• Title/Summary/Keyword: acoustic axis

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A Study of the Fabrication and Enhancement of Film Bulk Acoustic Wave Resonator using Two-Step Deposition Method of Piezoelectric Layer (압전층의 2단 증착법을 이용한 체적 음향파 박막형 공진기의 제작과 성능향상에 관한 연구)

  • Park Sung-Hyun;Chu Soon-Nam;Lee Neung-Heon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.54 no.7
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    • pp.308-314
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    • 2005
  • The 2 GHz film bulk acoustic wave resonator(FBAR), one of the most necessary device of the next generation mobile communication system, consisted of solidly mounted resonator(SMR) structure using Brags reflector, was researched in this paper The FBAR applied SiO$_{2}$ and W had large difference of the acoustic impedance to reflector Al to electrode and ZnO to piezoelectric layer. Specially, the FBAR applied the two-step deposition method to improve the c-axis orientation and increase reproducibility of the fabrication device had good performance. The electrical properties of plasma such as impedance, resistance, reactance, $V_{pp},\;I{pp}$, VSWR and phase difference of voltage and current, was analyzed and measured by RF sensor with the variable experiment process factors such as gas ratio, RF power and base vacuum level about concerning the thickness, c-axis orientation, adhesion and roughness. The FBAR device about the optimum condition resulted reflection loss(S$_{11}$) of -17 dB, resonance frequency of 1.93 GHz, electric-mechanical coefficient(k$_{eff}$) of 2.38 $\%$ and Qualify factor of 580. It was seen better qualify than the common dielectric filter at present and expected on business to the filter device of 2 GHz bandwidth with the MMIC technology.

A Design Method for Direction Selective Structural-acoustic Coupled Radiator (구조-음향 연성현상을 갖는 방사 방향을 가질 수 있는 방사체 설계방법)

  • Seo, Hee-Seon;Kim, Yang-Hann
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.15 no.2 s.95
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    • pp.225-231
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    • 2005
  • This paper presents a design method for the structural-acoustic coupled radiator that can emit sound in the desired direction. A coupled system that has a finite space and a semi-infinite space separated by two flexible walls and an opening is considered. An objective function is selected to maximize radiation power on a main axis and minimize a side lobe level. To get initial values, prediction of a pressure distribution on field points and radiation pattern of the structural-acoustic coupling system is shown at a coupled-resonant frequency. Three different optimization methods are adapted to design the coupled radiator. Pressure and intensity distribution of the designed radiator is presented.

Directional Radiation Pattern Design Using Structural-Acoustic Coupling (구조-음향 연성현상을 이용한 지향성 방사패턴 설계)

  • Seo, Hee-Seon;Kim, Yang-Hann
    • Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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    • 2004.11a
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    • pp.751-754
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    • 2004
  • This paper presents a design of the directional radiation pattern by using the structural-acoustic interaction. For this purpose, prediction of the pressure distribution of the field points and radiation pattern of the structural-acoustic coupling system is shown. In order to get a strong coupling, coupled system that has a finite space and a semi-infinite space separated by two flexible walls and an opening is selected. A volume interaction can be occurred in structure boundary and a pressure interaction can be happened in the opening boundary. The coupled system is maximized the radiation power on the main axis and minimized the side lobe level.

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Acoustic Source Tracker Based on Pseudo-Linear DOA Estimator for Autonomous Robots (자율이동로봇 이동음원 추적센서 개발을 위한 의사선형 도래각 추정기법)

  • Lim, Jae-Il;Ra, Won-Sang
    • Proceedings of the KIEE Conference
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    • 2011.07a
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    • pp.1788-1789
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    • 2011
  • In order to develop a one-axis gimbaled acoustic source tracker for mobile robots, a pseudo-linear direction of arrival(DOA) estimator is proposed using a linear ultrasonic sensor array. Under the assumption that the sensor measurement errors are negligible, a linear measurement model is derived using the linear prediction relation of the received sinusoidal acoustic signals. Applying the Kalman filtering technique for this model, the linear recursive DOA estimator is designed. For its linear recursive filter structure, it is preferable for real-time implementation on a commercial DSP. Through the experiments, the effectiveness of the suggested method is demonstrated.

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Numerical Simulation of Acoustic Field Interacting between a Vortex Ring and a Rigid Sphere (원형 고리와와 강체구의 상호작용에 의한 음향장 수치해석)

  • 유기완;이덕주
    • Journal of KSNVE
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    • v.7 no.2
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    • pp.215-222
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    • 1997
  • The flow and acoustic fields due to a vortex ring interaction with a rigid sphere are simulated numerically. The flow field is regarded as three-dimensional inviscid and incompressible. The vorticity is assumed to be concentrated inside the finite core of vortex filament. The vortex filament curve, described by parabolic blending curve function, is used to effectively solve the modified Biot-Savart equation. The interaction between a vortex ring and a rigid sphere using the parabolic blending curve is calculated. The trajectory of the vortex ring is obtained with several different initial positions between the ring and the sphere. The force variations acting on the sphere are calculated by using the boundary integral method. Finally, we can also obtain the acoustic signals at the far field observation positions from the force variations acting on the rigid surface. We can find that the dipole axis of the directivity patterns are rotated during the interacting phenomena.

