• Electrical & Electronic Materials
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• v.9 no.9
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• pp.918-924
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• 1996

A downstream oxygen plasma is generated by capacitively coupled RF power and applied to photoresist stripping. Stripping rate (ashing rate) is measured in terms of RF power, chamber pressure, oxygen flow rate and temperature. Ashing reaction is thermally activated and depends on oxygen radical density. The ashing process is optimized to have the high ashing rate, good uniformity and minimal plasma damage using a statistical method.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.6 no.2
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• pp.301-312
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• 1996

This study was performed to search a optimal analyzing method of cadmium in whole-blood. Cadmium was determined by graphite furnace atomic absorption spectrometry(GFAAS). We investigated the effect of ashing temperature on the absorbance of cadmium in a simple dilution(ten-fold) method with triton X-100 and matrix modifier methods treated with $NH_4H_2PO_4$(1 and 3%) and $Pd(NO_3)_2$(0.00l and 0.005%) as matrix modifier. We also compared the reported reference values of standard blood with values resulted from optimal analyzing conditions of this study. In case of a simple dilution method, when ashing temperature was set at $450^{\circ}C$, the absorbance of sample and background were $0.334{\pm}0.012$ and $1.382{\pm}0.245$, respectively. Background level was higher than the value(0.8) that can be corrected by $D_2$ background correction method. As ashing temperature was rised to $500^{\circ}C$, the absorbance of sample and background were $0.178{\pm}0.008$ and $0.711{\pm}0.223$ respectively. The higher ashing temperature($450^{\circ}C-650^{\circ}C$) was, the lower the absorbance of sample was. In case of a matrix modifier method with $NH_4H_2PO_4$(1 and 3%), when ashing temperature was rised from $500^{\circ}C$ to $650^{\circ}C$, the absorbance of sample slightly changed. The absorbances of sample at $600^{\circ}C$ were $0.230{\pm}0.017$ and $0.137{\pm}0.012$, respectively. These values were larger than that of simple dilution method. But the absorbance of background was higher than the level that can be corrected by $D_2$ method. In case of a matrix modifier method with $Pd(NO_3)_2$(0.001 and 0.005%), the absorbance of sample and background were higher than those of other methods and were stable and reproducible. When ashing temperature was over $550^{\circ}C$, the absorbance of sample was significantly decreased. In case of 0.005% $Pd(NO_3)_2$ carbon residue remained in graphite tube affected the absorbance of sample and background. From these results, We propose that in case of a simple dilution(ten-fold) method with triton X-100 ashing temperature must be maintained below $400^{\circ}C$. In order to diminish the absorbance of background, the alternative method is attenuation of injection volume or multiplication of dilution ratio. We recommend $Pd(NO_3)_2$ than $NH_4H_2PO_4$ as a matrix modifier. In case of a matrix modifier method with $Pd(NO_3)_2$ ashing temperature might be maintained below $550^{\circ}C$.

• Journal of Korean Society of Occupational and Environmental Hygiene
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• v.23 no.4
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• pp.333-340
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• 2013

Objectives: This study was designed to establish an accurate analytical method for asbestos in a biological sample for determining occupational asbestos-related diseases and relief of the health effects of environmental asbestos. Methods: Biological samples were obtained from lungs of rats following intratracheal instillation of asbestos(Chrysotile, anthophyllite) and were prepared according to digestion method(Wet digestion, high temperature ashing, low temperature ashing). The samples were then analyzed for asbestos fibers using a transmission electron microscope equipped with an energy dispersive X-ray spectrometer. Results: Low temperature plasma ashing removed more of the organic components and reduced fiber loss compared to the wet digestion method, making specimens so prepared more suitable for transmission electron microsocpy. Conclusions: The low temperature ashing technique is the most accurate method for analyzing asbestos in biological samples.

• Journal of environmental and Sanitary engineering
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• v.16 no.1
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• pp.91-101
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• 2001

In order to propose a optimum method increasing accuracy and reproducibility in analysis of urine lead levels, we compared matrix modifier addition method and microwave digestion method. The results were as follows ; 1. Where the concentration of $Pd(NO_3)_2$(matrix modifier) was $50mg/{\ell}$, and ashing temperature was $900^{\circ}C$, the results were optimum. In case of matrix modifier addition method, the average coefficient of variation (CV) of normal man was 24.1%, and lead worker was 7.9%. The average urine lead levels of standard were $10.42\mu{g}/{\ell}$ and $19.89\mu{g}/{\ell}$ , the accuracies compared to reference values were 97.0% and 92.6%, respectively. 2. Microwave digestion temperature($160~180^{\circ}C$), time(15~25min) and the ratio of urine/ashing acid(1:1~4:1) did not significantly affect lead absorbance and background absorbance. Therefore we set up a optimum analytical conditions as follows: temperature, $160^{\circ}C$; time, 15min; the ratio of urine/ashing acid, 4:1. after samples were digested by the above analytical conditions, lead absorbance and background absorbance was measured at $450^{\circ}C$ as ashing temperature. The average coefficient of variation (CV) of normal man was 12.4%, and lead worker was 6.2%. The average urine lead levels of standard urine were $10.66\mu{g}/{\ell}$ and $23.31\mu{g}/{\ell}$, the accuracies compared to reference values were 99.3% and 103.9%, respectively. From the results, we suggest that microwave digestion method is a more favorable method than matrix modifier addition method because of easiness to reduce organic matter, possibility to analysis at low temperature and accuracy.

