• Korean Journal of Materials Research
• /
• v.6 no.11
• /
• pp.1127-1135
• /
• 1996

반도체 소자가 고집적화 됨에 따라 단위공정의 수가 증가하게 되었고 동시에 실리콘 기판의 오염에 대한 문제가 증가하였다. 실리콘 기판의 주 오염물로는 유기물, 파티클, 금속분순물 등이 있으며 특히, Cu와 Fe과 같은 금속불순물은 이온주입 공정, reactive ion etching, photoresist ashing과 같은 실 공정 중에 1011-1013atoms/㎤정도로 오염이 되고 있다. 그러나 금속불순물 중 Cu와 같은 전기음성도가 실리콘 보다 큰 오염물질은 일반적인 습석세정방법으로는 제거하기 힘들다. 따라서 본 연구에서는 Cu와 Fe과 같은 금속불순물을 제거할 목적을 건식과 습식 세정방법을 혼합한 UV/ozone과 HF세정을 제안하여 실시하였다. CuCI2와 FeCI2 표준용액으로 실리콘 기판을 인위적 오염한 후 split 1(HF-only), split 2 (UV/ozone+HF), split 3 (UV/ozone + HF 2번 반복), split 4(UV/ozone-HF 3번 반복)를 실시하였고 TXRF(Total Reflection X-Ray Fluorescence)와 AFM(Atomic Force Microscope)으로 금속불순물 제거량과 표면거칠기를 각각 측정하였다. 또한 contact angle 측정으로 세정에 따른 표면상태도 측정하였다. TXRF 측정결과 split 4가 가장 적은 양의 금속불순물 잔류량을 보였으며 AFM 분석을 통한 표면거칠기도 가장 작은 RMS 값을 나타내었다. Contact angle 측정 결과 UV/ozone 처리는 친수성 표면을 형성하였고 HF처리는 소수성 표면을 형성하였다.

• Proceedings of the Korea Technical Association of the Pulp and Paper Industry Conference
• /
• 2006.06b
• /
• pp.465-469
• /
• 2006

Pre-treatment methods to determine various heavy metal contents in packaging papers were investigated by ICP-ES (Inductively Coupled Plasma Emission Spectrometry) analysis. Pre-treatment methods utilized in this study include dry ashing and decomposition methods ($HNO_{3-}HClO_{4-}HF,\;HNO_{3},\;and\;H_{2}SO_{4-}HNO_{3}$). They were compared with the conventional extraction (water) and migration (3% acetic acid) methods. The five representative heavy metals (Cd, As, Pb, Cr and Hg) were analyzed. For Cd, Hg, and As, the results were below detection limit of the instrument. In case of Cr and Pb, the migration test is considered to be a better method compared to the extraction test, but all pretreated methods showed much higher detection efficiency than the extraction or migration test. However, the detection ratio between the migration test and decomposition methods was different. Among all decomposition methods, the nitric acid - perchloric acid - hydrofluoric acid treatment brought a slightly higher detection value than others, but there was no significant difference among them except sulfuric acid - nitric acid method. Concerning Pb, the sulfuric acid - nitric acid method showed a low detection efficiency compared to other decomposition methods. The sulfuric acid - nitric acid method is, thus, not considered to be a suitable analysis method for Pb in packaging papers.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2016.02a
• /
• pp.185.2-185.2
• /
• 2016

The plasma density is an essential plasma parameter describing plasma physics. Furthermore, it affects the throughput and uniformity of plasma processing (etching, deposition, ashing, etc). Therefore, a novel technique for plasma density measurement has been attracting considerable attention. Microwave probe is a promising diagnostic technique. Various type of cutoff, hairpin, impedance, transmission, and absorption probes have been developed and investigated. Recently, based on the basic type of probes, modified flat probe (curling and multipole probes), have been developing for in situ processing plasma monitoring. There is a need for comparative study between the probes. It can give some hints on choosing the reliable probe and application of the probes. In this presentation, we make attempt of numerical study of different kinds of microwave probes. Characteristics of frequency spectrum from probes were analyzed by using three-dimensional electromagnetic simulation. The plasma density, obtained from the spectrum, was compared with simulation input plasma density. The different microwave probe behavior with changes of plasma density, sheath and pressure were found. To confirm the result experimentally, we performed the comparative experiment between cutoff and hairpin probes. The sheath and collision effects are corrected for each probe. The results were reasonably interpreted based on the above simulation.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
• /
• v.18 no.1
• /
• pp.28-35
• /
• 2004

