• 제목/요약/키워드: anti-reflection

검색결과 255건 처리시간 0.026초

Effect of a SiO2 Anti-reflection Layer on the Optoelectronic Properties of Germanium Metal-semiconductor-metal Photodetectors

  • Zumuukhorol, Munkhsaikhan;Khurelbaatar, Zagarzusem;Kim, Jong-Hee;Shim, Kyu-Hwan;Lee, Sung-Nam;Leem, See-Jong;Choi, Chel-Jong
    • JSTS:Journal of Semiconductor Technology and Science
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    • 제17권4호
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    • pp.483-491
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    • 2017
  • The interdigitated germanium (Ge) meta-lsemiconductor-metal (MSM) photodetectors (PDs) with and without an $SiO_2$ anti-reflection (AR) layer was fabricated, and the effect of $SiO_2$ AR layer on their optoelectronic response properties were investigated in detail. The lowest reflectance of 15.6% at the wavelength of 1550 nm was obtained with a $SiO_2$ AR layer with a thickness of 260 nm, which was in a good agreement with theoretically calculated film thickness for minimizing the reflection of Ge surface. The Ge MSM PD with 260 nm-thick $SiO_2$ AR layer exhibited enhanced device performance with the maximum values of responsivity of 0.65 A/W, the quantum efficiency of 52.2%, and the detectivity of $2.49{\times}10^9cm\;Hz^{0.5}W^{-1}$ under the light illumination with a wavelength of 1550 nm. Moreover, time-dependent switching analysis of Ge MSM PD with 260 nm- thick $SiO_2$ AR layer showed highest on/off ratio with excellent stability and reproducibility. All this investigation implies that 260 nm-thick $SiO_2$ AR layer, which is effective in the reduction in the reflection of Ge surface, has a great potential for Ge based optoelectronic devices.

광학적 모니터링 장비를 이용한 안경렌즈의 무반사 코팅 (Anti-reflection Coating using Optical Monitoring System)

  • 정부영
    • 한국안광학회지
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    • 제16권2호
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    • pp.159-165
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    • 2011
  • 목적: 광학적 모니터링 장비를 이용한 안경렌즈의 무반사 코팅의 신뢰성과 재현성을 연구하였다. 방법: 광학적 모니터링 장비를 이용한 무반사 코팅의 수행 가능성을 확인하기 위해서 Essential Macleod 프로그램을 이용하여 RunSheet 실행과 랜덤 에러 전산시늉을 실시하였다. 전산 시늉 후에 AR coating의 재현성 확인을 위해서 19 배치의 코팅 프로세스를 실시하였다. 결과: 19 배치의 코팅 프로세스 반사율 결과는 약 0.5%의 에러 내에서의 좋은 재현성을 보였다. 결론: 결과들로부터 우리는 광학적 모니터링 법을 이용한 무반사 코팅의 가능성과 우수한 재현성을 확인하였다.

Zinc nitrate 용액을 이용한 염료감응형 태양전지 반사 방지막에 관한 연구 (A Study on the ZnO Anti-reflection Layer of Dye Sensitized Solar Cell using Zinc Nitrate Solution)

  • 최진호;서현웅;손민규;김수경;김병만;김희제;프라바카르;김종락
    • 전기학회논문지
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    • 제61권5호
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    • pp.705-710
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    • 2012
  • An anti-reflection layer (AR) is used in the solar cell to improve the amount of the irradiated light, resulting in the improvement of the performance of the solar cell. In this study, the zinc oxide (ZnO) AR is applied to the dye-sensitized solar cell (DSC) by using zinc nitrate solution. The conditions such as solution concentration and sintering temperature for fabricating the ZnO AR are changed to optimize the performance of the AR. As a result, the best performance is shown when the zinc nitrate solution with 100mM concentration is used and the sintering temperature is $600^{\circ}C$. And then, the ZnO AR formed with these optimal conditions is applied to the DSC. Consequently, a DSC with a ZnO AR had an increased current density up to 13.86$mA/cm^2$ and an enhanced efficiency of 6.32%.

