• International Journal of Precision Engineering and Manufacturing
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• 제9권3호
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• pp.27-32
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• 2008

This paper describes a contact atomic force microscope (AFM) that can be used for high-speed precision measurements of microstructured surfaces. The AFM is composed of an air-bearing X stage, an air-bearing spindle with the axis of rotation in the Z direction, and an AFM probe unit. The traversing distance and maximum speed of the X stage are 300 mm and 400 mm/s, respectively. The spindle has the ability to hold a sample in a vacuum chuck with a maximum diameter of 130 mm and has a maximum rotation speed of 300 rpm. The bandwidth of the AFM probe unit in an open loop control circuit is more than 40 kHz. To achieve precision measurements of microstructured surfaces with slopes, a scanning strategy combining constant height measurements with a slope compensation technique is proposed. In this scanning strategy, the Z direction PZT actuator of the AFM probe unit is employed to compensate for the slope of the sample surface while the microstructures are scanned by the AFM probe at a constant height. The precision of such a scanning strategy is demonstrated by obtaining profile measurements of a microstructure surface at a series of scanning speeds ranging from 0.1 to 20.0 mm/s.

• 한국정밀공학회지
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• 제27권3호
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• Tribology and Lubricants
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• 제35권5호
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• pp.310-316
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• 2019

This paper presents two methods for designing a high-speed air spindle operated over the rotational speed of 50,000 rpm. The first method is an approximate method, which assumes a symmetric spindle shape even though it is not symmetric in reality. The second is an analysis of rotordynamics using beam and solid models. The approximate method can be used to calculate the bearing load capacities, stiffness and damping coefficients, stability of the shaft system, and response of the forced excitation from the unbalanced mass. Designers can use this method to determine the dimensions of the desired spindle at the first stage of the design. The more detailed behavior of the spindle can be calculated using the rotordynamics theory using beam and solid models based on the Finite Element Method. In this paper, a spindle, with two air bearings, one motor at the end, and two air thrust bearings, is newly developed. The solutions from the two rotordynamics theories are compared with the solution obtained using the approximate method. The three calculations are in agreement, and the procedure for the design of a spindle system, supported on the externally pressurized air bearings, ispresented and discussed.

• Tribology and Lubricants
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• 제39권1호
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• pp.28-34
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• 2023

Because of their cleanliness, low friction, and high stiffness, aerostatic bearings are used in numerous applications. Aerostic bearings that use porous materials as means of flow restriction have higher stiffness than other types of bearings and have been successfully applied as guide bearings, which have high motion accuracy requirements. However, the performances of porous bearings exhibit strong nonlinearity and can vary considerably depending on design parameters. Therefore, accurate prediction of the performance characteristics of porous bearings is necessary or their successful application. This study presents a porous bearing design and performance analysis for a spindle used in wafer polishing. The Reynolds and Darcy flow equations are solved to calculate the pressures in the lubrication film and porous busing, respectively. To verify the validity of the proposed analytical model, the calculated pressure distribution in the designed bearing is compared with that derived from previous research. Additional parametric studies are performed to determine the optimal design parameters. Analytical results show that optimal design parameters that obtain the maximum stiffness can be derived. In addition, the results show that cross-coupled stiffness increases with rotating speed. Thus, issues related to stability should be investigated at the design stage.

• 한국정밀공학회지
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• 제31권5호
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• pp.381-387
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• 2014

This paper introduces a system to machine micro-sized patterns effectively on surface based on micro-milling process using tools with simultaneous rotation and oscillation, oscillation micro milling. To review the effectiveness of proposed concept, we integrated a micro-spindle supported by active magnetic bearings with a precision 3-axis air bearing stage using double-wedge mechanism, and tested this oscillation milling. Two types of oscillation milling were tested, which are linear oscillation milling with a flat end mill and elliptical oscillation milling with a ball end mill with 0.3 mm of diameter. The spindle was rotating 110 krpm and workpiece was moving constant speed of 2~8 mm/sec during the oscillation milling. As the results, multiple oval shape dimples were generated in regular spacing, and the variation of elliptical motion made different shapes of patterns. The results showed that proposed oscillation milling can be successfully used for machining repeated micro-patterns.

• 한국지반환경공학회 논문집
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• 제8권6호
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• pp.5-12
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• 2007

이암은 건조 조건에서는 일정한 강도와 강성을 가지나, 지하수 침투 등에 의한 습윤, 포화 시 고유의 강도 및 강성이 저하되어 급속히 풍화되는 특성을 가지며, 포항지역에서 자주 발생하는 절취사면의 활동은 주로 이암이 풍화되어 전단강도가 급격히 저하되는 것으로 볼 수 있다. 본 연구는 시추조사시 강성이 충분한 것으로 평가된 이암층에 PRD강관말뚝을 시공한 후 정재하 시험을 실시한 결과 소요지지력이 부족하여, 이를 보강하기 위한 가장 우수한 방법을 찾기 위하여 여러 가지 공법을 검토하였다. 말뚝지지력 증대에 가장 효과적인 방법을 찾기 위해 말뚝주변 및 선단부에 MSG공법, 마이크로파일 보강후 주변그라우팅공법, 선단보강 그라우팅 및 콘크리트 속채움 등의 방법으로 시험시공을 실시하였고, 시험말뚝에 대한 정재하시험 결과 MSG공법으로 보강한 말뚝의 지지력이 가장 우수함을 알 수 있었다.

• 한국가축번식학회지
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• 제10권1호
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• pp.42-48
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• 1986

These experiments were carried out to develop new techniques identifying XX-bearing embryos prior to implantation by immunological method. Antiserum to histocompatibility-Y(H-Y) antigen was prepared in adult SD(sprague-dawley) female rat by repeated immunization of newbone testis supernatant from males of the same strain. ELISA test was used to identify the H-Y antibody of antiserum. Total 124 mouse embryos (8-cell stage) were treated with H-Y antiserum and complement in BSA free Ho, pp. and Pitt's medium and cultured under the gas phase of 5% CO2 in air at 37$^{\circ}C$ for 24 to 48 hrs. The morphological characteristics of embryos treated were observed under the phase-contrast micro scope. The results obtained in these experiments were summarized as follows: 1. Optimal Density of H-Y antibody were a, pp.ared to be 0.27-0.47 by ELISA test. 2. Of total 124 embryos treated with H-Y antiserum and complement 69(55.6%) embryos developed to blastocyst and 55(44.4%) destroyed or arrested.