• 에너지공학
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• 제28권1호
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• pp.57-64
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• 2019

본 연구에서는 산업용 발전설비 부품의 곡면을 표면처리 하기 위한 브라스팅 노즐을 설계한 후 압축성 유동해석을 통해 분사 성능을 살펴보았다. 이때 곡면 노즐의 출구는 부품의 표면을 따라 곡면으로 설계되었다. 3차원 프린팅으로 노즐을 제작한 후 실린더형 시편의 표면에 연마재를 분사하여 세정 성능시험을 수행하였다. 해석 후 얻은 유효 세정 면적과 실험 후 얻은 유효 세정 면적의 크기와 형상이 유사하였으며 이로부터 곡면형 노즐 설계의 타당성 및 실효성을 확인하였다.

• Design & Manufacturing
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• 제16권1호
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• pp.50-54
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• 2022

Coverglass of electronic equipments is thinner and slimmer, so the glass must have good bending strength. In these days, the polishing edge of glass is used by solid tool like grinding wheel. But solid tool leave micro crack or edge chipping in edge of glass. MR polishing is an optimal method by polishing edge of glass. MR polishing is used MR fluid that is a liquid tool. MR polishing doesn't leave tool path or residual stress, micro crack and edge chipping unlike grinding wheel polishing. In this paper, the results of grinding and MR polishing were compared and analyzed to improve bending strength by minimizing edge chipping of cover glass. It was derived that the depth and size of cracks have a significant influence on the bending strength of the glass edge. The edges of the glass using MR grinding were analyzed to have a better surface and higher bending strength than the glass using abrasive wheel grinding. It was confirmed that MR polishing had an effect on strength improvement by effectively removing cracks in the specimen.

• 한국주조공학회지
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• 제14권5호
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• pp.471-479
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• 1994

Al-2%Si-2%Mg alloy containing SiC particle in 20, $70{\mu}m$ were prepared by mean of squeeze casting with various pressure 50, 100, 150 and 220MPa respectively. The specimens were made by casting into $50{\Phi}{\times}100{\ell}$ mold under various squeeze conditions(pressures, pressurizing temperature, particle sizes). Mechanical properties(hardness, tensile strength, elongation and wear characteristics) were evaluated at room temperature with those various fabrication factors. It became feasible to make favorable Al-SiCp composite free from casting defects by the injection of Ar gas during melting and 100MPa pressure squeeze casting. However, pressure of 50MPa was not sufficient to avoid completely porosity formation as a result of precessing and shrinkage during solidification. As the particle size is smaller and the squeeze pressure is higher, the hardness and tensile strength at room temperature are higher. Cell size became smaller gradually with increase of squeeze pressure. With increase of squeeze pressure(MPa), wear behaviors of those composites were changed from adhesive into abrasive wear, and the tendency of above behavior became outstanding with increasing sliding speed. The chemical reaction(4Al＋3SiC${\rightarrow}$$Al_4C_3+3Si$) is more accelerated at interface between SiCp and matrix with increase of squeeze pressure. Therefore $Al_4C_3$ intercompound and Si peak intensity is increased at interface.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.166-169
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• 2003

In this study, we evaluated the characteristics by the addition of 3 different kinds of nonionic surfactant to improve the dispersion stability of slurries. Slurry stability is an issue in any industry in which settling of particles can result in poor performance. So we observed the variation of particle size and settling rate when the concentration and addition time of surfactant are changed. When the surfactant is added after milling process, the particle size and pH became low. It is supposed that the particle agglomeration was disturbed by adsorption of surfactant on alumina abrasive. The settling rate was relatively stable when nonionic surfactant is added about 0.1~1.0 wt%. When molecular weight(MW) is too small like Brij 35, it was appeared low effect on dispersion stability. Because it can't prevent coagulation and subsequent settling with too small MW. The proper quality of MW for slurry stability was presented about 500,000. Consequently, the addition of nonionic surfactant to alumina slurry has been shown to have very good effect on slurry stabilization. If we apply this results to copper CMP process, it is thought that we will be able to obtain better yield.

