Experimental approach to minimize the air bubble during the imprinting process in dispensing nanoimprint lithography (Dispensing nanoimprint lithography 에서 air bubble 최소화를 위한 실험적 고찰)
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- Proceedings of the Korean Society of Precision Engineering Conference
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- 한국정밀공학회 2008년도 춘계학술대회 논문집
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- pp.127-128
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- 2008