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12" 웨이퍼 Spin etcher용 실시간 박막두께 측정장치의 개발 (Development of Real Time Thickness Measurement System of Thin Film for 12" Wafer Spin Etcher)

  • 김노유;서학석
    • 반도체디스플레이기술학회지
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    • 제2권2호
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    • pp.9-15
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    • 2003
  • This paper proposes a thickness measurement method of silicon-oxide and poly-silicon film deposited on 12" silicon wafer for spin etcher. Halogen lamp is used as a light source for generating a wide-band spectrum, which is guided and focused on the wafer surface through a optical fiber cable. Interference signal from the film is detected by optical sensor to determine the thickness of the film using spectrum analysis and several signal processing techniques including curve-fitting and adaptive filtering. Test wafers with three kinds of priori-known films, polysilicon(300 nm), silicon-oxide(500 nm) and silicon-oxide(600 nm), are measured while the wafer is spinning at 20 Hz and DI water flowing on the wafer surface. From experiment results the algorithm presented in the paper is proved to be effective with accuracy of maximum 0.8% error.rror.

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새로운 유도전동기 벡터제어 기법 (A new vector control method for induction motor)

  • 변윤섭;왕종배;백종현;박현준
    • 한국철도학회:학술대회논문집
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    • 한국철도학회 2000년도 추계학술대회 논문집
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    • pp.680-687
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    • 2000
  • In this paper we present a new vector control scheme for induction motor. An exact knowledge of the rotor flux position is essential for a high-performance vector control. The position of the rotor flux is measured in the direct scheme or estimated in the indirect schemes. Since the estimation of the flux position requires a priori knowledge of the induction motor parameters, the indirect schemes are machine parameter dependent. The rotor resistance and stator resistance among the parameters change with temperature. Variations in the parameters of induction machine cause deterioration of both the steady state and dynamic operation of the induction motor drive. Several methods have been presented to minimize the consequences of parameter sensitivity in indirect scheme. In this paper new estimation scheme of rotor flux position is presented to eliminate sensitivity due to resistance change with temperature. Simulation results are used to verify the performance of the proposed vector control scheme.

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선재 압연의 소재 자유표면 형상 계산(I) (Calcuation of Stress Free Surface Profile of Stock in Red Rolling(I))

  • 이영석;최상우;유선준;주웅용
    • 한국소성가공학회:학술대회논문집
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    • 한국소성가공학회 1999년도 제3회 압연심포지엄 논문집 압연기술의 미래개척 (Exploitation of Future Rolling Technologies)
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    • pp.78-87
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    • 1999
  • A mathematical model for the stress free surface profile in Over-Round and Round-Oval grove rolling, which can be used effectively in the calculation of pass area, is presented. The new model has generality, simplicity and accuracy for practical usage. The stress free surface profile of an outgoing stock can be modeled when the maximum spread of it known a priori. The equation for the stress free surface profile is formulated from the linear interpolation of the radius of curvature of an incoming stock and that of roll groove to the axis direction. In developing the analytical model, the effect of rolling temperature and friction between roll and work piece(stock) were not considered since the geometry of roll groove and the incoming work piece were assumed a dominant factor which decides the stress free surface profile of the outgoing stock. A simulation with the analytical model developed also has been carried out to demonstrate the stress free surface profile of the outgoing stock.

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ERROR ESTIMATES FOR A GALERKIN METHOD FOR A COUPLED NONLINEAR SCHRÖDINGER EQUATIONS

  • Omrani, Khaled;Rahmeni, Mohamed
    • 대한수학회보
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    • 제57권1호
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    • pp.219-244
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    • 2020
  • In this paper, we approximate the solution of the coupled nonlinear Schrödinger equations by using a fully discrete finite element scheme based on the standard Galerkin method in space and implicit midpoint discretization in time. The proposed scheme guarantees the conservation of the total mass and the energy. First, a priori error estimates for the fully discrete Galerkin method is derived. Second, the existence of the approximated solution is proved by virtue of the Brouwer fixed point theorem. Moreover, the uniqueness of the solution is shown. Finally, convergence orders of the fully discrete Crank-Nicolson scheme are discussed. The end of the paper is devoted to some numerical experiments.

지역가중다항식을 이용한 예측모형 (Locally Weighted Polynomial Forecasting Model)

  • 문영일
    • 한국수자원학회논문집
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    • 제33권1호
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    • pp.31-38
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    • 2000
  • 수문변량 사이의 관계는 대부분 비선형 관계를 보이고 있다. 일반적으로 이런 비선형 관계는 어떤 선행하는 명백한 하나의 함수적인 형태로 표현할 수 없는 것이 일반적이다. 본 논문에서는, 비매개변수적 다변량 회귀분석 방법을 지역적으로 가중된 다항식을 이용하여 비선형 예상 함수를 추정하였다. 지역적으로 가중된 다항식은 추정치 각 점에서의 인접한 이웃자료를 가지고 목적 함수를 테일러 급수 확장을 통하여 고려하였다. 이런 비매개변수적 회귀분석을 실용성을 Great Salt Lake의 격주 체적자료에 대한 단기간 예측을 통하여 보여주었다.

