• Journal of the Korean Ceramic Society
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• v.37 no.2
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• pp.117-121
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• 2000

Er-doped sodiumborosilicate glass films for waveguides amplifier were fabricated by Aerosol Flame Deposition(AFD) method. Al2O3 was added to sodium borosilicate glass films to suppress the formation of crystalline phase and control the refractive index. the formation of crystalline phase was suppressed above Al2O3 of 6 wt%. As the amount of Al2O3 increased from 2 to 12 wt% the refractive index of glass films increased lineary from 1.4595 up to 1.4710. After the core of 77SiO2-15B2O3-8Na2O＋6 wt%Al2O3＋8wt%Er2O3 was coated on the buffer layer of 77SiO2-15B2O3-8Na2O＋6 wt%Al2O3, the core was etched by reactive ion etching. The absorption spectrum of 3 cm waveguide amplifier showed two peaks of 1530 and 1550 nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.348-348
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• 2008

In recent, the concept of system-on-package (SOP) for highly integrated multifunctional systems has been paid attention to for the miniaturization and high frequency of electronic devices. In order to realize SOP, co-integration of passive devices, such as capacitors, resistors and inductors, and active devices should be achieved. If ceramic thick films can be grown at room temperature, we expect to be able to overcome many problems in conventional fabrication processes. So, we focused on the aerosol deposition method (ADM) as room temperature fabrication technology. ADM is a novel ceramic coating method based on the Room Temperature Impact Consolidation (RTIC) phenomena. This method has a wide range potential for fabrication of co-integration of passive and active devices. In this paper, I will present the future potential of ADM introducing various ceramic dielectric thick films for the integration of electronic ceramics.

• Journal of the Korean Ceramic Society
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• v.37 no.1
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• pp.77-81
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• 2000

Silica glass films to utilize optical waveguides was fabricated by Aerosol Flame Deposition(AFD) method. As the amount of B2O3 increased in the sol solution of (92-x)SiO2-xB2O3-8P2O5, the thermophoretic deposition rate onto Si substrate was markedly lowered due to vaporizing out of B2O3 and P2O5 during the vaporization and reaction of the aerosol in the flame. GeO2 was added to 62SiO2-30B2O3-8P2O5 in order to control easily the refractive index of glass films. As the amount of GeO2 increased from 2 to 12 wt%, its refractive index increased from 1.4633 up to 1.4716.

• Nuclear Engineering and Technology
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• v.46 no.6
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• pp.825-836
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• 2014

Predicting radioactive fission product (FP) behaviors in the reactor coolant system and the containment of a nuclear power plant (NPP) is one of the major concerns in the field of reactor safety, since the amount of radioactive FP released into the environment during the postulated accident sequences is one of the major regulatory issues. Radioactive FPs circulating in the primary coolant loop and released into the containment are basically in the form of gas or aerosol. In this study, a multi-component and multi-sectional analysis module for aerosol fission products has been developed based on the MAEROS model [1,2], and the aerosol transport model has been developed and verified against an analytic solution. The deposition of aerosol FPs to the surrounding structural surfaces is modeled with recent research achievements. The developed aerosol analysis model has been successfully validated against the STORM SR-11 experimental data [3], which is International Standard Problem No. 40. Future studies include the development of the resuspension, growth, and chemical reaction models of aerosol fission products.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2004.11a
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• pp.25-25
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• 2004

• Proceedings of the Materials Research Society of Korea Conference
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• 2006.05a
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• pp.24.2-24.2
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• 2006

• Journal of the Semiconductor & Display Technology
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• v.21 no.2
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• pp.38-44
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• 2022

Plasma density in semiconductor fabrication equipment becomes higher to achieve the improved the throughput of the process, but the increase of surface corrosion of the ceramic coated chamber wall has been observed by the increased plasma density. Plasma chamber wall coating with aerosol deposition prefer to be firm and uniform to prevent the potential creation of particle inside the chamber from the deformation of the coating materials, and the aerosol discharge nozzle is a good control factor for the deposited coating condition. In this paper, we investigated the design of the nozzle of the aerosol deposition to form a high-quality coating film. Computational fluid dynamics (CFD) study was employed to minimize boundary layer effect and shock wave. The degree of expansion, and design of simulation approach was applied to found out the relationship between the divergence angle and nozzle length as the key parameter for the nozzle design. We found that the trade-off tendency between divergence angle and nozzle length through simulation and quantitative analysis, and present the direction of nozzle design that can improve the uniformity of chamber wall coating.

