• Title/Summary/Keyword: and removal force

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A Study on Stick-slip Friction and Scratch in Cu CMP (Cu CMP에서 스틱-슬립 마찰과 스크래치에 관한 연구)

  • Lee, Hyun-Seop;Park, Boum-Young;Jeong, Suk-Hoon;Jeong, Jae-Woo;Seo, Heon-Deok;Jeong, Hae-Do
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2005.07a
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    • pp.653-654
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    • 2005
  • Stick-slip friction is one of the material removal mechanisms in tribology. This stick-slip friction occurs when the static friction force is larger than the dynamic friction force, and make the friction curve fluctuated. In the friction force monitoring system for chemical mechanical polishing(CMP), the friction force also vibrates just as stick-slip friction. It seems that the stick-slip friction causes scratches on the surface of moving parts. In this paper, A study on the scratches which occur during copper CMP was conducted in a view of stick-slip friction.

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Adaptive Cross-Coupling Controller for Precision Contour Machining (정밀 윤곽가공을 위한 적응 교차축 연동제어기)

  • 윤상필;지성철
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 2000.10a
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    • pp.8-13
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    • 2000
  • In this paper, a new adaptive cross-coupling control (CCC) method with an improved contour error model is proposed to maintain contouring precision in high-speed nonlinear contour machining. The proposed method utilizes variable controller gains based on the instantaneous curvature of a contour and the feedrate command. In addition, a real-time federate adaptation scheme is included in the proposed CCC to regulate cutting force. The proposed method is evaluated and compared with the conventional CCC for nonlinear contouring motion through computer simulations. The simulation results show that the proposed CCC improves the contouring accuracy and regulates cutting force more effectively than the existing method.

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The Study on Burr Removal Rate Along the Cutting Radial Distance in U-type Flow Channel (절삭 반경에 따른 U-type 유로 형상의 버 제거율에 관한 연구)

  • Son, Chul-Bae;Lee, Jung-Hee;Kwak, Jae-Seob
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.18 no.7
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    • pp.8-13
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    • 2019
  • As increasing demand for precise machining in advanced disciplines, especially in semi-conductor, aeronautical and automotive industries, the magnetic abrasive deburring(MAD) which is able to eliminate micro-sized burr on complex surface in less time has drawn the attention in the last decades. However, the performance of MAD is subject to shape and size of a tool. Therefore, this study aim to identify deburring behavior of MAD in U-type flow channel by measuring the length rate of burr removal in radial distance of the cylindrical tool under four process factors. In order to evaluate the deburring effect of MAD on the surface, finishing regions are divided based on center of the circular cutting tool. As a results, it was defined that the amount of burr removal in a downward direction moving toward flow channel from the top surface was higher than upward direction. This is because the magnetic abrasives were detached from magnetic lines of force due to geometrical shape.

REMOVAL TORQUE OF BICORTICALLY STABILIZED RBM(RESORBABLE BLAST MEDIA) PIN IMPLANTS IN RABBIT TIBIA

  • Kim, Kwon-Sik;Suh, Kyu-Won;Lee, Richard Sung-Bok;Ryu, Jae-Jun
    • The Journal of Korean Academy of Prosthodontics
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    • v.44 no.6
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    • pp.722-733
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    • 2006
  • Statement of problem. The use of small diameter implants having less than 3 mm in diameter were restricted because of lack of bonding strength to bone. Purpose. The purpose of this study was to observe how much resorbable blast media pin implants increase the binding force to the bone compared to machined transitional pin implants by measuring removal torque, and whether they can be used as final implants for replacement of small diameter teeth. Material and method. Fifteen rabbits were used in this study. Two kinds of implants (resorbable blast media pin implants and machined transitional pin implants) were inserted in each tibia bicortically. After healing time of 2, 4 and 8 weeks, the removal torque values were recorded and the rabbits were sacrificed for histological analysis. Linear finite element method analyses were conducted to compare bicortical fixation with monocortical fixation. Result and conclusion. Within the limitation of this in vivo study, the following conclusions were drawn: 1) The removal torque value of RBM pin implants showed statistically significant increase compared to machined pin implants at 2, 4, and 8 weeks respectively (p<0.05). 2) The removal torque value of RBM pin implants at 2, 4, and 8 weeks was increased statistically significantly with time (p<0.05). 3) Bicortical fixation showed better stress distribution compared with monocortical fixation in a linear finite element method analysis. 4) RBM pin implants are not recommended as transitional implants because they showed a lot of bone fracture in histologic specimens.