다층 박막을 이용한 패럴 단면의 무반사 코팅 설계 및 특성 (Design and Characteristics of Anti-reflection Coating using Multi-layer Thin Film on the Ferrule Facet)

  • 기현철;양명학;김선훈;김태언;김회종;구할본
    • 한국전기전자재료학회논문지
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    • 제20권11호
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    • pp.991-994
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    • 2007
  • In this paper, we have designed the anti-reflection(AR) coating for $1400{\sim}1600$ nm wavelength range on the ferrule facet of optical connector. The low-temperature ion-assisted deposition was applied to AR coating on the ferrule facet in order to avoid damage of optical connector. We have measured the refractive index of coating film($Ta_2O_5\;and\;SiO_2$) using the ellipsometer and optimized the film thickness using the SEM and thickness measurement equipment. UV-VIS-NIR spectrophotometer is used to measure transmissivity of the AR coated ferrule facet. The refractive index of $Ta_2O_5\;and\;SiO_2$ is $2.123{\sim}2.125$ and $1.44{\sim}1.442$, respectively, for $1400{\sim}1600$ nm wavelength range. The transmissivity of the AR coated ferule facet is more than 99.8 % for $1425{\sim}1575$ nm wavelength range and more than 99.5 % for $1400{\sim}1600$ nm wavelength range. The return loss of the AR coated ferrule facet is 30.1 dB.

중적외선 영역의 무반사 코팅된 ZnS 기판의 설계와 광학 특성 (Design and Analysis of Optical Properties of Anti-reflection Coated ZnS Substrates in the Mid-infrared Region)

  • 박범근;백종후
    • 센서학회지
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    • 제31권4호
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    • pp.255-259
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    • 2022
  • In this study, we fabricated ZnS substrates with excellent transmittance in the mid-infrared region (3-5 ㎛) using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon (DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance efficiency. To reduce the reflectance and further improve transmittance in the mid-infrared region, anti-reflection (AR) coating was designed for DLC/ZnS /AR and AR/ ZnS /AR structures. The coating structure, microstructure, and optical properties of the AR-coated ZnS substrates were subsequently investigated by employing energy dispersive X-ray spectroscopy, scanning electron microscopy, and Fourier-transform infrared (FTIR) spectroscopy. The FTIR spectroscopy results demonstrated that, in the mid-infrared region, the average transmittance of the samples with AR coating on one and both sides increased by approximately 18% and 27%, respectively. Thus, AR coating improved the transmittance of the ZnS substrates.

수중청음기 배열의 간격 및 깊이 변화에 따른 측정 소음준위 오차 (Sound Source Level Error on Element Spacing and Depth of Hydrophone Array)

  • 윤종락
    • 한국음향학회:학술대회논문집
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    • 한국음향학회 1997년도 영남지회 학술발표회 논문집 Acoustic Society of Korean Youngnam Chapter Symposium Proceedings
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    • pp.68-74
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    • 1997
  • Ship radiated noise is an infortant parameter which dtermines Anti Submarine Warfare(ASW) countermeansure or passive Sonar detection and classification performance. Its measurement should be performed under controlled ocean acoustic environment. In data reduction of the measured data from hydrophone array, theeffect fo ambient noise, surface reflection and bottom reflection etc. should be compensated to obtain the source level of the ship radiated noise. This study describes the measurement hydrophone array design criteria based on the analysis of transimission anomaly due to the surface reflection.

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SF6/O2 혼합가스에 의한 실리콘 웨이퍼의 표면 텍스쳐링 특성 (Characterization of Surface Textured Silicon Substrates by SF6/O2 Gas Mixture)

  • 강민석;주성재;구상모
    • 한국전기전자재료학회논문지
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    • 제25권5호
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    • pp.345-348
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    • 2012
  • The optical losses associated with the reflectance of incident radiation are among the most important factors limiting the efficiency of a solar cell. Therefore, photovoltaic cells normally require special surface structures or materials, which can reduce reflectance. In this study, nano-scale textured structures with anti-reflection properties were successfully formed on silicon. The surface of sicon wafer was etched by the inductively coupled plasma process using the gaseous mixture of $SF_6+O_2$. We demonstrate that the reflection characteristic has significantly reduced by ~0% compared with the flat surface. As a result, the power efficiency $P_{max}$ of the nano-scale textured silicon solar cell were enhanced up to 20%, which can be ascribed primarily to the improved light trapping in the proposed nano-scale texturing.

