• 제목/요약/키워드: ZnO doping

검색결과 316건 처리시간 0.025초

A study of Physically Implanted Surface Islands by direct Nd:YAG Laser Beam Irradiation

  • Oh, Chang-Heon;Cheon, Suyoung;Lim, Changjin;Lee, Jeongjun;Jeon, Jihyun;Kim, Kyoung-Kook;Chung, Chan-Moon;Cho, Soohaeng
    • Applied Science and Convergence Technology
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    • 제26권4호
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    • pp.66-69
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    • 2017
  • Physically implanted surface islands of Nano Carbon Tube (NCT) and ${\alpha}-F_2O_3$ particles have been produced on Al-doped ZnO (AZO)/glass surfaces by simple and direct ND:YAG laser beam irradiation. Sheet resistance of the reconstructed surface increased by about 3.6% of over AZO. Minimal surface damage can be repaired by ND:YAG laser beam irradiation in conjunction with proper impurities. Implanted islands of NCT, which are considered to be a good conductive impurity, on AZO increased the sheet resistance by about 1.8%, while implanted islands of ${\alpha}-F_2O_3$, an insulating impurity, on AZO increased sheet resistance by about 129% compared with a laser beam treated AZO. This study provides insight regarding surface implantations of nanowires and micro-circuits, doping effects for semiconductors and optical devices, surface area and impurity effects for catalysis.

기판온도 및 공정압력이 Aldoped ZnO 박막의 특성에 미치는 영향 (Effect of Substrate temperatures and Working pressures on the properties of the AI-doped ZnO thin films)

  • 강성준;정양희
    • 한국정보통신학회논문지
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    • 제14권3호
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    • pp.691-698
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    • 2010
  • 본 연구에서는 RF magnetron sputtering 법으로 AZO 세라믹 타켓 ($Al_2O_3$ : 3 wt%)을 이용하여 Eagle 2000 유리 기판위에 기판온도 ($100{\sim}500^{\circ}C$)와 공정압력 (10 ~ 40 mTorr)에 따른 AZO 박막을 제작하여, 결정화 특성과 전기적 및 광학적 특성을 조사하였다. 모든 AZO 박막은 육방정계구조를 가지는 다결정 이었고, (002)우선 배향성이 관찰되었다. 기판온도 $300^{\circ}C$, 10 mTorr에서 제작한 AZO 막에서 가장 우수한 (002) 배향성을 나타냈으며, 이때의 반가폭 값은 $0.42^{\circ}$였다. 전기적 특성은 기판온도 $300^{\circ}C$, 10 mTorr에서 가장 낮은 비저항 $2.64{\times}10^{-3}\;{\Omega}cm$과 우수한 캐리어 농도 및 이동도를 $5.29{\times}10^{20}\;cm^{-3}$, $6.23\;cm^2/Vs$를 나타내었다. 모든 AZO 박막은 가시광 영역에서 80%의 투과율을 나타내었으며, 기판온도 증가와 공정압력 감소에 따른 Al 도핑효과의 증가로 밴드 갭이 넓어지는 Burstein-Moss 효과가 관찰 되었다.

Photoelectrochemical Water Oxidation and $CO_2$ Conversion for Artificial Photosynthesis

  • Park, Hyunwoong
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2013년도 제45회 하계 정기학술대회 초록집
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    • pp.70-70
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    • 2013
  • As the costs of carbon-footprinetd fuels grow continuously and simultaneously atmospheric carbon dioxide concentration increases, solar fuels are receiving growing attention as alternative clean energy carriers. These fuels include molecular hydrogen and hydrogen peroxide produced from water, and hydrocarbons converted from carbon dioxide. For high efficiency solar fuel production, not only light absorbers (oxide semiconductors, Si, inorganic complexes, etc) should absorb most sunlight, but also charge separation and interfacial charge transfers need to occur efficiently. With this in mind, this talk will introduce the fundamentals of solar fuel production and artificial photosynthesis, and then discuss in detail on photoelectrochemical (PEC) water splitting and CO2 conversion. This talk largely divides into two section: PEC water oxidation and PEC CO2 reduction. The former is very important for proton-coupled electron transfer to CO2. For this oxidation, a variety of oxide semiconductors have been tested including TiO2, ZnO, WO3, BiVO4, and Fe2O3. Although they are essentially capable of oxidizing water into molecular oxygen, the efficiency is very low primarily because of high overpotentials and slow kinetics. This challenge has been overcome by coupling with oxygen evolving catalysts (OECs) and/or doping donor elements. In the latter, surface-modified p-Si electrodes are fabricated to absorb visible light and catalyze the CO2 reduction. For modification, metal nanoparticles are electrodeposited on the p-Si and their PEC performance is compared.

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RF Sputter 방법으로 제조한 ZnO:Ga 박막의 전기 및 광학적 특성 (ELECTRICAL AND OPTICAL PROPERTIES OF RF SPUTTERED AND Ga-DOPED ZINC OXIDE THIN FILMS)

  • 최병호;윤경훈;송진수;임호빈
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 1989년도 하계종합학술대회 논문집
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    • pp.314-318
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    • 1989
  • Thin films of undoped and Ga-doped zinc oxide have been prepared by rf sputtering. The films deposited on substrates, which have a columnar structure with the c-axis perpendicular to the substrate surface, consist of very small crystal grains (500-1000 ${\AA}$). Considering doping effects, the electrical resistivity of Ga-doped films decreased by an order of $10^3$ compared to undoped films and the optical transmission was above 80% in the visible range and the optical band gap widened as the Ga content increased.

