• Korean Journal of Optics and Photonics
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• v.28 no.6
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• pp.290-294
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• 2017

The Cassegrain telescope consists of a primary concave mirror and a secondary convex mirror. In the case of a secondary mirror, it is more difficult to test wavefront error than for a primary mirror, because it reflects the entire testing beam, as it is convex in shape. In this paper we tested the wavefront error of a complex aspheric convex secondary mirror by using the Simpson-Oland-Meckel Hindle test. To separate the systematic errors, such as fabrication error and alignment error of a meniscus lens, we adopted the QN absolute test (pixel-based absolute test using the quasi-Newton method) as well. Finally, we compared the measured result with that of an ASI (Aspheric Stitching Interferometer) made by the QED company, which resulted in an rms difference of only 2.5 nm, showing a similar shape of astigmatism aberration.

• Korean Journal of Optics and Photonics
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• v.7 no.1
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• pp.37-43
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• 1996

Two type interference air refractometers have been developed by using a frequency stabilized He-Ne laser in a transverse magnetic field. The refractometers were based on symmetric multiple pass interferometer. In this system, One part of the beams passed through air whose refractivity is to be measured and the other part of the beams passed through a vacuum champer to be used as a reference. Several measurements were performed under normal air condition. Maximum difference between two interference refractometers was ${\pm}2{\times}10^{-8}$.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.1
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• pp.125-133
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• 2010

A versatile micro-robotic platform for micro/nano scale assembly has been demanded in a variety of application areas such as micro-biology and nanotechnology. In the near future, a flexible and compact platform could be effectively used in a scanning electron microscope chamber. We are developing a platform that consists of miniature mobile robots and a compact positioning stage with multi degree-of-freedom. This paper presents the design and the implementation of a low-cost and compact multi degree of freedom position sensor that is capable of measuring absolute translational and rotational displacement. The proposed sensor is implemented by using a CMOS type image sensor and a target with specific hole patterns. Experimental design based on statistics was applied to finding optimal design of the target. Efficient algorithms for image processing and absolute position decoding are discussed. Simple calibration to eliminate the influence of inaccuracy of the fabricated target on the measuring performance also presented. The developed sensor was characterized by using a laser interferometer. It can be concluded that the sensor system has submicron resolution and accuracy of ${\pm}4{\mu}m$ over full travel range. The proposed vision-based sensor is cost-effective and used as a compact feedback device for implementation of a micro robotic platform.

• Proceedings of the KIEE Conference
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• 1998.11c
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• pp.922-924
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• 1998

In this paper, an optical fiber sensor(OF sensor) utilizing the principal of Mach-Zehnder interferometer were proposed to detect the partial discharge signals in insulating oil. At first the AC breakdown signals were detected to check the response of the OF sensor. The detected signals from OF sensor was consistent with that from current probe. After the response checking, simultaneous measurements and continuous recording were made of electrical and the OF sensor signals from partial discharge(PD) produced by IEC(b) electrode system immersed in insulating oil. The continuous recording made it possible to extract basic quantities of PD from the OF sensor signals, such as pulse phase and pulse amplitude distribution. Through the signal analysis, the absolute peaks of the OF sensor PD signal was found to be increased with the amplitude of electrical signals, and these results mean that there is a strong correlation between OF sensor and electrical PD signals. It was demonstrated that the OF sensor in this research had a possibility to detect the PD signals in power apparatus.

• Journal of the Korean Society for Precision Engineering
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• v.13 no.6
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• pp.128-135
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• 1996

This paper proposes a high precision measurement technique to obtain the height of gage block with a few millimeter height. The proposed technique is consisted of two steps : In the first step, laser position transducer and electric micrometer are adopted to obtain a coarse value of the height of gage block, and then, in the second step, heterodyne laser interferometry is adopted to acquire the precision value. A new kind of phase detector is constructed in the low cost for the heterodyne interferometer and its linearity with ${\pm}1%$ is confirmed by experiment. Also measurement error factors due to enviroments are discussed and methodology to reduce such errors is proposed. Preliminary experiments are carried out for the gage blocks of as high as a few millimeter.