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비대칭 손실함수 아래서 포아송평균의 베이즈와 경험적베이즈 추정의 연구 (A Study on Bayes and Empirical Bayes Estimates of Poisson Means under Asymmetric Loss Functions)

  • Youn Shik Chung;Chan Soo Kim
    • 응용통계연구
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    • 제7권2호
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    • pp.131-143
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    • 1994
  • 엔트로피와 스타인손실들을 포함한 비대칭 손실함수아래서 포아송 평균이 사전분포 함수를 갖는 경우에서 베이즈적, 경험적 베이즈 추정치들의 집합을 구하였다. 또한 Efron과 Morris의 접근방법에 의하여 앞에서 제안된 추정치와 기존의 추정치들의 상대절약 손실량을 모의실험을 통하여 비교하였다.

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A Novel Image Completion Algorithm Based on Planar Features

  • Xiao, Mang;Liu, Yunxiang;Xie, Li;Chen, Qiaochuan;Li, Guangyao
    • KSII Transactions on Internet and Information Systems (TIIS)
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    • 제12권8호
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    • pp.3842-3855
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    • 2018
  • A novel image completion method is proposed that uses the advantage of planar structural information to fill corrupted portions of an image. First, in estimating parameters of the projection plane, the image is divided into several planes, and their planar structural information is analyzed. Second, in calculating the a priori probability of patch and patch offset regularity, this information is converted into a constraint condition to guide the process of filling the hole. Experimental results show that the proposed algorithm is fast and effective, and ensures the structure continuity of the damaged region and smoothness of the texture.

밝기분포도를 이용한 영상영역화의 성능분석 (Performance Analysis of the Image Segmentation Using an Intensity Histogram)

  • 김경수;이상욱
    • 대한전자공학회논문지
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    • 제24권3호
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    • pp.504-509
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    • 1987
  • In this paper a characteristics of image which can be segmented based on the thresholding technique using a histogram was investigated employing 3 parameters: the variance of pixel value, the average mean difference between target and background and the target size. The threshold value for the histogram segmentation was determined by applying the hypothesis testing theory. The performance of the selected threshold was evaluated by computing a probability of error. Since a priori probability can be easily obtained from the histogram, it was found that the Bayes decision rule which theoretically guarantees the minimum probability of error works better than the minimax criterion rule.

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강화학습 기반의 다단계 공급망 분배계획 (Reinforcement leaning based multi-echelon supply chain distribution planning)

  • 권익현
    • 대한안전경영과학회지
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    • 제16권4호
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    • pp.323-330
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    • 2014
  • Various inventory control theories have tried to modelling and analyzing supply chains by using quantitative methods and characterization of optimal control policies. However, despite of various efforts in this research filed, the existing models cannot afford to be applied to the realistic problems. The most unrealistic assumption for these models is customer demand. Most of previous researches assume that the customer demand is stationary with a known distribution, whereas, in reality, the customer demand is not known a priori and changes over time. In this paper, we propose a reinforcement learning based adaptive echelon base-stock inventory control policy for a multi-stage, serial supply chain with non-stationary customer demand under the service level constraint. Using various simulation experiments, we prove that the proposed inventory control policy can meet the target service level quite well under various experimental environments.

웨이블렛 변환을 이용한 구조물의 결함 진단 (Structural Damage Detection Using Wavelet Transform)

  • 김창구;박광호;기창구
    • 한국전산구조공학회:학술대회논문집
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    • 한국전산구조공학회 1999년도 가을 학술발표회 논문집
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    • pp.194-200
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    • 1999
  • Localized damage to a structure affects its dynamic properties, and much work has been undertaken investigating the variation of natural frequencies, damping ratios and mode shapes. This paper presents a technique based on wavelet transform to detect the existences and locations of structural damages. The procedure operates solely on the mode shape from the damaged structure, and does not require a priori knowledge of the undamaged structure. The procedure is developed using a 32-story shear building model. Applying wavelet transform to the mode shape successfully identifies the location of damage. The procedure is best suited to the mode shape obtained from the fundamental natural frequency. The wavelet coefficients from the higher mode shapes can be used to verify the location of damage, but they are not as sensitive as the wavelet coefficients of the lower mode shapes.

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