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산화물 세라믹스의 미소전압용 바리스터에 대한 응용 (Application of Ceramic Oxides to Low-voltage Varistor)

  • 강대하;김영학;박윤동
    • 동력기계공학회지
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    • 제4권4호
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    • pp.99-107
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    • 2000
  • In this study several P type and N type ceramic semiconductors were prepared by atomic valence control and their electric resistivities were investigated with various concentrations of additive impurities. N-P junctions were made by thin film printing method and their varistor-like characteristics were investigated and their availability was discussed. The results are followings, 1) Some N type semiconductors with a proper concentration of additive impurity have minimum resistivities. 2) The N-P junction samples with ZnO as a constituent material of N type semiconductor have linearity in voltage-current characteristics, but the other N-P junction samples have the non-linearity, 3) Some N-P junction samples showed the good varistor-like characteristics.

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Influence of Plasma Discharge Power on the Electrical and Optical Properties of Aluminum Doped Zinc Oxide Thin Films

  • Moon, Yeon-Keon;Park, Jong-Wan
    • 한국재료학회지
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    • 제16권6호
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    • pp.346-350
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    • 2006
  • Al-doped ZnO (AZO) thin films were grown on type of glass#1737 substrates by DC magnetron sputtering. The structural, electrical and optical properties of the films were investigated as a function of various plasma discharge power. The obtained films were polycrystalline with a hexagonal wurtzite structure and preferentially oriented in the (002) crystallographic direction. The lowest resistivity was $6.0{\times}10^{-4}{\Omega}cm$ with the carrier concentration of $2.69{\times}10^{20}cm^{-3}$ and Hall mobility of 20.43 $cm^2/Vs$. The average transmittance in the visible range was above 90%.

Al이 첨가된 Zinc Oxide박막의 투명전도막으로서의 응용 (Application of Al-doped Zinc Oxide for transparent conductive thin film)

  • 정운조;정용근;유용택
    • E2M - 전기 전자와 첨단 소재
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    • 제8권6호
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    • pp.693-698
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    • 1995
  • We fabricated Zinc Oxide transparent conductive thin films with 2wt% of A1203 doping using rf magnetron sputtering. And we investigated electrical and optical characteristics of them which were made with conditions ; rf power 60-300W, thickness of film 3000 11000.angs.. Resistivity, carrier concentration and Hall mobility were investigated for electrical characteristics. Transmittance and optical band gap were investigated with Spectrophotometer in the wavelength range between 200-900 nm. As a result, ZnO thin film fabricated with rf power of 180W and thickness of 5000.angs. showed the best properties. At the best condition, the sample has resistivity of 1*10$\^$-4/.ohm.cm and transmittance of 95% in the visible range.

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Transparent Conductors for Photoelectric Devices

  • Kim, Joondong;Patel, Malkeshkumar;Kim, Hong-Sik;Yun, Ju-Hyung;Kim, Hyunki
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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    • pp.87.2-87.2
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    • 2015
  • Transparent conductors are commonly used in photoelectric devices, where the electric energy converts to light energy or vice versa. Energy consumption devices, such as LEDs, Displays, Lighting devices use the electrical energy to generate light by carrier recombination. Meanwhile, solar cell is the only device to generate electric energy from the incident photon. Most photoelectric devices require a transparent electrode to pass the light in or out from a device. Beyond the passive role, transparent conductors can be employed to form Schottky junction or heterojunction to establish a rectifying current flow. Transparent conductor-embedded heterojunction device provides significant advantages of transparent electrode formation, no need for intentional doping process, and enhanced light-reactive surface area. Herein, we present versatile applications of transparent conductors, such as NiO, ZnO, ITO in photoelectric devices of solar cells and photodetectors for high-performing UV or IR detection. Moreover, we also introduce the growth of transparent ITO nanowires by sputtering methods for large scale application.

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전이금속이 치환된 반도체 물질의 자기적 특성 연구 (The Study on Magnetic Properties of Transition Metal Doped Semiconductor)

  • 김재욱;차병관;지명진;권태필;박병천;경동현;진훈열;김승회;김종규
    • 대한화학회지
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    • 제54권6호
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    • pp.766-770
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    • 2010
  • 본 연구는 전이금속이 치환된 묽은 자성 반도체의 자기적 특성을 연구하였다. 울츠자이트(wurtzite) 구조를 가지는 화합물은 졸-겔(sol-gel)법을 이용하여 합성하였다. 열역학적 특성과 자기적 특성을 가진 $Zn_{1-x}Co_xO$은 단일상으로 나타났으며, 농도에 따라 다른 특성을 보여주었다. 묽은 자성 반도체의 특성을 조사하기 위해 X-ray diffraction (XRD), scanning electronic microscope (SEM) 및 vibrating sample magnetometer (VSM)을 사용하였다. 구조 분석을 통해 단일상이 확인된 시료에서는 모두 강자성 특성이 발견되었고, 전이금속 이온의 농도를 5%이상 치환이 되면 강자성이 감소하는 현상이 나타났다.