• Title/Summary/Keyword: a-C/B:H film

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High Frequency Properties of Patterned Fe-Al-O Thin Films

  • N.D. Ha;Park, B.C.;B.K. Min;Kim, C.G.;Kim, C.O.
    • Proceedings of the Korean Magnestics Society Conference
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    • 2003.06a
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    • pp.194-194
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    • 2003
  • As a result of the recent miniaturization an enhancement in the performance of thin film inductors and thin film transformers, there are increased demands for the thin films with high magnetic permeability in the high frequency range, high saturation magnetization, in high electrical resistivity, and low coercive force. In order to improve high frequency properties, we will investigate anisotropy field by shape and size of pattern. The Fe-Al-O thin films of 16mm and 1 $\mu\textrm{m}$ thickness were deposited on Si wafer, using RF magnetron reactive sputtering technique with the mixture of argon and oxygen gases. The fabricating conditions are obtained in the working partial pressure of 2mTorr, O$_2$ partial pressure of 5%, input power of 400W, and Al pellets on an Fe disk with purity of 99,9%. Magnetic properties of the continuous films as followed: the 4$\pi$M$\_$s/ of 19.4kG, H$\_$c/ of 0.6Oe, H$\_$k/ of 6.0Oe and effective permeability of 2500 up to 100㎒ were obtained. In this work, we expect to enhance effect of magnetic anisotropy on patterned of Fe-Al-O thin films.

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Effect of Feeding Rate for Operation Properties of Centrifugal Thin Film Evaporator (급액속도가 원심식 박막증발기의 운전 특성에 미치는 영향)

  • Kim, Byeong-Sam;Park, Noh-Hyun;Park, Moo-Hyun;Han, Bong-Ho
    • Korean Journal of Food Science and Technology
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    • v.23 no.4
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    • pp.437-441
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    • 1991
  • During the evaporation of garlic juice by centrifugal thin film evaporator (Centri-Therm, CT-1B), the effect of feeding rate was investigated for its operation properties. On the process condition of feeding rate of 25 to 125 kg/h, theoretical average thickness of the garlic juice film on the rotating cone and residence time of the juice in the evaporator varied in the range of 0.52 to 0.89 mm and 1.77 to 6.75 second, respectively. And the flow of garlic juice was considered as a streamline flow by Reynolds number. At constant temperatures of steam and juice evaporation, concentration ratio decreased with the increase of the feeding rate. But the evapoartion rate and overall heat transfer coefficient increased with the increase of the feeding rate until the feeding rate reached a certain value and then decreased. On the conditions of $25{\leq}$feeding rate ${\leq}125\;kg/h$, evaporation temperature of $40^{\circ}C$, $95{\leq}steam$ $temperature≤120^{\circ}C$ and initial feed concentration of $32^{\circ}Brix$, concentration ratio and overall heat transfer coefficient were $1.04{\sim}2.04\;and\;3,074.33{\sim}17,614.70kJ/m^{2}{\cdot}h{\cdot}^{\circ}C$.

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Fabrication of OTFT with plasma polymerized methylmethacrylate organic thin film (플라즈마 중합된 ppMMA 유기 박막을 절연층으로 한 유기박막 트랜지스터의 제작)

  • Lim, J.S.;Shin, P.K.;You, D.H.;Park, G.B.;Lim, H.C.;Jo, G.S.;Lee, S.H.;Lee, D.C.
    • Proceedings of the KIEE Conference
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    • 2007.07a
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    • pp.1347-1348
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    • 2007
  • In this paper, ITO gate electrode surface was modified using $O_2$ plasma and organic gate insulating layers were deposited on the ITO surface using plasma polymerization technique. In order to investigate the influence of the plasma coupling method and plasma conditions on the plasma polymerized methyl methacrylate (ppMMA) thin film properties, inductively coupled (ICP) and capacitively coupled plasma (CCP) were used to generate the plasma and the plasma parameters were varied. The ppMMAs were investigated using atomic force microscopy (AFM) and a Fourier Transform Infrared (FT-IR) spectroscopy. Dielectric constants of the ppMMA thin films were investigated using a impedance analyzer (HP4192A, LF Impedance Analyzer). Current-Voltage (I-V) characteristics of the organic thin film transistors (OTFTs) were investigated using a source measurement unit (SMU: Keithley 2612). Proposed method can be applied to dry-process to fabricate OTFTs during overall fabricating steps.

