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Hybrid Organic-Inorganic Films Fabricated Using Atomic and Molecular Layer Deposition Techniques

  • George, Steven M.
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.75.1-75.1
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    • 2013
  • Atomic layer deposition (ALD) and molecular layer deposition (MLD) are based on sequential, self-limiting surface reactions that produce atomic layer controlled and conformal thin film growth. ALD can deposit inorganic films and MLD can deposit films containing organics. ALD and MLD can be used together to fabricate a wide range of hybrid organic-inorganic alloy films. The relative fraction of inorganic and organic constituents can be defined by controlling the ratio of the ALD and MLD reaction cycles used to grow the film. These hybrid films can be tuned to obtain desirable mechanical, electrical and optical properties. This talk will focus on the growth and properties of metal alkoxide films grown using metal precursors and various organic alcohols that are known as "metalcones". The talk will highlight the tunable mechanical properties of alucone alloys grown using Al2O3 ALD and alucone MLD and the tunable electrical conductivity of zincone alloys grown using ZnO ALD and zincone MLD with DEZ and hydroquinone as the reactants.

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Purification and Characterization of the Extracellular Alginase Produced by Bacillus licheniformis AL-577 (알긴산 분해균 Bacillus licheniformis AL-577가 생산하는 균체외 효소의 정제 및 특성)

  • Uo, Meung-Hee;Joo, Dong-Sik;Cho, Soon-Yeong;Min, Tae-Sun
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.35 no.2
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    • pp.231-237
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    • 2006
  • The extracellular enzyme alginase produced by Bacillus licheniformis AL-577 was purified by ion chromatography on CM-Cellulose column, DEAE-Sepharose column, and followed by gel filtration on Sephadx G-100 column. The optimum pH and temperature for the activity of the purified enzyme were 6.0 and $35^{\circ}C$, respectively. The enzyme was stable at the pH range of $6.0\~9.0$ and at $20^{\circ}C$. The molecular weight of the enzyme was estimated to be about 25,500 daltons by SDS-polyacrylamide gel electrophoresis. NaCl was required for high activity of the enzyme. The enzyme was inhibited by $Ba^{2+},\;Co^{2+},\;Cu^{2+},\;Fe^{2+},\;Mg^{2+},\;Zn^{2+},\;NH_4^+$, EDTA, L-cysteine, and 2-mercaptoethanol, while stimulated by DTT, O-phenanthroline, $K^+$ and $Li^+$. This enzyme was proposed to be an alginase specifically degrading alginic acid.

PEMFC Operation Connected with Methanol Reformer System

  • Lee, Jung-Hyun;Park, Sang-Sun;Shul, Yong-Gun;Park, Jong-Man;Kim, Dong-Hyun;Kim, Ha-Suck;Yoo, Seung-Eul
    • Carbon letters
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    • v.9 no.4
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    • pp.303-307
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    • 2008
  • The studies on integrated operation of fuel cell with fuel processor are very essential prior to its commercialization. In this study, Polymer Electrolyte Membrane Fuel Cell (PEMFC) was operated with a fuel processor, which is mainly composed of two parts, methanol steam reforming reaction and preferential oxidation (PROX). In fuel processor, ICI 33-5 (CuO 50%, ZnO 33%, $Al_2O_3$ 8%, BET surface area: $66\;m^2g^{-1}$) catalyst and CuO-$CeO_2$ catalyst were used for methanol steam reforming, preferential oxidation (PROX) respectively. PEMFC was operated by hydrogen fuel generated from fuel processor. The resulting gas from PROX reactor is used to operate PEMFC equipped with our prepared anode and cathode catalyst. PtRu/C catalyst gives more tolerance to CO.

Charaterization of structural, electrical, and optical properties of AZO thin film as a function of annealing temperature (열처리 온도에 따른 AZO 박막의 구조적, 전기적, 광학적 특성 분석)

  • Ko, Ki-Han;Seo, Jae-Keun;Lee, Sang-Joon;Hwang, Chae-Young;Bae, Eun-Kyung;Lim, Moo-Kil;Choi, Won-Seok
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1343_1344
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    • 2009
  • In this work, transparent conducting Al-doped zinc oxide (AZO) films were prepared on Corning glass substrate by RF magnetron sputtering using an Al-doped ZnO target (Al: 2 wt.%) at room temperature and all films were deposited with athickness of 150 nm. We investigated the effects of the post-annealing temperature and the annealing ambient on structural, electrical and optical properties of AZO films. The films were annealed at temperatures ranging from 300 to $500^{\circ}C$ in steps of $100^{\circ}C$ using rapid thermal annealing equipment in oxygen. The thickness of the film was observed by field emission scanning electron microscopy (FE-SEM) and grain size was calculated from the XRD spectra using the Scherrer equation and their electrical properties were investigated using a hole measurement and the reflectance of AZO films was investigated by UV-VIS spectrometry.