$N_2$ has been one of the most useful gases in industrial application, for example, plasma ashing, surface cleaning and decomposition of pollution gases. In order to clarify $N_2$ plasma properties and increase practical applications, many experimental and theoretical investigations have been carried out until now on. In this papa, we examined the characteristics of $N_2$ RF Plasmas using one-dimensional fluid model. $N_2$ plasmas showed a double-layer structure in both sheath regions as the power source voltage becomes higher. Generally, a double-layer structure should be showed in electro-negative plasmas, but not in electro-postive plasmas such as $N_2$ discharge. However, most electrons in $N_2$ plasmas lost their energy by many excitation reactions in the near of both electrodes where electron collisions were actively executed and such continuous reactions during an RF period made this structure strong with increase of the power source voltage. The dependence of $N_2$ plasma properties on pressure was also discussed.

• Analytical Science and Technology
• /
• v.5 no.4
• /
• pp.349-358
• /
• 1992

The direct determination of lead in the whole-blood by graphite furnace atomic absorption spectrometric analysis was carried out by using the sample which was diluted five-fold with 1% Triton X-100. Matrix modification was tried to remove the interferences of blood matrix and also to get the optimum analytical condition. Good agreement with certificated values in reference materials(bovine blood) supplied by comparison program in Japan was obstained when 1% $(NH_4)_2HPO_4$ as matrix modifier and ashing temperature, $700^{\circ}C$ were used or 1% $(NH_4)_2HPO_4$ and 0.1% $PdCl_2$ as matrix modifier and ashed at $700^{\circ}C$. Standard deviations were appeared as 2.2~6.3% for 1% $(NH_4)_2HPO_4$ and 3.1~9.1% for 1% $(NH_4)_2HPO_4$ and 0.1% $PdCl_2$ in the range of $31{\sim}624{\mu}gPb/l$.

• Journal of Environmental Health Sciences
• /
• v.35 no.2
• /
• pp.130-142
• /
• 2009

This study compared FTIR with XRD method for the analysis of quartz by % recovery, coefficient of variation (CV) and influence of the interference. the results were as the following. 1. In FTIR method, the coefficient of determination ($r^2$) was 0.9998 in a calibration curve of $695\;cm^{-1}$, and the limit of detection was $4.9{\mu}g/sample$. 2. The highest recovery was $799\;cm^{-1}$ (98.2%). 3. The CVpooled of the FTIR method was approximately 10% in three wave numbers. 4. The analysis of qualitative and quantitative for quartz is difficult with mixed cristobalite and iron oxide. 5. In XRD method with rotating sample holder and LynxEye detector, the coefficient of determination was 0.9996 in a calibration curve, and the limit of detection was $5.9{\mu}g/sample$. 6. The recovery and CV pooled were 104.3%, and 11 %, respectively. 7. In muffle furnace ashing, the quartz weight decreased to 34% when the maximum weight of the iron oxide was more than eight times. In conclusion, the accuracy (% recovery) and precision (CV) of FTIR and XRD method for analyzing $\alpha$-quartz were similar. FTIR method was a disadvantage for sample matrix because it indicates possibility of interference. However, XRD method distinguished specific crystalline forms of silica, and the majority of silicate minerals. In addition, XRD method recommend filter dissolution to pretreatment method.

• KSBB Journal
• /
• v.21 no.6 s.101
• /
• pp.418-421
• /
• 2006

Fatty acid methyl esters, also referred to as biodiesel, have been determined to have a great deal of potential as substitutes for petro-diesel. In order to enhance productivity in the biodiesel production process, feedstocks were previously recommended to be anhydrous, with a free fatty acid content of less than 0.5%. In this study, the effects of several catalysts, methanol molar ratio, catalyst amount, and reaction time on the reduction of free fatty acid level were studied with a simulated feedstock consisting of 20% oleic acid in rapeseed oil. Ferric sulfate was selected as the best catalyst. Increasing the catalyst amount and methanol molar ratio is very effective in decreasing the acid value of the simulated mixture. Our results may provide useful information with regard to the development of more economic and efficient free fatty acid removal system.

