• Journal of the Semiconductor & Display Technology
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• v.22 no.4
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• pp.26-31
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• 2023

We investigated the impact of NF₃ / H₂O remote plasma dry cleaning conditions on the SiO₂ etching rate at different preparation states during the fabrication of ultra-large-scale integration (ULSI) devices. This included consideration of factors like Si crystal orientation prior to oxidation and three-dimensional structures. The dry cleaning process were carried out varying the parameters of pressure, NF₃ flow rate, and H₂O flow rate. We found that the pressure had an effective role in controlling anisotropic etching when a thin SiO₂ layer was situated between Si₃N₄ and Si layers in a multilayer trench structure. Based on these observations, we would like to provide further guidelines for implementing the dry cleaning process in the fabrication of semiconductor devices having 3D structures.

• Journal of IKEEE
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• v.18 no.4
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• pp.447-455
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• 2014

In this research, n-based 4H-MOS Capacitor was fabricated with PECVD (plasma enhanced chemical vapor deposition) process for improving SiC/$SiO_2$ interface properties known as main problem of 4H-SiC MOSFET. To overcome the problems of dry oxidation process such as lower growth rate, high interface trap density and low critical electric field of $SiO_2$, PECVD and NO annealing processes are used to MOS Capacitor fabrication. After fabrication, MOS Capacitor's interface properties were measured and evaluated by hi-lo C-V measure, I-V measure and SIMS. As a result of comparing the interface properties with the dry oxidation case, improved interface and oxide properties such as 20% reduced flatband voltage shift, 25% reduced effective oxide charge density, increased oxide breakdown field of 8MV/cm and best effective barrier height of 1.57eV, 69.05% reduced interface trap density in the range of 0.375~0.495eV under the conduction band are observed.

• 한국신재생에너지학회:학술대회논문집
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• 2009.06a
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• pp.88-88
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• 2009

실리콘 이종접합 태양전지 제작을 위한 주요 요소기술 중 TCO/a-Si:H 간의 계면 특성은 태양전지 효율을 결정하는 주요 인자이다. 일반적으로 투명전도 산화막으로는 ZnO:Al 또는 ITO 가 사용되고 있으며 Zn, In, Sn, O 등의 확산과 Si원소의 확산으로 TCO/a-Si:H 계면에서 $SiO_x$가 생성되어 태양전지 충진률을 감소시키는 영향을 미친다. 따라서 본 연구에서는 TCO/a-Si 계면에서 확산을 방지 하면서 패시베이션 역할을 하는 완충층을 삽입하여 실리콘 이종접합 태양전지의 효율을 높이는 연구를 수행하였다. 완충층으로 사용된 ZnO:Al의 수소화와 Zn 박막, $TiO_2$ 박막의 전기 광학적 특성을 분석하였고 AES 분석을 통해 $SiO_x$의 생성과 각 원소의 확산정도를 분석하고, CTLM을 이용하여 TCO/완충층/a-Si 간의 접촉저항을 측정하였다. 결과적으로 완충층으로 사용된 $TiO_2$(5nm)는 광특성에 큰 감소요인 없이 전기적 특성과 접촉저항 특성이 우수하였으며, 원소들간의 확산방지층으로도 우수한 특성을 보였다. ZnO:Al의 수소화는 SIMS 분석 결과 수소원소들이 계면쪽에 위치하지 않고 표면쪽에 다수 존재함으로써 패시베이션 특성을 크게 보이지 않았으나 AZO 박막의 전기적 특성은 크게 향상 시켰다. 그밖에 완충층으로 사용된 Zn 박막은 두께가 두꺼원 질수록 접촉저항의 감소를 가져왔으나 광학적 특성이 크게 감소하면서 효율적인 광포획 특성을 가지지 못하였다. 본 연구를 통하여 TCO/a-Si:H 간의 완충층 삽입을 통해 접촉저항을 낮추고 원소간의 확산을 억제하여 계면 패시베이션 특성을 향상 시킬수 있었다.

