• Title/Summary/Keyword: aluminium oxide

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The Effect of Different Substrate Temperature on the Electrical Properties of Al-doped ZnO Thin Films (Al-doped ZnO 박막의 기판 온도에 따른 전기적, 광학적 특성)

  • Kim, Bong-Seok;Kim, Eung-Kwon;Lee, Kyu-Il;Oh, Su-Young;Song, Joon-Tae
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.10
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    • pp.1782-1785
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    • 2007
  • In this paper, the effect of substrate temperature on structural, electrical and optical properties of aluminium-doped zinc oxide (AZO) films were investigated. AZO thin films were prepared on glass substrate by pulsed DC magnetron sputtering technique. The properties of AZO were measured by using XRD, AFM, UV spectrophotometer, and hall effect measurement system. The resistivity of AZO films was improved under the condition of high substrate temperature. The resistivity decreased from $9.95{\times}10^{-2}\;{\Omega}-cm\;to\;1.1{\times}10^{-3}\;{\Omega}-cm$ as a result of high substrate temperature and the average transmittances in visible range were above 80%.

SHS of Oxide Systems Based on MCR of Quartz Modified by Organometallic Compounds

  • Soh, Dea-Wha;Tlek, Ketegenov;Z.A., Mansurov
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.666-669
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    • 2002
  • The differences of the effects of mechanical substance pre-activation in the mills with divers force effect schemes on the self-propagating high temperature synthesis (SHS) of the $SiO_2$ + 37.5% Al system were investigated. The power saturation of activated material state are estimated referring on the variations of dilatometry curve paths. The effects of activation time on the temperature of sample self-ignited in the furnace, combustion temperature and completeness of the quartz reaction with aluminium were determined. The enhancing effects of organic modifiers of quartz particle surfaces on the further SHS synthesis development were shown.

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Anodic Oxide Membrane Formation of Hexagonal Pore Arrarys on Aluminium (다공성 알루미나 박막의 나노 스케일 구조 제어)

  • Jung, Kyung-Han;Shin, Hoon-Kyu;Kwon, Young-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2002.07b
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    • pp.830-833
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    • 2002
  • 최근 나노 구조 (nano structure)를 만들기 위한 시도 중 하나로서 스스로 조직화(self organization)하여 나노 구조를 형성하는 물질을 나노 소자 제작을 위한 형틀 (template)로 이용하려는 시도가 활발히 진행되고 있다. 이러한 물질로서 주목을 받고있는 것 중 하나가 전해질 용액에서 알루미늄을 양극산화(anodization) 시켰을 때 형성되는 다공성 알루미나 박막이다. 본 연구에서는 고 순도 알루미늄을 기계적으로 연마(mechanical polishing)하고 공기 분위기에서 어닐링 (annealing)하여 알루미늄을 재결정화(recrystallization) 시키고 인가 전압이 40 V인 정 전압하에서 0.3 M의 수산(oxalic acid)을 전해질로 사용하면서 양극산화를 수행하여 평균 직경이 65 nm인 고도로 배열된 육방밀집구조의 나노 다공성 박막을 제작하였다. 또한 같은 방향의 육방밀집 배열은 크기가 수 ${\mu}m$인 영역(grain)을 형성하고 있었으며, 평균적인 pore의 밀도는 $1.1{\times}10^{10}/cm^2$였다.

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Formation of Anodized GaN Nanopores on InGaN/GaN Multi-quantum Well Structures (InGan/GaN 다중양자우물구조 위에 제작되어진 산화된 GaN 나노구멍)

  • Choi, Jae-Ho;Kim, Keun-Joo;Jung, Mi;Woo, Deok-Ha
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2006.11a
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    • pp.315-316
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    • 2006
  • We fabricated GaN nanopores m the etching process of anodic oxidation of aluminum. The aluminum was deposited by using E-beam evaporator on p-type GaN. After the aluminum was anodized GaN structure was exposed to the electric field with the oxidat species. The fabricated nanopore structure provides the enhanced intensity of light emission at the wavelengths 470 nm. We investigated the structure of the GaN nanopores from FE-SEM and EDS measurements.

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The Precursor Ratio Effects on the Electrical and Optical Properties of the ZnO:Al Transparent Conducting Oxide Grown by ALD Method

  • Kwon, Sang-Jik;Lee, Hyun-Jae;Jeong, Hak-June;Seo, Yong-Woon;Jeong, Heui-Seob;Hwang, Man-Soo
    • 한국정보디스플레이학회:학술대회논문집
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    • 2003.07a
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    • pp.924-927
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    • 2003
  • Aluminium-doped ZnO (ZnO:Al) films were grown by atomic layer-controlled deposition on glass substrates at temperature of 200 $^{\circ}C$ using diethylzinc($Zn(C_{2}H_{2})_{2}$; DEtZn), water($H_{2}O$) and trimethylaluminium ($Al(CH_{3})_{3}$; TMA) as precursors. As the cycle ratio of TMA to DEZn(TMA/DEZn) increased, the resistivity of the films decreased and the roughness increased. In the case of TMA/DEZn pulse ratio of 1 to 10, the film had a resistivity of $9.7{\times}l0^{-4}{\Omega}{\cdot}cm$ and a roughness of 2.25nm(rms), while in the case of only DEZ injection the film had a resistivity of $3.5{\times}10^{-3}{\Omega}{\cdot}cm$ and a roughness of 1.07nm(rms)