• Korean Journal of Materials Research
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• v.20 no.10
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• pp.550-554
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• 2010

This work presents a fabrication procedure to make large-area, size-tunable, periodically different shape metal arrays using nanosphere lithography (NSL) combined with ashing and annealing. A polystyrene (PS, 580 ${\mu}m$) monolayer, which was used as a mask, was obtained with a mixed solution of PS in methanol by multi-step spin coating. The mask morphology was changed by oxygen RIE (Reactive Ion Etching) ashing and temperature processing by microwave heating. The Au or Pt deposition resulted in size tunable nano patterns with different morphologies such as hole and dots. These processes allow outstanding control of the size and morphology of the particles. Various sizes of hole patterns were obtained by reducing the size of the PS sphere through the ashing process, and by increasing the size of the PS sphere through annealing treatment, which resulted in tcontrolling the size of the metallic nanoparticles from 30 nm to 230 nm.

• Journal of the Semiconductor & Display Technology
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• v.16 no.2
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• pp.55-60
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• 2017

The supercritical $CO_2$ (sc-$CO_2$) mixture and the sc-$CO_2$-based Photoresist(PR) stripping(SCPS) process were applied to the removal of the post etch/ash PR residue on aluminum patterned wafers and the results were observed by scanning of electron microscope(SEM). In the case of MDII wafers, the carbonized PR was able to be effectively removed without pre-stripping by oxygen plasma ashing by using sc-$CO_2$ mixture containing the optimum formulated additives at the proper pressure and temperature, and the same result was also able to be obtained in the case of HDII wafer. It was found that the efficiency of SCPS of ion implanted wafer improved as the temperature of SCPS was high, so a very large amount of MEA in the sc-$CO_2$ mixture could be reduced if the temperature could be increased at condition that a process permits, and the ion implanted photoresist(IIP) on the wafer was able to be removed completely without pre-treatment of plasma ashing by using the only 1 step SCPS process. By using SCPS process, PR polymers formed on sidewalls of metal conductive layers such as aluminum films, titanium and titanium nitride films by dry etching and ashing processes were removed effectively with the minimization of the corrosion of the metal conductive layers.

• Analytical Science and Technology
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• v.7 no.4
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• pp.427-434
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• 1994

For the analysis of the relatively volatile lead in blood by GFAAS(graphite furnace atomic absorption spectrophotometer), one can not raise the ashing temperature beyond certain degree due to the elevation of the baseline. Previous investigations showed that background is stabilized when the ashing temperature is raised to $700^{\circ}C$ using a matrix modifier. In this study, same result was obtained at the ashing temperature of around $550^{\circ}C$ even when the matrix modifier is not used and only Triton X-100 is used as a diluent, on an instrument which is equipped with both temperature and current controller(Shimadzu, AA-6501S) and thus the temperature control is fast and accurate. Background correction methods of $D_2$ arc and SR(self reversal) were reviewed. The results show that the absorbance is higher for the $D_2$ arc method, but the background correction is higher for the SR method.

• Journal of Korea Technical Association of The Pulp and Paper Industry
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• v.31 no.2
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• pp.77-85
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• 1999

A study on the thermal stability of commonly used six fillers, such as titanium dioxide, silica, ground calcium carbonate, zeolite, and, clay, showed that most fillers except titanium dioxide were strongly effected by heat treatment. Therefore, the present methods for determination of ash in paper give weight loss due to thermal decomposition of fillers. It was found that a paper ashing method at a temperature of 40$0^{\circ}C$ allows most fillers in their original and undecomposed from. Results presented in this paper also show that X-ray diffraction can be used for qualitative determination of mixed fillers and coating pigments in a paper sheet.

• Journal of the Korean Society of Food Science and Nutrition
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• v.31 no.2
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• pp.241-245
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• 2002

To effectively utilize ostrich egg shell as a calcium source, various conditions for preparation of calcium lactate from ashing powder (ashed for 15 min at 90$0^{\circ}C$) were evaluated. Optimal conditions involved treatment of ashing powder with 30 mL lactic acid solution at room temperature for 15 min with a CaO : lactic acid ratio (mol/mol) of 1:2. Calcium lactate contained 39.70% calcium comparable to that (40.98%) in ostrich egg shell. Solubility of calcium lactate, 97.7%, was considerably higher than those (0.58% and 3.43%, respectively) of ostrich egg shell and ashing powder, indicating that the former can be utilized more effectively as a calcium source than the two latter.

• Korean Journal of Fisheries and Aquatic Sciences
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• v.33 no.2
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• pp.158-163
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• 2000

As a part of investigation for utilizing of canned tuna processing by-products as a food resource, we examined the processing conditions and characteristics (extraction methods and ashing condition) of a calcium powder from skipjack tuna bone. Among ashing, autoclaving, and shaking methods for extraction of calcium powder from skipjack tuna bone, ashing method was superior to other methods on the aspect of fish odor, white index, and calcium recovery of calcium powder. Based on the results of white index and soluble calcium ratio, the optimal ashing temperature and time for preparation of a calcium powder from skipjack tuna bone was at $900{\circ}C for 15 min$. Cohesive ratio of calcium powder by shaking at pH 7.0 was increased up to 16 hrs, but after that almost unchanged. Cohesive ratio of calcium powder by shaking for 24 hrs was increased at neutral and alkaline conditions (pH 6-8 and pH 9-11), but almost unchanged at acidic conditions (pH 2-5). For the effective utilization of the calcium powder from skipjack tuna bone, a suitable treatment is needed for improvement of calcium solubility at neutral condition.