• Applied Chemistry for Engineering
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• v.8 no.4
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• pp.582-588
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• 1997

Synthetic reaction of TAME, ETBE, and MTBE compounds used largely for gasoline octane number enhancer to prevent air pollution was investigated using heteropolyacid catalyst in a fixed bed flow reactor. In the synthetic reaction of TAME, ETBE and MTBE, after hetero atom being replaced with poly atom, the activity of the catalyst, $H_4SiW_{12}O_{40}$ with coordinated bond with W and an hetero atom of Si was the highest among the catalysts tested. Also the activity depended upon the metals replaced which are related to the catalyst acidity. $FeHPW_{12}O_{40}$ and $K_3PM_{o12}O_{40}$ catalysts showed high activity in TAME synthesis, while they were not effective in ETBE and MTBE synthesis. In this study catalysts showing high activity were selected and mixed with equal weight combination of $H_4SiW_{12}O_{40}$ and $Sr_2SiW_{12}O_{40}$ ;$H_4SiW_{12}O_{40}$ and $NaH_2PW_{12}O_{40}$ ; $Fe_{1.5}PW_{12}O_{40}$ and $Mg_2SiW_{12}O_{40}$ ; $Mg_2SiW_{12}O_{40}$ and $Ba_2SiW_{12}O_{40}$. The mixed heteropolyacid catalysts showed higher TBA conversion rate and better selectivity of ETBE and MTBE than the single catalysts.

• The Bulletin of The Korean Astronomical Society
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• v.39 no.2
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• pp.112.2-112.2
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• 2014

We propose simultaneous monitoring observations of 22 GHz $H_2O$ and 43/86/129 GHz SiO masers toward ~15 evolved stars in order to investigate spatial structure and dynamical effect from SiO to $H_2O$ maser regions including mass-loss process and development of asymmetry in circumstellar envelopes. We also aim at investigating mutual association and difference between SiO and $H_2O$ masers for establishing SiO and $H_2O$ maser models coupled to hydrodynamical model of circumstellar envelope. In addition, the correlation and difference of SiO maser properties among J=1-0, J=2-1, and J=3-2 transition masers are traced according to different type of stars for constraining SiO pumping models. These scientific goals and target sources were determined based on KVN single dish and VLBI feasibility test observations at 4 bands. As a total observing time of every 2 month monitoring, about 90 and 360 hours (in average per year) are required for single dish and VLBI observations, respectively. From the 2014B observing season, these monitoring observations will be derived as one of KVN key science programs.

• Journal of The Korean Astronomical Society
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• v.47 no.6
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• pp.293-302
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• 2014

Simultaneous time monitoring observations of $H_2O$ $6_{16}-5_{23}$, SiO J = 1-0, 2-1, 3-2, and $^{29}SiO$ ${\upsilon}=0$, J = 1-0 lines are carried out in the direction of the Mira variable star TX Cam with the Korean VLBI Network single dish radio telescopes. For the first time, the $H_2O$ maser emission from TX Cam is detected near the stellar velocity at five epochs from April 10, 2013 (${\phi}=3.13$) to June 4, 2014 (${\phi}=3.89$) including minimum optical phases. The intensities of $H_2O$ masers are very weak compared to SiO masers. The variation of peak antenna temperature ratios among SiO ${\upsilon}=1$, J = 1-0, J = 2-1, and J = 3-2 masers is investigated according to their phases. The shift of peak velocities of $H_2O$ and SiO masers with respect to the stellar velocity is also investigated according to observed optical phases. The $H_2O$ maser emission occurs around the stellar velocity during our monitoring interval. On the other hand, the peak velocities of SiO masers show a spread compared to the stellar velocity. The peak velocities of SiO J = 2-1, and J = 3-2 masers show a smaller spread with respect to the stellar velocity than those of SiO J = 1-0 masers. These simultaneous observations of multi-frequencies will provide a good constraint for maser pumping models and a good probe for investigating the stellar atmosphere and envelope according to their different excitation conditions.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.17 no.2
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• pp.47-51
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• 2007

F-doped SiOC : H thin films with low refractive index were deposited on Si wafer and glass substrate by plasma enhanced chemical vapor deposition (PECVD) as a function of rf powers, substrate temperatures, gas rates and their composition flow ratios ($SiH_4,\;CF_4$ and $N_2O$). The refractive index of the F-doped SiOC : H film continuously decreased with increasing deposition temperature and rf power. As $N_2O$ gas flow rate decreased, the refractive index of the deposited films decreased down to 1.3778, reaching a minimum value at rf power of 180W and $100^{\circ}C$ without $N_2O$ gas. The fluorine content of F-doped SiOC : H film increased from 1.9 at% to 2.4 at% as the rf power was increased from 60 W to 180 W, which results in the decrease of refractive index.

