• 제목/요약/키워드: ZnO growth behavior

검색결과 52건 처리시간 0.033초

ZnO 에피 박막의 성장 거동과 광 특성 (Growth behavior and optical property of ZnO epitaxial films)

  • 강승민
    • 한국결정성장학회지
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    • 제14권6호
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    • pp.253-256
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    • 2004
  • 단결정상의 ZnO 에피 박막 성장을 사파이어 기판의 (0001)면 상에 RF magnetron sputtering 법으로 수행하였다. 200~$600^{\circ}C$까지의 기판의 온도를 변화하여 가면서 ZnO 에피 박막의 성장 거동을 조사하였으며, 성장된 ZnO 박막에 대하여 산소분위기에서 400, 600, $800^{\circ}C$에서 각각 아닐링을 하여 이에 대한 광 특성을 평가하였다. Hall measurement에 의해 측정 된 carrier concentratin은 $600^{\circ}C$에서 아닐링하여 $2.6${\times}$10^{16}\textrm{cm}^{-3}$이었다.

The Effect of Growth Temperature on the Epitaxial Growth of Vertically Aligned ZnO Nanowires by Chemical Vapor Deposition

  • 임소영;이도한;장삼석;김아영;변동진
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.21.1-21.1
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    • 2011
  • Vertically aligned single-crystal ZnO nanowires have been successfully grown on c-plane sapphire substrate using chemical vapor deposition (CVD) without catalyst. According to growth temperatures, it was changed ZnO growth characteristic. We investigated the effect of substrate temperatures on the growth ZnO films or nanowires on c-plane (0001) sapphire substrates. The ZnO films were acquired at $500^{\circ}C$, whereas the ZnO nanowires were obtained at $600^{\circ}C$, $700^{\circ}C$, and $800^{\circ}C$. The growth behavior diameter and growth rate of ZnO were changed due to different temperature. As a result of analyzing in-plane residual stress by X-ray diffraction, the optimized condition of ZnO nanowires were at $600^{\circ}C$.

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ZnO-Bi2O3계의 소결초기단계와 입자성장에 관한 연구 (A Study on the Initial Stage of Sintering and the Grain Growth of ZnO in ZnO-Bi2O3 System)

  • 성건용;강을손;김종희
    • 한국세라믹학회지
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    • 제26권4호
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    • pp.505-513
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    • 1989
  • The sintering behavior and grain growth of ZnO in 99.0mol% ZnO-1.0mol% Bi2O3 which are the basic compositions of ZnO varistor were studied. The microstructrual observation confirmed that the final sintered density was mainly determined at the initial stage of sintering, i.e. grain rearrangement and grain growth which were induced by the penetration of eutectic melts formed at eutectic temperature(74$0^{\circ}C$). But when the liquid penetration was terminated, the grain growth did not promote further densification. Activation energy of the grain growth of ZnO in the system of 99.0mol% ZnO-1.0mol% Bi2O3 was 44.8$\pm$1.8Kcal/mol.

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$Zn_7Sb_2O_{12}$ 첨가량이 ZnO 바리스터의 입자성장과 미세구조에 미치는 영향 (Effect of $Zn_7Sb_2O_{12}$ Content on Grain Growth and Microstructure of ZnO Varistor)

  • 김경남;한상목
    • 한국세라믹학회지
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    • 제30권11호
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    • pp.955-961
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    • 1993
  • Sintering behavior and microstructure development in the system ZnO-Bi2O3-CoO-Zn7Sb2O12 with Zn7Sb2O12 content(0.1mol%~2mol%) were studied. The pyrochlore phase was formed by the reaction of the Zn7Sb2O12 with Bi2O3 phase during heating (below 90$0^{\circ}C$). The formation temperature of the liquid phase (Bi2O3) was dependent on the Zn7Sb2O12 contents (about 74$0^{\circ}C$ for Bi2O3/Zn7Sb2O12>1 by the eutectic melting in the ZnOBi2O3 system, and about 110$0^{\circ}C$ for Bi2O3/Zn7Sb2O12 1 by the decomposition of pyrochlore phase). Hence, sintering behavior and microstructure development were determined virtually by the Bi2O3/Zn7Sb2O12 ratio, which were promoted by liquid (Bi2O3) phase and retarded by the pyrochlore (or spinel) phase. The grain growth of ZnO during sintering was sluggish with increasing Zn7Sb2O12 contents.