Effects of crown retrieval on implants and the surrounding bone: a finite element analysis

  • Ozkir, Serhat Emre;Unal, Server Mutluay;Yurekli, Emel;Guven, Sedat
    • The Journal of Advanced Prosthodontics
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    • v.8 no.2
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    • pp.131-136
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    • 2016
  • PURPOSE. The aim of this study was to observe stress concentration in the implant, the surrounding bone, and other components under the pull-out force during the crown removal. MATERIALS AND METHODS. Two 3-dimensional models of implant-supported conventional metal ceramic crowns were digitally constructed. One model was designed as a vertically placed implant ($3.7mm{\times}10mm$) with a straight abutment, and the other model was designed as a 30-degree inclined implant ($3.7mm{\times}10mm$) with an angled abutment. A pull-out force of 40 N was applied to the crown. The stress values were calculated within the dental implant, the abutment, the abutment screw, and the surrounding bone. RESULTS. The highest stress concentration was observed at the coronal portion of the straight implant (9.29 MPa). The stress concentrations at the cortical bone were lower than at the implants, and maximum stress concentration in bone structure was 1.73 MPa. At the abutment screws, the stress concentration levels were similiar (3.09 MPa and 3.44 MPa), but the localizations were different. The stress at the angled abutment was higher than the stress at the straight abutment. CONCLUSION. The pull-out force, applied during a crown removal, did not show an evident effect in bone structure. The higher stress concentrations were mostly observed at the implant and the abutment collar. In addition, the abutment screw, which is the weakest part of an implant system, also showed stress concentrations. Implant angulation affected the stress concentration levels and localizations. CLINICAL IMPLICATIONS. These results will help clinicians understand the mechanical behavior of cement-retained implant-supported crowns during crown retrieval.

Effect of Cusp on the Cutting Characteristics and Tool Wear of Semi-finishing in Ball End Milling (볼엔드밀 중삭가공시 커습에 의한 절삭특성과 공구마모)

  • Cho, Chul-Yong;Mun, Sang-Don;Ryu, Shi-Hyoung
    • Transactions of the Korean Society of Machine Tool Engineers
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    • v.15 no.5
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    • pp.79-84
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    • 2006
  • In modem manufacturing, many products that have geometrically complicated features, including three-dimensional sculptured surfaces, are designed and produced. In the production of these complex-shaped mechanical components, e.g. automobile dies, molds, and various engineering applications, the ball-end milling process is one of the most widely used NC machining processes that consists of roughing, semi-finishing and finishing. In semi-finishing, cusps remained after roughing according to the used tools that have two patterns of stairs and wave shapes. These cusp shapes have air-cut in cutting and instability caused by high cutting speed that affects the cutting characteristics such as cutting force and tool wear. Cutting characteristics are measured and analyzed through cutting force, FFT analysis of cutting force and tool wear along cutting length according to low tool paths with same metal removal rate. As a results of the experiments, this study suggests the optimal conditions of tool path and cutting direction. This approach for the cutting characteristics of semi-finishing provides a useful aid for the productivity and efficiency improvements of NC machining processes.

Variation of Grinding Force and Wheel Life in Surface Grinding (평면연삭에서 연삭력 변화와 숫돌수명)

  • Choi, Soung-Sam;Koo, Yang;Kwak, Jae-Seob;Ha, Man-Kyong;Park, No-Kwang
    • Journal of the Korean Society for Precision Engineering
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    • v.19 no.3
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    • pp.59-65
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    • 2002
  • In the grinding process, the degree of the sharpness in wheel grain affects the surface roughness and the dimensional accuracy. If a wheel with dull grains is used, te grinding force will be increased and the surface roughness deteriorated. To produce a precision component, the magnitude of parameters related to the wear amount of a grinding wheel has to be limited. In this study, a variation of the grinding force and the surface roughness were measured to seek the machining characteristics of the WA and CBN wheels. From the wear amount of the grinding wheel and the removal rate of workpiece, the grinding ratio was calculated. And also the wheel life was determined at a rapid decreasing point of the grinding ratio. The difference between the surface of wheel-workpiece before grinding and after wheel life was clearly verified with a microscopic photo.