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Low-temperature synthesis of nc-Si/a-SiNx: H quantum dot thin films using RF/UHF high density PECVD plasmas

  • Yin, Yongyi;Sahu, B.B.;Lee, J.S.;Kim, H.R.;Han, Jeon G.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2016.02a
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    • pp.341-341
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    • 2016
  • The discovery of light emission in nanostructured silicon has opened up new avenues of research in nano-silicon based devices. One such pathway is the application of silicon quantum dots in advanced photovoltaic and light emitting devices. Recently, there is increasing interest on the silicon quantum dots (c-Si QDs) films embedded in amorphous hydrogenated silicon-nitride dielectric matrix (a-SiNx: H), which are familiar as c-Si/a-SiNx:H QDs thin films. However, due to the limitation of the requirement of a very high deposition temperature along with post annealing and a low growth rate, extensive research are being undertaken to elevate these issues, for the point of view of applications, using plasma assisted deposition methods by using different plasma concepts. This work addresses about rapid growth and single step development of c-Si/a-SiNx:H QDs thin films deposited by RF (13.56 MHz) and ultra-high frequency (UHF ~ 320 MHz) low-pressure plasma processing of a mixture of silane (SiH4) and ammonia (NH3) gases diluted in hydrogen (H2) at a low growth temperature ($230^{\circ}C$). In the films the c-Si QDs of varying size, with an overall crystallinity of 60-80 %, are embedded in an a-SiNx: H matrix. The important result includes the formation of the tunable QD size of ~ 5-20 nm, having a thermodynamically favorable <220> crystallographic orientation, along with distinct signatures of the growth of ${\alpha}$-Si3N4 and ${\beta}$-Si3N4 components. Also, the roles of different plasma characteristics on the film properties are investigated using various plasma diagnostics and film analysis tools.

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The Influence of Engine Operating Conditions and Lubricants on Oil Film Thickness of Engine Connecting Rod Bearing (커넥팅로드 베어링의 유막두께에 미치는 기관 운전조건 및 윤활유의 영향)

  • Lee, D.H.;Chang, B.J.
    • Transactions of the Korean Society of Automotive Engineers
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    • v.2 no.5
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    • pp.1-10
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    • 1994
  • By applying of total electric capacitance method on engine connecting rod bearing during engine operating, the influence of engine operating conditions and lubricants on bearing oil film thickness was investigated. Minimum oil film thickness increases with kinematic viscosity, but as increasing of viscosity, the increasing ratio of film thickness is reduced. Also minimum oil film thickness increases with engine speed but there is a limit. Above this limit, film thickness decreases in opposition because of crankshaft inertia. As increasing of engine torque and oil temperature, munimum oil film thickness decreases linearly. For non-Newtonian oils, the correlation between $100{\circ}C$ kinematic viscosity and munimum oil film thickness is very poor.

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A Study on Discharge Electrode Formation for PDP with Ion Beam Assisted DC Planar Magnetron Sputtering Device (Ion Beam Assisted DC Planar Magnetron Sputtering 장치에 의한 PDP용 방전전극 형성에 관한 연구)

  • Kim, J.H.;Son, J.B.;Shin, J.H.;Cho, J.S.;Park, C.H.
    • Proceedings of the KIEE Conference
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    • 1998.07e
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    • pp.1791-1793
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    • 1998
  • The thin film metal electrode for PDP needs low resistivity and strong adhesion. But the sputtered copper film is weak, in the adhesion between copper and glass. In this paper, we investigated the characteristics of resistivity and adhesion about Cu thin film using Ion Beam Assisted DC Planar Magnetron Sputtering(DCPM) Device.

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Properties of Phosphorus Doped ${\mu}c$-Si:H Thin Films Prepared by PECVD (PECVD에 의하여 제조된 Phosphorus-Doped ${\mu}c$-Si:H 박막의 특성)

  • Lee, J.N.;Moon, D.G.;Ahn, B.T.;Im, H.B.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1992.11a
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    • pp.22-27
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    • 1992
  • Phosphorus doped hydrogenated microcrystalline silicon (${\mu}c$-Si:H) thin films were deposited by PECVD (Plasma Enhanced Chemical Vapour Deposition) method using 10.2% $SiH_4$ gas (diluted in Ar) and 308ppm $PH_3$ gas (diluted in Ar). The structural, optical and electrical properties of the films were investigated as a function of substrate temperature(15 to $400^{\circ}C$) and RF power(10 to 120W). The thin film deposited by varing substrate temperature had columnar structure and microcrystalline phase. The volume fraction of microcrystalline phase in the films deposited at RF power of 80W, increased with increasing substrate temperature up to $200^{\circ}C$, and then decreased with further increasing substrate temperature. Volume fraction of microcrystalline phase increased monotonously with increasing RF power at substrate temperature of $250^{\circ}C$. With increasing volume fraction of microcrystalline, electrical resistivity of films decreased to 0.274 ${\Omega}cm$.

