• 한국세라믹학회지
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• 제43권1호
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• pp.42-47
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• 2006

In this paper, we prepared high-quality ZnO thin films for application of FBAR (Film Bulk Acoustic Resonator) by using pulse DC magnetron sputtering. To prevent the formation of low dielectric layers between metal and piezoelectric layer, Ru film of 30 nm thickness was used as a buffer layer. In addition we investigated the influence of annealing condition with various temperatures. As the annealing temperature increased, the crystalline orientation with the preference of (002) c-axis and resistance properties improved. The single resonator which was fabricated at $500^{\circ}C$ exhibited the resonance frequency and the return loss 0.99 GHz and 15 dB, respectively. This work demonstrates potential feasibility for the use of thin film Ru buffer layers and the optimization of annealing condition.

• 음성과학
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• 제12권2호
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• pp.81-88
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• 2005

Electrodermal activity(EDA) is a bio-electric signal which occurs at the skin surface during the sweating. EDA reflects the activity of the sympathetic axis of the autonomic nervous system. EDA is associated with the eccrine sweat gland at the palmar and plamar surface. This study was aimed to characterize the relationship between EDA and auditory stimulus intensities. Acoustic stimulus used in this study were 500 Hz, 1 kHz, 2 kHz of narrow band noise, which were representative of speech frequencies in audible range. Stimulus intensity between 90 and 30 dB in 10 dB within dynamic range. After deriving the minimum stimulus intensity(threshold of skin potential) which elicited skin potential, and then the latency and amplitude were derived from waveform of skin potential, each latency and amplitude were compared to stimulus intensity. The waveform of skin potential were recorded stably, and the threshold of skin potential appeared nearly the hearing threshold level of the participant. The latency was decreased and the amplitude was increased according to the increase of the stimulus intensity. These results suggest that auditory evoked skin potential can be applicable to auditory assessment and audiological diagnosis tool.

• 음성과학
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• 제15권3호
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• pp.39-51
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• 2008

Formant measurements are one of the most important factors to objectively test cross-linguistic differences among vowels produced by speakers of any given languages. However, many speech analysis softwares present erroneous estimates and some researchers use them without any verification procedures. The purposes of this paper are to examine formant measurements of complex waves which were synthesized from the average formant values of five Korean vowels using three default methods in Praat and to verify the measured values of the five vowels produced by 20 students using one of the methods. Variances along the time axis are discussed after determining absolute difference sum from the 1/3 vowel duration point. Results show that there were smaller measurement errors by the burg method. Also, greater errors were observed in the sl or lpc methods mostly caused by the inappropriate formant settings. Formant measurement deviations were greater in those vowels produced by the female students than those of the male students, which were mostly attributed to the settings for the vowels /o, u/. Formant settings can best be corrected by changing the number of formants to the number of visible dark bands on the spectrogram. Those results suggest that researchers should check the validity of the estimates from the speech analysis software. Further studies are recommended on the perception test of the original sound with the synthesized sound by the estimated formant values.

• 신재생에너지
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• 제3권3호
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• pp.45-53
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• 2007

This paper demonstrates a computational method in predicting aerodynamic noise generated from wind turbines. Low frequency noise due to displacement of fluid and leading fluctuation, according to the blade passing motion, is modelled on monopole and dipole sources. They are predicted by Farassat 1A equation. Airfoil self noise and turbulence ingestion noise are modelled upon quadrupole sources and are predicted by semi-empirical formulas composed on the groundwork of Brooks et al. and Lowson. Aerodynamic flow in the vicinity of the blade should be obtained first, while noise source modelling need them as numerical inputs. Vortex Lattice Method(VLM) is used to compute aerodynamic conditions near blade. In the use of program X-foil [M.Drela] boundary layer characteristics are calculated to obtain airfoil self noise. Wind turbine blades are divided into spanwise unit panels, and each panel is considered as an independent source. Retarded time is considered, not only in low frequency noise but also In turbulence ingestion noise and airfoil self noise prediction. Numerical modelling is validated with measurement from NREL [AOC15/50 Turbine) and ETSU [Markham's VS45] wind turbine noise measurements.

• 한국전기전자재료학회논문지
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• 제18권2호
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• pp.159-163
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• 2005

This paper gives characterization of ZnO thin film deposited by RF magnetron sputtering method, which is concerned in deposition process and device fabrication process, to fabricate solidly mounted resonator(SMR)-type film bulk acoustic resonator(FBAR). A piezoelectric layer of 1.1${\mu}{\textrm}{m}$ thick ZnO thin films were grown on thermally oxidized SiO$_2$(3000 $\AA$)/Si substrate layers by RF magnetron sputtering at the room temperature. The highly c-axis oriented ZnO thin film was obtained at the conditions of 265 W of RF power, 10 mtorr of working pressure, and 50/50 of Ar/O$_2$ gas ratio. The piezoelectric-active area was 50 ${\mu}{\textrm}{m}$${\times}$50${\mu}{\textrm}{m}$, and the thickness of ZnO film and Al-3 % Cu electrode were 1.4 ${\mu}{\textrm}{m}$ and 180${\mu}{\textrm}{m}$, respectively. Its series and parallel frequencies appeared at 2.128 and 2.151 GHz, respectively, and the qualify factor of the resonator was as high as 401.8$\pm$8.5.