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침전법으로 제조된 ZnO 분체의 소결특성 (Sintering Characteristics of ZnO Powder Prepared by Precipitation Method)

  • 강상규;김경남;한상목
    • 한국세라믹학회지
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    • 제30권5호
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    • pp.404-410
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    • 1993
  • The characterization and sintering behavior of ZnO powders prepared by precipitation method were investigated. ZnO powders were synthesized using the aqueous solutions of ZnCl2 and NH4OH as a precipitation agent, which were crystallized in the shape of plate-like. The grain growth of ZnO(0.68${\mu}{\textrm}{m}$, 1.3${\mu}{\textrm}{m}$ and 3.4${\mu}{\textrm}{m}$) has been studied for temepratures from 100$0^{\circ}C$ to 130$0^{\circ}C$, and the rate of densification was inversely proportional to the ZnO particle size. Densification proceeded slowly by diffusion mechanisms above at 100$0^{\circ}C$. In this work, the grain growth kinetic exponent(n) was 3. The temperature dependence of ZnO grain growth was plotted, and the activation energy of grain growth was 75~85Kcal/mol.

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Cr2O3를 첨가한 ZnO의 소결과 전기적 특성 (Sintering and Electrical Properties of Cr2O3-doped ZnO)

  • 홍연우;신효순;여동훈;김진호
    • 한국전기전자재료학회논문지
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    • 제23권11호
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    • pp.875-879
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    • 2010
  • In this study, we have characterized the roles of $Cr_2O_3$ on the sintering and electrical properties of ZnO. The densification and grain growth of Cr-doped ZnO (ZCr) system was mainly influenced by Cr contents. In the beginning of sintering, the densification of ZnO was retarded as reducing the Zni concentration in ZnO lattice with Cr doping. And the densification and grain growth of ZnO was more retarded due to a formation of spinel phase with increasing the Cr contents. ZCr system revealed varistor behavior with nonlinear coefficient $\alpha$ of 3~23 depending on the sintering temperature, implying double Schottky barrier formation on the grain boundary of ZnO. Especially the best varistor characteristics should be developed with 0.1~0.5 at% Cr contents and under $1100^{\circ}C$ in ZCr systems.

초음파 분무 열분해법에 의한 ZnO 나노구조 성장시 Leidenfrost 효과에 의한 성장 거동 변화 (Growth Mechanism Evolution of ZnO Nanostructures by Leidenfrost Effect in Ultrasonic Spray Pyrolysis Deposition)

  • 한인섭;박일규
    • 한국재료학회지
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    • 제27권11호
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    • pp.609-616
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    • 2017
  • We investigated a Leidenfrost effect in the growth of ZnO nanostructures on silicon substrates by ultrasonic-assisted spray pyrolysis deposition(SPD). Structural and optical properties of the ZnO nanostructures grown by varying the growth parameters, such as substrate temperature, source concentration, and suction rate of the mist in the chambers, were investigated using field-emission scanning electron microscopy, X-ray diffraction, and photoluminescence spectrum analysis. Structural investigations of the ZnO nanostructures showed abnormal evolution of the morphologies with variation of the substrate temperatures. The shape of the ZnO nanostructures transformed from nanoplate, nanorod, nanopencil, and nanoprism shapes with increasing of the substrate temperature from 250 to $450^{\circ}C$; these shapes were significantly different from those seen for the conventional growth mechanisms in SPD. The observed growth behavior showed that a Leidenfrost effect dominantly affected the growth mechanism of the ZnO nanostructures.

