• Journal of the Korean Ceramic Society
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• v.44 no.2 s.297
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• pp.98-102
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• 2007

The stability of slurry and removal rate during recycling of colloidal silica slurry was evaluated in silicon wafer polishing. The particle size distribution, pH, and zeta potential were measured to investigate the stability of colloidal silica. Large particles appeared as recycling time increased while average size of slurry did not change. Large particles were identified by EDS(energy dispersive spectrometer) as foreign substances from pad or abraded silicon flakes during polishing. As the recycling time increased, pH of slurry decreased and removal rate of silicon reduced but zeta potential decreased inversely. Hence, it could be mentioned that decrease of removal rate is related to consumption of $OH^-$ ions during recycling. Attention should be given to the control of pH of slurry during polishing.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.65-65
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• 2003

Chemical mechanical polishing (CMP) is one of the most important processes in recent ULSI (Ultra Large Scale Integrated Circuit) manufacturing technology. Recently, ceria slurries with surfactant have recently been used in STI-CMP,[1] became they have high oxide-to-nitride removal selectivity and widen the processing margin The role of the abrasives, however, on the effect of planarization on STI-CMP is not yet clear. In this study, we investigated how the crystal characteristic affects the planarization efficiency of wafer surface with controlling crystallite size and poly crystalline abrasive size independently.

• Journal of the Korean Ceramic Society
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• v.32 no.6
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• pp.710-718
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• 1995

The new forming method, Pressureless Powder Packing Forming Method was applied to the manufacturing of reaction sintered SiC. After the experiments of vibratory powder packing and binder infiltration, the abrasive SiC powder of which mean size is 45${\mu}{\textrm}{m}$ was selected to this forming method. Uniform green bodies with porosity of 45% and narrow pore size distribution could be formed by this new forming method. Also, complex or varied cross-sectional shapes could be easily manufactured through the silicone rubber mould used in this forming method. Maximum 15 wt% amorphous carbon was penetrated into green body by multi impregnation-carbonization cycles. And reaction-bonded SiC was manufactured by infiltration of SiC-carbon shaped bodies with liquid silicon.

• Journal of the Korean Ceramic Society
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• v.32 no.1
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• pp.113-119
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• 1995

The green body was fabricated by a new forming method, pressureless powder packaing forming method, and the characteristics of sintered specimen were investigated. It was found that alumina ceramics prepared by the present method showed porous structure with narrow pore size distribution, and in case of abrasive powder sintered body, compared with dry-pressed specimen, had the nearly same density. Especially, the specimen prepared with spray-dried granules showed the characteristic that granules were not either deformed or fractured during forming and sintering process. Therefore, it was found that this new forming method was effective method in fabrication of porous ceramics on account of easy control of porosity and pore size and its high thermal stability.

• The Korean Journal of Rheology
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• v.11 no.1
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• pp.44-49
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• 1999

Effects of particulate size and frictional characteristics were examined on the melting behavior of PP (polypropylene) in a batch mixer. Powder and pellet types of PP were used and each component was blended with PE (polyethylene) wax and clay, respectively. It was observed that small size particulates, i.e. powder systems exhibit accelerated melting behavior; and it was also found that the abrasive additive acts as an effective agent for fast melting of PP powder. Retardation of melting due to the reduced friction was observed in PP pellet/PE wax blends, while melting rate of PP powder was increased by addition of PE wax.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.12 no.4
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• pp.9-16
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• 2003

In this study, the decision of dressing time for diamond wheel was analyzed by observing with acoustic emission signals and surface roughness, and also obtained the machining characteristics by weibull distribution plot for the values of bending strength. From the experimental study, it was possible to predict the time of re-dressing for the diamond grinding wheel with the analysis of acoustic emission signals and surface roughness values, and following conclusions were obtained. The root-mem-square values of acoustic emission signals were obtained low as the increased of table speed for different abrasive grain size. This is caused by the lack of grinding power which is not able to get rid of all real grinding mass of depth as the table speed is increased. The values of bending strength for ground $Si_3 N_4$ specimens were decreased for gain size of #400 than that of #60, but it was found that the surface roughness values for gain size of #60 were better than that of #400. As compared the shape parameter of weibull distribution plot for the values of bending strength, it was found that the reliability of bending strength for grain size of #60 increased than that of #400.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.3
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• pp.51-55
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• 2005