써모크로믹 $\textrm{VO}_2$ 박막의 anti-reflection 코팅 (Anti-reflection coating for Thermochromic Thin Films)

  • 박준;박은석;이문희
    • 한국재료학회지
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    • 제7권1호
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    • pp.3-7
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    • 1997
  • VO$_{2}$ 써모크로믹 원도우의 가시광 투과율을 높히기 위하여 내마모성이 우수한 SiO$_{2}$박막을 이용하여 AR(anti-rdflection)코팅을 하였다. 두가지 중요한 공정변수인 기판온도와 증착속도가 AR효과에 미치는 영향을 조사하였다. 그리고 SiO$_{2}$박막의 AR효과는 낮은 기판온도와 높은 증착속도에서 더 우수한 것으로 나타났으며, 이는 SiO$_{2}$AR 박막의 굴절율과 상관관계가 있는 것으로 나타났다. VO$_{2}$ 써모크로믹 유리 위에 SiO$_{2}$AR-코팅을 했을 때 약 30% 정도의 가시광 투과율의 향상이 있었다. 그리고 AR-코팅을 하지 않은 경우보다 더 뚜렷한 써모크로미즘을 나타냈다. 또한 천이온도는 7$0^{\circ}C$정도로 AR-코팅을 하지 않은 VO$_{2}$써모크로믹 유리의 경우와 같게 나타났다.

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모드 전송선로 이론의 고유치 문제를 사용한 주기적인 blazed 2D 회절격자의 정확한 분석 (Rigorous Analysis of Periodic Blazed 2D Diffraction Grating using Eigenvalue Problem of Modal Transmission-Line Theory)

  • 호광춘
    • 한국인터넷방송통신학회논문지
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    • 제19권3호
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    • pp.173-178
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    • 2019
  • Blazed 격자구조에 의한 광 신호의 회절 특성을 분석하기 위하여 처음으로 격자구조의 Toeplitz 유전율 tensor를 2D spatial Fourier 급수로 정의하고 공식화하였다. 그때 각 층에서의 필드들은 고유치 문제에 기초하여 표현하였으며, 완전한 해는 적절한 경계 값 문제에 의존하는 모드 전송선로 이론 (MTLT)을 사용하여 정확하게 유도하였다. 비대칭형 blazed 격자구조의 Toeplitz 유전율 tensor에 기초하여 대칭형과 톱니형 격자구조의 Toeplitz 행렬을 정의하고 각 격자구조에 대한 회절특성을 수치해석 하였다. 수치해석 결과, 비대칭형과 대칭형 구조는 무반사 (anti-reflection) GMR 필터 특성을 나타내었으며, 대칭형 구조가 비대칭형 구조보다 광대역 필터특성을 보였다. 이에 반하여 톱니형 격자 구조는 무반사보다 무투과 (anti-transmission) 필터의 특성이 더욱 강하게 나타났다.

3차원 경사입사파동장에서 이중유공슬릿케이슨 내부의 수리특성 및 반사특성 (Reflection and Hydraulic Characteristics inside Two-Chamber Vertical Slit Caisson in 3-D Oblique Wave Field)

  • 허동수;이준;이우동
    • 한국해양공학회지
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    • 제28권3호
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    • pp.227-235
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    • 2014
  • Using a 3-D numerical scheme (LES-WASS-3D) that considered wave-structure-sandy seabed interactions in a 3-D wave field, we analyzed the wave reflection and hydraulic characteristics inside a slit caisson with two chambers in a 3-D oblique wave field. To verify the 3-D numerical analysis method suggested in this study, we compared the numerical results with existing experimental results and found good agreement. The numerical analysis revealed that a standing wave field is generated on the front side of the slit caisson due to the effect of wave reflection. For incident waves propagating perpendicular to the slit caisson, the nodes and anti-nodes of the standing wave are apparent and symmetrical. However, in an oblique wave field, as the incident wave angle decreases, the nodes and anti-nodes of the standing wave become ambiguous and unsymmetrical. It was also found that the wave reflection coefficient decreases as the incident wave angle decreases. It can be pointed out that as the incident wave angle decreases, the turbulent intensity in the chamber increases. Thereby, the increased wave energy dissipation by the increased turbulent intensity reduces the rate of wave reflection. In addition, a strong turbulent intensity generally occurs in the first chamber.