powder obtained using type B was finer primary particle size, spherical shape with weak agglomeration and bigger value of specific surface area. 9/ This can be due to much lower reaction temperature of type B at ignition time than type A. Synthesized nanocrystalline ZnO powders at the best ultrasonic spray conditions have primary particle size in range 20~30nm and specific surface area is about 20m$^2$/g.

Bile Acid Inhibition of N-type Calcium Channel Currents from Sympathetic Ganglion Neurons

  • Lee, Hye-Kyung;Lee, Kyoung-Hwa;Cho, Eui-Sic
    • The Korean Journal of Physiology and Pharmacology
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    • v.16 no.1
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    • pp.25-30
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    • 2012
  • Under some pathological conditions as bile flow obstruction or liver diseases with the enterohepatic circulation being disrupted, regurgitation of bile acids into the systemic circulation occurs and the plasma level of bile acids increases. Bile acids in circulation may affect the nervous system. We examined this possibility by studying the effects of bile acids on gating of neuronal (N)-type $Ca^{2+}$ channel that is essential for neurotransmitter release at synapses of the peripheral and central nervous system. N-type $Ca^{2+}$ channel currents were recorded from bullfrog sympathetic neuron under a cell-attached mode using 100 mM $Ba^{2+}$ as a charge carrier. Cholic acid (CA, $10^{-6}M$) that is relatively hydrophilic thus less cytotoxic was included in the pipette solution. CA suppressed the open probability of N-type $Ca^{2+}$ channel, which appeared to be due to an increase in (no activity) sweeps. For example, the proportion of sweep in the presence of CA was ~40% at +40 mV as compared with ~8% in the control recorded without CA. Other single channel properties including slope conductance, single channel current amplitude, open and shut times were not significantly affected by CA being present. The results suggest that CA could modulate N-type $Ca^{2+}$ channel gating at a concentration as low as $10^{-6}M$. Bile acids have been shown to activate nonselective cation conductance and depolarize the cell membrane. Under pathological conditions with increased circulating bile acids, CA suppression of N-type $Ca^{2+}$ channel function may be beneficial against overexcitation of the synapses.

A Study on Floating Collar of Dragged Gears (인망그물의 부양깃판에 관하여)

  • 장지원
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.22 no.1
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    • pp.1-5
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    • 1986
  • In order to improve the net-mouth height of dragged gears, the authors devised models of floatingcollars of nylon cloth instead of floats and experimented with 4 types-A type (length 65em, breadth 3em), B type (length 65em, breadth 4em), C type (length 65em, breadth 5em) and D type (length 65 em, breadth 6em) attached respectively to the front edge of square of a model net after preliminary experimentation. These various types of floating collars were experimented in a circulating water channel to evaluate the characteristics of net-mouth height and hydrodynamic resistance and the effect of the length of bridles were also examined. The results obtained were as follows: 1. In case of attaching floats, the model net-mouth height reduced from 80 em to 20 em when current velocity was increased from 0.25m/see to 1m/sec. 2. In case of attaching floating collars, the model net-mouth heights were maintained 70 em, 71 em, 80 em, 78 em in maximum and 55 em, 63 em, 69 em, 73 em in minimum respectively even the current volocity was increased from 0.25 m/see to 1 m/see. 3. The model net-mouth height was reduced to 10 em maximum according to the current velocity and types of floating collars when the bridles were shortened 3~4 mm in length. 4. Hydrodynamic resistance of D type only was increased to 700 g in maximum and those of A, B, C type were reduced to 460 g in maximum at current velocity beyond 0.5 m/ see when bridles were shortened 3-4 mm in length. 5. But the model net-mouth heights became higher in accordance with breadth of floating coliars, B type was the best for this model net in case that hydrodynamic resistance was taken into account.

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High-speed Machining Technology using CNC Machining Center Equipped with Attachment Type High-Speed Spindle (CNC 공작기계 장착형 고속스핀들을 이용한 고속가공 실용화 기술)

  • Lee, Yong-Chul;Kwak, Tae-Soo;Kim, Gyung-Nyun;Lee, Jong-Ryul
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.2
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    • pp.152-158
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    • 2012
  • A newly developed attachment type high-speed spindle can be easily attached to the conventional CNC machining center to allow high-speed machining with low investment costs. This study has focused on the application of a conventional CNC machining center equipped with an attachment type high-speed spindle. A specimen of plastic mold material has been machined to compare the cutting effectiveness of the high-speed machining center and the conventional machining center with the attachment type high-speed spindle respectively. The rotational accuracy of the spindles are measured by a transmission optic measurement system and the surface roughness of the workpiece in accordance with revolution speed(rpm) of the spindle are investigated respectively. As the experimental results, it was shown that the surface roughness of the machined workpiece was $3.42{\mu}mR_{max}$, $0.46{\mu}mR_a$ in the case of attachment type spindle and $1.81{\mu}mR_{max}$, $0.275{\mu}mR_a$ in the case of the high-speed machining center. Moreover, the mean rotational accuracy was $7.57{\mu}m$ in the case of the attachment type spindle and $7.39{\mu}m$ in the case of the high-speed machining center.