• Tribology and Lubricants
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• 제31권2호
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• pp.69-77
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• 2015

Recently, there have been reports of severe symptoms of wear in bearings due to foreign substances mixed in lubricants. Therefore, studying the effects of foreign substances (such as combustion products and metallic debris) on the wear characteristics of journal bearings and proposing appropriate management standards for lubricant cleanliness have become necessary. Studies on the effect of particle size and concentration of foreign substances on surface damage have actively progressed in the recent times. These studies indicate the possibility of foreign substances causing direct wear of bearing surfaces. However, experiments conducted until now involve only basic tests such as the Pin-on-Disk test instead of those involving real bearing systems. This study experimentally examines the damage to the surface of a journal bearing due to foreign substances (combustion products and alumina) mixed with the lubricant, as well as the effect of the type and size of particles on its wear characteristics. The study uses an experimental journal bearing similar to a real bearing system for conducting the lubrication test. Hydrodynamic Lubrication (HL) numerical analysis, experiment results, and film parameters are used for calculating the operating conditions required for achieving the desired film thickness, and the results of the analysis are modified for considering the surface roughness. The run-time of the experiment is 10 min including the stabilization process. The experiment results show that alumina particles larger than the minimum film thickness cause significant surface damage.

• Tribology and Lubricants
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• 제38권3호
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• pp.101-108
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• 2022

The structure and properties of tetrahedral amorphous carbon (ta-C) coatings depend on the main process parameters and bending angles of the magnetic field filter used in the filtered cathodic vacuum arc (FCVA). During the process, it is possible to effectively control the plasma flux of carbon ions incident on the substrate by controlling the arc discharge current, thereby influencing the mechanical properties of the coating film. Furthermore, we can control the size and amount of large particles mixed during carbon film formation while conforming with the bending angle of the mechanical filter mounted on the FCVA; therefore, it also influences the mechanical properties. In this study, we consider tribological characteristics for filtered bending angles of 45° and 90° as a function of arc discharge currents of 60 and 100 A, respectively. Experiment results indicate that the frictional behavior of the ta-C coating film is independent of the bending angle of the filter. However, its sliding wear behavior significantly changes according to the bending angle of the FCVA filter, unlike the effect of the discharge current. Further, upon changing the bending angle from 45° to 90°, abrasive wear gets accelerated, thereby changing the size and mixing amount of macro particles inside the coating film.

• 한국광물학회지
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• 제21권2호
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• pp.201-208
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• 2008

최근 기능성 나노물질로서 반도체 공정 중 기계.화학적 평탄화(CMP)용 연마제로 중요하게 사용되는 세리아(Ceria, $CeO_2$)에 대해서 X-선 회절분석을 실시하여 리트벨트법에 의한 상세한 구조해석 및 세리아의 입자크기와 미세응력을 측정하였다. 두 시료(RT735. RT835)의 리트벨트 계산 결과 R지수 값은 각각 $R_p(%)=8.50$, 8.34; $R_{wp}(%)=13.4$, 13.5; $R_{exp}(%)=11.3$, 11.5; $R_B(%)=2.21$, 2.36; S(GofF: Goodness of fit)=1.2, 1.2를 보여주며 계산이 잘 이루어졌음을 알 수 있다. $CeO_2$는 공간군 Fm3m을 가지며, 격자상수는 a=5.41074(2), 5.41130(6) ${\AA}$, V=158.406(1), 158.455(3) ${\AA}^3$으로 각각 계산되었다. 입자크기 및 미세응력 계산 결과, RT735의 평균 입자크기와 최대 응력은 37.42(1) nm, 0.0026이며, RT835는 72.80(2) nm, 0.0013으로 각각 결정되었다. 입자크기와 미세응력은 서로 반비례함을 알 수 있다.

• 유기물자원화
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• 제32권1호
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• pp.21-29
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• 2024