• Composites Research
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• v.17 no.5
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• pp.15-24
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• 2004

Longitudinal strains (${\varepsilon}_x$) of the core and skin layers in glass fiber reinforced plastic (GFRP) cross-ply composite laminates have been measured using the embedded optical fiber sensor of absolute extrinsic Fabry-Perot interferometer (A-EFPI). Transmission optical microscopy was used to investigate the damage behavior around the A-EFPI sensor. Foil-type strain gauges bonded on both the upper and lower surfaces were used for the measurement of the surface strains. It was shown that values of ${\varepsilon}_x$ in the interior of the skin layer and the core layer measured by embedded A-EFPI sensor were significantly higher than that of the specimen surface measured by strain gauges. The experimental results agreed well with those from finite element analysis on the basis of uniform stress model. Large strains in the core layer led to the occurrence of many transverse cracks which drastically reduced the strain at failure of optical fiber sensor embedded in the core layer.

• Journal of the Korean Society for Nondestructive Testing
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• v.37 no.1
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• pp.7-12
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• 2017

A nonlinear ultrasonic parameter is defined by the ratio of displacement amplitude of the fundamental frequency component to that of the second-order harmonic frequency component. In this study, the ultrasonic displacement amplitude of an SUS316 specimen was measured via a piezo-electric-based method to identify the validity of piezo-electric detection method. For comparison, the ultrasonic displacement was also determined via a laser-based Fabry-Pérot interferometer. The experimental results for both measurements were in good agreement. Additionally, the stability of the repeated test results from the piezo-electric method exceeded that of the laser-interferometric method. This result indicated that the piezo-electric detection method can be utilized to measure a nonlinear ultrasonic parameter due to its excellent stability although it involves a complicated process.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.93-93
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• 2016

Large scale integrated circuits (LSIs) has been improved by the shrinkage of the circuit dimensions. The smaller chip sizes and increase in circuit density require the miniaturization of the line-width and space between metal interconnections. Therefore, an extreme precise control of the critical dimension and pattern profile is necessary to fabricate next generation nano-electronics devices. The pattern profile control of plasma etching with an accuracy of sub-nanometer must be achieved. To realize the etching process which achieves the problem, understanding of the etching mechanism and precise control of the process based on the real-time monitoring of internal plasma parameters such as etching species density, surface temperature of substrate, etc. are very important. For instance, it is known that the etched profiles of organic low dielectric (low-k) films are sensitive to the substrate temperature and density ratio of H and N atoms in the H2/N2 plasma [1]. In this study, we introduced a feedback control of actual substrate temperature and radical density ratio monitored in real time. And then the dependence of etch rates and profiles of organic films have been evaluated based on the substrate temperatures. In this study, organic low-k films were etched by a dual frequency capacitively coupled plasma employing the mixture of H2/N2 gases. A 100-MHz power was supplied to an upper electrode for plasma generation. The Si substrate was electrostatically chucked to a lower electrode biased by supplying a 2-MHz power. To investigate the effects of H and N radical on the etching profile of organic low-k films, absolute H and N atom densities were measured by vacuum ultraviolet absorption spectroscopy [2]. Moreover, using the optical fiber-type low-coherence interferometer [3], substrate temperature has been measured in real time during etching process. From the measurement results, the temperature raised rapidly just after plasma ignition and was gradually saturated. The temporal change of substrate temperature is a crucial issue to control of surface reactions of reactive species. Therefore, by the intervals of on-off of the plasma discharge, the substrate temperature was maintained within ${\pm}1.5^{\circ}C$ from the set value. As a result, the temperatures were kept within $3^{\circ}C$ during the etching process. Then, we etched organic films with line-and-space pattern using this system. The cross-sections of the organic films etched for 50 s with the substrate temperatures at $20^{\circ}C$ and $100^{\circ}C$ were observed by SEM. From the results, they were different in the sidewall profile. It suggests that the reactions on the sidewalls changed according to the substrate temperature. The precise substrate temperature control method with real-time temperature monitoring and intermittent plasma generation was suggested to contribute on realization of fine pattern etching.