• 한국전자파학회논문지
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• 제8권4호
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• pp.382-389
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• 1997

본 논문에서는 다결정 AlN 박막을 이용하여 800 MHz 대역의 표면탄성파 펼터를 시험제작한 연구 결과를 제시한다. 고주파 스퍼터링 방법에 의하여 실리콘 기판위에 증착시켜 X선 rocking curve의 반치폭이 $3^{\circ}$이고 박막 성장 방향으로 결정의 c축이 우선 배향된 박막을 얻었다. 임펄수 모텔링 기법을 이용하여 시험제작된 표면탄성파 필터는 중심주파수 865 MHz, 3 dB 대역폭 45 MHz이며 측정된 주파수 응답곡선으로부터 유도된 전기기계 결합상수는 0.8 %, 표면탄성파 전달속도는 5,709 m/s이다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2005년도 춘계학술대회 논문집
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• pp.10-14
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• 2005

Zinc Oxide(ZnO) thin films on Si (100) substrates were deposited by RF magnetron reactive sputtering. The characteristics of zinc oxide thin films with changing sputtering conditions such as argon/oxygen gas ratios, RF power, and substrate temperature, chamber pressure and target-substrate distance were investigated. To analyze a crystallographic properties of the films, $\theta/2{\theta}$ mode X -ray diffraction, SEM, and AFM analyses. C-axis preferred orientation, resistivity, and surface roughness highly depended on Ar/$O_2$ gas ratios. The resistivity of ZnO thin films rapidly increased with increasing oxygen ratio and the resistivity value of $9{\times}10^7\;{\Omega}cm$ was obtained at a working pressure of 10 mTorr with Ar/$O_2$=50/50. The surface roughness was also improved with increasing oxygen ratio and the ZnO films deposited with Ar/$O_2$=50/50 showed the excellent roughness value of $28.7{\AA}$.

• 한국기계가공학회지
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• 제17권1호
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• pp.101-107
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• 2018

In this study, the analysis of radiation noise and chattering noise of vehicle seat recliner was conducted through testing and analysis. First, operating noise was measured by seat back frame and recliner, and chattering noise was confirmed. Next, the transient dynamic analysis was performed, and the result was mapped to the acoustic analysis. Finally, the test and analysis were compared and analyzed. The results are as follow. First, it was found that the peaks appeared in common in the range of 620~650Hz, 1,240~1,290 Hz, and 1,840~1,940 Hz. It was judged that the dynamic characteristics of the recliner system overlapped with the rotation component of the motor to cause amplification of noise and vibration. Next, as a result of imaging the radiation noise analysis, it was judged that the noise radiated in the forward and backward direction has a greater influence than the direction of the rotation axis when the ear position of the person is taken as a reference.

• 한국해양공학회지
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• 제11권3호
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• pp.170-179
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• 1997

This paper presents a hybrid navigation system for AUV to locate its position precisely in rough sea. The tracking system is composed of various sensors such as an inclinometer, a tri-axis magnetometer, a flow meter, and a super short baseline(SSBL) acoustic position tracking system. Due to the inaccuracy of the attitude sensors, the heading sensor and the flowmeter, the predicted position slowly drifts and the estimation error of position becomes larger. On the other hand, the measured position is liable to change abruptly due to the corrupted data of the SSBL system in the case of low signal to noise ratio or large ship motions. By introducing a sensor fusion technique with the position data of the SSBL system and those of the attitude heading flowmeter reference system (AHFRS), the hybrid navigation system updates the three-dimensional position robustly. A Kalman filter algorithm is derived on the basis of the error models for the flowmeter dynamics with the use of the external measurement from the SSBL. A failure detection algorithm decides the confidence degree of external measurement signals by using a fuzzy inference. Simulation is included to demonstrate the validity of the hybrid navigation system.

• 센서학회지
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• 제5권6호
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• pp.68-73
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• 1996

고주파 마그네트론 스펏터링법을 이용하여 유리 및 (012)면인 사파이어 기판위에 ZnO박막을 제조하였다. 유리기판위에는 (002)면을 갖는 ZnO 다결정박막이 제조되었으며, (012)면인 사파이어 기판위에는 (110)면인 ZnO에 피택셜 박막이 제조되었다. 유리 및 사파이어 기판위에 제조된 ZnO박막의 표면탄성파 특성을 조사하였다. 유리 및 사파이어 기판에 대한 중심주파수에서의 전파속도는 각각 2680 m/sec 및 5980 m/sec였으며, 기본모드에서 구한 결합계수는 각각 0.98 % 및 1.44 %였다.