• Journal of the Korean Ceramic Society
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• v.35 no.12
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• pp.1329-1336
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• 1998

A twt -step carbothermal reduction scheme has been employed for the synthesis of SiC whiskers in an Ar or a H2 atmosphere via vapor-solid two-stage and vapor-liquid-solid growth mechanism respectively. It has been shown that the whisker growth proceed through the following reaction mechanism in an Ar at-mosphere : SiO2(S)+C(s)-SiO(v)+CO(v) SiO(v)3CO(v)=SiC(s)whisker+2CO2(v) 2C(s)+2CO2(v)=4CO(v) the third reaction appears to be the rate-controlling reaction since the overall reaction rates are dominated by the carbon which is participated in this reaction. The whisker growth proceeded through the following reaction mechaism in a H2 atmosphere : SiO2(s)+C(s)=SiO(v)+CO(v) 2C(s)+4H2(v)=2CH4(v) SiO(v)+2CH4(v)=SiC(s)whisker+CO(v)+4H2(v) The first reaction appears to be the rate-controlling reaction since the overall reaction rates are enhanced byincreasing the SiO vapor generation rate.

• The Bulletin of The Korean Astronomical Society
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• v.46 no.2
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• pp.49.1-49.1
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• 2021

We carried out simultaneous monitoring observations of five maser lines, H₂O (22 GHz), SiO 𝝊 =1, 2, J =1-0 (43.1, 42.8 GHz), and SiO 𝝊 =1, J=2-1, J =3-2 (86.2, 129.3 GHz), toward the Mira variable star WX Serpentis with the 21-m antennas of the Korean VLBI Network (KVN) in 2009-2021 (~12 years). Most spectra of the H₂O maser are well separated into two parts of two blue- and one redshifted features within ± 10 km s-1 of the stellar velocity. All detected SiO masers are generally concentrated within ± 5 km s-1 of the stellar velocity, and sometimes appear split into two components. Overall, the profiles of SiO and H₂O masers detected in WX Serpentis illustrate typical characteristics of the Mira variable. In addition, flux variations of both SiO and H₂O masers are well correlated with the optical light curve of the central star, showing a phase lag of ~ 0.1 for SiO masers and ~ 0.2 for H₂O maser. This phenomenon is considered to be the direct effect of propagating shock waves generated by the stellar pulsation, because SiO and H₂O masers are sequentially distributed at different positions with respect to the central star. In addition, we analyzed long-term trends and characteristics of maser velocities, maser ratio, and the velocity extents (the full width at zero power; FWZP). We also investigated a spectral energy distribution (SED) ranging from 1.2 to 240 ㎛ obtained using several infrared data: 2MASS, WISE, IRAS, ISO, COBE DIBRE, RAFGL, and AKARI (IRC and FIS). From the IRAS LRS and ISO SWS spectra of this star, we identified 9.7 and 12 ㎛ silicate emission features consistent with the SE6 spectrum model, corresponding to the typical AGB phase.

• Monthly Notices of the Royal Astronomical Society
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• v.488 no.1
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• pp.1427-1445
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• 2019

H₂O (22 GHz) and SiO masers (43, 86, 129 GHz) in the bipolar proto-planetary nebula OH 231.8+4.2 were simultaneously monitored using the 21-m antennas of the Korean VLBI Network in 2009-2015. Both species exhibit periodic flux variations that correlate with the central star's optical light curve, with a phase delay of up to 0.15 for the maser flux variations with respect to the optical light curve. The flux densities of SiO v = 2, J = 1→0 and H₂O masers decrease with time, implying that they may disappear in 10-20 yr. However, there seems to have been a transient episode of intense H₂O maser emission around 2010. We also found a systematic behaviour in the velocity profiles of these masers. The velocities of the H₂O maser components appear to be remarkably constant, suggesting ballistic motion for the bipolar outflow in this nebula. On the other hand, those of the SiO maser clumps show a systematic radial acceleration of the individual clumps, converging to the outflow velocity of the H₂O maser clumps. Measuring the full widths at zero power of the detected lines, we estimated the expansion velocities of the compact bipolar outflow traced by H₂O maser and SiO thermal line, and discussed the possibility of the expanding SiO maser region in the equatorial direction. All of our analyses support that the central host star of OH231.8 is close to the tip of the AGB phase and that the mass-loss rate recently started to decrease because of incipient post-AGB evolution.