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Heat and Mass Transfer Enhancement of a pendant droplet on heated horizontal surface by acoustic resonance (가열된 평판위에 매달려 있는 액적의 음향공진에 의한 열 및 물질 전달 촉진에 관한 연구)

  • Moon, Jong-Hoon
    • Proceedings of the SAREK Conference
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    • 2005.11a
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    • pp.335-340
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    • 2005
  • Nonlinear and forced oscillations of supported viscous droplet were focused in the present study. The droplet has a free contact line with solid plate and inviscid fluid. Natural frequencies of a pendant droplet have been investigated experimentally by imposing the acoustic wave while the frequency is being increased at a fixed amplitude. The evaporation was observed at atmosphere pressure. The droplet was recorded throughout the entire evaporation process and transient variations of the volume was measured. The evaporation process of oscillating droplet with thermofoil has been also observed to investigate analyzing the resonance effect on the thermal characteristics of droplet. It is found that a pendant droplet shows the resonant behaviors at each mode similar to the theoretical analysis. During imposing the acoustic wave, the pendant droplet makes a rotating motion in its longitudinal axis which is a new shape oscillation mode. The evaporation rate of a pendant droplet at resonant frequency is significantly enhanced.

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Deposition of ZnO Films for FBAR Device Fabrication

  • Song Hae-il;Mai Linh;Yim Munhyuk;Yoon Giwan
    • Journal of information and communication convergence engineering
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    • v.3 no.3
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    • pp.131-136
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    • 2005
  • The effects of the deposition temperature on the growth characteristics of the ZnO films were studied for film bulk acoustic wave resonator (FBAR) device applications. All films were deposited using a radio frequency (RF) magnetron sputtering technique. It was found that the growth characteristics of the ZnO films have a strong dependence on the deposition temperature from 25 to $350^{\circ}C$. The ZnO films deposited below $200^{\circ}C$ exhibited reasonably good columnar grain structures with a highly preferred c-axis orientation while those above 200°C showed very poor columnar grain structures with a mixed-axis orientation. This study seems very useful for the future FBAR device applications.

Improvement of c-axis orientation of ZnO thin film prepared on pre-heated substrate with cooling during RF sputter deposition (RF 스퍼터를 이용하여 미리 가열된 기판을 냉각하며 증착한 ZnO 박막의 c축 배향성 향상에 관한 연구)

  • Park, Sung-Hyun;Lee, Soon-Beom;Shin, Young-Hwa;Lee, Neung-Heon;Ji, Seung-Han;Kwon, Sang-Jik
    • Proceedings of the KIEE Conference
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    • 2006.10a
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    • pp.24-25
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    • 2006
  • In this paper, ZnO thin films were prepared on p-Si(100) by RF magnetron sputtering. Before the depostion, the substrates were pre-heated to 500, 400, 300, $200^{\circ}C$ or not. During the deposition, the substrates were cooled down naturally or kept and then the films were investigated by XRD(X-ray diffraction) and SEM (scanning micro scope). It is showed the most outstanding result that the film was prepared on the substrate were cooled from $400^{\circ}C$. When the substrate was cooled from a certain temperature during deposition, it could be improve the c-axis orientation and useful for application of SAW(surface acoustic wave) filter and FBAR(film bulk acoustic wave resonator) device.

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Pressure Characteristics on Korean High-Speed Railway Acoustic Screen Using 1/61 Scaled-Down Moving Model Rig

  • Jang, Yong-Jun;Kim, Hag-Beom;Jung, Woo-Sung;Kim, Dong-Hyeon
    • International Journal of Railway
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    • v.2 no.2
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    • pp.93-97
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    • 2009
  • The experiments for aerodynamic characteristics of railway acoustic screen are performed using 1/61 scaled-down moving model rig facility which employs an axis symmetry and one wire guidance method. The launching mechanism is an air-gun type. The train model for the experiment is the high speed train (Korea Train Express: KTX) and the tested speed is about 300 km/h. The tested train length is 61 em which is corresponding to two units of KTX train. The cross sectional area and weight of train model are 0.00264 $m^2$ and 287 g, respectively. The Reynolds number based on the model train length is $1.2{\times}10^7$. The strength of pressure wave is measured using piezo typed pressure sensor. The measured pick value of pressure was as high as 365 Pa in the shortest gap between the acoustic screen and model train. The measured pressure is well compared with the field test data of mc 779-1 [2] values. However, the experimental data were slightly lower than the mc 779-1 values. The results show the model test can be used as a substitute for the field test.

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