• 한국표면공학회지
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• 제52권2호
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• pp.84-89
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• 2019

We fabricated durable anti-reflective(AR) layer with silica globular coating on polymer by two steps. Firstly, nano-protrusions of polymer were formed by plasma etching known as R.I.E(reactive ion etching) process. Secondly, silica globular coating was deposited on polymer nano-protrusions for mechanically protective and optically enhancing AR layers by RF magnetron sputter. And then durable antireflective polymers were synthesized adjusting plasma power and time, working pressures of RIE and RF sputtering processes. Consequently, we acquired the average transmission (94.10%) in the visible spectral range 400-800 nm and the durability of AR layer was verified to sustain its transmission until 5,000 numbers by rubber test at a load of 500 gf.

• 한국산학기술학회논문지
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• 제18권10호
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• pp.771-776
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• 2017

모바일 디스플레이 및 태양전지의 커버글라스에는 반사방지 코팅 및 셀프클리닝과 같은 기능성 코팅이 필요하다. 최근 들어 나방 눈 또는 연꽃 잎과 같은 자연의 기능성 표면을 모사하여 공학적으로 응용하고자하는 많은 연구가 수행되었다. 특히 실리카 나노입자를 이용한 반사방지 기능성 코팅은 빛의 투과를 증가시키며, $TiO_2$ 광촉매 코팅은 셀프클리닝 기능성 필름에 적용되어왔다. 본 연구에서는 $SiO_2/TiO_2$ 나노입자의 박막 코팅에 의한 투명 발수 반사방지 코팅을 sol-gel 공정과 dip-coating 공정으로 글라스 기판 위에 제조하였다. 기능성 코팅의 표면형상 의존성을 원자힘현미경, 접촉각 측정 및 UV-visible 분광광도계 분석으로 조사하였다. 그 결과 $TiO_2$ 나노입자의 코팅은 가시광선 영역에서 투과율을 저하시키지 않고 기판인 슬라이드 글라스와 비슷한 수준의 높은 평균 광 투과율을 나타내었다. 또한 7nm $SiO_2$/7nm $TiO_2$ 나노입자의 이중층 기능성 코팅은 접촉각 $110^{\circ}$의 투명 발수 표면 특성을 나타내었으며, 가시광선 영역에서 기판인 슬라이드 글라스 보다 2.3% 높은 평균 투과율의 향상을 나타내었다.

• 한국자기학회:학술대회 개요집
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• 한국자기학회 2016년도 임시총회 및 하계학술연구발표회
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• pp.76-77
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• 2016

• 전자공학회논문지A
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• 제32A권11호
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• pp.29-34
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• 1995

Mirror coating is applied to laser facets to improve properties of edge emitting laser diodes. In this experiment, InGaAsP/GaAs high power laser diodes were studied with respect to different degrees of anti-reflective coating. Sputterred $Al_{2}$O$_{3}$ was used as the coating material and the HR coating was kept constant at 90%. Threshold current density, differential quantum efficiency, emission wavelength and the operating current at 500mW were measured for a range of AR coating and compared with theoretically calculated values; that showed good agreements. Precise wavelength control is important for laser diodes for solid state pumping because of small absorption bandwidth. In addition, since these lasers operate under CW condition, a lowest possible operating current for a given power is desired in order to minimize the heat produced. From the results of this experiment, we were able to obtain a optimum range of AR coatings for minimum operating current. The wavelength can be varied up to 4nm within this range.

• 한국산학기술학회논문지
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• 제18권3호
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• pp.1-6
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• 2017

태양전지의 셀을 보호하기 위한 커버 글라스에는 반사방지 코팅 및 셀프클리닝과 같은 기능성 코팅이 적용되어왔다. 일반적으로 메조포러스 실리카를 이용한 반사방지 코팅은 빛의 투과를 증가시키며, $TiO_2$ 광촉매 필름은 셀프클리닝 코팅에 적용되어왔다. 본 연구에서는 $SiO_2/TiO_2$ 박막 코팅에 의한 투명 발수 반사방지 및 셀프클리닝 코팅을 sol-gel 공정과 dip-coating 공정으로 글라스 기판 위에 제조하였다. 기능성 코팅의 표면형상은 전계방출 주사전자현미경과 원자힘 현미경으로 분석하였고, 광학적 특성은 UV-visible 분광광도계로 분석하였다. 필름의 발수특성은 접촉각 측정으로 확인하였다. 그 결과 $TiO_2$ 필름은 기판인 슬라이드 글라스와 비슷한 수준의 높은 광 투과율을 나타내었다. 일반적으로 $TiO_2$ 나노입자는 필름에서 반사를 증가시키며, 결과적으로 투과율의 저하를 가져온다. 하지만 본 연구의 $SiO_2/TiO_2$ 박막으로 이루어진 기능성 코팅은 $110^{\circ}$의 접촉각을 나타내었으며, 파장 550 nm에서 기판인 슬라이드 글라스의 투과율보다 2.0% 증가한 93.5%의 광 투과율 특성을 나타내었다.