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Fabrication of OLED using low cost transparent conductive thin films (저가격 투명전극을 이용한 OLED의 제작)

  • Lee, B.J.;Shin, P.K.;You, D.H.;Ji, S.H.;Lee, N.H.;Park, K.S.
    • Proceedings of the KIEE Conference
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    • 2008.07a
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    • pp.1281-1282
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    • 2008
  • Low cost TCO(Transparent Conductive oxide) thin films were prepared by 3" DC/RF magnetron sputtering systems. For the AZO preparation processes a 99.99% AZO target (Zn: 98 wt.%, $Al_2O_3$: 2 wt.%) was used. In order to verify feasibility of the AZO thin films to organic light emitting device (OLED) application, test organic light emitting device was fabricated based on AZO as TCO, TPD as hole transporting layer (HTL), Alq3 as both emitting layer (EML) and electron transporting layer (ETL), and aluminium as cathode, where the both ITO and AZO surfaces were treated using $O_2$ RF plasma. The I-V characteristics of the AZO/TPD/Alq3/Al OLEDs were evaluated. As the results, the performance of the OLEDs with AZO as transparent conducting anode could be useable.

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Mechanical Properties of ZTA Composites Fabricated by Reaction Bonding (반응결합에 의해 제조된 ZTA복합체의 기계적 특성)

  • 장복기;백용혁;문종하;이종호
    • Journal of the Korean Ceramic Society
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    • v.34 no.6
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    • pp.577-582
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    • 1997
  • The mechanical properties of Al2O3-ZrO2 composites fabricated by RBAO(reaction bonded aluminium oxide) process were investigated. As the amount of ZrO2 increased the sinstered density of Al2O3-ZrO2 composites decreased slightly, but wear resistance was enhanced. Bending strength of Al2O3-ZrO2 composites increased in proportion to the amount of al in case of a fixed ZrO2 content. When the amount of Al was fixed bending strength reached its maximum value at 25 wt% ZrO2. The fracture toughness(K1c) increased with increasing content of ZrO2, but decreased with increasing Al amount. On the other hand, the fracture mode of Al2O3-ZrO2 composites was the mixed mode of inter-and transgranular fracture.

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Electrical Characterization of Para-Sexiphenyl Organic Electroluminescenct Devices (Para-sexiphenyl 유기 EL 소자의 전기적 특성)

  • Lee, Yonq-Soo;Park, Jae-Hoon;Choi, Jong-Sun
    • Proceedings of the KIEE Conference
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    • 2000.07c
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    • pp.1739-1741
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    • 2000
  • DC current density-voltage and impedance spectroscopy studies have been performed on indium-tin-oxide(ITO)/para-sexiphenyl(6p)/aluminium organic electroluminescent device. The device exhibited a blue color emission, The turn-on voltage of the device is observed at 5V from the current density-voltage measurements. The impedance spectroscopy measurements show that a resonance frequency shift with applied DC bias is observed and a single semi-circle Cole-Cole plot is confirmed. The bias-dependent bulk resistance and bias-independent bulk capacitance is observed.

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A Study on the Asymmetry Factor in Photophoresis (광영동에 있어서의 비대칭인자에 대한 연구)

  • Park, S.H.
    • Korean Journal of Air-Conditioning and Refrigeration Engineering
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    • v.7 no.4
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    • pp.694-702
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    • 1995
  • When a small absorbing particle is exposed to a strong thermal radiation incidence, it moves towards or away from the radiation source due to the nonuniform internal absorption of the radiation. It is called the photophoretic phenomena and governed by the asymmetry factor. An asymmetry factor for the total wavelength range is calculated to estimate the photophoretic phenomena of a particle in a combustor or in the atmosphere and compared to that for a single wavelength. The samples are soot particulates, water droplets, ice particles, silicon particles, $SiO_2$ particles, aluminium oxide particles, whose spectral complex refractive index are available. Although differences between total and monochromatic asymmertry factors are not much for relatively uniform distribution of the spectral refractive index, they are great in general. Therefore the use of the monochromatic factor will considerably deteriorate the accuracy of the calculation of the photophoresis.

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The ablation of ITO thin films by KrF Eximer laser and its characteristics (KrF 엑시머 레이저에 의한 ITO 박막의 어블레이션과 표면특성관찰)

  • Lee, Kyoung-Cheol;Lee, Cheon
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2000.11a
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    • pp.511-514
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    • 2000
  • This work aimed to develop ITO (Indium Tin Oxide) thin films ablation with a KrF Eximer laser required for the application in flat panel display, especially patterning into small geometry on a large substrate area. The threshold fluence for ablating ITO on glass substrate is about 0.1 J/cm$^2$. And its value is much smaller than using third harmonic Nd:YAG laser. Through the optical microscope measurement the surface color of the damaged ITO is changed into dark brown and irradiated spot is completely isolated form the undamaged surroundings by laser light. The XPS analysis showed that the relative surface concentration of Sn and In were essentially unchanged (In :Sn=5:1) after irradiating Eximer laser. Using aluminium mask made by second harmonic Nd:YAG laser the ITO patterning is carried out.

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