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Characterization of the effect of RF power on the properties of AZO films deposited at room temperature (RF 파워에 따른 상온에서 합성한 AZO 투명전도막의 특성분석)

  • Seo, Jae-Keun;Ko, Ki-Han;Kim, Jae-Kwang;Lee, Jong-Hwan;Lee, You-Sung;Choi, Won-Seok
    • Proceedings of the KIEE Conference
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    • 2009.07a
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    • pp.1345_1346
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    • 2009
  • In this study, transparent and conductive Al-doped zinc oxide (AZO) films were prepared on glass substrate by RF magnetron sputtering method using an Al-doped ZnO target (Al: 2wt.%) at room temperature as the thickness of 150 nm. We investigated the effects of the RF power between 100~350 W in the steps of 50 W on structural, electrical and optical properties of AZO films. The thickness and cross-sectional images of films were observed by field emission scanning electron microscopy (FE-SEM) and all of the films were kept to be constant about 150 nm on glass substrate. The grain size of AZO films figured out X-ray diffraction (XRD) on using the Scherrer' equation and their electrical properties investigated Hall effect electronic transport measurement system. Moreover, we measured transmittance of AZO films by UV/VIS spectrometer.

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Thermal Treated Al-doped Zinc Oxide (AZO) Film-embedding UV Sensors

  • Kim, Jun-Dong;Yun, Ju-Hyeong;Ji, Sang-Won;Park, Yun-Chang;Anderson, Wayne A.;Han, Seok-Gyu;Kim, Yeong-Guk;Kim, Jae-Hyeon;Anderson, Wayne A.;Lee, Jeong-Ho;Lee, Jun-Sin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.90-90
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    • 2011
  • Transparent conducting oxide (TCO) films have been intensively utilized in the electric applications, such as, displays, lightings and solar cells due to the good electric conductivity with an excellent transmittance of the visible light. We, herein present an excellent Al-doped ZnO film (AZO), which has been fabricated by co-sputtering method. An as-deposited AZO film had an optical transmittance of 84.78% at 550 nm and a resistivity of $7.8{\times}10^{-3}{\Omega}cm$. A rapid annealing process significantly improved the optical transmittance and electrical resistivity of the AZO film to 99.67% and $1{\times}10^{-3}{\Omega}cm$, respectively. The fabricated AZO film was fabricated for a metal-semiconductor-metal (MSM) structure. The AZO film-embedding MSM device was highly responsive to a UV light.

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Influence of Post-deposition Annealing Temperature on the Properties of GZO/Al Thin Film (진공열처리 온도에 따른 GZO/Al 적층박막의 구조적, 전기적, 광학적 특성 변화)

  • Kim, Sun-Kyung;Kim, Seung-Hong;Kim, So-Young;Jeon, Jae-Hyun;Gong, Tae-Kyung;Yoon, DaeYoung;Choi, DongYong;Choi, Dong-Hyuk;Son, Dong-Il;Kim, Daeil
    • Journal of the Korean institute of surface engineering
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    • v.47 no.2
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    • pp.81-85
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    • 2014
  • Ga doped ZnO (GZO)/Al bi-layered films were deposited on the glass substrate by RF and DC magnetron sputtering and then vacuum annealed at different temperatures of 100, 200 and $300^{\circ}C$ for 30 minutes to consider the effects of annealing temperature on the structural, electrical and optical properties of the films. For all depositions, the thicknesses of the GZO and Al films were kept constant at 95 and 5 nm, respectively, by controlling the deposition time. As-deposited GZO/Al bi-layered films showed a relatively low optical transmittance of 62%, while the films annealed at $300^{\circ}C$ showed a higher transmittance of 81%, compared to the other films. In addition, the electrical resistivity of the films was influenced by annealing temperature and the lowest resistivity of $9.8{\times}10^{-4}{\Omega}cm$ was observed in the films annealed at $300^{\circ}C$. Due to the increased carrier mobility, 2.35 $cm^2V^{-1}S^{-1}$ of the films. From the experimental results, it can be concluded that increasing the annealing temperature enhanced the optical and electrical properties of the GZO/Al films.

Mineralogy and Geochemistry of Green-colored Cr-bearing Sericite from Hydrothermal Alteration Zone of the Narim Gold Deposit, Korea (나림 금광상의 열수변질대에서 산출되는 녹색크롬-견운모의 광물학적 및 지구화학적 특징)

