Browse > Article
http://dx.doi.org/10.5695/JKISE.2019.52.2.84

High Durable Anti-Reflective Polymer with Silica Nanoparticle Array Fabricated by RF Magnetron Sputter  

Jeon, Seong-Gwon (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science)
Jeong, Eun-Uk (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science)
Rha, Jong-Joo (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science)
Kwon, Jung-Dae (Advanced Functional Thin Films Dept., Surface Technology Division, Korea of Materials Science)
Publication Information
Journal of the Korean institute of surface engineering / v.52, no.2, 2019 , pp. 84-89 More about this Journal
Abstract
We fabricated durable anti-reflective(AR) layer with silica globular coating on polymer by two steps. Firstly, nano-protrusions of polymer were formed by plasma etching known as R.I.E(reactive ion etching) process. Secondly, silica globular coating was deposited on polymer nano-protrusions for mechanically protective and optically enhancing AR layers by RF magnetron sputter. And then durable antireflective polymers were synthesized adjusting plasma power and time, working pressures of RIE and RF sputtering processes. Consequently, we acquired the average transmission (94.10%) in the visible spectral range 400-800 nm and the durability of AR layer was verified to sustain its transmission until 5,000 numbers by rubber test at a load of 500 gf.
Keywords
Durability; Anti-Reflection(AR); Silica nanoparticle; RF Magnetron Sputter;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Y. Leterrier, Durability of nanosized oxygen-barrier coatings on polymers. Progress in Materials Science, 2003. 48(1): p. 1-55.   DOI
2 B.G. Priyadarshini and A. Sharma, Design of multilayer anti-reflection coating for terrestrial solar panel glass. Bulletin of Materials Science, 2016. 39(3): p. 683-689.   DOI
3 J. Dobrowolski, Daniel Poitras, Penghui, Ma, Himanshu, Vakil and Muchael, Acree Toward perfect antireflection coatings: numerical investigation. Applied optics, 2002. 41(16): p. 3075-3083.   DOI
4 P.B. Uskens, M. Burghoorn, M. Mourad and Z. Vroon, Antireflective coatings for glass and transparent polymers. Langmuir, 2016. 32(27): p. 6781-6793.   DOI
5 U. Sikder and M.A. Zaman, Optimization of multilayer antireflection coating for photovoltaic applications. Optics & Laser Technology, 2016. 79: p. 88-94.   DOI
6 D. Chen, Anti-reflection (AR) coatings made by sol-gel processes: a review. Solar Energy Materials and Solar Cells, 2001. 68(3-4): p. 313-336.   DOI
7 J.J. Chu, C.S. Li, C.C. Shih and S.C. Chang, Antireflection high conductivity multi-layer coating for flat CRT products. 2002, Google Patents.
8 J.A. Hiller, Mendelsohn, J.D. and Rubner, M.F. Reversibly erasable nanoporous anti-reflection coatings from polyelectrolyte multilayers. Nature materials, 2002. 1(1): p. 59.   DOI
9 M. Keshavarz Hedayati, and M. Elbahri, Antireflective coatings: Conventional stacking layers and ultrathin plasmonic metasurfaces, a minireview. Materials, 2016. 9(6): p. 497.   DOI
10 J.T. Cox and G. Hass, Antireflection coatings for optical and infrared materials. Physics of Thin Films, 1968. 2: p. 239.
11 R. Herrmann, Quarterwave layers: simulation by three thin layers of two materials. Applied optics, 1985. 24(8): p. 1183-1188.   DOI
12 H.A. Macleod Thin-film optical filters. 2010: CRC press.
13 H.K. Raut, V.A. Ganesh, A. Nair and Ramakrishna, Seeram. Anti-reflective coatings: A critical, indepth review. Energy & Environmental Science, 2011. 4(10): p. 3779-3804.   DOI
14 M. Mazur, D. Wojcieszak, D. Domaradzki, S. Kaczmarek and F.Placido, Song. $TiO_2/SiO_2$ multilayer as an antireflective and protective coating deposited by microwave assisted magnetron sputtering. Opto-Electronics Review, 2013. 21(2): p. 233-238.
15 J-H. Selj, T.T. Mongst and E.S. Marstein, Reduction of optical losses in colored solar cells with multilayer antireflection coatings. Solar Energy Materials and Solar Cells, 2011. 95(9): p. 2576-2582.   DOI
16 J.H. Yun, T.S. Bae, J.D. Kwon, S.H. Lee and G.H. Lee, Antireflective silica nanoparticle array directly deposited on flexible polymer substrates by chemical vapor deposition. Nanoscale, 2012. 4(22): p. 7221-7230.   DOI
17 K. Choi, S.H. Park, M.S. Song, Y.T. Lee, C.K. Hwangbo, H. Yang and H.S. Lee Nano-tailoring the surface structure for the monolithic high?performance antireflection polymer film. Advanced Materials, 2010. 22(33): p. 3713-3718.   DOI
18 H. Shimomura, Z. Gemici, R. Cohen and M.F. Rubner Layer-by-layer-assembled high-performance broadband antireflection coatings. ACS applied materials & interfaces, 2010. 2(3): p. 813-820.   DOI
19 Z. Wu, J. Walish, A.Nolte, L. Zhai, R.E.Cohen and M.F. Rubner Deformable antireflection coatings from polymer and nanoparticle multilayers. Advanced Materials, 2006. 18(20): p. 2699-2702.   DOI
20 L. Xu and J. He, Antifogging and antireflection coatings fabricated by integrating solid and mesoporous silica nanoparticles without any posttreatments. ACS applied materials & interfaces, 2012. 4(6): p. 3293-3299.   DOI
21 S.Y. Chou, P.R. Krauss and P.J. Renstrom, Imprint of sub-25 nm vias and trenches in polymers. Applied physics letters, 1995. 67(21): p. 3114-3116.   DOI
22 J.H. Yun, S.H. Lee, T.S. Bae, Y.M. Yun, S.H. Lee, J.D. Kwon and G.H. Lee, Adhesive and Structural Failures of Oxide Coatings on Plasma-Treated Polymers. Plasma Processes and Polymers, 2011. 8(9): p. 815-831.   DOI
23 I.S. Saidi, S.L. Jacques and F.K. Tittel, Mie and Rayleigh modeling of visible-light scattering in neonatal skin. Applied optics, 1995. 34(31): p. 7410-7418.   DOI
24 A. Bieder, V. Condoin, Y. Leterrier, G. Tornare, P. Vonrohr and J. Manson, Mechanical properties of carbon-modified silicon oxide barrier films deposited by plasma enhanced chemical vapor deposition on polymer substrates. Thin solid films, 2007. 515(13): p. 5430-5438.   DOI
25 J. Lewis, Material challenge for flexible organic devices. Materials today, 2006. 9(4): p. 38-45.   DOI