• 한국재료학회지
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• 제15권5호
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• pp.285-292
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• 2005

Anti-reflection film was coated by using spherical silica nano colloids. Silica colloid sol was reserved between two inclined slide glasses by capillary force, and particles were convectively stacked to form a film onto the substrate as the water evaporates. As the sliding speed increased, the thickness of the film decreased and the wavelength at the maximum transmittance decreased. The microstructure observed by SEM showed that silica particles were nearly close packed, which enabled the calculation of the effective refractive index of the film. The film thickness was measured by proffer and calculated from the wavelength of maximum transmittance and the effective refractive index. The effective refractive index of the film could be controlled by a subtle controlling of the coating speed and by mixing two different sized silica particles. When the 100 nm and 50 m particles were mixed at 4:1-5:1 volume ratio, the maximum transmittance of $95.2\%$ for one-sided coating was obtained. This is the one that has increased by $3.8\%$ compared to bare glass substrate, and shows that $99.0\%$ of transmittance or $1.0\%$ of reflectance can be achieved by the simple process if both sides of the substrate are coated.

• Transactions on Electrical and Electronic Materials
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• 제15권3호
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• pp.159-163
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• 2014

More accurate CD (Critical Dimension) control is required for the nanometer-scaled devices. However, since the reflectivity between substrate and PR (Photoresist) becomes higher, the CD (Critical Dimension) swing curve was intensified. The higher reflectivity also causes PR notching due to the pattern of sub-layer. For this device requirement, it was optimized for the thickness, refractive index(n) and absorption coefficient(k) in the bottom anti-reflective coating(BARC; SiON) and photoresist with the minimum reflectivity. The computational simulated conditions, which were determined with the thickness of 33 nm, n of 1.89 and k of 0.369 as the optimum condition, were successfully applied to the experiments with no standing wave for the 0.13um-device. At this condition, the lowest reflectivity was 0.44%. This optimum condition for BARC SiON film was applied to the process for 0.13um-device. The optimum SiON film as BARC to PR and sub-layer could be formed with the accurate CD control and no standing waver for the nanometer-scaled semiconductor manufacturing process.

• 한국전기전자재료학회논문지
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• 제28권12호
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• pp.821-825
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• 2015

Anti-reflective (AR) thin film was fabricated on a glass substrate by sol-gel method. The coating solution was synthesized with TEOS (tetraethlyorthosilicate) and poly ethylene glycol (PEG, 4.0 wt%). As the withdrawal speed of coating was changed from 0.1 mm/sec to 0.3 mm/sec, the thickness and refractive index of prepared thin films were changed. The reflectance and transmittance of coating glass fabricated by the withdrawal speed of 0.1 mm/sec were 0.62% and 95.0% in visible light range. The refractive index and thickness of single layer thin film were n= 1.29 and ca. 99.0 nm.

• 조명전기설비학회논문지
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• 제26권4호
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• pp.35-40
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• 2012

In this study, the ultraviolet (UV) intensity of polymer insulator was measured using the Anti-Reflective (AR) coating lens on the occurrence of corona discharge. The UV intensity was compared before and after the AR coating. Under the 200-260[nm] of UV lens, the reflection rate before AR coating was 7.5~5.5[%] with 85-89[%] of transmission rate. After AR coating, however, the reflection rate decreased to 1.3~1.22[%] with improved transmission (97.4~97.6[%]). Then, the UV intensity by distance was measured in the polymer insulator. According to the measurement, the UV intensity increased 6.5 times at 37.5[%] of Vm/Vbd with 5[m] of distance. As distance increased, the growth rate declined. As high voltage increased, in addition, AR coating was less effective due to the count error caused by the UV sensor pulse signal overlap. Therefore, it appears that it would be more effective to detect corona discharge with 5[m] or less of distance at diagnosis of power facilities by AR coating and UV sensor sensitivity.

• 한국세라믹학회지
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• 제31권8호
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• pp.911-919
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• 1994

As the study for preparation of single-layer anti-reflective coating on glass, the conditions of synthesis of sol for coating and of reproducible coating procedure were investigated. In case of water-based sol, coating was impossible because of poor wettability of sol. The Substitution of solvent with ethanol improved the wettability of sol on the glass surface, and optimum amount of ethanol for substitution was 70 vol%. Maximum specific surface area and total pore volume of water-based sol were 268.7$m^2$/g and 0.315 cc/g, but after substitution, those values increased to 404.1 $m^2$/g and 0.376 cc/g, respectively. The upper limit withdrawl speed of coating in order to get clean coated films without aggregations or stains was 7 cm/min. In case of addition of 0.1 mol HNO3 and substitution with 70 vol% ethanol and heat-treatment at 40$0^{\circ}C$ for 1 hour, thin film with thickness of 94 nm was obtained at withdrawl speed of 4 cm/min. The thickness of thin film was independent of drying time.