RF-magnetron sputtering 방법으로 성장시킨 Ga-doped ZnO 박막의 성장 온도 변화에 따른 영향

  • 김영이;우창호;안철현;배영숙;공보현;김동찬;조형균
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2009년도 하계학술대회 논문집
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    • pp.9-9
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    • 2009
  • 1 wt % Ga-dope ZnO (ZnO:Ga) thin films with n-type semiconducting behavior were grown on c-sapphire substrates by radio frequency magnetron sputtering at various growth temperatures. The room temperature grown ZnO:Ga film showed the faint preferred orientation behavior along the c-axis with small domain size and high density of stacking faults, despite limited surface diffusion of the deposited atoms. The increase in the growth temperature in the range between $300\sim550^{\circ}C$ led to the granular shape of epitaxial ZnO:Ga films due to not enough thermal energy and large lattice mismatch. The growth temperature above $550^{\circ}C$ induced the quite flat surface and the simultaneous improvement of electrical carrier concentration and carrier mobility, $6.3\;\times\;10^{18}/cm^3$ and $27\;cm^2/Vs$, respectively. In addition, the increase in the grain size and the decrease in the dislocation density were observed in the high temperature grown films. The low-temperature photoluminescence of the ZnO:Ga films grown below $450^{\circ}C$ showed the redshift of deep-level emission, which was due to the transition from $Zn_j$ to $O_i$ level.

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Pechini 방법으로 제조된 ZnO 바리스터의 소결 거동 및 전기적 특성 (Somteromg Behavior and Electrical Characteristics of ZnO Variators Prepared by Pechini Process)

  • 윤상원;심영재;조성걸
    • 한국세라믹학회지
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    • 제35권5호
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    • pp.499-504
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    • 1998
  • Pechini 방법으로 98.0 mol% ZnO, 1.0mol% $Bi_2O_3$, 0.5mol% CaO, 그리고 0.5mol% $MnO_2$ 조성의 ZnO 바리스터를 제조하여 소결거동과 전기적 특성을 관찰하였다. Pechini 방법으로 제조된 ZnO 바리스터 분말은 평균 입자크기가 $1.5\mu$m 정도이며 좁은 입도 분포를 보였다. $1100^{\circ}C$의 소결온도에서 전형적인 액상소결 과정에서 나타나는 입자성장 거동을 보였으며, 균일한 입자크기와 입계를 따라 Bi가 풍부한 액상이 고르게 분포된ZnO 바리스터를 제조할 수 있었다. 본 실험에서 비직선계수는 40~60 정도의 비교적 높은 값을 보였으며, 항복전압의 역수는 입자크기에 거의 비례하였다. 이것은 Pechini 방법으로 제조한 ZnO 바리스터가 균일한 입자크기와 균일한 액상의 분포를 갖는 바람직한 미세구조를 갖는 것을 보여 주는 것으로, Pechini 방법을 이용함으로서 ZnO 바리스터의 미세구조를 효과적으로 조절할 수 있으므로, 그 전기적 특성의 제어가 가능할 것으로 사료된다.

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수용액에서 합성한 ZnO 나노구조체의 형상 (Shapes of ZnO Nanostructures Grown in the Aqueous Solutions)

  • 장연익;박훈;이승용;안재평;박종구
    • 한국분말재료학회지
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    • 제12권4호
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    • pp.284-290
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    • 2005
  • ZnO nanostructures with various shapes were synthesized under ambient pressure condition by a wet chemical reaction method. Nanorods of ZnO with hexagonal cross-section and their aggregates with radiate shape were synthesized. Precursor concentration affected considerably the shape evolution of ZnO nanorods. Low precursor concentration was proved to be more preferable to the growth of ZnO nanorods, which is attributed to the intrinsic characteristics of chemical reaction in the synthesis of ZnO from zinc compounds.