This study addresses the contamination sensitivity test of a typical fuel pump for an automotive vehicle. The objective of the study is to find the contamination sensitivity coefficient of a fuel pump on specific contaminant particle sizes so that an optimal fuel filter could be selected. To achieve the objective, the degradation of discharge flow rate of the fuel pump is measured under the experiments of various contaminants size ranges of ISO test dust up to $80\;{\mu}m$. The fundamental theory of contamination sensitivity is introduced and the contamination sensitivity coefficients are estimated using the experimental data. Maximum contamination sensitivity coefficient of $5\chi\;10^{-6}\;L/min{\cdot}Ea$ is found in the contaminant size range of $40\;{\mu}m\~50\;{\mu}m$. The magnified picture of the surface of vane disc reveals that the abrasive wear is the principal cause of discharge flow rate degradation. Hence, this study reveals that a high efficiency filter for contaminant particles especially in the size range of $30\;{\mu}m\~70\;{\mu}m$ especially should be used to maintain the service life of the fuel filter.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.17 no.2
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• pp.138-143
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• 2004

CMP (Chemical Mechanical Polishing) technology for global planarization of multilevel interconnection structure has been widely studied for the next generation devices. Among the consumables for CMP process, especially, slurry and their chemical compositions play a very important role in the removal rates and within-wafer non-uniformity (WIWNU) for global planarization ability of CMP process. However, CMP slurries contain abrasive particles exceeding 1 ${\mu}{\textrm}{m}$ size, which can cause micro-scratch on the wafer surface after CMP process. Such a large size particle in these slurries may be caused by particle agglomeration in slurry supply-line. In this work, to investigate the effects of agglomeration on the performance of oxide CMP slurry, we have studied an aging effect of silica slurry as a function of particle size distribution and aging time during one month. We Prepared and compared the self-developed silica slurry by adding of alumina powders. Also, we have investigated the oxide CMP characteristics. As an experimental result, we could be obtained the relatively stable slurry characteristics comparable to aging effect of original silica slurry. Consequently, we can expect the saving of high-cost slurry.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.102-108
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• 2004

This study addresses the contamination sensitivity test of a typical fuel pump for automotive vehicle. The objective of the study is to find the contamination sensitivity coefficient of fuel pump on specific contaminant particle sizes so that optimal fuel filter could be selected. To achieve the objective, the degradation of discharge flow rate of fuel pump was measured under the experiments of various contaminants size ranges of ISO test dust up to 80${\mu}{\textrm}{m}$. The fundamental theory of contamination sensitivity was introduced and the contamination sensitivity coefficients were estimated using the experimental data. Maximum contamination sensitivity coefficient of $5{\times}10^{-6}$ L/minㆍEa was found on the contaminant size range of 40${\mu}{\textrm}{m}$∼50${\mu}{\textrm}{m}$. The magnified picture of the surface of vane disc revealed that the abrasive wear was the principal cause of discharge flow rate degradation. Hence, this study revealed that high efficiency filter on the contaminant particle size range of 30${\mu}{\textrm}{m}$∼70${\mu}{\textrm}{m}$ especially should be used to maintain the service lift of the fuel filter.

• Analytical Science and Technology
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• v.32 no.5
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• pp.173-184
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• 2019

As the size of semiconductors becomes smaller, it is necessary to perform high precision polishing of nanoscale. Ceria, which is generally used as an abrasive, is widely used because of its uniform quality, but its stability is not high because it has a high molecular weight and causes agglomeration and rapid precipitation. Such agglomeration and precipitation causes scratches in the polishing process. Therefore, it is important to accurately analyze the size distribution of ceria particles. In this study, a study was conducted to select dispersants useful for preventing coagulation and sedimentation of ceria. First, a dispersant was synthesized and a ceria slurry was prepared. The defoamer selection experiment was performed in order to remove the air bubbles which may occur in the production of ceria slurry. Dynamic light scattering (DLS) and asymmetrical flow field-flow fractionation (AsFlFFF) were used to determine the size distribution of ceria particles in the slurry. AsFlFFF is a technique for separating nanoparticles based on sequential elution of samples as in chromatography, and is a useful technique for determining the particle size distribution of nanoparticle samples. AsFlFFF was able to confirm the presence of a little quantities of large particles in the vicinity of 300 nm, which DLS can not detect, besides the main distribution in the range of 60-80 nm. AsFlFFF showed better accuracy and precision than DLS for particle size analysis of a little quantities of large particles such as ceria slurry treated in this study.