  • Lee, Hyun Koo;Lee, Chan Hee
    • Economic and Environmental Geology
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    • v.30 no.4
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    • pp.279-289
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    • 1997
  • Dark to pale green-colored, Cr-bearing sericites from hydrothermal alteration zone of the Narim gold deposit were investigated mineralogically and geochemically. The alteration zone is composed mineralogically of quartz, carbonate minerals and green sericite with minor amounts of chlorite, barite and sulfide minerals (pyrite, sphalerite, galena). The zone is enriched in As (967 to 1520 ppm), Cu (31 to 289 ppm), Ni (1027 to 1205 ppm), Pb (0.20 to 1.24 wt.%) and Zn (1.03 to 1.07 wt. %) compared with fresh rocks such as granitic gneiss, porphyritic biotite granite and basic dyke. The Cr, probably the chromophore element, is highly enriched in the alteration zone (1140 to 1500 ppm), host granitic gneiss (1200 ppm) and porphyritic biotite granite (1200 ppm). Occurrence and grain size of sericite are diverse, but most of the Cr-bearing sericites (150 to $200{\mu}m$ long and 20 to $30{\mu}m$ wide) occur along the boundaries between ore veins and host rocks (especially basic dyke and granitic gneiss). X-ray diffraction data of the sericite show its monoclinic form with unit-cell parameters of $a=5.202{\AA}$, $b=8.994{\AA}$, $c=20.103{\AA}$, ${\beta}=95.746^{\circ}$ and $V=935.83{\AA}^3$, which are similar with the normal 2M1-type muscovite. Representative chemical formula of the sericite is ($K_{1.54}Ca_{0.03}Na_{0.01}$)($Al_{3.42}Mg_{0.38}Cr_{0.14}Fe_{0.06}V_{0.02}$)($Si_{6.69}Al_{1.31}$)$O_{20}(OH)_4$. The Cr content increases with decrease of the octahedral Al content, and ranges from 0.36 to 2.58 wt.%. DTA and TG curves of the sericite show endothermic peaks at $342^{\circ}$ to $510^{\circ}$, $716^{\circ}$ to $853^{\circ}$ and $1021^{\circ}C$, which are due to the expulsion of hydroxyl group. The total weight loss by heating is measured to be about 8.8 wt. %, especially at $730^{\circ}C$. Infrared absorption experiments of the sericite show broad absorption band due to the O-H bond stretching vibration near the $3625cm^{-1}$, coupled with the 825 and $750cm^{-1}$ doublet. The vibration bands related with the H-O-Al and Si-O-Al bonds occur at $1030cm^{-1}$ and 500 to $700cm^{-1}$, respectively. Based on paragonite content of the sericite, the formation temperature of the Narim gold deposit is calculated to be $220{\pm}10^{\circ}C$.

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Petrochemistry of Granitoids in the Younggwang-Kimje area, Korea (영광-김제 지역 화강암류의 암석화학적 연구)

  • Park, Young-Seog;Kim, Jong-Kyun;Kim, Jin
    • Economic and Environmental Geology
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    • v.34 no.1
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    • pp.55-70
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    • 2001
  • Granitoids in the Younggwang-Kimje area can be divided into two types of granite. One is foliated granite (Cheongup and Kochang foliated granites) developed along the NE-SW direction kwangju fault system and the other is undeformed granite (Kimje and Younggwang granites) developed in the western part of the area. $SiO_2$ content of study area, Younggwang granite is 62.8-74.0%, Kochang foliated granite is 64.5-74.4%, Cheongup foliated granite is 64.5-70.2%, Kimje granite is 63.4-72.0%. The result indicated that these granitoids belong to the intermediate and acidic rock. In Harker's diagram, as $SiO_2$ increases, $Al_2O_3$, $Fe_2O_3$, MgO, CaO, $TiO_2$> $P_2O_{5}$s and MnO decrease, but $K_2O$ increases. In AFM diagram, Younggwang granite, Kochang foliated granite, Cheongup foliated granite and Kimje granite belong to calk-alkaline rock series. And in triangular diagrams of normative Qz-Or-Pl and An-Ab-Or, they are located in granodiorite and granite region. On the co-variation diagrams of trace elements with silica, Ba, Co, Li, Nb, An, Rb elements show increasing patterns. The diagrams of ACF and $Na_2O$ vs. $K_2O$ ratios indicate that granitoids of the study area belong to I-type.

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Mineralogy and Geochemistry of Jido kaolin deposits (지도 도석광상에 대한 광물학적 및 지구화학적 연구)

  • Park, Young Seog;Kim, Jin
    • Journal of the Mineralogical Society of Korea
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    • v.6 no.2
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    • pp.80-93
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    • 1993
  • Jido kaolin deposits developed in the rhyolitic tuff of Cretaceous are located in the western part of Sinan-gun, Jeonranam-do. Jido kaolin deposits is predominantly composed of pyrophyllite, kaolinite and illite. On the basis of mineral assemblage Jido kaolin deposits can be divided into three alteraion zone from the center of alteration to the margin; kaolinite, kaolinite-pyrophyillite and pyrophyillite zones. Discriminant analysis show that $Al_2O_3$, $K_2O$, $Na_2O$, CaO of major elements are discriminant elements classifying kaolinite, kaolinite-pyrophyllite and pyrophyllite zones, while in case of trace elements Cr, Ni, Sc, Zn, and Zr are discriminant elements. Kaolin deposits has been formed by the hydrothermal alterations of the volcano rocks such as rhyolitic tuff and lapilli tuff, in late cretaceous. On the basis of the results of X-ray diffraction analysis, the deposits can be classified into three types of minerals assemblages; kaolinite, kaolinite-pyrophyllite and pyrophyllite zones. All the assemblages contain quartz and muscovite, but the kaolinite zone contains kaolinite, illite and chlorite, the kaolinite-pyrophyllite zone contains kaolinite, pyrophyllite and the pyrophyllite zone contains illite and pyrite.

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