• 한국막학회:학술대회논문집
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• 한국막학회 1991년도 춘계 총회 및 학술발표회
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• pp.35-37
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• 1991

무기 분말과 고분자 용액을 함께 습식방사하여 제조된 중공사를 소결하여 이방성 구조를 갖는 Alumina 와 Alumina/Silica 중공사막을 제조 하였다. 중공사 제조 용액의 조성과 소결 온도에 따른 다공성 지지체막의 기공도 및 미세구조를 Mercury Porosimeter와 Surface Analyzer(Autosorb-1)를 이용하여 살펴 보았다. 무기 분말(Alumina, Silica)이 충진된 고분자 용액의 적정한 조성에 따라 소결 후에도 이방성 구조를 유지할 수 있었고 방사 조건에 따라서도 양쪽지상구조, 한쪽지상구조, 또는 망사구조를 가지고 있으며 제조시 소결 온도에 따라 기체 투과도가 감소 하였다. 다공도는 소결 온도가 증가함에 따라 급격히 줄어들고 있으나 평균 기공의 크기는 약간 증가 하였다. 전체적으로 투과 실험 조건하에서 기체 투과가 knudsen flow 특성을 나타내었다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1573-1575
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• 2004

An alumina membrane with nano-sized pores was fabricated by anodic oxidation. The shape and structure of the pore on alumina membrane were changed according to the roughness of aluminum surface. The shape and structure of the nano-sized pre were investigated according to purity of aluminum substrate for the anodization process. The aluminum substrates with 99.5% and 99.999% purities were used. The aluminum substrate(99.5%) was anodized after the processes of pressing, mechanical polishing, chemical polishing, and electrochemical polishing. The nano-sized pores with the pore size of 50 - 100nm, the cell size of 20-50nm and the thickness of $10{\mu}m{\sim}45{\mu}m$ were obtained. Even though the electrochemical polishing was used for the aluminum substrate (99.999%), the same characteristics as the aluminum substrate (99.5%) was obtained. The alumina membrane prepared by anodization for 5 min using fixed voltage method shows the pore with irregular shape. The pore shape was changed to regular shape after pore widening process.

• 한국전기전자재료학회논문지
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• 제18권8호
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• pp.708-713
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• 2005

An alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer was fabricated. It Is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. While the oxalic acid with 0.2 M was used for low voltage anodization under 100 V, the chromic acid with 0.1 M was used for high voltage anodization over 100 V. The nano-sized pores with diameter of $60\~120$ nm was obtained by low voltage anodization of $40\~80$ V and those of $200\~300$ nm was obtained by high voltage anodization of $140\~200$ V. The pore widening process was employed for obtaining the one-channel with flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1 M concentration to etching the barrier layer.

• 제어로봇시스템학회논문지
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• 제14권5호
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• pp.420-425
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• 2008

PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.

• 한국세라믹학회지
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• 제29권2호
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• pp.107-118
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• 1992

Alumina supports for TiO2 ultrafiltration membrane coating were prepared by presintering disk-type preforms at 140$0^{\circ}C$. These supports showed uniform microstructures which had the apparent porosity of 40%, the pore size distribution in the range of 0.1~0.5${\mu}{\textrm}{m}$, and the water flux of 1400ι/$m^2$.h at the pressure difference of 10 atm. The optimum pH and concentration of the TiO2 sol for coating were 0.8 and 1.0 wt%, respectively, and sol particles were identified as rutile forms of 20 nm size. Crack-free alumina-supported rutile TiO2 membranes could be prepared through well controlled drying and heating the gel layer coated by the sol-gel dipping. The pore size of the TiO2 membranes heat-treated at 50$0^{\circ}C$ for 2 hrs was 30~80$\AA$, and their thickness varied from 1.1 to 3.8 ${\mu}{\textrm}{m}$ in accordence with the dipping time (4~40 min). The flux of water through this composite membrane at 10 atm was found to be in the range from 800 to 1100ι/$m^2$.hr depending on the dipping time (10~40 min). The membrane thickness increased linearly with the square root of the dipping time and the slope was 0.62 ${\mu}{\textrm}{m}$/{{{{ SQRT { min} }}.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.1971-1973
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• 2005

We fabricated an alumina membrane with nano-sized pore array by anodic oxidation using the thin film aluminum deposited on silicon wafer. It is important that the sample prepared by metal deposition method has a flat aluminum surface and a good adhesion between the silicon wafer and the thin film aluminum. The oxidation time was controlled by observation of current variation. The nano-sized pores with diameter of $60{\sim}120nm$ was obtained by $40{\sim}80$ voltage. The pore widening process was employed for obtaining the flat surface because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of rough surface. Finally, the sample was immersed to the phosphoric acid with 0.1M concentration to etching the barrier layer. The sample will be applied to electronic sensors, field emission display, and template for nano- structure.