• Journal of the Korean Society of Food Science and Nutrition
• /
• v.30 no.3
• /
• pp.388-394
• /
• 2001

This study was conducted ton investigate the mineral contents of commercial baby foods. Samples were classified into 4 groups; powdered formula, baby juice product (domestic), juice and paste products (imported) and soymilk-based formula. We analyzed Ca, P, Mg, Na, K, Fe, Cu, Zn contents by atomic absorption spectrophotometer after dry-ashing. The difference of analyzed value versus labeled value and Ca/P ratio of analyzed value were calculated. The difference (%) of analyzed value on the labeled value was Ca: 98.6, P: 121.8, Mg: 146.1, Na: 87.4, K: 104.3, Fe: 104.8, Cu: 120.2, Zn: 109.8 in powdered formula, Mg showed the highest difference among the elements. The Ca/P ratio of powdered formula was 1.41 (1.70-1.99). Baby juice products (domestic) were fortified Ca, Fe and the difference (%) of analyzed value on labeled value of Ca and Fe contents was 131.8, 110.2, respectively. The Ca/P ratio of these was 2.36 (1.64-3.71). Differently the domestic products, imported juice and paste products were not fortified Ca, Fe and its Ca/P ratio was 0.38(0.14-0.59). The difference (%) of analyzed value on the labeled value was Ca: 110.2, Mg: 179.5, Na: 83.7, K: 87.8, Cu: 107.8, Fe: 219.8, Zn: 100.5, P: 126.6 in soymilk-based formula, Fe showed the highest difference among the elements. The Ca/P ratio of soymilk-based formula was 1.17 (1.04-0.39).

• Restorative Dentistry and Endodontics
• /
• v.15 no.2
• /
• pp.17-33
• /
• 1990

The purpose of this study was to evaluate the fracture toughness of dental composite resins and to investigate the filler factor affecting the fracture behaviour on which the degree of fracture toughness depends. Six kinds of commercially available composite resin;, including two of each macrofilled, microfilled, and hybrid type were used for this study, The plane strain fracture toughness ($K_{10}$) was determined by three-point bending test using the single edge notch specimen according to the ASTM-E399. The specimens were fabricated with visible light curing or self curing of each composite resin previously inserted into a metal mold, and three-point bending test was conducted with cross-head speed of 0.1mm/min following a day's storage of the specimens in $37^{\circ}C$ distilled water. The filler volume fractions were determined by the standard ashing test according to the ISO-4049. Acoustic Emission(AE), a nondestructive testing method detecting the elastic wave released from the localized sources In material under a certain stress, was detected during three-point bending test and its analyzed data was compared with, canning electron fractographs of each specimen. The results were as follows : 1. The filler content of composite resin material was found to be highest in the hybrid type followed by the macrofilled type, and the microfilled type. 2. It was found that the value of plane strain fracture toughness of composite resin material was in the range from 0.69 MPa$\sqrt{m}$ to 1 46 MPa$\sqrt{m}$ and highest In the macrofilled type followed by the hybrid type, and the microfilled type. 3. The consequence of Acoustic Emission analysis revealed that the plane strain fracture toughness increased according as the count of Acoustic Emission events increased. 4. The higher the plane strain fracture toughness became, the higher degree of surface roughness and irregularity the fractographs demonstrated.

• Korean Journal of Community Nutrition
• /
• v.21 no.6
• /
• pp.574-579
• /
• 2016

Objectives: Vitamin C has various functions such as antioxidative effect and supporting absorption of iron (Fe). Aim of this present study was to provide vitamin C nutrition information and to briefly evaluate absorption interaction of vitamin C and Fe content of vitamin C emphasized products. Methods: Vitamin C emphasized foods including beverages, cereal, snacks, chocolate products, other cocoa products, and sugary products were examined by HPLC. Fe contents in samples after dry-ashing were examined by ICP. Results: Vitamin C content ranges in various products tested were the following: beverages (n=11) $20.15{\pm}0.08{\sim}845.41{\pm}6.07mg$, cereal (n=11) $52.50{\pm}0.23{\sim}262.50{\pm}0.07mg$, snacks (n=1) $50.00{\pm}0.25mg$, chocolate products (n=1) $311.73{\pm}2.44mg$, other cocoa products (n=1) $311.73{\pm}2.44mg$, other sugary products (n=2) $52.50{\pm}0.23{\sim}262.50{\pm}0.07mg$. Vitamin C (n=27) analysis values ranged from 82 to 450% of the labeled value. Vitamin C content in vitamin C emphasized food (n=6) was estimated 7.7 times~56.6 times more than Fe content. Conclusions: Analyzed samples ranged more than 80% of the labeled value in vitamin C emphasized products, which complied with food labeling regulation. But, beverages (n=3), cereal (n=4), chocolate products (n=1) were 2 times more than the labeled value. To provide accurate nutrition information, food manufactures should supervise nutrition labeling and understand the interactions between nutrients. Also, consumer should decide about the adequate amount of nutrient intake by thoroughly checking nutrition labeling.