• Journal of Magnetics
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• v.12 no.3
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• pp.129-132
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• 2007

Bismuth-substituted yttrium iron garnet (Bi:YIG, $Bi_{0.5}Y_{2.5}Fe_5O_{12}$) films were deposited with aerosol deposition method and their magnetic and optical properties were investigated as a function of annealing temperature. Since the ceramic films deposited with aerosol deposition method have not a perfect crystal structure due to non-uniform internal stress occurred by mechanical collision during their deposition, the post annealing could be a key process to release its internal stress and to improve its micro structure for optimizing the magnetic and magneto-optic properties of films. The crystallinity of Bi: YIG film was improved with increase of annealing temperature, and the saturation magnetization increased up to 87 emu/cc at $800^{\circ}C$. The Faraday rotation increased up to $1.4deg/{\mu}m$ by annealing at $700^{\circ}C$ around the wavelength of $0.5{\mu}m$. The optical transmittance of the Bi:YIG film was also improved in visible region.

• Journal of Korean Society for Atmospheric Environment
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• v.20 no.E1
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• pp.35-41
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• 2004

Aerosol wall loss is an important factor affecting smog chamber experiments, especially with chambers made of Teflon film. In this work, the aerosol wall loss was investigated in 2.5 and $5.8-m^3$ cubic-shaped Teflon film chambers filled with ambient air. The natural change in the particle size distribution was measured using a scanning mobility particle sizer in a dark environment. The rate of aerosol wall loss was obtained from the deposition theory suggested by Crump and Seinfeld (1981). The measured rates of aero-sol wall loss were In a good agreement with the theoretical and experimental values given by McMurry and Rader (1985), implying that the electrostatic effect enhances particle deposition on the chamber wall. The significance of aerosol wall loss correction was demonstrated with the photochemical reaction experiments using the ambient air.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.311-311
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• 2010

Aerosol deposition method(ADM)은 상온에서 에어로졸화 된 고상의 원료분말을 노즐을 통해 분사시켜 소결과정을 거치지 않고도 상온에서 고밀도 후막을 제조할 수 있는 공정이다. 이러한 Aerosol deposition method의 장점은 상온에서 고밀도 후막을 제조할 수 있고, 다양한 재료의 코팅이 가능하며, 코팅층의 조성 및 화학 양론비의 제어가 용이하다. 본 연구에서는 많은 장점을 가지고 있는 Aerosol deposition method를 이용하여 높은 유전상수, 압전계수, 초전계수를 갖는 $BaTiO_3$ 분말을 원료로 하여 압전소자, 커패시터, 고전압용 유전체 등에 응용이 가능한 유전체 형성에 관한 연구를 진행하였다. 또한 $BaTiO_3$ 같은 강유전체 세라믹을 이용하여 여러 가지 소자를 제조하는 경우 소자의 미세조직에 따라 물성이 영향을 받는 것으로 확인되어져 있다. 이에 본 연구에서는 세라믹 분말보다 상대적으로 탄성이 큰 polymer 분말 중 높은 유전율을 갖고 압전특성이 있는 Polyvinyl difluoride(PVDF)를 선정하여 $BaTiO_3$ 분말에 첨가하여 동시분사법을 사용해 복합체 후막을 성장시켰고, 또한 금속 분말을 첨가하여 동시분사법을 사용해 복합체 후막을 성장시켰다. 성장된 복합체 후막은 유전율과 유전손실 그리고 leakage current, breakdown voltage, 미세구조 분석 등 다양한 분석이 이루어 졌으며, embedded capacitor 유전체 층으로 응용 가능성을 가늠하였고, 상온에서 제조된 유전체 층의 응용을 위한 최적의 공정조건을 제시하고자 한다.