Browse > Article
http://dx.doi.org/10.4313/JKEM.2005.18.2.159

Characteristics of ZnO Thin Film for SMR-typed FBAR Fabrication  

Shin, Young-Hwa (경원대학교 전기전자공학부)
Kwon, Sang-Jik (경원대학교 전기전자공학부)
Kim, Hyung-Jun (서울대학교 공과대학 재료공학과)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.18, no.2, 2005 , pp. 159-163 More about this Journal
Abstract
This paper gives characterization of ZnO thin film deposited by RF magnetron sputtering method, which is concerned in deposition process and device fabrication process, to fabricate solidly mounted resonator(SMR)-type film bulk acoustic resonator(FBAR). A piezoelectric layer of 1.1${\mu}{\textrm}{m}$ thick ZnO thin films were grown on thermally oxidized SiO$_2$(3000 $\AA$)/Si substrate layers by RF magnetron sputtering at the room temperature. The highly c-axis oriented ZnO thin film was obtained at the conditions of 265 W of RF power, 10 mtorr of working pressure, and 50/50 of Ar/O$_2$ gas ratio. The piezoelectric-active area was 50 ${\mu}{\textrm}{m}$${\times}$50${\mu}{\textrm}{m}$, and the thickness of ZnO film and Al-3 % Cu electrode were 1.4 ${\mu}{\textrm}{m}$ and 180${\mu}{\textrm}{m}$, respectively. Its series and parallel frequencies appeared at 2.128 and 2.151 GHz, respectively, and the qualify factor of the resonator was as high as 401.8$\pm$8.5.
Keywords
ZnO; FBAR; Resonator; Piezoelectric layer; SMR;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 K. Lakin, G. Kline, and K. McCarron, 'Development of miniature filters for wireless applications', IEEE Transactions on microwave theory and techniques, Vol. 43, No. 12, p. 2933, 1995.   DOI   ScienceOn
2 Y. M. Kim, K. Y. Noh, J. Y. Park, and J. H. Lee, Journal of the Korea Physical Society, Vol. 39, p. S268, 2001
3 Marc-Alexandre Dubois and Paul Rhee, 'BAW resonators based on aluminum nirtide thin films', Proceedings of IEEE Ultrasonics Symposium, p. 907, 1999
4 J. M. Lee, 'A Study on the Microwave Properties of Film Bulk Acoustic Resonators', Ph. D thesis, Seoul National University, p. 20, 2001
5 Jae Bin Lee, 'Fabrication of Film Bulk Acoustic Resonator Devices using Piezoelectric ZnO Films', Ph. D thesis, Seoul National University, p. 23, 2001
6 R. Ondo-Ndong, F. Pascal-Delannoy, A. Boyer, A. Giani, and A. Foucran, 'Structural properties of zinc oxide thin films prepared by RF magnetron sputtering', Materials Science and Engineering, Vol. B97, No. 1, p. 68, 2003
7 H. P. Loebl, M. Klee, and C. Metzmacher, W. Brand, R. Milsom, and P. Lok, 'Piezoelectric thin AIN films for bulk acoustic wave(BA-W) resonators', Materials Chemistry and physics, Vol. 79, No. 2-3, p. 143, 2003