• 한국환경과학회지
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• 제9권4호
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• pp.311-318
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• 2000

To improve $CO_2$pemselectivity, a modified silica membrane was prepared by chemical vapor deposition with tetraethoxysilane(TEOS)-ethanol-water, and TEOS-ethanol-water-HCI solution at 300-$600^{\circ}C$. The silica was effectively deposited in the mesopores of a ${\gamma}$-alumina film coated on a porous $\alpha$-alumina tube by evacuating the reactants through the porous wall. In this membrane, $CO_2$interacts, to some extent, with the pore wall, and $CO_2$/$N_2$selectivity then exceeds the value of the Knudsen diffusion mechanism, while the membrane derived from TEOS alone has no $CO_2$selectivity. The silica membrane prepared from TEOS-ethanol-water-HCI solution showed that $CO_2$permeance was $2.5$\times$10^{-7}mol/s^{-1}.m^{-2}.Pa^{-1} at 30{\circ}C$ and $CO_2$/$N_2$selectivity was approximately 3. The $CO_2$permeance and selectivity was improved by enlarging the surface diffusion with modification of chemical affinity of the silica pores.

• 한국표면공학회지
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• 제43권5호
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• pp.248-254
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• 2010

Porous $Al_2O_3$ film can be utilized as template for fabrication of nano-structured materials. Porous anodic alumina layer as template was prepared by anodization of aluminum in oxalic acid, and the pore diameter and barrier-type alumina layer can be controlled for proper anodizing parameter by widening process in $H_3PO_4$ solution. The $SiO_2$ nanodot and Ni nanowire was fabricated using anodic alumina template and their characteristics were investigated using SEM and TEM with EDS. Especially the growth mechanism of $SiO_2$ nanodot in alumina membrane compared with thinning of the alumina barrier layer during anodization was also investigated.

• 멤브레인
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• 제23권4호
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• pp.278-282
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• 2013

ZIF 재료는 독특한 기체 분리 특성을 포함한 물리적, 화학적 특성 때문에 큰 관심을 받아왔다. 본 연구에서는 ${\alpha}$-alumina 지지체 위에 결함 없고 연속적인 ZIF-7 막을 형성하는 새롭고 효율적인 방법이 연구되었다. 지지체 위에 시딩(seeding)을 하지 않고 직접 ZIF-7 박막을 합성하는데 정전분무법이 처음으로 적용되었다. 이 방법은 전구체 용액을 직접 정전분무함으로 ${\alpha}$-alumina 지지체에 ZIF-7 박막을 형성할 수 있었다. ZIF-7 박막은 XRD, FE-SEM, 단일 기체 투과 장치 등을 이용해 분석하였다.

• 멤브레인
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• 제23권3호
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• pp.211-219
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• 2013

탄소 한외여과 및 광촉매 코팅 폴리프로필렌(PP) 구의 혼성수처리 공정에서 물 역세척 주기(FT)의 영향을 알아보고, 탄소 정밀여과막 또는 알루미나 한외여과막 및 정밀여과막을 사용한 기존 결과들과 비교하여 분리막의 영향을 고찰하였다. FT 6분일 때 초기 60분까지 최소 막오염 저항을 보이고 최대 총여과부피를 얻어서, FT 6분이 초기 막오염의 억제에 가장 효과적이고 최적 조건이다. 탁도의 처리효율은 98.6% 이상이며 FT 변화의 영향이 보이지 않았는데, 탄소 또는 알루미나 정밀여과막을 사용한 기존 연구와 일치하는 것이다. 유기물의 처리효율은 FT 6분에서 98.2%로 최대값을 보였는데, 알루미나 정밀여과막의 결과와 유사하다. 반면에 탄소 정밀여과막에서는 유기물의 처리효율이 비역세척(NBF)에서 최소이고 FT가 감소할수록 증가하였으나, 알루미나 한외여과막에서는 NBF에서 최대이고 FT가 감소할수록 역시 증가하였다. 따라서 유기물 처리효율에 대한 물 역세척 주기의 영향은 동일한 재질의 분리막이라도 기공 크기에 따라 다른 기작을 보인다는 것을 알 수 있었다.