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Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols

  • Cheong, Deock-Soo;Yun, Dong-Hun;Park, Sang-Hwan;Kim, Chang-Sam
    • Journal of the Korean Ceramic Society
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    • v.46 no.6
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    • pp.708-712
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    • 2009
  • ITO films were achieved by sintering at $500{\sim}550{^{\circ}C}$. This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn$O_2$ on XRD at $350{^{\circ}C}$/1 h, but the ITO-B sol showed a small amount of Sn$O_2$ even after annealing at $600{^{\circ}C}$/1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600$\Omega$/□, while the ITO-B sol alone showed 5200 $\Omega$/□ by sintering at $550{^{\circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.

Packaging and Storage of kimchi with Polyethylene Film Contained Raw Ore (생광석 함유 폴리에틸렌 필름을 사용한 김치의 포장저장)

  • 김순동;김미향;김미경
    • Food Science and Preservation
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    • v.5 no.4
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    • pp.355-362
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    • 1998
  • Polyethylene films contained 0, 10, 20, 30 and 40% of raw-ore powder(PERO) were prepared. The characteristics feature of the film and the powder were investigated in order to use packaging material for kimchi quality. Kimchi was packaged in the PERO bass md stored at 10$^{\circ}C$. The kimchi was examined for a pH, acidity, number of total microbe and lactic acid bacteria, E. coli, color values and sensory evaluation. The ore powder at 20$^{\circ}C$ produced infrared rays at 800-1100nm. The growth of E. coli md Staphylococcus aureus was extremely inhibited in the EMB and nutrient broth containing 10% of raw-ore powder but, that of lactobacillus plantarum and Leuconostoc mesenteriodes was slightly promoted in MRS broth containing 1%. The ripening by pH and acidity was slightly accelerated in kimchi in PERO bag(PERO-kimchi) compared to control kimchi but the maintenance of ripened-kimchi taste was prolonged in PERO-kimchi. The number of lactic acid bacteria of PERO-kimchi was more numerous than that of contol sample but that of E. coli wag exremely legs. The color L* values of PERO-kimchi was lower than control but a* and b* values were higher. Sensory evaluation of PERO-kimchi was higher score than control sample in crispness and overall taste about 10 to 20% of raw-ore contents for kimchi-packaging material was desirable.

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Predicting and Extending the Shelf Life of Red Cabbage Sprouts (적양배추싹의 Shelf Life 예측 및 Aqueous ClO2, Fumaric Acid, UV-C 병합처리)

  • Chun, Ho Hyun;Park, Seung Jong;Jung, Seung Hun;Song, Kyung Bin
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.42 no.9
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    • pp.1518-1523
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    • 2013
  • To estimate the shelf life of red cabbage sprouts (stored at 4 and $10^{\circ}C$), the numbers of total aerobic bacteria were determined during storage. Parameters for the Gompertz model were determined and the shelf life was predicted using a modified Gompertz equation. The estimated shelf lives of red cabbage sprouts packed with polyolefin film and polyamide/polyamide/polyethylene (PA/PA/PE) film at $4^{\circ}C$ were 49.4 and 52.3 h, respectively, whereas those of red cabbage sprouts packed with polyolefin film and PA/PA/PE film at $10^{\circ}C$ were 19.7 and 22.6, respectively. The shelf life prediction equation was appropriate, based on the statistical analysis of the accuracy factor, bias factor, and mean square error. On the other hand, for red cabbage sprouts treated with aqueous $ClO_2$/fumaric acid and UV-C then packed with polyolefin film or PA/PA/PE film, the shelf life was predicted to be longer than 168 h. These results suggest that the combined treatment of aqueous $ClO_2$/fumaric acid and UV-C can be useful for improving microbial safety and extending the shelf life of red cabbage sprouts during storage.