[KSCI] Korea Science Citation Index Service

http://dx.doi.org/10.4191/KCERS.2009.46.6.708

Indium Tin Oxide (ITO) Coatings Fabricated Using Mixed ITO Sols

Cheong, Deock-Soo (Department of MATSE, Dankook University)
Yun, Dong-Hun (Division of MATSE, Korea Institute of Science and Technology)
Park, Sang-Hwan (Division of MATSE, Korea Institute of Science and Technology)
Kim, Chang-Sam (Battery Research Center, Korea Institute of Science and Technology)

Publication Information

Journal of the Korean Ceramic Society / v.46, no.6, 2009 , pp. 708-712 More about this Journal

Abstract

ITO films were achieved by sintering at $500{\sim}550{^{\circ}C}$ . This was possible by inducing a seeding effect on an ITO sol by producing crystalline ITO nanoparticles in situ during heat treatment. Two kinds of ITO sols (named ITO-A and ITO-B) were prepared at 2.0 wt% from indium acetate and tin(IV) chloride in different mixed solvents. The ITO-A sol showed a high degree of crystallinity of ITO without any detectable Sn $O_2$ on XRD at $350{^{\circ}C}$ /1 h, but the ITO-B sol showed a small amount of Sn $O_2$ even after annealing at $600{^{\circ}C}$ /1 h. The 10 wt% ITO-A//ITO-B showed the sheet resistance of 3600 $\Omega$ /□, while the ITO-B sol alone showed 5200 $\Omega$ /□ by sintering at $550{^{\circ}C}$ for 30 min. Processing parameters were studied by TG/DSC, XRD, SEM, sheet resistance, and visible transmittance.

Keywords

ITO thin film; Sol-gel coating; Solvent effect; In situ seeding; Mixed sol;

Citations & Related Records

Times Cited By SCOPUS : 1

Reference
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