본 연구에서는 반도체 패키징의 몰딩 공정에서 발생하는 EMC 폐기물을 재활용하여 실리카 나노입자를 성공적으로 제조하였으며, 이를 CMP 공정용 슬러리의 연마재 물질로 응용하였다. 상세히는, EMC 폐기물을 암모니아 용액과 소니케이터를 활용하여 열과 에너지를 가하는 에칭 과정을 통해 실리카 나노입자를 제조하기 위한 실라놀 전구체를 추출하였다. 이후 실라놀 전구체를 활용하여 졸-겔법을 통해 약 100nm를 나타내는 균일한 구형의 실리카 나노입자(e-SiO₂, experimentally synthesized SiO₂)를 합성하였다. 제조한 e-SiO₂는 물리화학적 분석을 통해 상용화된 실리카 입자(c-SiO₂, commercially SiO₂)와 동일한 형상과 구조를 지니고 있음을 확인할 수 있었다. 최종적으로, e-SiO₂를 연마재로 사용하여 CMP 공정용 슬러리를 제조하여 실제적인 반도체 칩의 연마 성능을 확인하였다. 그 결과, 반도체 칩의 표면에 존재하던 스크래치가 성공적으로 제거되어 매끈한 표면으로 바뀌게 된 것을 확인하였다. 본 연구 결과는 물질의 재활용법에 대한 설계를 통해 EMC 폐기물의 부가가치를 향상시키기 위하여 반도체 공정에서 대표적으로 활용되는 고부가가치 소재인 실리카 입자로 성공적으로 제조하고 이를 응용하는 방법에 대해 제시하였다.

• Corrosion Science and Technology
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• 제6권4호
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• pp.159-163
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• 2007

Micron size Co-alloy 800 (T800) powder is coated on the high temperature, oxidation and corrosion resistant super alloy Inconel 718 substrate by the optimal high velocity oxy-fuel (HVOF) thermal spray coating process developed by this laboratory. For the study of durability improvement of high speed spindle operating without lubricants, friction and sliding wear behaviors of the coatings are investigated both at room and at an elevated temperature of $1000^{\circ}F(538^{\circ}C)$. Friction coefficients, wear traces and wear debris of coatings are drastically reduced compared to those of non-coated surface of Inconel 718 substrate both at room temperature and at $538^{\circ}C$. Friction coefficients and wear traces of both coated and non-coated surfaces are drastically reduced at higher temperature of $538^{\circ}C$ compared with those at room temperature. At high temperature, the brittle oxides such as CoO, $Co_{3}O_{4}$, $MoO_2$ and $MoO_3$ are formed rapidly on the sliding surfaces, and the brittle oxide phases are easily attrited by reciprocating slides at high temperature through oxidation and abrasive wear mechanisms. The brittle solid oxide particles, softens, melts and partial-melts play roles as solid and liquid lubricants reducing friction coefficient and wear. These show that the coating is highly recommendable for the durability improvement coating on the machine component surfaces vulnerable to frictional heat and wear.

• 한국윤활학회:학술대회논문집
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• 한국윤활학회 2002년도 proceedings of the second asia international conference on tribology
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• pp.389-396
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• 2002

In XXI century it is necessary to expect the recommencement and development of activities on mastering the Moon. In the long term it is construction of manned lunar bases with industrial, astrophysical, procuring, repair equipment and services. Interplanetary flights from the Moon demand smaller power expenditures, than from the Earth, therefore it is favourable to use its surface for the construction of space-vehicle launching sites. Flights of devices in libration points in the system 'Earth - Moon' are considered. Experience of engineering system creation for the Moon displays the great complexity in provision of serviceability and reliability of friction units. Open friction units should operate under following conditions on the Moon: pressure of environment (vacuum) $p\;>10\;^{-10}$ Pa; wide range of temperature change $+150^{\circ}C\;...170^{\circ}C$; high evaporability of lubricants; influence of temperature gradients and warping of constructions; sublimation of elements of constructional materials; irradiation of different physical nature; effect of micrometeorites; reduced gravitation; influence of abrasive particles of lunar ground; requirements on minimization of size and weight characteristics of a construction (high tension); undesirability (impossibility) of application of liquid and plastic lubricants; vibration, shock, acoustic loadings during start and landings to the Earth; difficulties in repair-regenerative operations in conditions of the Moon etc. Adhesive interaction of conjugated surfaces is the principal reason of possible failures of rubbed units on the Moon. In the research of the Moon automatic interplanetary stations of 'Luna' (USSR), 'Surveyer', 'Apollo' (USA) series were used. Stations executed functions of flying, landing, artificial satellites of the Moon, moon-rovers and manned spacecrafts such as 'Apollo'. The experimental- theoretical researches carried out in the sixtieth years on tribology for conditions of the Moon appeared to be rather useful to engineering of an outer space exploration and the decision of complex problems for the friction units operating in extreme conditions on the Earth. For the creation of highly loaded friction units for the long service life on the Moon it is required not only to use accumulated experience and designed technologies, but also to carry out wide scientific research.