Effect of Pressure on Edge Delamination in Chemical Mechanical Polishing of SU-8 Film on Silicon Wafer

  • Park, Sunjoon;Im, Seokyeon;Lee, Hyunseop
    • Tribology and Lubricants
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    • v.33 no.6
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    • pp.282-287
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    • 2017
  • SU-8 is an epoxy-type photoresist widely used for the fabrication of high-aspect-ratio (HAR) micro-structures in micro-electro-mechanical systems (MEMS). To fabricate highly integrated structures, chemical mechanical polishing (CMP) has emerged as the preferred manufacturing process for planarizing the MEMS structure. In SU-8 CMP, an oxidizer decomposes organic impurities and particles in the CMP slurry remove the chemically reacted surface of SU-8. To fabricate HAR microstructures using the CMP process, the adhesion between SU-8 and substrate material is important to avoid the delamination of the SU-8 film caused by the mechanical-dominant material removal characteristic. In this study, the friction force during the CMP process is measured with a CMP monitoring system to detect the delamination phenomenon and investigate the delamination of the SU-8 film from the silicon substrate under various pressure conditions. The increase in applied pressure causes an increase in the frictional force and wafer-edge stress concentration. The frictional force measurement shows that the friction force changes according to the delamination phenomenon of the SU-8 film, and that it is possible to monitor the delamination phenomenon during the SU-8 CMP process. The delamination at a high applied pressure is explained by the effect of stress distribution and pad deformation. Consequently, it is necessary to control the pressure of polishing, which can avoid the delamination in SU-8 CMP.

A study on the decay of friction force during CMP (화학 기계적 연마에서 마찰력 감소에 관한 연구)

  • 권대희;김형재;정해도
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2002.05a
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    • pp.972-975
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    • 2002
  • An understanding of tribological behavior in CMP(Chemical Mechanical Polishing) is one of the most important things to reveal the mechanism of material removal. In CMP, the contact type is thought to be semi-direct, elastohydrodynamic contact type from the Stribeck diagram, which is a combination of solid-solid direct contact and hydrodynamic lubrication with thin liquid film. This study is focused on the decay of friction force during CMP from two points of view, one of which is change of the real contact area and the other is the decrease of the elastic modulus of the pad caused by the increase of the temperature during CMP Experiments are implemented with elastic modulus measuring system and tool dynamometer. Results show that the decay of friction force during CMP results from the decrease of the real contact pressure working on an abrasive, which is induced by the decrease of elastic modulus of pad caused by the increase of temperature. And, the phenomenon is thought to be happen specially in the case that the weight concentration of abrasive in slurry is small enough.

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AN EXPERIMENTAL STUDY ON THE CHANGES OF RAT MOLAR PERIODONTIUM INCIDENT TO INTERMITTENT FORCE (간헐적 교정력에 의한 백서 구치 치주조직의 변화에 관한 실험적 연구)

  • Kim, Sun-Hae;Suhr, Cheong-Hoon
    • The korean journal of orthodontics
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    • v.19 no.2
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    • pp.57-73
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    • 1989
  • The purpose of this study was to investigate the tissue response of the rat molar periodontium incident to intermittent orthodontic force. The author intended to observe the healing process of injured periodontium and the response of injured tissue to the resumed force. Oxytetracyclin 50mg/Kg was given to each rat intraperitonially. 5 days later, maxillary 1st molars were moved mesially from the incisors with closed coil spring of 100gram. 7 days later, the appliances were removed and 20mg/Kg of calcein were given intraperitonially to each rat. At the same time, maxillary left 1st molars of 15 rats were moved by the same method, but force was lowered to 20 gram. After 1 day, maxillary left 1st molars of another 15 rats were moved by the same method and 50mg/Kg of oxytetracycline was given intraperitonially. After 4 days, another 15 rats were treated as above. After 7 days, another 15 rats were treated as above. 1,4,7,10 and 14 days after change of force, 3 rats were sacrificed in each group respectively. 2 rats were decalcified, embedded in paraffin, and stained with hematoxylin-eosin stain and with Masson's trichrome stain. Another rat was embedded in polyester resin and undecalcified specimen were made. Microradiograms were taken with the undecalcified sections. Observations were made with light and fluorescence microscope. Following conclusions were made. 1. Connective tissue cells and vessels were infiltrated into the hyalinized tissue from the bony cleft and along the border of the hyalinized tissue with bone and root surface. At the same time, elimination of hyalinized tissue, bone and root resorption occurred. 2. Bone and root were resorbed directly and indirectly. 3. Hyalinized tissue was removed within 5 days after force removal. 4. Hyalinized zone was less extensive and easily removed as the rest period prolonged. 5. Hyalinized tissue developed more rapidly and extensively and lasted over 10 days as the force resumed on the already formed hyalinized tissue.

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