• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.184-189
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• 2006

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by rising experiment and simulation. Optimal design for a passive air spring can be obtained by fluting the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the act ive vibration isolation table wi th the bet ter isolation performance.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.6-11
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• 2002

This paper is concerned with the development of the vibration isolation system using piezoelectric actuators and sensors. The active vibration absorber system consists of 4 pairs of PZT actuators bonded on aluminum plates. Hence, the active system is directly connected to the passive system. The rubber attached to the end of the beam is connected to the upper base as a structural member. It allows bending thus maximizing the vertical movement generated by the piezoceramic actuators. The piezoceramic sensors consists of 4 PZT sensors known to tilting, rolling and vertical movement. This paper also presents the development and the movement of the system.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.1-4
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• 2005

This paper describes work on isolation of vibration related engine by a hydraulic engine mount with controllable area of inertia track. Automotive engine mounts are required to constrain motion of engine shake resulting from low-frequency road input of shock excitation and also to isolate noise and vibration generated by the engine with unbalanced disturbance at the high frequency range. The property of the mount depends on vibration amplitude and excitation frequency, which means that the excitation amplitude is large in low excitation frequency range and small in high frequency range. In this paper, theoretical works with model of the mount to reduce vibrations related engine were conducted. The volumetric stiffness of the mount is greatly changed according to the switching the area of the inertia track. Therefore, when the area of the inertia track is tuned, the transmissibility of the mount is effectively reduced.

• 제어로봇시스템학회:학술대회논문집
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• 2005.06a
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• pp.2120-2125
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• 2005

The principal idea of vibration isolation is to filter out the response of the system over the corner frequency. The isolation objectives are to transmit the attitude control torque within the bandwidth of the attitude control system and to filter all the high frequency components coming from vibration equipment above the bandwidth. However, when a reaction wheels or control momentum gyros control spacecraft attitude, vibration inevitably occurs and degrades the performance of sensitive devices. Therefore, vibration should be controlled or isolated for missions such as Earth observing, broadcasting and telecommunication between antenna and ground stations. For space applications, technicians designing controller have to consider a periodic vibration and disturbance to ensure system performance and robustness completing various missions. In general, past research isolating vibration commonly used 6 degree order freedom isolators such as Stewart and Mallock platforms. In this study, the vibration isolation device has 3 degree order freedom, one translational and two rotational motions. The origin of the coordinate is located at the center-of-gravity of the upper plane. In this paper, adaptive notch filter finds the disturbance frequency and the reference signal in filtered-x least mean square is generated by the notch frequency. The design parameters of the notch filter are updated continuously using recursive least square algorithm. Therefore, the adaptive filtered-x least mean square algorithm is applied to the vibration suppressing experiment without reference sensor. This paper shows the experimental results of an active vibration control using an adaptive filtered-x least mean squares algorithm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.05a
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• pp.615-616
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• 2012

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1993.04a
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• pp.147-147
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• 1993

All types of dynamic excitation, periodical, pulse or transient in vertical, horizontal or all three directions can be effectively reduced by vibration isolation systems. Typical elements for vibration isolation control are spring units consisting of a group of helical compression springs. In all cases of shock, transient or random excitation energy absorbing dampers have to be added to the spring units in order to reduce system response in the frequency range near the natural frequency of the isolation system. The same isolation system of spring units and viscos-dampers has been used since 1979 for passive protection of buildings and structures has been proved to by very advantageous for vibration and structure borne noise control. Not only because of high vertical flexibility of the spring units, compared for example with typical rubber or neoprene mounts out also because of the horizontal of flexibility, which can be adapted by modifying the spring dimensions to nearly every requirement. It is just normal to use the same basic elements for passive isolation as for active isolation.

• Proceedings of the KIEE Conference
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• 2004.07d
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• pp.2495-2497
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• 2004

A system, featuring the hybrid isolator for control in the vertical direction, of active microvibration control was proposed. The main components of this system are a stage vibration isolation table with built-in acceleration sensors for detecting microvibration, hybrid isolators and a digital controller with high precision signal converters. The vibration control algorithm is focused on settling-time critical application and feedback/feedforward combination.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.10a
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• pp.110-111
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• 2010

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.243-244
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• 2008

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2010.05a
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• pp.497-498
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• 2010